Pipe washing device

Abstract

The utility model provides a tube washing device which is composed of a washing tank, a lifting mechanism, a telescopic mechanism, a placing frame and a brush head assembly, after a quartz tube is placed on the placing frame, the lifting mechanism is driven to drive the brush head assembly to ascend and descend, so that a brush head or a tube head in the brush head assembly is moved to the position of a tube opening of the quartz tube, and the quartz tube is washed. The telescopic mechanism drives the brush head assembly to move into the quartz tube for cleaning and then move out, so that cleaning and drying of the quartz tube are completed, automatic cleaning of the quartz tube is completed in an automatic mode, missing of the cleaning position is prevented, and the cleaning cleanliness of the quartz tube is effectively improved.

Description

Technical Field

[0001] The utility model relates to the field of quartz tube cleaning equipment, in particular to a tube cleaning device. Background Art

[0002] Gallium arsenide and indium phosphide substrates have application markets in the manufacture of high-frequency and high-power devices, optical fiber communications, wireless transmission, radio astronomy and other RF devices. RF devices made using indium phosphide substrates have demonstrated excellent performance in application scenarios such as satellites and radars. Indium phosphide substrates are highly competitive in the RF front end of radar and communication systems, analog / mixed signal wide-bandwidth circuits, and are suitable for applications such as high-speed data processing and high-precision wide-bandwidth A / D conversion. Indium phosphide substrates are expected to become the mainstream substrate material for RF devices.

[0003] The conventional process of manufacturing indium phosphide substrates is usually achieved through operations such as doping annealing or crystal growth of wafers or crystals. Various types of quartz tubes are required in this process. For semiconductor manufacturing, the cleanliness of the quartz tube is one of the key indicators.

[0004] The traditional quartz tube cleaning method is usually to manually place the quartz tube on a PVC hook, and then two people lift the hook with both hands and place it in a concentrated sulfuric acid tank for acidification. After the acidification is completed, the personnel will rinse it with a water gun and clean it with a brush. However, in the above process, whether it is rinsing with a water gun or cleaning with a brush, it is highly dependent on the experience of the personnel, and it is easy to miss a position during the cleaning process, resulting in the cleanliness of the quartz tube cannot be guaranteed. Utility Model Content

[0005] The utility model discloses a pipe cleaning device, which solves the technical problem that in the prior art quartz pipe cleaning process, whether it is water gun flushing or brush cleaning, it is heavily dependent on the experience of personnel, and it is easy to miss a position during the cleaning process, resulting in the cleanliness of the quartz pipe cannot be guaranteed.

[0006] The utility model embodiment provides a pipe cleaning device, including a cleaning tank, a lifting mechanism, a telescopic mechanism, a placement rack and a brush head assembly;

[0007] The placement rack is arranged at the bottom of the cleaning tank and has no contact with the brush head assembly, and is used to fix the quartz tube;

[0008] The side wall of the cleaning tank is embedded with a lifting slide rail;

[0009] The lifting mechanism is slidably connected to the lifting rail, one end of the telescopic mechanism is connected to the lifting mechanism, and the other end is connected to the brush head assembly;

[0010] The brush head assembly is used to move to the tube mouth position of the quartz tube through the lifting mechanism, and move into the interior of the quartz tube through the telescopic mechanism for cleaning and then move out.

[0011] In one example of the present utility model, the brush head assembly includes a movable setting plate, a brush cleaning head, a flushing pipe head and an air blowing pipe head;

[0012] The brush cleaning head, the flushing pipe head and the air blowing pipe head are arranged on the movable setting plate;

[0013] The brush cleaning head is used to move to the position of the tube mouth of the quartz tube through the lifting mechanism, move into the interior of the quartz tube through the telescopic mechanism, and then move out after cleaning;

[0014] The flushing pipe head is connected with a water inlet pipe, which is used to move to the pipe opening position of the quartz tube through the lifting mechanism after the brush cleaning head is moved out, and move into the interior of the quartz tube through the telescopic mechanism for flushing and then move out;

[0015] The air blowing pipe head is connected with an air inlet pipe, which is used to move to the pipe mouth position of the quartz tube through the lifting mechanism after the flushing pipe head is moved out, and move into the interior of the quartz tube through the telescopic mechanism to blow air before moving out.

[0016] Optionally, the brush cleaning head is a spiral brush.

[0017] Optionally, the brush cleaning head, the flushing pipe head and the air blowing pipe head are arranged in sequence from bottom to top, or in sequence from top to bottom on the movable setting plate.

[0018] In another example of the present utility model, the placement rack includes fixed feet and a receiving structure;

[0019] One end of the fixed foot is fixedly arranged on the bottom surface of the cleaning tank, and the other end is connected to the receiving structure;

[0020] The inner surface of the receiving structure is provided with a plurality of friction wheels for driving the quartz tube to rotate at a preset speed.

[0021] Optionally, the inner surface of the receiving structure is an inwardly concave arc surface.

[0022] Optionally, the cleaning tank is a rectangular parallelepiped structure with an open top.

[0023] In one example of the present invention, a top cover is also included;

[0024] The four corners of the cleaning tank are respectively provided with supporting columns, and each of the supporting columns is respectively connected to the top cover.

[0025] Optionally, it further includes a first moving mechanism;

[0026] A top slide rail is embedded inside the top cover;

[0027] The first moving mechanism is slidably connected to the top slide rail and is used to release the quartz tube after it is placed on the placement rack.

[0028] Optionally, it further includes a second moving mechanism;

[0029] The second moving mechanism is slidably connected to the top slide rail and is used to hook the dried quartz tube from the placement rack and move it to a target storage position.

[0030] It can be seen from the above technical solutions that the embodiments of the utility model have the following advantages:

[0031] The utility model provides a pipe cleaning device, which consists of a cleaning tank, a lifting mechanism, a telescopic mechanism, a placement rack and a brush head assembly. After the quartz tube is placed on the placement rack, the lifting mechanism is driven to drive the brush head assembly to lift and move, so as to move the brush head or the tube head in the brush head assembly to the tube mouth position of the quartz tube, and the brush head assembly is driven by the telescopic mechanism to move into the interior of the quartz tube for cleaning and then moved out, thereby completing the cleaning and drying of the quartz tube, and completing the automatic cleaning of the quartz tube in an automated manner, preventing the cleaning position from being missed and effectively improving the cleaning cleanliness of the quartz tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0033] Figure 1 This is an overall structural diagram of a pipe cleaning device provided by the utility model;

[0034] Figure 2 A detailed structural diagram of a placement rack provided by the utility model;

[0035] Figure 3 The utility model provides a schematic diagram of the use process of a pipe cleaning device. DETAILED DESCRIPTION

[0036] The utility model discloses a pipe cleaning device for solving the technical problem that in the prior art quartz pipe cleaning process, whether it is water gun flushing or brush cleaning, it is heavily dependent on the experience of personnel, and it is easy to miss a position during the cleaning process, resulting in the cleanliness of the quartz pipe cannot be guaranteed.

[0037] See also Figure 1 , Figure 1 The utility model provides an overall structural diagram of a pipe cleaning device.

[0038] A pipe cleaning device provided in an embodiment of the utility model comprises a cleaning tank 1, a lifting mechanism, a telescopic mechanism, a placement rack 2 and a brush head assembly 3;

[0039] The placement rack 2 is arranged at the bottom of the cleaning tank 1 and has no contact with the brush head assembly 3, and is used to fix the quartz tube;

[0040] The side wall of the cleaning tank 1 is embedded with a lifting slide rail;

[0041] The lifting mechanism is slidably connected to the lifting rail, one end of the telescopic mechanism is connected to the lifting mechanism, and the other end is connected to the brush head assembly 3;

[0042] The brush head assembly 3 is used to move to the tube mouth position of the quartz tube through the lifting mechanism, and move into the interior of the quartz tube through the telescopic mechanism for cleaning and then move out.

[0043] In the embodiment of the utility model, the placement rack 2 is fixedly arranged at the bottom of the cleaning tank 1 by a column, and its setting position is not in contact with the brush head assembly 3, so as to fix the quartz tube and prevent it from sliding and causing damage during the cleaning process. At the same time, the side wall of the cleaning tank 1 where the brush head assembly 3 is located is embedded with a lifting rail, which is slidably connected to the lifting rail by a lifting mechanism to facilitate the brush head assembly 3 to move up and down, and at the same time, one end of the telescopic mechanism is connected to the upgrading mechanism, and the other end is connected to the brush head assembly 3. The telescopic mechanism is driven by a motor or the like to drive the brush head assembly 3 to perform telescopic movement, so as to facilitate the brush head assembly 3 to move the quartz tube in and out.

[0044] It should be noted that the pipe washing device is composed of a washing tank 1, a lifting mechanism, a telescopic mechanism, a placement rack 2, and a brush head assembly 3. It automatically cleans the quartz tube placed on the placement rack 2 by responding to a preset pipe washing instruction. Specifically, the center coordinate of the tube mouth of the quartz tube can be used as the target moving position. After the brush head of the brush head assembly 3 is driven by the lifting mechanism to reach the target moving position, it is moved into the interior of the quartz tube for cleaning by the telescopic mechanism. After the cleaning is completed, the brush head assembly 3 is driven by the telescopic mechanism to move out of the quartz tube, thereby avoiding the manual cleaning method that relies on experience and effectively improving the cleanliness of the quartz tube cleaning.

[0045] In one example of the present utility model, the brush head assembly 3 includes a movable setting plate 31, a brush cleaning head 34, a flushing pipe head 33 and an air blowing pipe head 32;

[0046] The brush cleaning head 34, the flushing pipe head 33 and the air blowing pipe head 32 are arranged on the movable setting plate 31;

[0047] The brush cleaning head 34 is used to move to the position of the tube mouth of the quartz tube through the lifting mechanism, move into the interior of the quartz tube through the telescopic mechanism to clean it, and then move out;

[0048] The flushing pipe head 33 is connected to a water inlet pipe, which is used to move to the pipe opening position of the quartz tube through the lifting mechanism after the brush cleaning head 34 is moved out, and then move into the interior of the quartz tube through the telescopic mechanism for flushing and then move out;

[0049] The air blowing pipe head 32 is connected with an air inlet pipe, which is used to move to the pipe mouth position of the quartz tube through the lifting mechanism after the flushing pipe head 33 is moved out, and move into the interior of the quartz tube through the telescopic mechanism to blow air before moving out.

[0050] In this embodiment, the brush head assembly 3 is composed of a movable setting plate 31, a brush cleaning head 34, a flushing pipe head 33 and an air blowing pipe head 32, wherein the brush cleaning head 34, the flushing pipe head 33 and the air blowing pipe head 32 are fixedly arranged on the movable setting plate 31, and the center of the brush cleaning head 34 can pass through the movable setting plate 31 to be connected to a motor. When the quartz tube needs to be cleaned, the movable setting plate 31 is driven by the lifting mechanism to move to the position of the tube mouth of the quartz tube, and then driven by the telescopic mechanism to move into the interior of the quartz tube for cleaning and then moved out. The flushing pipe head 33 can be connected by a snap-fit ​​through the movable setting plate 31. The flushing pipe head 33 is connected by the water inlet pipe. When the brush cleaning head 34 is moved out of the quartz tube, the movable setting plate 31 is driven down or up by the lifting mechanism to move the flushing pipe head 33 to the pipe mouth of the quartz tube, and it is moved into the interior of the quartz tube by the telescopic mechanism and opened. Pure water or other liquid is introduced through the water inlet pipe to flush the interior of the quartz tube for a certain period of time before being moved out. When the flushing pipe head 33 is moved out, the blowing pipe head 32 is similarly moved to the pipe mouth of the quartz tube, and after it is moved into the interior of the quartz tube by the telescopic mechanism, gas output is provided through the air inlet pipe, and the interior of the quartz tube is blown and then moved out.

[0051] The air blowing pipe head 32 can pass through the movable setting plate 31 and be connected in a snap-fit ​​manner, and an air inlet pipe is connected to the rear end, through which different gases or gases of different temperatures are provided.

[0052] Furthermore, the brush cleaning head 34 is a spiral brush.

[0053] In order to improve the cleaning quality of the inside of the quartz tube, the brush cleaning head 34 can be a spiral brush, so that it can clean every position inside the quartz tube when it rotates.

[0054] In an example of the present invention, the brush cleaning head 34 , the flushing pipe head 33 and the air blowing pipe head 32 are arranged in sequence from bottom to top, or in sequence from top to bottom on the movable setting plate 31 .

[0055] In this embodiment, the brush cleaning head 34, the flushing pipe head 33 and the air blowing pipe head 32 can be arranged in sequence from bottom to top or from top to bottom, and the specific arrangement order is not limited.

[0056] It should be noted that in a specific implementation, the calling order of the brush head assembly 3 can also be adjusted according to the type of quartz tube, for example, first flushing with the flushing pipe head 33, then cleaning with the brush cleaning head 34, and finally drying with the blowing pipe head 32.

[0057] See also Figure 2 In one example of the present utility model, the placement rack 2 includes a fixed foot 21 and a receiving structure 22;

[0058] One end of the fixed foot 21 is fixedly disposed on the bottom surface of the cleaning tank 1, and the other end is connected to the receiving structure 22;

[0059] The inner surface of the receiving structure 22 is provided with a plurality of friction wheels 221 for driving the quartz tube to rotate at a preset speed.

[0060] In this embodiment, the placement rack 2 is composed of a fixed foot 21 and a supporting structure 22, wherein one end of the fixed foot 21 is fixedly set on the bottom surface of the cleaning tank 1, and the other end is connected to the supporting structure 22, so as to place the quartz tube at a certain height and facilitate the setting of the brush head assembly 3.

[0061] At the same time, the inner surface of the receiving structure 22 is also provided with a plurality of friction wheels 221, which rotate in the same direction at a preset speed, thereby driving the quartz tube to rotate at a preset speed, so as to further cooperate with the cleaning of the brush head assembly 3 and improve the cleaning effect.

[0062] Furthermore, in order to improve the receiving and fixing effect on the quartz tube, the inner surface shape of the receiving structure 22 can be set to be an inwardly concave arc surface.

[0063] In one example of the present invention, the cleaning tank 1 is a rectangular parallelepiped structure with an open top.

[0064] In a specific implementation, in order to facilitate observation of the cleaning effect of the quartz tube and transportation of the quartz tube, the cleaning tank 1 can be provided with a rectangular parallelepiped structure with an open top, such as Figure 1 shown.

[0065] Furthermore, the pipe washing transposition device provided by the utility model further includes a top cover 4;

[0066] The four corners of the cleaning tank 1 are each provided with a supporting column, and each of the supporting columns is connected to the top cover 4 respectively.

[0067] In this embodiment, the cleaning tank 1 can be covered by a top cover 4, and the top cover 4 is connected by respectively setting support columns at the four corners of the cleaning tank 1 to provide support force, so as to facilitate the hooking and transportation of the quartz tube through the slide rail set on the top cover 4.

[0068] See also Figure 3 In another example of the present utility model, the pipe washing device may further include a first moving mechanism 51;

[0069] A top slide rail 41 is embedded inside the top cover 4;

[0070] The first moving mechanism 51 is slidably connected to the top slide rail 41 and is used to release the quartz tube after placing it on the placement rack 2 .

[0071] In this embodiment, the first moving mechanism 51 can be slidably connected to the top slide rail 41, and can hook the quartz tube and place it on the placement rack 2, then release it, and then return to its original position along the top slide rail 41 to hook the quartz tube again.

[0072] In a specific implementation, before the quartz tube is cleaned in the cleaning tank 1, it is usually necessary to perform a primary or secondary pickling with concentrated sulfuric acid on the quartz tube to clean the chemicals left on the quartz tube. To this end, the first moving mechanism 51 can be sequentially cleaned by the hot concentrated sulfuric acid tank and the cold concentrated sulfuric acid tank, and then moved to the placement rack 2 of the cleaning tank 1 to clean the brush head assembly 3.

[0073] Optionally, the pipe cleaning device further includes a second moving mechanism 52;

[0074] The second moving mechanism 52 is slidably connected to the top slide rail 41 and is used to hook the dried quartz tube from the placement rack 2 and move it to a target storage position.

[0075] In a specific implementation, since the first moving mechanism 51 will return to the starting point to hook the next quartz tube after placing the quartz tube on the placement rack 2, in order to further improve the cleaning efficiency of the quartz tube, a second moving mechanism 52 can be provided, and the second moving mechanism 52 is slidably connected to the top slide rail 41. After the tube washing device completes drying the quartz tube, the quartz tube on the placement rack 2 can be moved to the target storage position through the second moving mechanism 52.

[0076] The first moving mechanism 51 and the second moving mechanism 52 may be mechanical mechanisms such as hooking mechanisms or clamping mechanisms that can fix and move the quartz tube, and the embodiment of the utility model does not limit this.

[0077] In the specific implementation, a cleaning hook made of Teflon material is used as a hooking mechanism to hook the quartz tube. After the acid storage component heats the concentrated sulfuric acid to 75±5°C, the hot concentrated sulfuric acid is introduced into the first concentrated sulfuric acid tank, such as 20 liters, by starting the acid-proof, alkali-proof and high-temperature-proof circulation pump, and then the quartz tube is moved into the hot concentrated sulfuric acid for 60 seconds by the cleaning hook, and at the same time, the ultrasonic vibration cleaning with a frequency of 40 Hz is turned on. After the hot concentrated sulfuric acid peracid cleaning is completed, the quartz tube is moved into the second concentrated sulfuric acid tank for peracid cleaning for 30 seconds through the cleaning hook, and the ultrasonic vibration collaborative cleaning with a frequency of 40 Hz can also be turned on. At the same time, the acid-proof, alkali-proof and high-temperature-proof circulation pump is started to recycle the hot concentrated sulfuric acid in the first concentrated sulfuric acid tank to the acid storage component for insulation, and the working mode of the first concentrated sulfuric acid tank is switched to the flushing mode, and about 40 liters of pure water are injected into the tank through the water inlet pipe. After the pure water injection is completed, the cleaning hook lifts the quartz tube from the second concentrated sulfuric acid tank and moves it into the first concentrated sulfuric acid tank for immersion for 10 seconds, and the drain port is opened to quickly discharge the pure water in the first concentrated sulfuric acid tank. After discharging the pure water, continue to spray and rinse the quartz tube through the water inlet pipe for 120 seconds. After the spray and rinse is completed, the quartz tube is moved to the placement rack in the cleaning tank through the cleaning hook and fixed. The placement rack drives the quartz tube to rotate at 20 rpm. First, use a special brush to clean for 30 seconds, use a special flushing pipe head to rinse for 30 seconds, and use a special nitrogen blowing pipe to blow normal temperature nitrogen for 30 seconds, then heat the nitrogen to 30°C, blow dry with hot air, complete the tube cleaning, hook the dried quartz tube through the storage hook mechanism, and move it to the target storage position.

[0078] In this embodiment, after the quartz tube is placed on the placement rack, the lifting mechanism is driven to drive the brush head assembly to move up and down, so as to move the brush head or tube head in the brush head assembly to the tube mouth position of the quartz tube, and the brush head assembly is driven by the telescopic mechanism to move into the interior of the quartz tube for cleaning and then moved out, thereby completing the cleaning and drying of the quartz tube, and automatically cleaning the quartz tube in an automated manner, preventing the cleaning position from being missed and effectively improving the cleaning cleanliness of the quartz tube.

[0079] The above is a detailed introduction to a pipe cleaning device provided by the utility model. For a person skilled in the art, according to the idea of ​​the embodiment of the utility model, there may be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the utility model.

Claims

1. A pipe cleaning device, characterized in that: It includes a cleaning tank, a lifting mechanism, a telescopic mechanism, a placement rack and a brush head assembly; The placement rack is arranged at the bottom of the cleaning tank and has no contact with the brush head assembly, and is used to fix the quartz tube; The side walls of the cleaning tank are embedded with lifting slide rails; The lifting mechanism is slidably connected to the lifting rail, one end of the telescopic mechanism is connected to the lifting mechanism, and the other end is connected to the brush head assembly; The brush head assembly is used to move to the tube mouth position of the quartz tube through the lifting mechanism, and move into the interior of the quartz tube through the telescopic mechanism for cleaning and then move out.

2. The pipe cleaning device according to claim 1, characterized in that: The brush head assembly includes a movable setting plate, a brush cleaning head, a flushing pipe head and an air blowing pipe head; The brush cleaning head, the flushing pipe head and the air blowing pipe head are arranged on the movable setting plate; The brush cleaning head is used to move to the position of the tube mouth of the quartz tube through the lifting mechanism, and move into the interior of the quartz tube through the telescopic mechanism to clean and then move out; The flushing pipe head is connected to a water inlet pipe, which is used to move to the pipe opening position of the quartz tube through the lifting mechanism after the brush cleaning head is removed, and then move into the interior of the quartz tube through the telescopic mechanism for flushing and then move out; The air blowing pipe head is connected to an air inlet pipe, which is used to move to the pipe mouth position of the quartz tube through the lifting mechanism after the flushing pipe head is moved out, and move into the interior of the quartz tube through the telescopic mechanism to blow air before moving out.

3. The pipe cleaning device according to claim 2, characterized in that: The brush cleaning head is a spiral brush.

4. The pipe cleaning device according to claim 2, characterized in that: The brush cleaning head, the flushing pipe head and the air blowing pipe head are arranged in sequence from bottom to top, or in sequence from top to bottom on the movable setting plate.

5. The pipe cleaning device according to claim 1, characterized in that: The placement rack includes fixed legs and a supporting structure; One end of the fixed foot is fixedly arranged on the bottom surface of the cleaning tank, and the other end is connected to the receiving structure; The inner surface of the receiving structure is provided with a plurality of friction wheels for driving the quartz tube to rotate at a preset speed.

6. The pipe cleaning device according to claim 5, characterized in that: The inner surface of the receiving structure is in the shape of an inwardly concave arc surface.

7. The pipe cleaning device according to claim 1, characterized in that: The cleaning tank is a rectangular parallelepiped structure with an open top.

8. The pipe cleaning device according to claim 1, characterized in that: Also includes top cover; A support column is provided at each of the four corners of the cleaning tank, and each of the support columns is connected to the top cover.

9. The pipe cleaning device according to claim 8, characterized in that: Also included is a first moving mechanism; A top slide rail is embedded in the inner side of the top cover; The first moving mechanism is slidably connected to the top slide rail and is used to release the quartz tube after placing it on the placement rack.

10. The pipe cleaning device according to claim 9, characterized in that: Also included is a second moving mechanism; The second moving mechanism is slidably connected to the top slide rail and is used to hook the dried quartz tube from the placement rack and move it to a target storage position.

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