Novel substrate conveying system

Abstract

The utility model relates to a novel substrate conveying system which comprises a rack, a feeding system is arranged on one side of the rack in the negative direction of an X axis, the feeding system is installed on the rack through a bottom padding frame, and a discharging system is arranged on one side of the rack in the positive direction of the X axis. The feeding system comprises a servo motor, a belt transmission set and a feeding transmission roller, the discharging system comprises a discharging assembly and two jacking supporting assemblies, and the two jacking supporting assemblies are located on the portions, on the two sides of the Y-axis direction, below the discharging frame. According to the utility model, through the cooperation of the feeding system and the discharging system, the process of feeding the substrates from the X-axis direction and discharging the substrates from the Y-axis direction can be realized, and the transmission mode is relatively flexible; according to the utility model, the fed substrates are guided through the feeding guide assembly, and the discharged substrates are limited through the discharging limiting block.

Description

Technical Field

[0001] The utility model relates to the technical field related to PVD equipment, and in particular to a novel substrate transmission system. Background Art

[0002] PVD physical vapor deposition technology refers to the technology of using physical methods under vacuum conditions to vaporize the surface of the material source (solid or liquid) into gaseous atoms or molecules, or partially ionize it into ions, and deposit a thin film with certain special functions on the surface of the substrate through a low-pressure gas (or plasma) process. Physical vapor deposition is one of the main surface treatment technologies.

[0003] After massive searches, it was found that the prior art publication number is CN209778989U, which discloses a device for stably transmitting a substrate carrier during magnetron sputtering, including: a cavity, a transmission mechanism arranged at the bottom of the cavity, a carrier rollingly arranged on the transmission mechanism, a permanent magnet arranged on one side of the carrier, and a target material arranged on one side of the carrier and on a different side from the permanent magnet; the carrier includes: a carrier plate, a side slide rail arranged on the carrier plate, and a plurality of first transmission wheels fixed to the top of the cavity and cooperating with the side slide rail; by adopting this device, the carrier plate is prevented from shaking left and right during movement, and stable transmission of the carrier is achieved, thereby avoiding obvious uneven changes in the thickness of the film deposited on the substrate, and not affecting the normal production efficiency of the substrate, while improving the production quality of the substrate and enhancing the production efficiency.

[0004] In summary, in the existing vacuum sputtering coating production line, the substrate is generally transported in and out directly, the transmission method is single, and the stability of the substrate during the transmission process is poor.

[0005] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a new substrate transmission system to make it more valuable for industrial use. Utility Model Content

[0006] In order to solve the above technical problems, the purpose of the utility model is to provide a new substrate transmission system.

[0007] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0008] A novel substrate transmission system comprises a frame, a feeding system is arranged on one side of the frame along the negative direction of the X-axis, the feeding system is installed on the frame through a bottom pad, and a discharging system is arranged on one side of the frame along the positive direction of the X-axis;

[0009] The feeding system includes a servo motor, a belt drive group and a feeding drive roller. The servo motor is installed on the elevated frame near the middle along the Y-axis direction. Belt drive groups are installed on the outer sides of both sides of the elevated frame along the Y-axis direction. The servo motor can be connected to the belt drive groups on both sides along the Y-axis direction through the servo drive shaft. The belt drive group is connected to the feeding drive roller located on the inner side of the elevated frame.

[0010] The discharging system includes a discharging assembly and a lifting support assembly. There are two lifting support assemblies located on the racks on both sides of the Y-axis direction below the discharging frame.

[0011] The discharging assembly includes a discharging frame, a feeding cavity is opened on one side of the discharging frame along the negative direction of the X-axis, and discharging cavities are opened on both sides of the discharging frame along the Y-axis direction. Discharging transmission wheel groups are installed on the outer sides of both sides of the discharging frame along the X-axis direction. The discharging transmission wheel groups are connected to the discharging transmission rollers located on the inner side of the discharging frame. The discharging transmission wheel groups and the discharging transmission rollers are both located below the feeding cavity.

[0012] The jacking support assembly includes a third jacking cylinder, a jacking plate, a jacking rod and a jacking support frame from bottom to top. The third jacking cylinder is installed on the frame. The driving end at the top of the third jacking cylinder is connected to the jacking plate above. A plurality of jacking rods are arranged on the jacking plate along the X-axis direction. The jacking rods can pass through the jacking rod holes on the discharging frame and enter the discharging frame and be connected to the jacking support frame. A plurality of jacking auxiliary wheels are evenly installed on the jacking support frame along the X-axis direction.

[0013] As a further improvement of the utility model, a first lifting cylinder is installed on the inner side of the raising frame near the middle along the Y-axis direction, and the driving end at the top of the first lifting cylinder is connected to the X-axis pushing cylinder above, and the driving end of the X-axis pushing cylinder is connected to the clamping cylinder along the positive direction of the X-axis, and the two clamping claws on the clamping cylinder are facing the side along the positive direction of the X-axis.

[0014] As a further improvement of the utility model, a second lifting cylinder is installed on the inner side of the raising frame along both sides of the Y-axis, and the driving end at the top of the second lifting cylinder is connected to the upper X-axis pushing electric cylinder, and the driving end of the X-axis pushing electric cylinder faces one side along the positive direction of the X-axis.

[0015] As a further improvement of the utility model, feed guide assemblies are installed on the discharging frames on both sides of the feed chamber along the Y-axis direction, and the feed guide assemblies include a guide seat, a guide ramp and a guide wheel. The guide seat is installed on the discharging frame, and a guide wheel is installed on the inner side of the top of the guide seat. A guide ramp inclined downward is provided on one side of the guide seat along the negative direction of the X-axis.

[0016] As a further improvement of the utility model, a guide baffle is arranged on the outer side of the top of the guide seat.

[0017] As a further improvement of the present invention, a plurality of discharging limit blocks are evenly installed along the Y-axis direction on one side along the positive direction of the X-axis in the discharging frame, and the discharging limit blocks are located near the top position in the discharging frame.

[0018] As a further improvement of the utility model, a spring member is installed on the lifting rod located between the bottom of the discharge frame and the lifting plate.

[0019] By means of the above solution, the utility model has at least the following advantages:

[0020] The utility model can realize the process of feeding the substrate from the X-axis direction and discharging the substrate from the Y-axis direction through the cooperation of the feeding system and the discharging system, and the transmission mode is more flexible;

[0021] The utility model guides the substrate of the feed material through the feed guide component, and limits the substrate of the discharge material through the discharge limit block.

[0022] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 It is a structural schematic diagram of a novel substrate transmission system of the utility model;

[0025] Figure 2 yes Figure 1 Schematic diagram of the structure of the middle pad elevated frame and feeding system;

[0026] Figure 3 yes Figure 2 Schematic diagram of the structure after removing the substrate frame;

[0027] Figure 4 yes Figure 1 The schematic diagram of the structure after removing the padding frame and feeding system;

[0028] Figure 5 yes Figure 4Structural schematic diagram of the middle discharging component;

[0029] Figure 6 yes Figure 5 A schematic diagram of the structure of the feed guide assembly;

[0030] Figure 7 yes Figure 4 Schematic diagram of the structure of the two jacking support components.

[0031] The meanings of the various reference numerals in the figures are as follows.

[0032] Frame 1, cushion frame 2, feeding system 3, discharging system 4, servo motor 5, servo drive shaft 6, belt drive group 7, substrate frame 8, feed drive roller 9, first lifting cylinder 10, X-axis pushing cylinder 11, second lifting cylinder 12, X-axis pushing electric cylinder 13, clamping claw cylinder 14, discharging frame 15, lifting support assembly 16, feeding cavity 17, discharging drive wheel group 18, feeding guide assembly 19, discharging drive roller 20, discharging limit block 21, discharging cavity 22, lifting rod hole 23, guide seat 24, guide inclined plate 25, guide wheel 26, guide baffle 27, third lifting cylinder 28, lifting plate 29, spring member 30, lifting rod 31, lifting support frame 32, lifting auxiliary wheel 33. DETAILED DESCRIPTION

[0033] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0034] In order to make the technical personnel in the technical field better understand the scheme of the utility model, the technical scheme in the embodiment of the utility model will be clearly and completely described below in combination with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, rather than all the embodiments. The components of the embodiment of the utility model usually described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model for protection, but only represents the selected embodiment of the utility model. Based on the embodiment of the utility model, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the utility model.

[0035] Example

[0036] like Figure 1 to Figure 7 As shown,

[0037] A novel substrate transmission system includes a frame 1, a feeding system 3 is arranged on one side of the frame 1 along the negative direction of the X-axis, the feeding system 3 is installed on the frame 1 through a bottom raising frame 2, and a discharging system 4 is arranged on one side of the frame 1 along the positive direction of the X-axis.

[0038] First, the feeding system 3 includes a servo motor 5, a belt drive group 7 and a feeding drive roller 9. The servo motor 5 is installed on the elevated frame 2 near the middle along the Y-axis direction. Belt drive groups 7 are installed on the outer sides of both sides of the elevated frame 2 along the Y-axis direction. The servo motor 5 can be driven and connected to the belt drive groups 7 on both sides along the Y-axis direction through the servo drive shaft 6, and the belt drive group 7 is connected to the feeding drive roller 9 located on the inner side of the elevated frame 2.

[0039] A first lifting cylinder 10 is installed on the inner side of the raising frame 2 near the middle along the Y-axis direction. The driving end at the top of the first lifting cylinder 10 is connected to the X-axis pushing cylinder 11 above. The driving end of the X-axis pushing cylinder 11 is connected to the clamping cylinder 14 on the side along the positive direction of the X-axis. The two clamping claws on the clamping cylinder 14 face the side along the positive direction of the X-axis.

[0040] A second lifting cylinder 12 is installed on both sides of the Y-axis inside the raising frame 2. The driving end at the top of the second lifting cylinder 12 is connected to the upper X-axis pushing electric cylinder 13, and the driving end of the X-axis pushing electric cylinder 13 faces one side along the positive direction of the X-axis.

[0041] The substrate rack 8 to be transported can be clamped by the clamping cylinder 14 , and the substrate rack 8 can be pushed into the discharging system 4 by the X-axis pushing electric cylinders 13 on both sides.

[0042] Second, the discharging system 4 includes a discharging assembly and a lifting support assembly 16 . There are two lifting support assemblies 16 , which are located on the frame 1 below the discharging frame 15 and on both sides along the Y-axis direction.

[0043] The discharging assembly includes a discharging frame 15, on which a feed cavity 17 is opened on one side of the discharging frame 15 along the negative direction of the X-axis, and on which discharging cavities 22 are opened on both sides of the discharging frame 15 along the Y-axis direction, and discharging transmission wheel groups 18 are installed on the outer sides of both sides of the discharging frame 15 along the X-axis direction, and the discharging transmission wheel groups 18 are connected to the discharging transmission rollers 20 located on the inner side of the discharging frame 15, and the discharging transmission wheel groups 18 and the discharging transmission rollers 20 are both located below the feed cavity 17.

[0044] The above-mentioned discharging transmission wheel group 18 can be a structure such as a magnetic fluid group.

[0045] Guiding and limiting structure: Feeding guide components 19 are installed on the discharging frame 15 on both sides of the feeding cavity 17 along the Y-axis direction. The feeding guide components 19 include a guide seat 24, a guide inclined plate 25 and a guide wheel 26. The guide seat 24 is installed on the discharging frame 15. The guide wheel 26 is installed on the inner side of the top of the guide seat 24. The guide seat 24 is provided with a guide inclined plate 25 inclined downward on one side along the negative direction of the X-axis, and a guide baffle 27 is provided on the outer side of the top of the guide seat 24. Several discharging limiting blocks 21 are evenly installed along the Y-axis direction on one side along the positive direction of the X-axis in the discharging frame 15. The discharging limiting blocks 21 are located near the top position in the discharging frame 15.

[0046] The lifting support assembly 16 includes a third lifting cylinder 28, a lifting plate 29, a lifting rod 31 and a lifting support frame 32 from bottom to top. The third lifting cylinder 28 is installed on the frame 1. The driving end at the top of the third lifting cylinder 28 is connected to the lifting plate 29 above. A plurality of lifting rods 31 are arranged on the lifting plate 29 along the X-axis direction. The lifting rods 31 can pass through the lifting rod holes 23 on the discharging frame 15 and enter the discharging frame 15 and are connected to the lifting support frame 32. A plurality of lifting auxiliary wheels 33 are evenly installed on the lifting support frame 32 along the X-axis direction. A spring member 30 is installed on the lifting rod 31 located between the bottom of the discharging frame 15 and the lifting plate 29.

[0047] The working process of a novel substrate transmission system of the utility model is briefly described as follows:

[0048] The substrate to be processed is located on the substrate rack 8. The substrate rack 8 is first placed on the feed drive roller 9 and driven by the belt drive group 7 to move along the X-axis direction until it moves to a position close to the feed chamber 17. The first lifting cylinder 10 drives the X-axis push cylinder 11 to lift, and the second lifting cylinder 12 drives the X-axis push electric cylinder 13 to lift. The clamping claw cylinder 14 at the front end of the X-axis push cylinder 11 can clamp the substrate rack 8, and then the X-axis push electric cylinder 13 pushes the substrate rack 8 into the feed chamber 17. When the substrate rack 8 enters the feed chamber 17, it is guided by the feed guide components 19 on both sides. At this time, the third lifting cylinder 28 drives the top lifting support frame 32 to be in a lifting state, so that the substrate rack 8 falls on the lifting support frame 32. After that, the third lifting cylinder 28 drives the top lifting support frame 32 to descend until the substrate rack 8 falls on the discharge transmission roller 20, and the discharge transmission roller 20 is driven by the discharge transmission wheel group 18 to drive the substrate rack 8 to discharge from the discharge cavity 22 on both sides.

[0049] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly referring to the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0050] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0051] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be regarded as within the protection scope of the present invention.

Claims

1. A novel substrate transmission system, comprising a frame (1), a feeding system (3) being arranged on one side of the frame (1) along the negative direction of the X-axis, the feeding system (3) being installed on the frame (1) via a bottom raising frame (2), and a discharging system (4) being arranged on one side of the frame (1) along the positive direction of the X-axis; Features: The feeding system (3) comprises a servo motor (5), a belt transmission group (7) and a feeding transmission roller (9); the servo motor (5) is mounted on the elevated frame (2) at a position close to the middle along the Y-axis direction; belt transmission groups (7) are mounted on the outer sides of both sides of the elevated frame (2) along the Y-axis direction; the servo motor (5) can be connected to the belt transmission groups (7) on both sides along the Y-axis direction through a servo transmission shaft (6); and the belt transmission group (7) is connected to the feeding transmission roller (9) located on the inner side of the elevated frame (2); The discharging system (4) comprises a discharging assembly and a lifting support assembly (16), wherein the number of the lifting support assemblies (16) is two and they are located on the frame (1) on both sides along the Y-axis direction below the discharging frame (15); The discharging assembly comprises a discharging frame (15), a feeding cavity (17) is provided on one side of the discharging frame (15) along the negative direction of the X-axis, and discharging cavities (22) are provided on both sides of the discharging frame (15) along the Y-axis direction. Discharging transmission wheel groups (18) are installed on the outer sides of both sides of the discharging frame (15) along the X-axis direction. The discharging transmission wheel groups (18) are connected to the discharging transmission rollers (20) located on the inner side of the discharging frame (15), and the discharging transmission wheel groups (18) and the discharging transmission rollers (20) are both located below the feeding cavity (17); The jacking support assembly (16) comprises, from bottom to top, a third jacking cylinder (28), a jacking plate (29), a jacking rod (31) and a jacking support frame (32), wherein the third jacking cylinder (28) is mounted on the frame (1), and the driving end at the top of the third jacking cylinder (28) is connected to the jacking plate (29) above, and a plurality of jacking rods (31) are arranged on the jacking plate (29) along the X-axis direction, and the jacking rods (31) can pass through the jacking rod holes (23) on the discharging frame (15) and then enter into the discharging frame (15) and be connected to the jacking support frame (32), and a plurality of jacking auxiliary wheels (33) are evenly installed on the jacking support frame (32) along the X-axis direction.

2. A novel substrate transmission system as claimed in claim 1, characterized in that: A first lifting cylinder (10) is installed on the inner side of the raising frame (2) near the middle along the Y-axis direction, and the driving end at the top of the first lifting cylinder (10) is connected to the upper X-axis pushing cylinder (11), and the driving end of the X-axis pushing cylinder (11) is connected to a clamping cylinder (14) on one side along the positive direction of the X-axis, and the two clamping claws on the clamping cylinder (14) face the side along the positive direction of the X-axis.

3. A novel substrate transport system as claimed in claim 1, characterized in that: A second lifting cylinder (12) is installed on both sides of the inner side of the raising frame (2) along the Y-axis, and the driving end at the top of the second lifting cylinder (12) is connected to the upper X-axis pushing electric cylinder (13), and the driving end of the X-axis pushing electric cylinder (13) faces one side along the positive direction of the X-axis.

4. A novel substrate transport system as claimed in claim 1, characterized in that: A feed guide assembly (19) is installed on both sides of the feed chamber (17) along the Y-axis direction on the discharge frame (15), and the feed guide assembly (19) comprises a guide seat (24), a guide inclined plate (25) and a guide wheel (26). The guide seat (24) is installed on the discharge frame (15), and the guide wheel (26) is installed on the inner side of the top of the guide seat (24). The guide seat (24) is provided with a guide inclined plate (25) inclined downward on one side along the negative direction of the X-axis.

5. A novel substrate transport system as claimed in claim 4, characterized in that: A guide baffle (27) is arranged on the outer side of the top of the guide seat (24).

6. A novel substrate transport system as claimed in claim 1, characterized in that: A plurality of discharging limit blocks (21) are evenly installed along the Y-axis direction on one side along the positive direction of the X-axis in the discharging frame (15), and the discharging limit blocks (21) are located near the top position in the discharging frame (15).

7. A novel substrate transport system as claimed in claim 1, characterized in that: A spring member (30) is installed on a lifting rod (31) located between the bottom of the discharge frame (15) and the lifting plate (29).

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