Cross beam type white light interferometer

Abstract

The utility model relates to a cross beam type white light interferometer, which comprises a base, a displacement device arranged on the base, a cross beam arranged at the rear end of the displacement device on the base, a probe assembly arranged on the cross beam, a protective device arranged outside the probe assembly and a probe wiring assembly arranged on the cross beam, and a displacement wiring assembly is arranged on the base. Therefore, by adopting an overhead cross beam structure, the view finding requirement of the probe assembly is not influenced while the bearing rigidity is met, and the shielding is avoided. And a shock absorber is arranged, so that vibration during use is avoided, and the image acquisition precision is ensured. The independent displacement device is arranged, and during use, the distance between the lens and the to-be-measured object can be adjusted through software according to the height of the to-be-measured object. By adopting the independent probe wiring assembly and the displacement wiring assembly, unified planning of wiring can be realized, requirements of built-in wiring are met, exposure and damage of wires are avoided, and plugging conduction requirements of conventional use are met.

Description

Technical Field

[0001] The utility model relates to an interferometer, in particular to a crossbeam type white light interferometer. Background Art

[0002] White light interferometer is based on the principle of white light interferometry, uses a white light source with an extremely short coherence length, and uses the characteristic that different wavelengths of light only appear when the optical path difference is zero, and the light intensity maximum value is superimposed by time phase expansion. Combined with nano-longitudinal scanning, the corresponding scanning image of different optical path differences can be obtained. For each pixel point, the optical path difference zero position corresponding to the light intensity extreme point can be found, and the longitudinal height of the surface of the object to be measured can be detected by comparing the optical path difference zero positions corresponding to different pixel points.

[0003] However, in order to take into account the layout of the probe, the existing white light interferometer is too large and occupies a large workstation space. This leads to inconvenience in transportation and high cost of use. At the same time, the existing white light interferometers all use external wiring, which leads to messy routing of various cables and easy damage to the wires due to the placement of other external equipment. In addition, the existing white light interferometers all use non-industrial standard interfaces, which requires adjustment of the wiring and is inconvenient to use. Moreover, the components for installing the probes are all L-shaped support structures, which have poor rigidity and are prone to deformation, affecting the detection accuracy. Furthermore, there is a lack of effective anti-vibration mechanisms. Once a slight displacement occurs, it will affect the final detection results and reduce the detection accuracy.

[0004] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a beam-type white light interferometer to make it more valuable for industrial use. Utility Model Content

[0005] In order to solve the above technical problems, the purpose of the utility model is to provide a beam-type white light interferometer.

[0006] The utility model provides a beam-type white light interferometer, comprising a base, wherein: a displacement device is arranged on the base, a beam is arranged on the base at the rear end of the displacement device, a probe assembly is installed on the beam, the probe assembly corresponds to the displacement device, a protective device is arranged outside the probe assembly, a probe wiring assembly is arranged on the beam, and a displacement wiring assembly is arranged on the base.

[0007] Furthermore, in the above-mentioned beam-type white light interferometer, the base includes a bearing plate, a plurality of shock absorbers are arranged below the bearing plate, a positioning groove is arranged above the bearing plate, and a beam is arranged in the positioning groove.

[0008] Furthermore, in the above-mentioned beam-type white light interferometer, the shock absorber is a spring pad or a silicone pad; the lower end of the beam is connected to the bearing plate by screws.

[0009] Furthermore, in the above-mentioned beam-type white-light interferometer, the displacement device includes a bearing base connected to the base, and a displacement platform is arranged on the bearing base.

[0010] Furthermore, in the above-mentioned beam-type white light interferometer, the displacement platform is an X-axis adjustment platform, or a Y-axis adjustment platform, or a dual-axis adjustment platform shared by the X-axis and the Y-axis, and the displacement platform is equipped with a corresponding drive motor.

[0011] Furthermore, in the above-mentioned beam-type white-light interferometer, the beam is an integrated arc-shaped beam, a contact extension edge is provided at the bottom of the beam, a combining bracket is provided at the top of the beam, the probe assembly is connected to the combining bracket by a screw, a wire channel is provided in the beam, a wire assembly is provided in the wire channel, one end of the wire assembly is connected to the probe assembly, and the other end of the wire assembly is connected to the probe wiring assembly.

[0012] Furthermore, in the above-mentioned beam-type white light interferometer, the protective device includes a front cover shell and a rear cover shell connected by screws, and a connecting hole is provided on the rear cover shell.

[0013] Furthermore, in the above-mentioned beam-type white light interferometer, a receiving channel is provided in the base, a control wire group is provided in the receiving channel, one end of the control wire group is connected to the displacement device, and the other end of the control wire group is connected to the displacement wiring assembly.

[0014] Furthermore, in the above-mentioned beam-type white light interferometer, the probe wiring assembly and the displacement wiring assembly include a plurality of power supply interfaces and communication interfaces.

[0015] Furthermore, in the above-mentioned beam-type white-light interferometer, the probe assembly is a switchable multi-group probe.

[0016] By means of the above solution, the utility model has at least the following advantages:

[0017] 1. The overhead beam structure is adopted to meet the load-bearing rigidity while not affecting the framing needs of the probe assembly and causing no obstruction.

[0018] 2. The crossbeam structure has good rigidity and anti-vibration performance; the new damping shock absorber has better anti-interference ability to ensure the accuracy of image acquisition.

[0019] 3. It is equipped with an independent displacement device. During use, the distance between the lens and the object to be measured can be adjusted through the software according to the height of the object to be measured.

[0020] 4. The use of independent probe wiring components and displacement wiring components can achieve unified planning of wiring, meet the requirements of built-in wiring, avoid wire exposure and damage, and adapt to the needs of conventional plug-in conduction.

[0021] 5. The overall structure is simple, and the currently commercially available white light interferometer can be modified to reduce the implementation cost.

[0022] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the body structure of a beam-type white-light interferometer.

[0024] Figure 2 This is a schematic diagram of the rear structure of the beam-type white-light interferometer.

[0025] The meanings of the reference numerals in the drawings are as follows.

[0026] 1 Base 2 Beam

[0027] 3 Probe assembly 4 Probe wiring assembly

[0028] 5 Displacement wiring assembly 6 Shock absorber

[0029] 7 Loading base 8 Displacement platform

[0030] 9 Driving motor 10 Combined bracket

[0031] 11 front cover 12 rear cover DETAILED DESCRIPTION

[0032] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0033] like Figures 1 to 2The beam-type white light interferometer includes a base 1, which is different from the others in that a displacement device is provided on the base 1 to facilitate adjustment of the actual position of the object to be measured. At the same time, the base 1 is provided with a beam 2 at the rear end of the displacement device, and a probe assembly 3 is installed on the beam 2. In this way, the actual impact of the object to be measured can be collected based on the current wavelength of white light. Considering that the viewing range should be adapted to the placement area of ​​the object to be measured as much as possible, the probe assembly 3 corresponds to the displacement device. In addition, in order to prevent external foreign matter from invading the probe assembly 3, a protective device is provided outside the probe assembly 3. In order to meet the subsequent connection needs of control wires, power supply wires, communication wires, etc., a probe wiring assembly 4 is provided on the beam 2, and a displacement wiring assembly 5 is provided on the base 1. In this way, rapid and stable docking of various types of wires can be achieved.

[0034] In view of a preferred embodiment of the utility model, the base 1 used includes a bearing plate, and a plurality of shock absorbers 6 are arranged below the bearing plate. In this way, the conduction of external vibrations during use can be avoided, and the framing displacement of the probe assembly 3 will not be caused, so that a more accurate image can be obtained during the scanning of images corresponding to different optical path differences. At the same time, a positioning groove is arranged above the bearing plate, and a crossbeam 2 is arranged in the positioning groove. In this way, during installation, the bottom of the crossbeam 2 can be pre-positioned to ensure that it is finally accurately installed in place. During implementation, the shock absorber 6 is a spring pad or a silicone pad. In this way, it has a better buffering and shock absorbing effect and is also easy to install. Of course, other damping shock absorbers can also be used. Furthermore, considering the combination stability of the crossbeam 2, the lower end of the crossbeam 2 is connected to the bearing plate by screws.

[0035] Looking further, the displacement device adopted by the utility model includes a bearing base 7 connected to the base 1, and a displacement platform 8 is arranged on the bearing base 7. Specifically, considering the framing needs of different objects to be measured, the displacement platform 8 is an X-axis adjustment platform, or a Y-axis adjustment platform. In this way, the adjustment in the X-axis direction or the Y-axis direction can be met, so that the object to be measured is in a reasonable framing area. Of course, for some needs of dual-axis adjustment, a dual-axis adjustment platform shared by the X-axis and the Y-axis can also be used to achieve dual-axis adjustment. At the same time, the displacement platform 8 is equipped with a corresponding drive motor 9 to realize convenient X-axis and Y-axis drive. During implementation, a commercially available screw motor or linear motor can be directly selected as the drive motor 9 to reduce the difficulty of implementation.

[0036] In view of the actual implementation, the beam 2 used is an integrated arc-shaped beam 2, which has better rigidity. Specifically, the bottom of the beam 2 is provided with a contact extension edge, which can provide better auxiliary support to the bottom. After installation in place, stable load-bearing can be achieved. At the same time, a combining bracket 10 is provided on the top of the beam 2, and the probe assembly 3 is connected to the combining bracket 10 by screws to meet the overhead installation needs of the probe assembly 3. During implementation, a wire channel is provided in the beam 2, and a wire assembly is provided in the wire channel, one end of the wire assembly is connected to the probe assembly 3, and the other end of the wire assembly is connected to the probe wiring assembly 4. In this way, internal wiring can be realized, effective wiring planning can be achieved, and the wire will not be exposed, avoiding damage during use.

[0037] Further, the protective device includes a front cover 11 and a rear cover 12 connected by screws. During installation, the front and rear buckles are fastened to the probe assembly 3, and the two can be connected by screws or buckles. At the same time, the utility model is provided with a connection hole on the rear cover 12. In this way, relying on the existence of the connection hole, the rear cover 12 and the connection bracket 10 can be matched and made to give way by screws, without affecting the connection of the probe assembly 3.

[0038] At the same time, considering the need for centralized wiring of the base 1, the utility model is provided with a receiving channel in the base 1, and a control wire group is provided in the receiving channel. During assembly, one end of the control wire group is connected to the displacement device, and the other end of the control wire group is connected to the displacement wiring assembly 5. As a result, the defects of exposed wires and messy wiring are eliminated. At the same time, it is convenient to realize plug-in docking control between the displacement wiring assembly 5 and the external wire. During implementation, the probe wiring assembly 4 and the displacement wiring assembly 5 include a number of power supply interfaces and communication interfaces. In this way, the power supply docking and control docking needs required during the use of the current white light interferometer can be docked.

[0039] Furthermore, the probe assembly 3 is a switchable multi-group probe. In this way, it has a larger viewing range and different focus positions, which can effectively measure the roughness of microscopic morphology and meet the needs of obtaining contour dimension data such as step height, angle, flatness, etc. of the object to be measured. In addition, the probe assembly 3 is equipped with a standard connector for easy adaptation and installation.

[0040] The working principle of the utility model is as follows:

[0041] Connect the probe wiring assembly 4 and the displacement wiring assembly 5 to the corresponding control and energy supply equipment. During this period, pre-use debugging can be performed.

[0042] After that, the object to be measured is placed on the displacement device. Then, according to the framing requirements of the probe assembly 3, the position device starts to drive the object to be measured to move. At the same time, the probe assembly 3 can switch the corresponding probe to achieve different image acquisition.

[0043] It can be seen from the above text description and the accompanying drawings that the following advantages are achieved after adopting the utility model:

[0044] 1. The overhead beam structure is adopted to meet the load-bearing rigidity while not affecting the framing needs of the probe assembly and causing no obstruction.

[0045] 2. The crossbeam structure has good rigidity and anti-vibration performance; the new damping shock absorber has better anti-interference ability to ensure the accuracy of image acquisition.

[0046] 3. It is equipped with an independent displacement device. During use, the distance between the lens and the object to be measured can be adjusted through the software according to the height of the object to be measured.

[0047] 4. The use of independent probe wiring components and displacement wiring components can achieve unified planning of wiring, meet the requirements of built-in wiring, avoid wire exposure and damage, and adapt to the needs of conventional plug-in conduction.

[0048] 5. The overall structure is simple, and the currently commercially available white light interferometer can be modified to reduce the implementation cost.

[0049] In addition, the indicated orientations or positional relationships described in the present invention are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or structure referred to must have a specific orientation or be operated with a specific orientation structure. Therefore, they cannot be understood as a limitation on the present invention.

[0050] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be regarded as within the protection scope of the present invention.

Claims

1. A beam-type white light interferometer, comprising a base, characterized in that: A displacement device is provided on the base, a crossbeam is provided on the base at the rear end of the displacement device, a probe assembly is installed on the crossbeam, the probe assembly corresponds to the displacement device, a protective device is provided outside the probe assembly, a probe wiring assembly is provided on the crossbeam, and a displacement wiring assembly is provided on the base.

2. The beam-type white light interferometer according to claim 1, characterized in that: The base comprises a bearing plate, a plurality of shock absorbers are arranged below the bearing plate, a positioning groove is arranged above the bearing plate, and a crossbeam is arranged in the positioning groove.

3. The beam-type white light interferometer according to claim 2, characterized in that: The shock absorber is a spring pad or a silicone pad; the lower end of the crossbeam is connected to the bearing plate through screws.

4. The beam-type white light interferometer according to claim 1, characterized in that: The displacement device comprises a bearing base connected to the base, and a displacement platform is arranged on the bearing base.

5. The beam-type white light interferometer according to claim 4, characterized in that: The displacement platform is an X-axis adjustment platform, or a Y-axis adjustment platform, or a dual-axis adjustment platform shared by the X-axis and the Y-axis. The displacement platform is equipped with a corresponding driving motor.

6. The beam-type white light interferometer according to claim 1, characterized in that: The crossbeam is an integrated arc-shaped crossbeam, a contact extension edge is provided at the bottom of the crossbeam, a combining bracket is provided at the top of the crossbeam, the probe assembly is connected to the combining bracket by screws, a wire channel is provided in the crossbeam, a wire assembly is provided in the wire channel, one end of the wire assembly is connected to the probe assembly, and the other end of the wire assembly is connected to the probe wiring assembly.

7. The beam-type white light interferometer according to claim 1, characterized in that: The protective device comprises a front cover shell and a rear cover shell connected by screws, and a connecting hole is arranged on the rear cover shell.

8. The beam-type white light interferometer according to claim 1, characterized in that: The base is provided with an accommodating channel, and a control wire group is provided in the accommodating channel. One end of the control wire group is connected to the displacement device, and the other end of the control wire group is connected to the displacement wiring assembly.

9. The beam-type white light interferometer according to claim 1, characterized in that: The probe wiring assembly and the displacement wiring assembly include a plurality of power supply interfaces and communication interfaces.

10. The beam-type white light interferometer according to claim 1, characterized in that: The probe assembly is a switchable multi-group probe.

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