Transfer device for adjacent areas in mask manufacturing process

Abstract

The utility model discloses a transfer device for adjacent areas in a mask plate manufacturing process, which comprises a shell and further comprises a dustproof assembly, a first transmission assembly, a second transmission assembly and a second transmission assembly, wherein the dustproof assembly is used for preventing dust from being adsorbed on a mask plate in a transfer process; the dustproof assembly comprises a dustproof plate A, a dustproof plate B and a sliding plate, the dustproof plate A is in sliding connection with the shell, the other end of the dustproof plate A is fixedly connected with the sliding plate, the sliding plate is in sliding connection with the shell, and the dustproof plate B is hinged to the dustproof plate A; according to the device, dust can be effectively prevented from being adsorbed and adhered to the mask plate in the transfer process.

Description

Technical Field

[0001] The utility model belongs to the technical field of mask processing, and in particular relates to a device for transferring adjacent areas in a mask manufacturing process. Background Art

[0002] The mask is an ideal photosensitive blank plate for making fine photomask patterns. The required photomask can be obtained through the photolithography process. Simply put, the photomask substrate becomes a photomask after the mask pattern is etched on it. Since the mask is a high-precision product, the turnover and transmission of each area is prone to generate dust, which affects the product quality, especially the transfer between the photolithography area and the post-processing area. A device is now proposed that can effectively prevent the dust from being adsorbed and adhered to the mask during transportation. Utility Model Content

[0003] In view of the deficiencies in the prior art, the utility model provides a device for transferring adjacent areas of a mask manufacturing process, which solves the above-mentioned problems.

[0004] To achieve the above objectives, the utility model is implemented through the following technical solutions: a device for transferring adjacent areas of a mask process, comprising a shell, and also comprising: a dustproof component, used to prevent dust from being adsorbed on the mask during transportation; the dustproof component comprises a dustproof plate A, a dustproof plate B and a slide plate, the dustproof plate A is slidably connected to the shell, the other end of the dustproof plate A is fixedly connected to the slide plate, the slide plate is slidably connected to the shell, and the dustproof plate A is hinged with a dustproof plate B.

[0005] Beneficial Effects

[0006] The utility model provides a device for transferring adjacent areas of a mask manufacturing process, which has the following beneficial effects compared with the prior art:

[0007] When the mask needs to be transported, the relevant technicians start the motor, so that the motor drives the gear meshing with the transmission gear on it to start rotating, so that the gear drives the screw B fixedly connected at its axis to rotate synchronously, so that the screw B drives the slide cylinder threaded on it, so that the slide cylinder drives the slide plate fixedly connected to it, so that the slide plate starts to move linearly along the slide rail at the connection between it and the shell, and the slide plate drives the dustproof plate A fixedly connected to it to move linearly synchronously. When gear A moves above the rack, gear A starts to rotate with the cooperation of the rack, so that gear A drives the shaft fixedly connected at its axis to rotate synchronously, and the shaft drives the screw A fixedly connected on it to rotate synchronously, so that the screw The slide cylinder A threadedly connected to the rod A starts to move linearly, so that the slide cylinder A drives the pull rod hinged on it, so that the pull rod starts to push the dustproof plate B hinged thereto, so that the dustproof plate B starts to move in a circle with its hinge with the dustproof plate A as a fulcrum, so that the dustproof plate B is opened, so that the relevant technicians can place the mask on the dustproof plate A. After the placement is completed, the slide plate continues to slide along the shell, and the gear A continues to rotate on the rack, so that the slide cylinder A starts to move in the opposite direction, and the dustproof plate B starts to close. When the dustproof plate B is completely closed, the gear A turns out of the rack to stop it from rotating, so that the dustproof plates A and B are in a sealed state to prevent dust from being adsorbed on the mask during transportation. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model.

[0009] Figure 2 It is a schematic cross-sectional view of the overall structure of the utility model.

[0010] Figure 3 It is a side structural cross-sectional schematic diagram of the utility model.

[0011] Notes on figure marks: housing 101, dustproof component 2, dustproof plate A201, dustproof plate B202, slide plate 203, pull rod 204, slide cylinder A205, screw rod A206, shaft 207, gear A208, rack 209, slide cylinder 301, screw rod B302, gear 303, motor 304, transmission gear 305. DETAILED DESCRIPTION

[0012] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0013] The specific implementation of the present utility model is described in detail below in conjunction with specific embodiments.

[0014] See also Figures 1 to 3, provided in one embodiment of the utility model, is a device for transferring adjacent areas of a mask manufacturing process, comprising a housing 101, and further comprising:

[0015] A dust-proof component 2, used to prevent dust from being adsorbed on the mask during transportation;

[0016] The dustproof assembly 2 includes a dustproof plate A201, a dustproof plate B202 and a slide plate 203. The dustproof plate A201 is slidably connected to the shell 101. The other end of the dustproof plate A201 is fixedly connected to the slide plate 203. The slide plate 203 is slidably connected to the shell 101. The dustproof plate A201 is hinged with a dustproof plate B202.

[0017] For the above examples, those skilled in the art should be aware that when implementing the above technical solutions, they are not limited to the specific dustproof plates A201 and B202 described in the above embodiments. For example, the dustproof plates A201 and B202 are both provided with replaceable films. The purpose of this setting is to facilitate the adsorption of the film on the mask plate for further dustproof protection.

[0018] For the above examples, those skilled in the art should be aware that when implementing the above technical solutions, they are not limited to the specific shell 101 described in the above embodiments. For example, damping rubber strips are provided at the connection between the shell 101 and the dustproof plate A201 and the slide plate 203. The purpose of this setting is to increase the sliding friction in this way, so that the dustproof plate A201 and the slide plate 203 can slide smoothly.

[0019] Specifically, the dustproof plate B202 is hinged to the pull rod 204 via a hinge seat thereon, the other end of the pull rod 204 is hinged to the slide cylinder A205, and the slide cylinder A205 is slidably connected to the slide plate 203 via a slide rail in the slide plate 203.

[0020] For the above examples, those skilled in the art should be aware that when implementing the above technical solutions, they are not limited to the specific pull rod 204 described in the above embodiments. For example, the pull rod 204 should be made of a one-piece processed material, and the hinges at both ends should be further hardened and reinforced. The purpose of this arrangement is to prevent it from being broken under stress in this way.

[0021] Specifically, the slide cylinder A205 is threadedly connected to the screw rod A206, the screw rod A206 is fixedly connected to the shaft 207, and the shaft 207 is rotatably connected to the slide plate 203.

[0022] For the above examples, those skilled in the art should be aware that when implementing the above technical solutions, they are not limited to the specific screw rod A206 described in the above embodiments. For example, the screw rod A206 uses a reciprocating screw rod. The purpose of this arrangement is to facilitate the dustproof plates A201 and B202 to be opened and then closed in a closed state. The purpose of this arrangement is to facilitate the dustproof plates A201 and B202 to be prevented from being in a closed state for a long time, thereby causing dust to be adsorbed therein.

[0023] Specifically, a gear A208 is fixedly connected to the shaft 207 , and the gear A208 is meshedly connected to a rack 209 , and the rack 209 is fixedly connected to the housing 101 .

[0024] For the above examples, those skilled in the art should be aware that when implementing the above technical solutions, they are not limited to the specific shell 101 described in the above embodiments. For example, the other end of the shell 101 may be provided with a rack 209 of the same length. The purpose of this arrangement is to facilitate the automatic opening of the dustproof plate B202 after the mask is transported to the target point, so that relevant technicians can take it.

[0025] Specifically, a slide cylinder 301 is fixedly connected to the slide plate 203 , and the slide cylinder 301 is threadedly connected to a screw rod B302 , and the screw rod B302 is rotatably connected to the housing 101 .

[0026] For the above example, those skilled in the art should know that when implementing the above technical solution, it is not limited to the specific slide 301 recorded in the above embodiment. For example, the two ends of the screw rod B302 are provided with bearing rings. The purpose of this setting is to prevent it from

[0027] Specifically, a gear 303 is fixedly connected to the screw rod B302 , and the gear 303 is meshedly connected with a transmission gear 305 . The transmission gear 305 is fixedly connected to an output shaft of a motor 304 , and the motor 304 is fixedly connected to the housing 101 .

[0028] For the above examples, those skilled in the art should be aware that when implementing the above technical solutions, they are not limited to the specific motor 304 described in the above embodiments. For example, the motor 304 should be a motor with multiple adjustable speeds. The purpose of this setting is to facilitate adjusting the speed of the pull rod 204, thereby adjusting the transport speed of the skateboard 203.

[0029] In the embodiment of the utility model, when it is necessary to transport the mask, the relevant technician starts the motor 304, so that the motor 304 drives the gear 303 meshing with the transmission gear 305 thereon to start rotating, so that the gear 303 drives the screw rod B302 fixedly connected at its axis to rotate synchronously, so that the screw rod B302 drives the slide 301 threadedly connected thereon, so that the slide 301 drives the slide plate 203 fixedly connected thereto, so that the slide plate 203 starts to move linearly along the slide rail at the connection between it and the shell 101, so that the slide plate 203 drives the dustproof plate A201 fixedly connected thereto to move linearly synchronously, and when the gear A208 moves to above the rack 209, the gear A208 starts to rotate with the cooperation of the rack 209, so that the gear A208 drives the shaft 207 fixedly connected at its axis to rotate synchronously, so that the shaft 207 drives the screw rod A206 fixedly connected thereto to rotate synchronously Rotate, so that the slide A205 threadedly connected on the screw rod A206 starts to move linearly, so that the slide A205 drives the pull rod 204 hinged on it, so that the pull rod 204 starts to push the dustproof plate B202 hinged thereto, so that the dustproof plate B202 starts to move in a circle with its hinge with the dustproof plate A201 as a fulcrum, so that the dustproof plate B202 is opened, so that the relevant technical personnel can place the mask on the dustproof plate A201. After the placement is completed, the slide plate 203 continues to slide along the shell 101. At this time, the gear A208 continues to rotate on the rack 209, so that the slide A205 starts to move in the opposite direction, and the dustproof plate B202 starts to close. When the dustproof plate B202 is completely closed, the gear A208 turns out of the rack 209 to stop it from rotating, so that the dustproof plate A201 and the dustproof plate B202 are in a sealed state to prevent dust from being adsorbed on the mask during transportation.

[0030] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0031] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for transferring adjacent areas of a mask manufacturing process, comprising a housing (101), characterized in that: Also includes: A dust prevention component (2) is used to prevent dust from being adsorbed on the mask during transportation; The dustproof assembly (2) comprises a dustproof plate A (201), a dustproof plate B (202) and a slide plate (203); the dustproof plate A (201) is slidably connected to the shell (101); the other end of the dustproof plate A (201) is fixedly connected to the slide plate (203); the slide plate (203) is slidably connected to the shell (101); and the dustproof plate A (201) is hingedly connected to the dustproof plate B (202).

2. The device for transferring adjacent areas of a mask manufacturing process according to claim 1, characterized in that: The dustproof plate B (202) is hinged to the pull rod (204) via a hinge seat thereon, and the other end of the pull rod (204) is hinged to the slide cylinder A (205), and the slide cylinder A (205) is slidably connected to the slide plate (203) via a slide rail inside the slide plate (203).

3. The device for transferring adjacent areas of a mask manufacturing process according to claim 2, characterized in that: The slide cylinder A (205) is threadedly connected to the screw rod A (206), the screw rod A (206) is fixedly connected to the shaft (207), and the shaft (207) is rotationally connected to the slide plate (203).

4. The device for transferring adjacent areas of a mask manufacturing process according to claim 3, characterized in that: A gear A (208) is fixedly connected to the shaft (207), the gear A (208) is meshedly connected to a rack (209), and the rack (209) is fixedly connected to the housing (101).

5. The device for transferring adjacent areas of a mask manufacturing process according to claim 1, characterized in that: The slide plate (203) is fixedly connected with a slide cylinder (301), the slide cylinder (301) is threadedly connected to a screw rod B (302), and the screw rod B (302) is rotationally connected to the housing (101).

6. The device for transferring adjacent areas of a mask manufacturing process according to claim 5, characterized in that: The screw rod B (302) is fixedly connected with a gear (303), the gear (303) is meshedly connected with a transmission gear (305), the transmission gear (305) is fixedly connected to the output shaft of the motor (304), and the motor (304) is fixedly connected to the housing (101).

7. The device for transferring adjacent areas of a mask manufacturing process according to claim 1, characterized in that: The dustproof plate A (201) and the dustproof plate B (202) are both provided with replaceable films.

8. The device for transferring adjacent areas of a mask manufacturing process according to claim 3, characterized in that: The screw rod A (206) is a reciprocating screw rod.

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