Rotary clamp suitable for annular workpiece and multi-wire cutting machine

By designing a rotating fixture combined with rotation and vertical feeding, the problem of excessive workbench stroke in the cutting of annular workpiece is solved, and the linear movement of the wire mesh along the curved surface of the annular is achieved, which improves the cutting efficiency and quality.

CN222223120UActive Publication Date: 2024-12-24TANGSHAN JINGYU TECH CO LTD
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Patent Information

Application Number
CN202420619312.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-28
Publication Date
2024-12-24
Estimated Expiration
2034-03-28

AI Technical Summary

Technical Problem

In CNC multi-wire cutting machines, during the cutting process of ring-type semiconductor workpieces, the traditional vertical feeding method causes too large workbench stroke, making it difficult to accurately control the cutting rate, reducing efficiency and cutting quality.

Method used

Design a rotating fixture, combining rotational action and vertical feed action, drive the workpiece fixing mechanism to rotate through the rotating shaft assembly and drive mechanism, ensure that the wire mesh moves along the tangent direction of the curved surface of the ring, reduce the workbench stroke and maintain the cutting area Linear change.

Benefits of technology

The cutting efficiency and workpiece quality are improved, the wire mesh is linearly moved along the curved surface of the ring, and the cutting accuracy and efficiency are enhanced.

✦ Generated by Eureka AI based on patent content.

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    Figure CN222223120U_ABST
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Abstract

The utility model discloses a rotary clamp suitable for a circular-ring-shaped workpiece and a multi-wire cutting machine. The rotary clamp is provided with a workpiece fixing mechanism, a rotary shaft assembly, a driving mechanism and a supporting bottom frame. The workpiece fixing mechanism comprises a tight supporting block, a tight supporting block mounting seat and a pressing plate; the number of the supporting and tightening block mounting seats is not less than three, the supporting and tightening block mounting seats are fixedly mounted on the rotating shaft assembly and are uniformly arranged along the circumferential direction of the rotating shaft assembly, and the supporting and tightening blocks are fixed on the supporting and tightening block mounting seats through the pressing plates; the rotating shaft assembly is connected with the driving mechanism, and the driving mechanism drives the rotating shaft assembly and the workpiece fixing mechanism to rotate; the supporting bottom frame is installed on a workbench of the multi-wire cutting machine, and the rotating shaft assembly and the driving mechanism are arranged on the supporting bottom frame. According to the utility model, the stroke of the workbench in the cutting process of the multi-wire cutting machine is reduced, so that the metal wire mesh is in a linear change state relative to a workpiece cutting area, and the purposes of improving the working efficiency and the workpiece cutting quality are achieved.
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Description

Technical Field

[0001] The utility model relates to the technical field of multi-wire cutting, in particular to a rotary clamp suitable for cutting of annular workpieces and a multi-wire cutting machine equipped with the rotary clamp. Background Art

[0002] At present, CNC multi-wire cutting technology has gradually replaced traditional inner circle cutting and become the main method of silicon wafer cutting. During the operation of the CNC multi-wire cutting machine, the workpiece is fed through the linear motion of the worktable in the vertical direction, and the metal wire mesh wrapped on the groove wheel reciprocates horizontally to bring the abrasive into the semiconductor processing area for grinding. It can cut semiconductors and other hard and brittle materials into hundreds of thin slices at a time. However, for circular semiconductor workpieces, the above-mentioned cutting method of vertical feed of the workpiece requires the worktable to have a stroke greater than the diameter of the workpiece, and the cutting area of ​​the workpiece by the metal wire mesh changes nonlinearly during the cutting process, which makes it difficult to accurately control the cutting rate, which not only reduces the work efficiency, but also makes it difficult to ensure the cutting quality of the workpiece. Utility Model Content

[0003] The utility model provides a rotary clamp and a multi-wire cutting machine suitable for annular workpieces, and aims to realize the combination of the rotary action and the vertical feed action of the annular workpiece through the optimized design of the clamp structure, so as to reduce the worktable stroke during the cutting process, make the metal wire mesh change the cutting area of ​​the workpiece linearly, and achieve the purpose of improving work efficiency and workpiece cutting quality.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A rotating fixture suitable for annular workpieces is provided with a workpiece fixing mechanism, a rotating shaft assembly, a driving mechanism and a supporting frame; the workpiece fixing mechanism includes a clamping block, a clamping block mounting seat and a pressure plate; the clamping block mounting seats are provided in no less than three groups, fixedly mounted on the rotating shaft assembly and evenly arranged along the circumference of the rotating shaft assembly, and the clamping block is fixed to the clamping block mounting seat through a pressure plate; the rotating shaft assembly is connected to the driving mechanism, and the rotating shaft assembly and the workpiece fixing mechanism are driven to rotate through the driving mechanism; the supporting frame is installed on the workbench of a multi-wire cutting machine, and the rotating shaft assembly and the driving mechanism are arranged on the supporting frame.

[0006] The above-mentioned rotating clamp suitable for annular workpieces, the clamping block mounting seat is an L-shaped structure, and its horizontal base is fixed to the rotating shaft assembly by screws; the pressure plate is installed on the clamping block mounting seat by screws, and is located on the side opposite to the vertical wall of the clamping block mounting seat, and a slot for fixing the clamping block is formed between the pressure plate and the vertical wall of the clamping block mounting seat.

[0007] The above-mentioned rotating fixture suitable for annular workpieces, the rotating shaft assembly includes a rotating shaft, a sleeve, a sleeve clamping seat and a sleeve clamping seat clamping assembly; the rotating shaft is connected to the output end of the driving mechanism, and the sleeve is sleeved on the outside of the rotating shaft; the inner walls of both ends of the sleeve are conical surface structures, which cooperate with the outer conical surface of the sleeve clamping seat; the sleeve clamping seat is fixedly connected to the rotating shaft through the sleeve clamping seat clamping assembly.

[0008] The above-mentioned rotating fixture suitable for annular workpieces, the driving mechanism includes a motor and a reducer; the motor is fixed on the supporting base, the motor output shaft is connected to the reducer, and the rotating shaft assembly is driven to operate through the reducer.

[0009] A multi-wire cutting machine is provided with the above-mentioned rotating fixture suitable for annular workpieces on its workbench, and a protective cover is arranged outside the driving mechanism and supporting base frame of the rotating fixture.

[0010] The utility model provides a rotating fixture and a multi-wire cutting machine suitable for annular workpieces. The rotating fixture is installed on a workbench of the multi-wire cutting machine. At least three groups of clamping block mounting seats are arranged around a rotating shaft assembly. The inner wall of the annular workpiece can be pressed and fixed by the workpiece clamping blocks in the rotating fixture. The workpiece rotates integrally with the rotating shaft assembly under the drive of a driving mechanism and moves vertically with the workbench of the multi-wire cutting machine at the same time, so that the workpiece enters a cutting working area in a rotating state, ensuring that the metal wire mesh always reciprocates along the tangent direction of the annular curved surface. Not only does it reduce the stroke of the workbench during the cutting process, but it can also make the cutting area of ​​the workpiece by the metal wire mesh change linearly, thereby achieving the purpose of improving work efficiency and workpiece cutting quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram of the structure of the rotary fixture suitable for annular workpieces according to the utility model;

[0012] Figure 2 yes Figure 1 K-direction view;

[0013] Figure 3 It is a schematic diagram of the AA cross-section structure of Tu 2;

[0014] Figure 4 yes Figure 2 Side view of

[0015] Figure 5 yes Figure 4 The enlarged view of the structure at position Ⅰ in the middle;

[0016] Figure 6 It is a schematic diagram of a multi-wire cutting machine equipped with a rotating fixture suitable for annular workpieces;

[0017] Figure 7It is a schematic diagram of the assembly of a circular workpiece, a rotary fixture, and a multi-wire cutting machine workbench.

[0018] Explanation of the symbols in the figure:

[0019] 1 is a workpiece fixing mechanism, 1-1 is a tightening block, 1-2 is a tightening block mounting seat, and 1-3 is a pressing plate;

[0020] 2 is a rotating shaft assembly, 2-1 is a rotating shaft, 2-2 is a sleeve clamping seat clamping assembly, 2-3 is a sleeve clamping seat, and 2-4 is a sleeve;

[0021] 3 is a driving mechanism;

[0022] 4 is a supporting frame;

[0023] 5 is a circular workpiece;

[0024] 6 is a multi-wire cutting machine, and 6-1 is a workbench;

[0025] 7 is a protective cover. DETAILED DESCRIPTION

[0026] The utility model is further described below in conjunction with the accompanying drawings and specific embodiments.

[0027] See Figure 1. Figure 2 The utility model provides a rotary clamp suitable for annular workpieces, the rotary clamp is provided with a workpiece fixing mechanism 1, a rotating shaft assembly 2, a driving mechanism 3 and a supporting frame 4; the workpiece fixing mechanism 1 is fixedly installed on the rotating shaft assembly 2, and is evenly arranged along the circumference of the rotating shaft assembly 2; the rotating shaft assembly 2 is connected to the driving mechanism 3, and the rotating shaft assembly 2 and the workpiece fixing mechanism 1 are driven to rotate by the driving mechanism 3; the driving mechanism 3 includes a motor and a reducer, the motor output shaft is connected to the reducer input end, and the reducer output end is connected to the rotating shaft assembly; the supporting frame 4 is installed on the workbench 6-1 of the multi-wire cutting machine 6, and the rotating shaft assembly 2 and the driving mechanism 3 are arranged on the supporting frame 4.

[0028] See Figure 4. Figure 5 The rotary clamp suitable for annular workpieces described in the utility model comprises a workpiece fixing mechanism 1 including a tightening block 1-1, a tightening block mounting seat 1-2 and a pressure plate 1-3; the number of the tightening block mounting seats 1-2 is not less than three groups, which are evenly arranged along the circumference of the rotating shaft assembly 2, and the tightening block mounting seat 1-2 is an L-shaped structure, and its horizontal base is fixed to the rotating shaft assembly 2 by screws; the pressure plate 1-3 is installed on the tightening block mounting seat 1-2 by screws, and is located on the side opposite to the vertical wall of the tightening block mounting seat, and a slot for fixing the tightening block 1-1 is formed between the pressure plate 1-3 and the vertical wall of the tightening block mounting seat 1-2.

[0029] See Figure 2. Figure 3The rotary fixture suitable for annular workpieces described in the utility model comprises a rotating shaft assembly 2 including a rotating shaft 2-1, a sleeve 2-4, a sleeve clamping seat 2-3 and a sleeve clamping seat clamping assembly 2-2; the rotating shaft 2-1 is connected to the output end of the driving mechanism 3, and a sleeve 2-4 is sleeved on the outside of the rotating shaft 2-1; the inner walls of both ends of the sleeve 2-4 are conical surface structures, which cooperate with the outer conical surface of the sleeve clamping seat 2-3; the sleeve clamping seat 2-3 is fixedly connected to the rotating shaft 2-1 through the sleeve clamping seat clamping assembly 2-2.

[0030] See also Figure 6 , Figure 7 The utility model also provides a multi-wire cutting machine, wherein the rotating fixture suitable for annular workpieces is mounted on the workbench 6-1 of the multi-wire cutting machine 6, and a protective cover 7 is arranged outside the driving mechanism 3 and the supporting frame 4 of the rotating fixture.

[0031] See also Figures 1 to 7 The utility model provides a rotary fixture and a multi-wire cutting machine suitable for annular workpieces. The rotary fixtures are arranged in at least three groups around a rotary shaft assembly 2. In a preferred embodiment, the number of rotary fixtures is four groups, and the central axes of two adjacent groups are at an angle of 90 degrees. When the multi-wire cutting machine 6 equipped with the rotary fixture is working, the inner wall of the annular workpiece 5 is pressed and fixed by four groups of workpiece clamping blocks 1-1 in the workpiece fixing mechanism 1 of the rotary fixture. The workpiece clamping blocks 1-1 are consumables in the multi-wire cutting process, and their specifications can be selected according to the inner diameter size of the annular workpiece 5. The workpiece clamping blocks 1-1 can also be adjusted by adjusting the workpiece clamping blocks. The depth of the slot 1-1 embedded in the pressure plate 1-3 and the vertical wall of the support block mounting seat 1-2 is adjusted to ensure the coaxiality of the annular workpiece 5 and the rotating shaft assembly 2; the annular workpiece 5 rotates integrally with the rotating shaft assembly 2 driven by the driving mechanism 3, and at the same time moves vertically with the worktable 6-1 of the multi-wire cutting machine 6, so that the annular workpiece 5 enters the metal wire mesh cutting working area of ​​the multi-wire cutting machine 6 in a rotating state. Through the uniform rotation of the annular workpiece 5, it is ensured that the metal wire mesh always reciprocates along the tangent direction of the annular curved surface of the annular workpiece 5, and the cutting area of ​​the workpiece changes linearly.

Claims

1. A rotary fixture suitable for annular workpieces, characterized in that: It is provided with a workpiece fixing mechanism (1), a rotating shaft assembly (2), a driving mechanism (3) and a supporting chassis (4); the workpiece fixing mechanism (1) comprises a tightening block (1-1), a tightening block mounting seat (1-2) and a pressing plate (1-3); the tightening block mounting seats (1-2) are at least three in number and are fixedly mounted on the rotating shaft assembly (2) and evenly arranged along the circumference of the rotating shaft assembly (2); the tightening block (1-1) is fixed on the tightening block mounting seat (1-2) via a pressing plate (1-3); the rotating shaft assembly (2) is connected to the driving mechanism (3), and the rotating shaft assembly (2) and the workpiece fixing mechanism (1) are driven to rotate via the driving mechanism (3); the supporting chassis (4) is mounted on a workbench (6-1) of a multi-wire cutting machine (6), and the rotating shaft assembly (2) and the driving mechanism (3) are arranged on the supporting chassis (4).

2. The rotary fixture for annular workpieces according to claim 1, characterized in that: The tightening block mounting seat (1-2) is an L-shaped structure, and its horizontal base is fixed to the rotating shaft assembly (2) by means of screws; the pressing plate (1-3) is mounted on the tightening block mounting seat (1-2) by means of screws and is located on a side opposite to the vertical wall of the tightening block mounting seat, and a slot for fixing the tightening block (1-1) is formed between the pressing plate (1-3) and the vertical wall of the tightening block mounting seat (1-2).

3. The rotary fixture for annular workpieces according to claim 1 or 2, characterized in that: The rotating shaft assembly (2) comprises a rotating shaft (2-1), a shaft sleeve (2-4), a shaft sleeve clamping seat (2-3) and a shaft sleeve clamping seat pressing assembly (2-2); the rotating shaft (2-1) is connected to the output end of the driving mechanism (3), and the shaft sleeve (2-4) is sleeved on the outside of the rotating shaft (2-1); the inner walls of both ends of the shaft sleeve (2-4) are conical surface structures, which cooperate with the outer conical surface of the shaft sleeve clamping seat (2-3); the shaft sleeve clamping seat (2-3) is fixedly connected to the rotating shaft (2-1) via the shaft sleeve clamping seat pressing assembly (2-2).

4. The rotary fixture for annular workpieces according to claim 3, characterized in that: The driving mechanism (3) comprises a motor and a reducer; the motor is fixed on the supporting base frame (4), the motor output shaft is connected to the reducer, and the rotating shaft assembly (2) is driven to operate via the reducer.

5. A multi-wire cutting machine, characterized in that: A rotating fixture suitable for annular workpieces as described in any one of claims 1 to 4 is mounted on the workbench (6-1) of the multi-wire cutting machine (6), and a protective cover (7) is provided outside the driving mechanism (3) and the supporting frame (4) of the rotating fixture.