Butt flange and machine table
By setting a special gas contact layer and welding bevel in the docking flange of the semiconductor manufacturing machine, the welding position does not contact the special gas surface, which solves the pore problem after welding and improves the service life and cleanliness of the product.
Patent Information
- Application Number
- CN202420332631.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-22
- Publication Date
- 2024-12-24
- Estimated Expiration
- 2034-02-22
AI Technical Summary
In semiconductor manufacturing machines, it is difficult to avoid tiny pores on the welding surface during welding, resulting in special gas residue, corroding the product and shortening the service life.
A butt flange is designed, by setting a special gas contact layer and a welding bevel on the flange cover plate, and setting the welding bevel on the flange bottom plate, ensuring that the welding position does not contact the special gas surface, thereby avoiding the formation of air holes.
It effectively avoids tiny air hole defects on the special gas contact surface after welding, reduces repair costs, and improves the cleanliness of the machine and the service life of parts.
Smart Images
Figure CN222221526U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of flanges, in particular to a butt flange and a machine. Background Art
[0002] At present, semiconductor manufacturing machines have very high requirements for parts that come into contact with special gases, and the surface must be free of pores and depressions. In addition to contact with special gases, some parts also need to have a cooling effect. Welding is required in the production of cooling plates, and welding will inevitably cause tiny pores on the welding surface. In parts that come into contact with special gases, the contact surface needs to have very high surface quality requirements. Some gases in special gases are corrosive. If there are defects, micropores, depressions, etc. on the contact surface, the special gas will remain on the surface of the product, thereby corroding the product. On the one hand, it causes the peeling of metal ions and pollutes the machine, and on the other hand, it seriously affects the service life of the product.
[0003] Therefore, it is necessary to design a butt flange to ensure that the welding position does not contact the special gas surface, thereby ensuring that the contact surface is free of defects. Utility Model Content
[0004] The utility model aims to provide a butt joint flange and a machine platform to ensure that the welding position does not contact the special gas surface, thereby ensuring that the contact surface has no defects.
[0005] To achieve this purpose, the utility model adopts the following technical solutions:
[0006] Counter flange, including:
[0007] A flange cover plate, wherein one side of the flange cover plate is provided with a connector, and the other side of the flange cover plate is provided with a special gas contact layer, wherein the special gas contact layer is used for contacting with the special gas;
[0008] A flange bottom plate, wherein the flange bottom plate is provided with a connection hole, the connection hole is used to connect with the connection piece, and the flange bottom plate is also provided with a first welding groove;
[0009] The flange cover plate is welded to the flange bottom plate through the first welding groove.
[0010] The butt flange connects the flange base plate and the flange cover plate through a connecting piece and a connecting hole, and cooperates with the first welding groove to fix the flange base plate and the flange cover plate. At the same time, the first welding groove is set on the flange base plate and the special gas contact surface is set on the flange cover plate, so that the welding position will not contact the special gas contact surface, thereby ensuring that the special gas contact surface is free of defects.
[0011] As a preferred solution of the above-mentioned butt-jointed flange, the first welding groove is arranged on the side surface of the flange bottom plate.
[0012] The first welding groove is arranged on the side of the flange bottom plate to facilitate welding by the workers.
[0013] As a preferred solution of the above-mentioned butt flange, the bevel angle of the first welding groove is 60°.
[0014] The angle of the first welding groove is set to 60° to ensure the welding effect of the welding gun.
[0015] As a preferred solution of the above-mentioned docking flange, the flange bottom plate also includes a second welding groove, and the second welding groove is arranged at the bottom of the connecting hole.
[0016] The second welding groove is arranged at the bottom of the connecting hole to ensure the connection strength between the flange cover plate and the flange bottom plate.
[0017] As a preferred solution of the above-mentioned butt flange, the bevel angle of the second welding groove is 60°.
[0018] The angle of the second welding groove is also set to 60°, which further ensures the welding effect of the welding gun.
[0019] As a preferred solution of the above-mentioned docking flange, the docking flange further includes at least two groups of mounting units, and each group of the mounting units is arranged at intervals along the axis of the flange bottom plate.
[0020] Each group of mounting units is spaced apart on the axis of the flange base plate, which can realize the installation of the flange base plate and the flange cover plate while also improving the overall strength of the docking flange.
[0021] As a preferred solution of the above-mentioned docking flange, the mounting unit includes:
[0022] A mounting hole is provided on the flange bottom plate;
[0023] The mounting piece is arranged on the flange cover plate and is used for plugging and matching with the mounting hole.
[0024] The structure of the above-mentioned mounting parts and mounting holes makes installation and alignment more convenient. When installation is required, the mounting holes and mounting parts arranged on both sides of the axis are aligned, and then plugged in and matched, thereby ensuring the installation effect.
[0025] As a preferred solution of the above-mentioned docking flange, a third welding groove is provided on the mounting hole, and the bevel angle of the third welding groove is 60°
[0026] The angle of the third welding groove is also set to 60°, which further ensures the welding effect of the welding gun.
[0027] The machine platform comprises the above-mentioned docking flange.
[0028] The machine sets the first welding groove and the special gas contact surface separately, avoiding the inevitable tiny pores on the special gas contact surface caused by welding, thereby avoiding the need to repair the special gas contact surface due to pore defects after processing, thereby reducing the manpower, material and time costs incurred by repairing the pores. In addition, the above structure can improve the cleanliness of the machine and the service life of components.
[0029] Beneficial effects of the utility model:
[0030] The butt flange proposed in the utility model connects the flange base plate and the flange cover plate through a connecting piece and a connecting hole, and cooperates with the first welding groove to realize the fixation of the flange base plate and the flange cover plate. At the same time, the first welding groove is arranged on the flange base plate and the special gas contact surface is arranged on the flange cover plate, so that the welding position will not contact the special gas contact surface, thereby ensuring that the special gas contact surface is free of defects.
[0031] The machine proposed in the utility model separately sets the first welding groove and the special gas contact surface, thereby avoiding the inevitable tiny pores on the special gas contact surface caused by welding, thereby avoiding the need to repair the special gas contact surface due to pore defects after processing, thereby reducing the manpower, material and time costs generated by repairing the pores. In addition, the above structure can improve the cleanliness of the machine and the service life of components. BRIEF DESCRIPTION OF THE DRAWINGS
[0032] Figure 1 It is a structural schematic diagram of the butt flange provided by the utility model;
[0033] Figure 2 It is a structural schematic diagram of the flange bottom plate provided by the utility model;
[0034] Figure 3 It is a cross-sectional view of the butt flange provided by the utility model.
[0035] In the figure:
[0036] 1. Flange cover; 11. Connecting parts;
[0037] 2. Flange bottom plate; 21. Connection hole; 22. First welding groove; 23. Second welding groove;
[0038] 31. Mounting hole; 311. Third welding groove; 32. Mounting part. DETAILED DESCRIPTION
[0039] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.
[0040] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0041] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0042] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.
[0043] This embodiment provides a docking flange, such as Figure 1 and Figure 2As shown, the butt flange includes a flange cover plate 1 and a flange bottom plate 2, wherein one side of the flange cover plate 1 is provided with a connector 11, and the other side is provided with a special gas contact layer, and the special gas contact layer is used to contact with the special gas; the flange bottom plate 2 is provided with a connecting hole 21, and the connecting hole 21 is used to connect with the connector 11, and the flange bottom plate 2 is also provided with a first welding groove 22; the flange cover plate 1 is welded to the flange bottom plate 2 through the first welding groove 22. The butt flange connects the flange bottom plate 2 and the flange cover plate 1 through the connector 11 and the connecting hole 21, and the first welding groove 22 is used to fix the flange bottom plate 2 and the flange cover plate 1. At the same time, the first welding groove 22 is set on the flange bottom plate 2, and the special gas contact surface is set on the flange cover plate 1, so that the welding position will not contact the special gas contact surface, thereby ensuring that the special gas contact surface is free of defects.
[0044] Furthermore, if Figure 3 As shown, the first welding groove 22 is arranged on the side of the flange bottom plate 2. The first welding groove 22 is arranged on the side of the flange bottom plate 2 to facilitate the workers to perform welding.
[0045] Specifically, Figure 2 As shown, the bevel angle of the first welding groove 22 is 60°. Setting the angle of the first welding groove 22 to 60° ensures the welding effect of the welding gun.
[0046] Furthermore, the flange bottom plate 2 further includes a second welding groove 23, which is arranged at the bottom of the connection hole 21. By arranging the second welding groove 23 at the bottom of the connection hole 21, the connection strength between the flange cover plate 1 and the flange bottom plate 2 is ensured.
[0047] Furthermore, the bevel angle of the second welding groove 23 is 60°. The angle of the second welding groove 23 is also set to 60°, which further ensures the welding effect of the welding gun.
[0048] Furthermore, if Figure 1 As shown, the butt flange further comprises at least two groups of mounting units, each group of mounting units being arranged at intervals along the axis of the flange bottom plate 2. Each group of mounting units being arranged at intervals on the axis of the flange bottom plate 2 can improve the overall strength of the butt flange while realizing the installation of the flange cover plate 1 and the flange bottom plate 2.
[0049] Furthermore, if Figure 1 and Figure 2As shown, the mounting unit includes a mounting hole 31 and a mounting member 32, wherein the mounting hole 31 is provided on the flange bottom plate 2; the mounting member 32 is provided on the flange cover plate 1, and is used for plugging and matching with the mounting hole 31. The structure of the mounting member 32 and the mounting hole 31 makes installation and alignment more convenient. When installation is required, the mounting holes 31 and the mounting members 32 provided on both sides of the axis are aligned, and then plugged and matched, thereby ensuring the installation effect.
[0050] Furthermore, if Figure 3 As shown, a third welding groove 311 is provided on the mounting hole 31 , and the bevel angle of the third welding groove is 60°. The angle of the third welding groove 311 is also set to 60°, which further ensures the welding effect of the welding gun.
[0051] Specifically, the first welding groove 22, the second welding groove 23 and the third welding groove 311 are provided in plurality, thereby increasing the welding strength.
[0052] Specifically, the above-mentioned mounting hole 31 and connecting hole 21 can be configured as a cone protection hole, a compound hole and an arc hole, wherein the cone protection is generally processed by a cone protection center drill, and the cone protection hole is only used on the rough-machined workpiece, and its diameter size is mainly selected according to the diameter and quality of the mounting parts matched with it; the compound hole is usually processed by a compound center drill, and the processed compound hole is not easy to be damaged and destroyed because it is equipped with a protective cone; the main feature of the arc center drill used in the processing of the arc hole is high strength, which can avoid the stress concentration problem existing in the cone protection hole and the compound hole, so the processing quality of the arc hole is the highest. Therefore, the appropriate type can be selected according to actual needs, and no specific limitation is made here.
[0053] Specifically, the above-mentioned docking flange also has a vent hole. In this embodiment, the vent hole is opened at the center of the docking flange and penetrates the docking flange to achieve the ventilation function. In other embodiments, the vent hole can also be opened at other positions or set to multiple, which is not specifically limited here.
[0054] This embodiment also provides a machine, including the above-mentioned butt flange. The machine sets the first welding groove 22 and the special gas contact surface separately, avoiding the inevitable tiny pores on the special gas contact surface caused by welding, thereby avoiding the special gas contact surface from being repaired due to pore defects after processing, thereby reducing the manpower, material resources and time costs caused by repairing pores. In addition, the above structure can improve the cleanliness of the machine and the service life of parts.
[0055] Specifically, when welding, argon arc welding, laser welding and submerged arc welding can be selected. Among them, argon arc welding technology is based on the principle of ordinary arc welding. It uses argon gas to protect metal welding materials. Through high current, the welding materials are melted into liquid on the base material to form a molten pool, so that the welded metal and the welding materials can achieve metallurgical bonding. Since argon gas is continuously supplied during high-temperature molten welding, the welding materials cannot come into contact with oxygen in the air, thereby preventing the oxidation of the welding materials. Therefore, stainless steel and iron hardware metals can be welded; laser welding is a kind of welding technology that uses a focused laser beam as The method of welding by using the heat generated by energy bombarding the weldment. Due to the optical properties of laser such as refraction and focusing, laser welding is very suitable for welding micro parts and parts with poor accessibility. In addition, laser welding has the characteristics of low heat input, small welding deformation, and no influence of electromagnetic fields. Submerged arc welding is a method of welding by burning the arc under the flux layer. Its inherent advantages of stable welding quality, high welding productivity, no arc light and little smoke make it the main welding method in the production of important steel structures such as pressure vessels, pipe section manufacturing, box beams and columns. Therefore, the appropriate welding method can be selected according to actual needs, and no specific limitation is made here.
[0056] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.
Claims
1. Butt flange, characterized in that: include: A flange cover plate (1), wherein one side of the flange cover plate (1) is provided with a connecting piece (11), and the other side is provided with a special gas contact layer, wherein the special gas contact layer is used to contact with the special gas; A flange bottom plate (2), wherein the flange bottom plate (2) is provided with a connection hole (21), wherein the connection hole (21) is used to be connected to the connection piece (11), and the flange bottom plate (2) is also provided with a first welding groove (22); The flange cover plate (1) is welded to the flange base plate (2) via the first welding groove (22).
2. The butt flange according to claim 1, characterized in that: The first welding groove (22) is arranged on the side surface of the flange bottom plate (2).
3. The butt flange according to claim 1, characterized in that: The bevel angle of the first welding groove (22) is 60°.
4. The butt flange according to claim 1, characterized in that: The flange bottom plate (2) further comprises a second welding groove (23), wherein the second welding groove (23) is arranged at the bottom of the connecting hole (21).
5. The butt flange according to claim 4, characterized in that: The bevel angle of the second welding groove (23) is 60°.
6. The butt joint flange according to any one of claims 1 to 5, characterized in that: The butt flange further comprises at least two groups of mounting units, and each group of mounting units is arranged at intervals along the axis of the flange bottom plate (2).
7. The butt flange according to claim 6, characterized in that: The installation unit comprises: A mounting hole (31) is provided on the flange bottom plate (2); The mounting member (32) is arranged on the flange cover plate (1) and is used for plugging and matching with the mounting hole (31).
8. The butt flange according to claim 7, characterized in that: The mounting hole (31) is provided with a third welding groove (311), and the bevel angle of the third welding groove is 60°.
9. A machine, characterized in that: It comprises a butt flange as described in any one of claims 1 to 8.