Inflatable cabinet body suitable for wafer transfer box
By introducing electronic control devices, jaw components and sensors into the wafer conveying box inflation cabinet, the problem of low efficiency of the fixed-sized inflatable cabinet in the prior art is solved, and efficient inflation of products of different sizes is achieved. Improved applicability and flexibility.
Patent Information
- Application Number
- CN202323263007.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-11-30
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2033-11-30
AI Technical Summary
The existing wafer carrier inflatable cabinet structure can only be suitable for products of the same size, resulting in low working efficiency and insufficient inflating flexibility for products of different sizes.
An inflatable cabinet including electronic control devices, inflatable carrier discs, jaw components, positioning columns, sensors and photoinductors is designed. The jaw components and sensors are used to induce and fix products of different sizes, and multiple inflatables are used. Holes adapt to the inflation needs of products of different sizes.
It improves the applicability and inflatability flexibility for different products, reduces costs, and achieves efficient inflation of products of different sizes.
Smart Images
Figure CN222190629U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to an inflatable cabinet suitable for a wafer conveying box. Background Art
[0002] In the semiconductor manufacturing process, FOUP plays an extremely important role as a tool for temporary storage of wafers and transfer of wafers between various operating machines. With the improvement of process technology in the semiconductor industry, the humidity and oxygen content inside the carriers for transporting wafers need to be more strictly controlled to minimize the contact between wafers and oxygen and humidity to avoid oxidation reactions. Filling the carrier with nitrogen is currently the most important process, and equipment for filling the carrier with nitrogen has gradually become a must-have equipment in the wafer industry.
[0003] The inflatable disk of the wafer carrier in the prior art is used to purify the chip during the transmission process of chip manufacturing, and to control the humidity and oxygen content of the chip in the environment where the transmission carrier is located to avoid oxidation of the wafer, so as to achieve higher process requirements of the chip. After searching, the patent: an inflatable cabinet for a wafer carrier (CN202020084125.8), including a cabinet, the cabinet includes an upper cabinet and a lower cabinet, the upper cabinet is a cabinet structure with an opening on one side, an XMC disk fixing plate is arranged at the bottom of the upper cabinet, an XMC manual adjustment disk is arranged on the XMC disk fixing plate, a touch screen is arranged on one side of the upper cabinet, the touch screen is connected to the upper cabinet through an adjustable bracket, and a signal tower is also arranged on the upper cabinet on one side of the touch screen, an operation panel is arranged at the bottom of the XMC manual adjustment disk, a cabinet door that can be opened and closed freely is arranged on the lower cabinet, a handle is arranged on the cabinet door, and a movable fixed base is arranged at the bottom of the lower cabinet. The above structure can only inflate products of the same size, resulting in low working efficiency and low flexibility in inflating products of different sizes.
[0004] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a new structure of an inflatable cabinet suitable for wafer transfer boxes, making it more valuable for industrial use. Utility Model Content
[0005] In order to solve the above technical problems, the purpose of the utility model is to provide an inflatable cabinet suitable for a wafer transfer box.
[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:
[0007] An inflatable cabinet suitable for a wafer transfer box comprises a cabinet body, an electric control device is connected to the bottom of the cabinet body, an inflatable carrier is connected to the top of the cabinet body, a clamping hole is opened at the center of the inflatable carrier, a clamping claw assembly is connected to the bottom of the inflatable carrier passing through the clamping hole for clamping the product, positioning columns are connected to the inflatable carrier, the positioning columns are dispersed around the clamping hole, and they are distributed in a triangular structure, sensors are connected to the sides of the adjacent positioning columns and on the inflatable carrier, a photoelectric sensor for sensing the product is connected to the inflatable carrier, the photoelectric sensor, the sensor and the clamping claw assembly are all connected to the electric control device, and a plurality of inflatable holes are opened on the inflatable carrier for inflating products of different sizes.
[0008] Preferably, in the inflatable cabinet suitable for a wafer conveying box, the claw assembly includes a claw cylinder, the claw cylinder is hung on the bottom surface of the inflatable carrier, the driving shaft of the claw cylinder is connected to one end of the claw connecting rod, the other end of the claw connecting rod is connected to the claw passing through the clamping hole, and the claw connecting rod is connected to a clamping cylinder for clamping the bottom of the claw.
[0009] Preferably, in the inflatable cabinet suitable for a wafer transfer box, the sensor is a push-type sensor, and three sensors are provided, and their distribution positions are respectively matched with products of sizes of 160mm, 260mm and 284mm.
[0010] Preferably, in the inflatable cabinet suitable for a wafer transfer box, the inflatable hole is connected with an inflatable interface.
[0011] Preferably, in the inflatable cabinet suitable for a wafer transfer box, the inflatable carrier is connected with a baffle.
[0012] Preferably, in the inflatable cabinet suitable for a wafer transfer box, the bottom of the cabinet body (1) is connected with moving wheels and supporting feet.
[0013] By means of the above solution, the utility model has at least the following advantages:
[0014] The utility model can sense different products through sensors at different positions, so as to be used for inflating different products, improve applicability and achieve the purpose of reducing costs.
[0015] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.
[0017] Figure 1 It is a structural schematic diagram of the utility model;
[0018] Figure 2 It is a structural schematic diagram of the claw assembly of the utility model. DETAILED DESCRIPTION
[0019] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.
[0020] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.
[0021] Example
[0022] like Figure 1 and Figure 2 As shown, an inflatable cabinet suitable for a wafer transfer box comprises a cabinet body 1, the bottom of the cabinet body 1 is connected to an electric control device, an inflatable carrier plate 2 is connected to the top of the cabinet body 1, a clamping hole 3 is provided at the center of the inflatable carrier plate 2, a clamping claw assembly 4 is connected to the bottom of the inflatable carrier plate 2 through the clamping hole 3 for clamping the product, a positioning column 5 is connected to the inflatable carrier plate 2, the positioning columns 5 are scattered around the clamping hole 3, and they are distributed in a triangular structure, a sensor 6 is connected to the side of the positioning column 5 and on the inflatable carrier plate 2, a photoelectric sensor 7 for sensing the product is connected to the inflatable carrier plate 2, the photoelectric sensor 7, the sensor 6 and the clamping claw assembly are all connected to the electric control device, and a plurality of inflatable holes 8 for inflating products of different sizes are provided on the inflatable carrier plate 2.
[0023] The electric control device of the present invention is a PLC, or a control device known to those skilled in the art.
[0024] The claw assembly 4 in the utility model includes a claw cylinder 41, which is hung on the bottom surface of the inflatable carrier 2, and the driving shaft of the claw cylinder 41 is connected to one end of the claw connecting rod 42, and the other end of the claw connecting rod 42 is connected to the claw 43 passing through the clamping hole, and the claw connecting rod 42 is connected to a clamping cylinder 44 for clamping the bottom of the claw.
[0025] The sensor 6 described in the utility model is a push-type sensor, and three of them are provided. Their distribution positions are respectively matched with products of sizes of 160mm, 260mm and 284mm. The three different push-type sensors are aimed at products of three different sizes, and inflation of different products is achieved through different inflation holes.
[0026] The inflation hole 8 in the utility model is connected with an inflation interface.
[0027] The inflatable carrier plate 2 of the present invention is connected with a blocking bar 9 .
[0028] The bottom of the cabinet body 1 of the utility model is connected with moving wheels 10 and supporting feet 11, which can take into account both movement and fixation.
[0029] The working principle of the utility model is as follows:
[0030] During specific operation, the product is placed on the inflatable carrier. The photoelectric sensor on the inflatable carrier can first sense the product, then the press sensor is used to confirm the size of the product, and then the product is fixed by the claw assembly, and finally the product is inflated through the different inflation holes corresponding to the product.
[0031] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0032] In the description of this application, it should be noted that the terms "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.
[0033] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or vertical, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0034] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0035] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be regarded as within the protection scope of the present invention.
Claims
1. An inflatable cabinet suitable for a wafer transfer box, comprising a cabinet body (1), wherein the bottom of the cabinet body (1) is connected to an electric control device, characterized in that: An inflatable carrier plate (2) is connected to the top of the cabinet body (1), a clamping hole (3) is provided at the center of the inflatable carrier plate (2), a clamping claw assembly (4) is connected to the bottom of the inflatable carrier plate (2) and passes through the clamping hole (3) for clamping the product, a positioning column (5) is connected to the inflatable carrier plate (2), the positioning columns (5) are dispersed around the clamping hole (3), and they are distributed in a triangular structure, a sensor (6) is connected to the side of the positioning column (5) and on the inflatable carrier plate (2), a photoelectric sensor (7) for sensing the product is connected to the inflatable carrier plate (2), the photoelectric sensor (7), the sensor (6) and the clamping claw assembly are all connected to the electric control device, and a plurality of inflatable holes (8) for inflating products of different sizes are provided on the inflatable carrier plate (2).
2. The inflatable cabinet suitable for a wafer transfer box according to claim 1, characterized in that: The clamping claw assembly (4) comprises a clamping claw cylinder (41), wherein the clamping claw cylinder (41) is hung on the bottom surface of the inflatable carrier (2), the driving shaft of the clamping claw cylinder (41) is connected to one end of a clamping claw connecting rod (42), the other end of the clamping claw connecting rod (42) is connected to a clamping claw (43) passing through a clamping hole, and the clamping claw connecting rod (42) is connected to a clamping cylinder (44) for clamping the bottom of the clamping claw.
3. The inflatable cabinet suitable for a wafer transfer box according to claim 1, characterized in that: The sensor (6) is a push-type sensor, and three of them are provided, and their distribution positions are respectively matched with products of sizes of 160 mm, 260 mm and 284 mm.
4. The inflatable cabinet suitable for a wafer transfer box according to claim 1, characterized in that: The inflation hole (8) is connected with an inflation interface.
5. The inflatable cabinet suitable for a wafer transfer box according to claim 1, characterized in that: The inflatable carrier plate (2) is connected with a blocking bar (9).
6. The inflatable cabinet suitable for a wafer transfer box according to claim 1, characterized in that: The bottom of the cabinet body (1) is connected with moving wheels (10) and supporting feet (11).