Corrosive liquid circulating mechanism for multilayer metal wet etching

Abstract

The utility model relates to the technical field of wet etching, in particular to a corrosion liquid circulating mechanism for multilayer metal wet etching, which comprises a bottom plate, a side plate is fixedly connected to the top end of the bottom plate, and a top plate is fixedly connected to the top end of the side plate. The working efficiency of the corrosive liquid circulating mechanism for metal wet etching is higher, after wet etching is finished, corrosive liquid enters the inner side of the collecting box through the liquid outlet pipe and then penetrates through the filter screen, residues in the corrosive liquid are filtered out through the filter screen and prevented from entering the wet etching device again, product quality is prevented from being reduced, and then an external pump is started, so that product quality is guaranteed. And the filtered corrosive liquid enters the inner side of the storage tank again through the external pump and the circulating pipe, so that the working efficiency of the corrosive liquid circulating mechanism for metal wet etching is higher, the corrosive liquid can be filtered, and the quality of the corrosive liquid and a product is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of wet etching, in particular to a corrosion liquid circulation mechanism for multi-layer metal wet etching. Background Art

[0002] Wet etching is a method of using chemical liquids to corrode materials. This method is widely used in various fields, such as semiconductors, displays, solar cells, metal processing and research. Wet etching is classified according to the type of chemical liquid used. The main types of wet etching are: acid etching: corrosion using acidic chemical liquids, such as sulfuric acid, hydrochloric acid and nitric acid, alkali corrosion: corrosion using alkaline chemical liquids, such as potassium hydroxide, sodium hydroxide and ammonia, solvent corrosion: corrosion using solvent chemical liquids, such as acetone, isopropanol and ethanol. In industrial production, wet etching is usually used to clean metals. The purpose of cleaning is mainly to remove insoluble metal oxides and other impurities that affect product quality on the metal surface. And because the raw materials of wet etching are expensive, the etching liquid needs to be recycled and reused, so a metal wet etching etching liquid circulation mechanism is usually required.

[0003] In the prior art, the corrosive liquid circulation mechanism for metal wet etching usually places a collection bucket under the wet etching device to collect the used corrosive liquid before the wet etching starts, and after the wet etching is completed, the liquid in the collection bucket is directly poured back into the device manually. This method is relatively time-consuming. During the wet etching process, usually only a single layer of metal can be wet-etched, and the work efficiency is low. The corrosive liquid is not uniformly applied to the metal, and after the wet etching is completed, the corrosive liquid will still remain on the metal, which may not only cause excessive corrosion to the product, but also make the corrosive liquid unable to be recycled, resulting in waste of the corrosive liquid. Therefore, in view of the above problems, a corrosive liquid circulation mechanism for multi-layer metal wet etching is proposed. Utility Model Content

[0004] The utility model aims to provide a corrosion liquid circulation mechanism for multi-layer metal wet corrosion to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A corrosive liquid circulation mechanism for multi-layer metal wet corrosion comprises a bottom plate, the top end of the bottom plate is fixedly connected to a side plate, the top end of the side plate is fixedly connected to a top plate, the middle of the top end of the top plate is fixedly connected to a storage tank, the bottom end of the inner side of the storage tank is fixedly connected to a built-in pump, the bottom end of the built-in pump is fixedly connected to a telescopic tube that runs through the storage tank and the top plate, the bottom end of the top plate is fixedly connected to an electric telescopic rod, the bottom end of the electric telescopic rod is fixedly connected to a cover plate, the middle of the bottom end of the cover plate is fixedly connected to a nozzle, a sealing box is provided below the cover plate, the bottom end of the inner side of the sealing box is fixedly connected to a motor housing, the bottom end of the inner side of the motor housing is fixedly connected to a rotating motor, the top end of the rotating motor is rotatably connected to a rotating shaft, the top end of the rotating shaft is fixedly connected to a storage table, the top end of the storage table is provided with a card slot, the inner side of the storage table is provided with a threaded groove that penetrates the card slot, the inner side of the threaded groove is spirally connected with a bolt, and the bottom end of the storage table is fixedly connected to a limiting wheel.

[0007] Preferably, a liquid outlet pipe that penetrates the sealing box and the bottom plate is fixedly connected to the inner bottom edge of the sealing box, a collecting box is fixedly connected to the bottom end of the liquid outlet pipe, a filter is fixedly connected to the inside of the collecting box, a circulation pipe that passes through the collecting box is fixedly connected to the edge of one side of the collecting box, and an external pump that passes through the circulation pipe is fixedly connected to the outside of the circulation pipe.

[0008] Preferably, the end of the liquid outlet pipe away from the sealing box is connected to the collecting box, the filter is arranged in an arc shape, the end of the circulation pipe away from the collecting box is connected to the storage tank, the number of the liquid outlet pipes is four, and the number of the circulation pipes and the external pumps are both two.

[0009] Preferably, there are two side panels, which are evenly fixed at the bottom edge of the top panel, the top panel and the bottom panel are the same size, there are two electric telescopic rods, and one end of the telescopic tube away from the storage tank is fixedly connected to the top of the nozzle.

[0010] Preferably, the number of the slots, thread grooves and bolts is four, the inner diameter of the thread groove is larger than the outer diameter of the bolt, the number of the limiting wheels is four, and the limiting wheels are distributed in a ring shape at the bottom end of the storage table.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] 1. In the utility model, the working efficiency of the corrosive liquid circulation mechanism of metal wet corrosion is higher by setting the liquid outlet pipe, the collecting box, the filter screen, the circulation pipe and the external pump. When the wet corrosion is finished, the corrosive liquid enters the inner side of the collecting box through the liquid outlet pipe, and then passes through the filter screen. The filter screen filters out the residue in the corrosive liquid to prevent the residue from re-entering the inside of the wet corrosion device and causing the product quality to decline. Then the external pump is started, and the filtered corrosive liquid re-enters the inner side of the storage tank through the external pump and the circulation pipe. This design not only makes the working efficiency of the corrosive liquid circulation mechanism of metal wet corrosion higher, but also can filter the corrosive liquid to ensure the quality of the corrosive liquid and the product.

[0013] 2. In the utility model, the device can simultaneously corrode multiple layers of metal by providing a card slot, a threaded groove and a bolt. When in use, the metal is inserted into the inner side of the card slot, and then the bolt is screwed into the inner side of the threaded groove until the bolt fits tightly with the metal, thereby realizing wet corrosion of multiple layers of metal;

[0014] 3. In the utility model, by arranging the storage tank, built-in pump, telescopic tube, electric telescopic rod, cover plate, nozzle, sealing box, motor housing, rotating motor, rotating shaft, storage table and limiting wheel, the metal inside the corrosive liquid circulation mechanism of metal wet corrosion can be subjected to more uniform corrosive liquid. When the metal needs to be wet-etched, the metal is fixed on the storage table, the telescopic rod is started, the telescopic rod is extended to drive the cover plate and the sealing box to fit closely, the rotating motor is started, the rotating motor drives the rotating shaft and the storage table to rotate, at this time the limiting wheel follows the rotation, and then the built-in pump is started, the corrosive liquid in the storage tank is sprayed onto the metal surface through the built-in pump, the telescopic tube and the nozzle. Due to the rotation of the storage table, the metal is subjected to more uniform corrosive liquid. When the wet corrosion is completed, the built-in pump is turned off, and the storage table continues to rotate, and the corrosive liquid remaining on the metal and the surface of the storage table is thrown out, thereby avoiding the waste of the corrosive liquid and preventing the corrosive liquid from excessively corroding the metal. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the sealing box structure of the utility model;

[0017] Figure 3 This is a schematic diagram of the structure of the storage platform of the utility model from a top view;

[0018] Figure 4 This is a schematic diagram of the motor housing structure of the utility model.

[0019] In the figure: 1. bottom plate; 2. side plate; 3. top plate; 4. storage tank; 5. built-in pump; 6. telescopic tube; 7. electric telescopic rod; 8. cover plate; 9. nozzle; 10. sealing box; 11. motor housing; 12. rotating motor; 13. rotating shaft; 14. storage table; 15. slot; 16. threaded groove; 17. bolt; 18. limiting wheel; 19. liquid outlet pipe; 20. collection box; 21. filter; 22. circulation pipe; 23. external pump. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the devices or elements referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention. The directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0022] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0023] See also Figure 1-4 , the utility model provides a technical solution:

[0024] A multi-layer metal wet etching corrosion liquid circulation mechanism comprises a bottom plate 1, the top of the bottom plate 1 is fixedly connected to a side plate 2, the top of the side plate 2 is fixedly connected to a top plate 3, the middle of the top of the top plate 3 is fixedly connected to a storage tank 4, the bottom of the inner side of the storage tank 4 is fixedly connected to a built-in pump 5, the bottom of the built-in pump 5 is fixedly connected to a telescopic pipe 6 that penetrates the storage tank 4 and the top plate 3, the bottom of the top plate 3 is fixedly connected to an electric telescopic rod 7, the bottom of the electric telescopic rod 7 is fixedly connected to a cover plate 8, and the middle of the bottom of the cover plate 8 is fixedly connected to a nozzle 9 A sealing box 10 is provided under the cover plate 8, and a motor housing 11 is fixedly connected to the bottom inner end of the sealing box 10, and a rotating motor 12 is fixedly connected to the bottom inner end of the motor housing 11, and a rotating shaft 13 is rotatably connected to the top of the rotating motor 12, and a storage table 14 is fixedly connected to the top of the rotating shaft 13, and a card slot 15 is provided at the top of the storage table 14, and a threaded groove 16 that penetrates the card slot 15 is provided on the inner side of the storage table 14, and a bolt 17 is spirally connected to the inner side of the threaded groove 16, and a limiting wheel 18 is fixedly connected to the bottom end of the storage table 14.

[0025] A liquid outlet pipe 19 penetrating the sealed box 10 and the bottom plate 1 is fixedly connected to the inner bottom edge of the sealed box 10, a collecting box 20 is fixedly connected to the bottom end of the liquid outlet pipe 19, a filter screen 21 is fixedly connected to the inner side of the collecting box 20, a circulation pipe 22 penetrating the collecting box 20 is fixedly connected to the edge of one side of the collecting box 20, an external pump 23 penetrating the circulation pipe 22 is fixedly connected to the outer side of the circulation pipe 22, the end of the liquid outlet pipe 19 away from the sealed box 10 is penetrating the collecting box 20, the filter screen 21 is arranged in an arc shape, and the end of the circulation pipe 22 away from the collecting box 20 is penetrating the storage tank 4 There are four liquid outlet pipes 19, two circulating pipes 22 and two external pumps 23, two side panels 2, and the side panels 2 are evenly fixed at the bottom edge of the top plate 3. The top plate 3 is the same size as the bottom plate 1. There are two electric telescopic rods 7. The end of the telescopic tube 6 away from the storage tank 4 is fixedly connected to the top of the nozzle 9. There are four card slots 15, thread grooves 16 and bolts 17. The inner diameter of the thread groove 16 is larger than the outer diameter of the bolt 17. There are four limiting wheels 18, and the limiting wheels 18 are distributed in a ring shape at the bottom end of the storage table 14.

[0026] Working process: Power on the device before use, first insert the metal into the inner side of the card slot 15, then screw the bolt 17 into the inner side of the threaded groove 16 until the bolt 17 fits tightly against the metal, and then wet corrosion of the multi-layer metal can be achieved. Then start the telescopic rod, and the telescopic rod extends to drive the cover plate 8 and the sealing box 10 to fit tightly together, and start the rotating motor 12. The rotating motor 12 drives the rotating shaft 13 and the storage table 14 to rotate. At this time, the limiting wheel 18 rotates with it, and then start the built-in pump 5. The corrosive liquid in the storage tank 4 is sprayed onto the metal surface through the built-in pump 5, the telescopic tube 6 and the nozzle 9. Due to the rotation of the storage table 14, the metal is more evenly exposed to the corrosive liquid. When the wet corrosion is completed, turn off the built-in pump 5. The object table 14 continues to rotate, and the corrosive liquid remaining on the surface of the metal and the object table 14 is thrown out, thereby avoiding the waste of the corrosive liquid and preventing the corrosive liquid from excessively corroding the metal. When the wet etching is completed, the corrosive liquid enters the inner side of the collection box 20 through the liquid outlet pipe 19, and then passes through the filter screen 21. The filter screen 21 filters out the residue in the corrosive liquid to prevent the residue from re-entering the wet etching device and causing the product quality to deteriorate. Subsequently, the external pump 23 is started, and the filtered corrosive liquid re-enters the inner side of the storage tank 4 through the external pump 23 and the circulation pipe 22. This design not only makes the working efficiency of the corrosive liquid circulation mechanism of the metal wet etching higher, but also can filter the corrosive liquid to ensure the quality of the corrosive liquid and the product.

[0027] The contents not described in detail in this specification belong to the prior art known to the professional and technical personnel in this field. The standard parts used in this utility model can be purchased from the market, and the special-shaped parts can be customized according to the description and the drawings. The specific connection methods of each part adopt the conventional means such as bolts, rivets, welding, etc. in the prior art. The machinery, parts and equipment all adopt the conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be described in detail here.

[0028] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A multi-layer metal wet etching etching liquid circulation mechanism, comprising a bottom plate (1), characterized in that: The top of the bottom plate (1) is fixedly connected to a side plate (2), the top of the side plate (2) is fixedly connected to a top plate (3), the middle of the top of the top plate (3) is fixedly connected to a storage tank (4), the bottom of the inner side of the storage tank (4) is fixedly connected to a built-in pump (5), the bottom of the built-in pump (5) is fixedly connected to a telescopic tube (6) that runs through the storage tank (4) and the top plate (3), the bottom of the top plate (3) is fixedly connected to an electric telescopic rod (7), the bottom of the electric telescopic rod (7) is fixedly connected to a cover plate (8), the middle of the bottom of the cover plate (8) is fixedly connected to a nozzle (9), and a sealing box is provided below the cover plate (8). (10), the inner bottom end of the sealing box (10) is fixedly connected to a motor housing (11), the inner bottom end of the motor housing (11) is fixedly connected to a rotating motor (12), the top end of the rotating motor (12) is rotatably connected to a rotating shaft (13), the top end of the rotating shaft (13) is fixedly connected to a storage platform (14), the top end of the storage platform (14) is provided with a slot (15), the inner side of the storage platform (14) is provided with a threaded groove (16) that penetrates the slot (15), the inner side of the threaded groove (16) is spirally connected to a bolt (17), and the bottom end of the storage platform (14) is fixedly connected to a limiting wheel (18).

2. The etching liquid circulation mechanism for multi-layer metal wet etching according to claim 1, characterized in that: A liquid outlet pipe (19) penetrating the sealed box (10) and the bottom plate (1) is fixedly connected to the inner bottom edge of the sealed box (10); a collecting box (20) is fixedly connected to the bottom end of the liquid outlet pipe (19); a filter screen (21) is fixedly connected to the inner side of the collecting box (20); a circulation pipe (22) penetrating the collecting box (20) is fixedly connected to the edge of one side of the collecting box (20); and an external pump (23) penetrating the circulation pipe (22) is fixedly connected to the outer side of the circulation pipe (22).

3. The etching liquid circulation mechanism for multi-layer metal wet etching according to claim 2, characterized in that: The end of the liquid outlet pipe (19) away from the sealing box (10) is connected to the collecting box (20), the filter screen (21) is arranged in an arc shape, the end of the circulation pipe (22) away from the collecting box (20) is connected to the storage tank (4), the number of the liquid outlet pipes (19) is four, and the number of the circulation pipes (22) and the external pump (23) are both two.

4. The etching liquid circulation mechanism for multi-layer metal wet etching according to claim 1, characterized in that: The number of the side panels (2) is two, and the side panels (2) are evenly fixed at the bottom edge of the top panel (3). The top panel (3) and the bottom panel (1) are of the same size. The number of the electric telescopic rods (7) is two, and the end of the telescopic tube (6) away from the storage tank (4) is fixedly connected to the top of the nozzle (9).

5. The etching liquid circulation mechanism for multi-layer metal wet etching according to claim 1, characterized in that: The number of the clamping groove (15), the thread groove (16) and the bolt (17) are all four, the inner diameter of the thread groove (16) is larger than the outer diameter of the bolt (17), the number of the limiting wheels (18) is four, and the limiting wheels (18) are distributed in a ring shape at the bottom end of the storage platform (14).

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