Electron beam emittance measuring device
By designing an adjustable electron beam emissivity measurement device, the angle of the measurement plate is adjusted by using slide rails, rotary rods and gear mechanisms, the problem of low detection efficiency caused by angle fixation in existing equipment is solved, and efficient electron beam emissivity is achieved Measurement and cost reduction.
Patent Information
- Application Number
- CN202420749384.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-12
- Publication Date
- 2024-12-20
- Estimated Expiration
- 2034-04-12
AI Technical Summary
When the existing electron beam emission equipment detects the emission degree of the electron beam, the angle of the plane drop plate is fixed, which is inconvenient to adjust, resulting in difficulty in changing the detection angle and low efficiency.
An electron beam emitter measurement device including a workbench, an electron beam transmitter, a pallet, and a measuring mechanism is designed. The angle adjustment of the measuring plate is achieved through slide rails, movable grooves, rotating rods and gear mechanisms, and the positioning wheels and The lever fixes and moves the angle of the measuring plate.
The efficiency of electron beam emissivity detection is improved, stable measurement of different devices is achieved, cost is reduced, and convenience and benefits are brought to detectors.
Smart Images
Figure CN222212959U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of electron beam emission, in particular to an electron beam emission degree measuring device. Background Art
[0002] Electron beam testing uses a focused electron beam as the detection source, which has the highest sensitivity, but the slowest detection speed and the highest price. When using electron beam testing, the incident electron beam excites secondary electrons, which are then collected and analyzed to capture defects that cannot be detected by optical inspection equipment.
[0003] During the use of existing electron beam emitting equipment, a measuring device is required to measure the electron beam emission degree. However, the existing method of detecting the electron beam emission degree is generally to project the electron beam onto a plane to detect the electron beam angle. However, the existing plane projection plate is generally fixed in angle, which is not convenient for changing the detection angle. Utility Model Content
[0004] To this end, the utility model provides an electron beam emissivity measuring device, through which the user starts the electron beam equipment to deliver the electron beam to the measuring plate, and the user controls the measuring mechanism to adjust the angle of the measuring plate, so as to solve the problem that the existing method of detecting the electron beam emissivity is generally to deliver the electron beam on a plane to detect the electron beam angle, but the existing plane delivery plate is generally fixed in angle, which is not convenient for changing the detection angle.
[0005] In order to achieve the above-mentioned object, the utility model provides the following technical solutions: an electron beam emittance measuring device, comprising a workbench, wherein the workbench is configured as a rectangular parallelepiped structure;
[0006] An electron beam launching platform, the electron beam launching platform is arranged on the top of a workbench, the top of the workbench is fixedly connected with a supporting plate, the supporting plate is fixedly connected to the bottom of the electron beam launching platform, and the supporting plate is used to lift and support the electron beam launching platform;
[0007] A measuring mechanism is arranged on the top of the workbench and is used to measure the angle of electron beam emission.
[0008] Preferably, the measuring mechanism comprises two horizontal plates, both of which are arranged on the top of the workbench, both of which are fixedly connected to the top of the two horizontal plates with columns, and a measuring plate is arranged between the two columns.
[0009] Preferably, two slide rails are fixedly provided on the top of the workbench, and sliders are embedded on the tops of the two slide rails. The sliders are slidably connected to the slide rails, and the two sliders are respectively arranged at the bottoms of the two horizontal plates.
[0010] Preferably, a movable groove is provided on the top of the two sliding blocks, and movable blocks are embedded in the two movable grooves. The two movable blocks are respectively fixedly connected to the bottom of the two horizontal plates, and a rotating rod is embedded between the two movable blocks. The front and rear ends of the rotating rod extend into the two movable grooves and are respectively fixedly connected to the two movable blocks.
[0011] Preferably, a connecting groove is opened on the front side of the workbench, a first gear is embedded in the connecting groove, a round rod is fixedly embedded in the first gear, the front end of the round rod extends to the outside of the front side of the workbench, an indicator button is provided on the front side of the workbench, and the indicator button is fixedly sleeved on the outside of the front end of the round rod.
[0012] Preferably, a second gear is provided on the top of the first gear, the second gear is fixedly sleeved on the outside of the rotating rod, the first gear is meshed and connected with the second gear, an angle plate is fixedly connected to the front side of the workbench, and the angle plate is arranged on the rear side of the indicator button.
[0013] Preferably, a positioning wheel is provided at the rear side of the workbench, and the positioning wheel fixing sleeve is arranged on the outer side of the rear end of the rotating rod.
[0014] Preferably, two limit rods are fixedly connected to the rear side of the workbench, and a positioning plate is provided on the rear side of the workbench. The positioning plate is sleeved on the outside of the two limit rods and is slidably connected to the two limit rods.
[0015] Preferably, a clamping rod is provided on the rear side of the workbench, and the clamping rod is fixedly connected to the front side of the positioning plate.
[0016] Preferably, a plurality of clamping grooves are formed on the outer side of the positioning wheel, and the plurality of clamping grooves are matched with the clamping rod.
[0017] The beneficial effects of the utility model are:
[0018] The user starts the electron beam device to project the electron beam to the measuring plate, and the user controls the measuring mechanism to adjust the angle of the measuring plate, so as to solve the problem that the existing method of detecting the electron beam emissivity is generally to project the electron beam on a plane to detect the electron beam angle, but the existing plane projecting plate is generally fixed in angle, which is not convenient for changing the detection angle. The utility model greatly improves the efficiency of electron beam emissivity detection, and at the same time, the device can stably measure the electron beam emissivity of different electron beam devices by setting an adjustable measuring plate. In addition, the device adopts the design of positioning wheels and clamping rods, so that the inclination angle of the measuring plate can be fixed and moved, which brings great convenience to the measurement personnel, reduces the processing cost, and brings benefits to the detector. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the implementation of the utility model or the technical solution in the prior art, the following is a brief introduction to the drawings required for the implementation or the prior art description. Obviously, the drawings described below are only exemplary, and for ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.
[0020] The structures, proportions, sizes, etc. illustrated in this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the restrictive conditions for the implementation of the utility model. Therefore, they have no substantive technical significance. Any modification of the structure, change in the proportion relationship or adjustment of the size should still fall within the scope of the technical content disclosed by the utility model without affecting the effect and purpose that can be achieved by the utility model.
[0021] Figure 1 The overall structural diagram provided by the utility model;
[0022] Figure 2 A schematic diagram of the three-dimensional structure of the first gear and the second gear provided by the utility model;
[0023] Figure 3 A schematic diagram of the three-dimensional structure of the positioning wheel provided by the utility model;
[0024] Figure 4 The utility model provides Figure 3 A in the enlarged view;
[0025] In the figure: 1 workbench, 2 electron beam launch platform, 3 support plate, 4 horizontal plate, 5 column, 6 measuring plate, 7 slide rail, 8 slider, 9 movable block, 10 rotating rod, 11 first gear, 12 round rod, 13 indicator button, 14 second gear, 15 angle plate, 16 positioning wheel, 17 limit rod, 18 clamping rod, 19 clamping groove, 20 positioning plate. DETAILED DESCRIPTION
[0026] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.
[0027] See attached Figure 1 -Attached Figure 4 The utility model provides an electron beam emittance measuring device, comprising a workbench 1, which is set as a rectangular parallelepiped structure;
[0028] The electron beam launching platform 2 is arranged on the top of the workbench 1, and a support plate 3 is fixedly connected to the top of the workbench 1, and the support plate 3 is fixedly connected to the bottom of the electron beam launching platform 2, and the support plate 3 is used to lift and support the electron beam launching platform 2;
[0029] A measuring mechanism, which is disposed on the top of the workbench 1 and is used to measure the angle of electron beam emission;
[0030] In this embodiment, the user starts the electron beam device to deliver the electron beam to the measuring plate 6, and the user controls the measuring mechanism to adjust the angle of the measuring plate 6;
[0031] Among them, in order to achieve the purpose of measuring the electron beam emittance, the device is implemented by the following technical solutions: the measuring mechanism includes two horizontal plates 4, the two horizontal plates 4 are both arranged on the top of the workbench 1, the tops of the two horizontal plates 4 are fixedly connected with columns 5, a measuring plate 6 is arranged between the two columns 5, two slide rails 7 are fixedly arranged on the top of the workbench 1, the tops of the two slide rails 7 are embedded with sliders 8, the sliders 8 are slidably connected to the slide rails 7, the two sliders 8 are respectively arranged at the bottom of the two horizontal plates 4, the tops of the two sliders 8 are opened with movable grooves, the two movable grooves are embedded with movable blocks 9, and the two movable blocks 9 are respectively fixedly connected to the bottoms of the two horizontal plates 4 A rotating rod 10 is embedded between the two movable blocks 9, and the front and rear ends of the rotating rod 10 extend to the inside of the two movable grooves and are fixedly connected to the two movable blocks 9 respectively. A connecting groove is opened on the front side of the workbench 1, and a first gear 11 is embedded in the connecting groove. A round rod 12 is fixedly embedded in the first gear 11, and the front end of the round rod 12 extends to the outside of the front side of the workbench 1. An indicating button 13 is provided on the front side of the workbench 1, and the indicating button 13 is fixedly sleeved on the outside of the front end of the round rod 12. A second gear 14 is provided on the top of the first gear 11, and the second gear 14 is fixedly sleeved on the outside of the rotating rod 10, and the first gear 11 is meshed and connected with the second gear 14;
[0032] The user turns the indicating button 13 to rotate, the indicating button 13 rotates to drive the round rod 12 to rotate, the round rod 12 rotates to drive the first gear 11 to rotate, the first gear 11 rotates to drive the second gear 14 to rotate, the second gear 14 rotates to drive the rotating rod 10 to rotate, the rotating rod 10 rotates to drive the two movable blocks 9 to rotate, the two movable blocks 9 rotate to drive the two horizontal plates 4 to rotate, the two horizontal plates 4 rotate to drive the two upright posts 5 to rotate, the two upright posts 5 rotate to drive the measuring plate 6 to rotate, so as to adjust the measuring angle;
[0033] Among them, in order to achieve the purpose of angle fixing, the device is implemented by the following technical solutions: an angle plate 15 is fixedly connected to the front side of the workbench 1, and the angle plate 15 is arranged on the rear side of the indicating button 13. A positioning wheel 16 is provided on the rear side of the workbench 1, and the positioning wheel 16 is fixedly sleeved on the outer side of the rear end of the rotating rod 10. Two limit rods 17 are fixedly connected to the rear side of the workbench 1. A positioning plate 20 is provided on the rear side of the workbench 1, and the positioning plate 20 is sleeved on the outer sides of the two limit rods 17 and is slidably connected to the two limit rods 17. A clamping rod 18 is provided on the rear side of the workbench 1, and the clamping rod 18 is fixedly connected to the front side of the positioning plate 20. A plurality of clamping grooves 19 are provided on the outer side of the positioning wheel 16, and the plurality of clamping grooves 19 are matched with the clamping rod 18.
[0034] When the user changes the angle of the measuring plate 6, the user pushes the positioning plate 20, and the positioning plate 20 moves forward to drive the clamping rod 18 to move forward. The clamping rod 18 moves forward so that the clamping rod 18 is embedded in the clamping groove 19 inside the corresponding positioning wheel 16, thereby fixing the angle of the measuring plate 6. Similarly, when the user needs to change the angle of the measuring plate 6, the user pulls the positioning plate 20 to disengage the clamping rod 18 from the clamping groove 19, thereby facilitating the user to turn the indicating button 13 to adjust the angle of the measuring plate 6.
[0035] The use process of the utility model is as follows: the user starts the electron beam device to deliver the electron beam to the measuring plate 6, and at the same time the user controls the measuring mechanism to adjust the angle of the measuring plate 6, the user turns the indicator button 13 to rotate, the indicator button 13 rotates to drive the round rod 12 to rotate, the round rod 12 rotates to drive the first gear 11 to rotate, the first gear 11 rotates to drive the second gear 14 to rotate, the second gear 14 rotates to drive the rotating rod 10 to rotate, the rotating rod 10 rotates to drive the two movable blocks 9 to rotate, the two movable blocks 9 rotate to drive the two horizontal plates 4 to rotate, the two horizontal plates 4 rotate to drive the two columns 5 to rotate, and the two The rotation of the columns 5 drives the measuring plate 6 to rotate, thereby adjusting the measuring angle. After the user changes the angle of the measuring plate 6, the user pushes the positioning plate 20, and the positioning plate 20 moves forward to drive the clamping rod 18 to move forward. The clamping rod 18 moves forward so that the clamping rod 18 is embedded in the clamping groove 19 inside the corresponding positioning wheel 16, thereby fixing the angle of the measuring plate 6. Similarly, when the user needs to change the angle of the measuring plate 6, the user pulls the positioning plate 20 to disengage the clamping rod 18 from the clamping groove 19, so that it is convenient for the user to turn the indicating button 13 to adjust the angle of the measuring plate 6.
[0036] The above is only a preferred embodiment of the utility model. Any person skilled in the art may modify the utility model by using the above technical solution or modify it into an equivalent technical solution. Therefore, any simple modification or equivalent replacement based on the technical solution of the utility model shall fall within the scope of protection claimed by the utility model.
Claims
1. An electron beam emittance measuring device, characterized in that: include A workbench (1), wherein the workbench (1) is configured as a rectangular parallelepiped structure; An electron beam launching platform (2), the electron beam launching platform (2) being arranged on the top of a workbench (1), the top of the workbench (1) being fixedly connected with a support plate (3), the support plate (3) being fixedly connected to the bottom of the electron beam launching platform (2), the support plate (3) being used to lift and support the electron beam launching platform (2); A measuring mechanism is arranged on the top of a workbench (1), and is used to measure the angle at which the electron beam is emitted.
2. The electron beam emittance measuring device according to claim 1, characterized in that: The measuring mechanism comprises two horizontal plates (4), the two horizontal plates (4) are both arranged on the top of the workbench (1), the tops of the two horizontal plates (4) are both fixedly connected with upright posts (5), and a measuring plate (6) is arranged between the two upright posts (5).
3. The electron beam emittance measuring device according to claim 1, characterized in that: Two slide rails (7) are fixedly provided on the top of the workbench (1), and sliders (8) are embedded on the tops of the two slide rails (7). The sliders (8) are slidably connected to the slide rails (7), and the two sliders (8) are respectively arranged at the bottoms of the two horizontal plates (4).
4. The electron beam emittance measuring device according to claim 3, characterized in that: The tops of the two sliding blocks (8) are each provided with a movable groove, and movable blocks (9) are each embedded in the two movable grooves. The two movable blocks (9) are respectively fixedly connected to the bottoms of the two transverse plates (4), and a rotating rod (10) is embedded between the two movable blocks (9). The front and rear ends of the rotating rod (10) both extend into the two movable grooves and are respectively fixedly connected to the two movable blocks (9).
5. The electron beam emittance measuring device according to claim 1, characterized in that: The workbench (1) is provided with a connecting groove on the front side, a first gear (11) is embedded in the connecting groove, a round rod (12) is fixedly embedded in the first gear (11), the front end of the round rod (12) extends to the outside of the front side of the workbench (1), and an indicating button (13) is fixedly sleeved on the outside of the front end of the round rod (12).
6. The electron beam emittance measuring device according to claim 5, characterized in that: A second gear (14) is provided on the top of the first gear (11), the second gear (14) is fixedly sleeved on the outside of the rotating rod (10), the first gear (11) is meshedly connected with the second gear (14), and an angle plate (15) is fixedly connected to the front side of the workbench (1), and the angle plate (15) is arranged on the rear side of the indicating button (13).
7. The electron beam emittance measuring device according to claim 1, characterized in that: A positioning wheel (16) is provided on the rear side of the workbench (1), and the positioning wheel (16) is fixedly sleeved on the outer side of the rear end of the rotating rod (10).
8. The electron beam emittance measuring device according to claim 1, characterized in that: Two limit rods (17) are fixedly connected to the rear side of the workbench (1), and a positioning plate (20) is provided on the rear side of the workbench (1). The positioning plate (20) is sleeved on the outside of the two limit rods (17) and is slidably connected to the two limit rods (17).
9. The electron beam emittance measuring device according to claim 1, characterized in that: A clamping rod (18) is provided on the rear side of the workbench (1), and the clamping rod (18) is fixedly connected to the front side of the positioning plate (20).
10. The electron beam emittance measuring device according to claim 7, characterized in that: A plurality of clamping grooves (19) are formed on the outer side of the positioning wheel (16), and the plurality of clamping grooves (19) are matched with the clamping rod (18).