Liquid adjusting device for removing gas in copper electrolyte

Abstract

The utility model provides a liquid mixing device for removing gas in copper electrolyte, which comprises a first liquid mixing tank and a second liquid mixing tank which are connected in series through a liquid inlet pipe, the outlet end of the liquid inlet pipe respectively extends into the first liquid mixing tank and the second liquid mixing tank to form a liquid inlet pipe tank inner section, and the outlet of the liquid inlet pipe tank inner section is sealed. And at least two liquid outlet holes are respectively formed in the pipeline. In the actual use process, the copper electrolyte is added into the first liquid mixing tank and the second liquid mixing tank, and the copper electrolyte circularly flows between the first liquid mixing tank and the second liquid mixing tank under the driving of the liquid inlet pump, so that gas in the copper electrolyte is released when the copper electrolyte upwards jets out of the liquid level from the liquid outlet hole; inlets and outlets of the first liquid inlet pipe and the second liquid inlet pipe are below the liquid level, so that air brought into the copper electrolyte can be reduced; by adopting the liquid adjusting device for removing the gas in the copper electrolyte, the yield of ultra-pure electrolytic copper is greatly improved, and the yield is greater than or equal to 99%.

Description

Technical Field

[0001] The utility model belongs to the technical field of wet-process purification of metallic copper, relates to a copper electrolyte, and in particular to a liquid regulating device for removing gas from the copper electrolyte. Background Art

[0002] With the rapid development of VLSI, the size of semiconductor chips has been reduced to the nanometer level. The RC delay and electromigration of metal interconnects have become the main factors affecting chip performance. Traditional aluminum and aluminum alloy interconnects can no longer meet the requirements of VLSI process. Compared with aluminum, copper has higher electromigration resistance and higher conductivity, especially ultra-high purity copper with a purity of ≥6N, which is of great significance for reducing the resistance of chip interconnects and improving their computing speed.

[0003] In order to obtain ultra-high purity copper with a purity of ≥6N, the current method generally uses wet electrolytic purification to obtain high-purity electrolytic copper, and then uses fire smelting to form ingots, among which wet purification is the most critical. In the production of electrolytically purified copper, the electrolytic copper plates obtained generally have the problem of holes. This is because, during the electrolysis of copper, the gas dissolved in the copper electrolyte will gradually grow as a gas phase core to form bubbles, and the bubbles will adhere to the cathode plate to form insulating points, which will hinder the precipitation and growth of copper ions at this point, resulting in holes in the electrolytic copper plate. The impact of holes on product quality is particularly obvious in ultra-high purity copper, because the acid and impurities attached to the holes are almost impossible to remove, and the electrolytic copper finally obtained cannot meet the requirements of purity ≥6N.

[0004] CN104167526A discloses an electrolyte vacuum stirring and degassing device with an automatic cleaning function, specifically comprising a vacuum stirring device, the vacuum stirring device comprising an electrolyte degassing barrel, a vacuum stirring blade and a vacuum stirring motor for driving the vacuum stirring blade, the vacuum stirring motor is located above the electrolyte degassing barrel, and the vacuum stirring blade is located inside the electrolyte degassing barrel; a vacuum extraction interface and an electrolyte inlet are respectively provided at the upper end of the electrolyte degassing barrel, and a waste liquid discharge outlet and an electrolyte inlet are respectively provided at the lower end of the electrolyte degassing barrel. The above technical solution removes bubbles in the electrolyte by vacuum stirring, but there is a problem of incomplete removal.

[0005] CN202474115U discloses an electrolyte bubble treatment system, including a liquid storage device and a vacuum device connected to each other, the vacuum device including a stirring device and a gas extraction device, the stirring device including a stirring mechanism and a stirring motor for controlling the stirring mechanism, the stirring mechanism is arranged in a liquid storage tank of the liquid storage device. The above technical solution removes bubbles in the electrolyte by vacuum stirring, but there is a problem of incomplete removal.

[0006] CN208014800U discloses a liquid storage tank for eliminating bubbles in electrolyte, including a nitrogen bottle 1, an electrolyte barrel 2, a primary liquid storage tank 3, a secondary liquid storage tank 4 and a vacuum pump 5 arranged in sequence and connected by pipelines, wherein the primary liquid storage tank 3 is provided with a stirring paddle 31, and the secondary liquid storage tank 4 is provided with a buffer tank 41, wherein the buffer tank 41 is a cap-type buffer tank with an opening downward. The above technical solution first automatically stirs the primary liquid storage tank with a stirring paddle to separate the electrolyte and bubbles inside the primary liquid storage tank, and then the electrolyte flows from the primary liquid storage tank to the buffer tank in the secondary liquid storage tank through a pipeline, and the buffer tank buffers the electrolyte to eliminate some bubbles. However, the above technical solution has the problem of complex device structure.

[0007] In summary, in order to reduce the hole problem on the ultra-high purity electrolytic copper plate, it is necessary to develop a liquid regulating device for removing gas from the copper electrolyte. Utility Model Content

[0008] In view of the shortcomings of the prior art, the utility model provides a liquid regulating device for removing gas from copper electrolyte, including a first liquid regulating tank and a second liquid regulating tank connected in series through a liquid inlet pipe, and the outlet ends of the liquid inlet pipe respectively penetrate into the first liquid regulating tank and the second liquid regulating tank to form an inner section of the liquid inlet pipe tank, the outlets of the inner section of the liquid inlet pipe tank are sealed, and at least two liquid outlet holes are respectively opened on the pipe. In actual use, the copper electrolyte is added to the first liquid regulating tank and the second liquid regulating tank respectively, and the copper electrolyte circulates between the first liquid regulating tank and the second liquid regulating tank under the drive of the liquid inlet pump, so that the gas in the copper electrolyte is released when the copper electrolyte gushes upward from the liquid outlet hole. Moreover, the inlet and outlet of the first liquid inlet pipe and the second liquid inlet pipe are both below the liquid surface, which can reduce the air brought into the copper electrolyte; the liquid regulating device for removing gas from the copper electrolyte described in the utility model greatly improves the yield of ultra-high purity electrolytic copper, and the yield is ≥99%.

[0009] To achieve this purpose, the utility model adopts the following technical solutions:

[0010] The utility model provides a liquid regulating device for removing gas from a copper electrolyte, comprising: a first liquid regulating tank and a second liquid regulating tank, wherein the bottom outlet of the first liquid regulating tank is connected to the bottom inlet of the second liquid regulating tank through a first liquid inlet pipe, the bottom outlet of the second liquid regulating tank is connected to the bottom inlet of the first liquid regulating tank through a second liquid inlet pipe, and a liquid inlet pump is arranged on the first liquid inlet pipe and / or the second liquid inlet pipe;

[0011] Among them, the outlet end of the first liquid inlet pipe penetrates into the interior of the second liquid regulating tank to form a first liquid inlet pipe groove inner section, and the outlet end of the second liquid inlet pipe penetrates into the interior of the first liquid regulating tank to form a second liquid inlet pipe groove inner section. The outlets of the first liquid inlet pipe groove inner section and the second liquid inlet pipe groove inner section are both sealed, and at least two liquid outlet holes are opened on the pipeline respectively.

[0012] The utility model provides a liquid regulating device for removing gas from a copper electrolyte. In actual use, the copper electrolyte is added to a first liquid regulating tank and a second liquid regulating tank respectively. Driven by a liquid inlet pump, the copper electrolyte circulates between the first liquid regulating tank and the second liquid regulating tank, so that the gas in the copper electrolyte is released when the copper electrolyte gushes upward from a liquid outlet to the liquid surface. Moreover, the inlet and outlet of the first liquid inlet pipe and the second liquid inlet pipe are both below the liquid surface, which can reduce the amount of air introduced into the copper electrolyte. The liquid regulating device for removing gas from the copper electrolyte according to the utility model greatly improves the yield of ultra-high purity electrolytic copper, with the yield being ≥99%, can reduce the pores on the ultra-high purity electrolytic copper plate, and solves the problem of low qualified rate of ultra-high purity electrolytic copper produced by traditional electrolysis.

[0013] It should be noted that the liquid regulating device for removing gas from copper electrolyte described in the utility model is a device specifically used to remove gas from copper electrolyte before electrolysis. After the gas removal meets the standard, the treated copper electrolyte is used for electrolysis, that is, the liquid regulating device described in the utility model is operated intermittently and processes the copper electrolyte in batches.

[0014] It should be noted that the bottom outlet and the bottom inlet of the first liquid regulating tank and the second liquid regulating tank of the present invention are both arranged at the bottom of the tank to ensure that the circulating copper electrolyte does not expose the liquid surface.

[0015] As a preferred technical solution of the present invention, the diameter of the liquid outlet is 1-2 cm, for example, 1 cm, 1.1 cm, 1.2 cm, 1.3 cm, 1.4 cm, 1.5 cm, 1.6 cm, 1.7 cm, 1.8 cm, 1.9 cm or 2 cm, but is not limited to the listed values, and other unlisted values ​​within the above numerical range are also applicable.

[0016] As a preferred technical solution of the utility model, the average spacing between two adjacent liquid outlets is 10-20 cm, for example 10 cm, 11 cm, 12 cm, 13 cm, 14 cm, 15 cm, 16 cm, 17 cm, 18 cm, 19 cm or 20 cm, etc., but is not limited to the listed values, and other unlisted values ​​within the above numerical range are also applicable.

[0017] As a preferred technical solution of the utility model, the inner section of the first liquid inlet pipe groove contacts the bottom of the second liquid regulating groove; the inner section of the second liquid inlet pipe groove contacts the bottom of the first liquid regulating groove.

[0018] As a preferred technical solution of the utility model, the liquid outlet direction of the liquid outlet is upward.

[0019] As a preferred technical solution of the utility model, parallel to the direction of the inner section of the first liquid inlet pipe groove, the length of the second liquid regulating groove is 1.2-1.7 times the length of the inner section of the first liquid inlet pipe groove, for example, 1.2 times, 1.3 times, 1.4 times, 1.5 times, 1.6 times or 1.7 times, but is not limited to the listed values, and other values ​​not listed in the above numerical range are also applicable;

[0020] Parallel to the direction of the inner section of the second liquid inlet pipe groove, the length of the first liquid regulating groove is 1.2-1.7 times the length of the inner section of the second liquid inlet pipe groove, for example, 1.2 times, 1.3 times, 1.4 times, 1.5 times, 1.6 times or 1.7 times, etc., but is not limited to the listed values, and other values ​​not listed within the above numerical range are also applicable.

[0021] As a preferred technical solution of the utility model, it also includes an additive tank; the bottom outlet of the additive tank is provided with an additive outlet pipe, and the outlet of the additive outlet pipe is deep below the liquid level of the first liquid regulating tank.

[0022] It should be noted that the additive tank of the utility model is filled with prepared hydrogen peroxide with a concentration of 10-30wt%. During the circulation of the copper electrolyte, the hydrogen peroxide is added to the liquid level of the first liquid adjustment tank through the additive liquid outlet pipe, and the added amount is controlled to add 1-10 liters of hydrogen peroxide per cubic meter of copper electrolyte. After the hydrogen peroxide is added, the hydrogen peroxide will react with the nitrogen oxide gas in the copper electrolyte as follows:

[0023] 2NO+3H2O2=2HNO3+2H2O

[0024] 2NO2+H2O2=2HNO3

[0025] As a preferred technical solution of the utility model, a purification and filtering device is arranged at the outlet of the liquid inlet pump to filter the copper electrolyte.

[0026] As a preferred technical solution of the present utility model, the first liquid regulating tank is a closed tank body, and a vacuum pumping device is arranged on the top of the first liquid regulating tank.

[0027] As a preferred technical solution of the present invention, the second liquid regulating tank is a closed tank body, and a vacuum pumping device is arranged on the top of the second liquid regulating tank.

[0028] It should be noted that setting the first liquid regulating tank and / or the second liquid regulating tank as a closed tank body and providing a vacuum pumping device on the top is more conducive to the release of gas in the copper electrolyte and can also prevent the released gas from re-dissolving into the copper electrolyte.

[0029] Compared with the prior art, the beneficial effects of the utility model are:

[0030] The utility model provides a liquid regulating device for removing gas from copper electrolyte, comprising a first liquid regulating tank and a second liquid regulating tank which are connected in series through a liquid inlet pipe, and the outlet ends of the liquid inlet pipes respectively penetrate into the first liquid regulating tank and the second liquid regulating tank to form liquid inlet pipe tank inner sections, the outlets of the liquid inlet pipe tank inner sections are all sealed, and at least two liquid outlet holes are respectively opened on the pipes. In actual use, the copper electrolyte is added to the first liquid regulating tank and the second liquid regulating tank respectively. Under the drive of the liquid inlet pump, the copper electrolyte circulates between the first liquid regulating tank and the second liquid regulating tank, so that the gas in the copper electrolyte is released when the copper electrolyte gushes out of the liquid surface from the liquid outlet hole. Moreover, the inlet and outlet of the first liquid inlet pipe and the second liquid inlet pipe are both below the liquid surface, which can reduce the amount of air brought into the copper electrolyte. The liquid regulating device for removing gas from the copper electrolyte described in the utility model greatly improves the yield of ultra-high purity electrolytic copper, with a yield of ≥99%, can reduce the pores on the ultra-high purity electrolytic copper plate, and solves the problem of low qualified rate of ultra-high purity electrolytic copper produced by traditional electrolysis. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 This is a schematic diagram of the structure of the liquid regulating device for removing gas from copper electrolyte according to Example 1 of the utility model;

[0032] Figure 2 This is a schematic diagram of the structure of the liquid regulating device for removing gas from copper electrolyte according to Comparative Example 1 of the present utility model;

[0033] Figure 3 This is a schematic diagram of the structure of the liquid regulating device for removing gas from copper electrolyte according to Comparative Example 2 of the present utility model;

[0034] Among them, 1-the first liquid regulating tank; 2-the second liquid regulating tank; 3-the first liquid inlet pipe; 4-the second liquid inlet pipe; 5-the liquid inlet pump; 6-the inner section of the first liquid inlet pipe tank; 7-the inner section of the second liquid inlet pipe tank; 8-the additive tank; 9-the additive liquid outlet pipe; 10-the purification and filtering device. DETAILED DESCRIPTION

[0035] In order to make the technical solution, purpose and advantages of the utility model clearer, the utility model is further described in detail below through specific implementation examples and in conjunction with the accompanying drawings. It should be understood that the specific implementation methods described here are only used to illustrate and explain the utility model, and are not used to limit the utility model.

[0036] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0037] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two components. For the electrical and communication fields, it can be a wired connection or a wireless connection. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0038] Example 1

[0039] This embodiment provides a liquid conditioning device for removing gas from copper electrolyte, such as Figure 1 As shown, it comprises: a first liquid regulating tank 1 and a second liquid regulating tank 2, wherein the bottom outlet of the first liquid regulating tank 1 is connected to the bottom inlet of the second liquid regulating tank 2 via a first liquid inlet pipe 3, and the bottom outlet of the second liquid regulating tank 2 is connected to the bottom inlet of the first liquid regulating tank 1 via a second liquid inlet pipe 4, and liquid inlet pumps 5 are respectively arranged on the first liquid inlet pipe 3 and the second liquid inlet pipe 4;

[0040] The outlet end of the first liquid inlet pipe 3 penetrates into the interior of the second liquid regulating tank 2 to form a first liquid inlet pipe groove inner section 6, and the outlet end of the second liquid inlet pipe 4 penetrates into the interior of the first liquid regulating tank 1 to form a second liquid inlet pipe groove inner section 7. The outlets of the first liquid inlet pipe groove inner section 6 and the second liquid inlet pipe groove inner section 7 are both sealed, and 40 liquid outlet holes are respectively opened on the pipes; the diameter of the liquid outlet hole is 1.5 cm, and the average distance between two adjacent liquid outlet holes is 15 cm;

[0041] The first liquid inlet pipe groove inner section 6 is in contact with the groove bottom of the second liquid regulating groove 2; the second liquid inlet pipe groove inner section 7 is in contact with the groove bottom of the first liquid regulating groove 1; the liquid outlet direction of the liquid outlet is upward;

[0042] In a direction parallel to the inner section 6 of the first liquid inlet pipe groove, the length of the second liquid regulating groove 2 is 1.5 times the length of the inner section 6 of the first liquid inlet pipe groove;

[0043] In a direction parallel to the second liquid inlet pipe groove inner section 7, the length of the first liquid regulating groove 1 is 1.5 times the length of the second liquid inlet pipe groove inner section 7;

[0044] It also includes an additive tank 8; the bottom outlet of the additive tank 8 is provided with an additive liquid outlet pipe 9, and the outlet of the additive liquid outlet pipe 9 is deep below the liquid level of the first liquid regulating tank 1;

[0045] A purification and filtering device 10 is arranged at the outlet of the liquid inlet pump 5 located on the first liquid inlet pipe 3 .

[0046] Example 2

[0047] This embodiment provides a liquid regulating device for removing gas from copper electrolyte. Compared with Embodiment 1, the only difference is that:

[0048] The diameter of the liquid outlet hole is 1 cm, and the average distance between two adjacent liquid outlet holes is 10 cm;

[0049] In a direction parallel to the inner section 6 of the first liquid inlet pipe groove, the length of the second liquid regulating groove 2 is 1.7 times the length of the inner section 6 of the first liquid inlet pipe groove;

[0050] In a direction parallel to the second liquid inlet pipe groove inner section 7 , the length of the first liquid regulating groove 1 is 1.7 times the length of the second liquid inlet pipe groove inner section 7 .

[0051] Example 3

[0052] This embodiment provides a liquid regulating device for removing gas from copper electrolyte. Compared with Embodiment 1, the only difference is that:

[0053] The diameter of the liquid outlet hole is 2 cm, and the average distance between two adjacent liquid outlet holes is 20 cm;

[0054] In a direction parallel to the inner section 6 of the first liquid inlet pipe groove, the length of the second liquid regulating groove 2 is 1.3 times the length of the inner section 6 of the first liquid inlet pipe groove;

[0055] In the direction parallel to the second liquid inlet pipe groove inner section 7 , the length of the first liquid regulating groove 1 is 1.3 times the length of the second liquid inlet pipe groove inner section 7 .

[0056] Example 4

[0057] This embodiment provides a liquid regulating device for removing gas from copper electrolyte. Compared with Embodiment 1, the only difference is that:

[0058] The first liquid regulating tank is a closed tank body, and a vacuum pumping device is arranged on the top of the first liquid regulating tank;

[0059] The second liquid regulating tank is a closed tank body, and a vacuum pumping device is arranged on the top of the second liquid regulating tank.

[0060] Comparative Example 1

[0061] This comparative example provides a liquid conditioning device for removing gas from copper electrolyte, such as Figure 2 As shown, compared with Example 1, the only difference is:

[0062] The outlet end of the first liquid inlet pipe 3 does not penetrate into the interior of the second liquid regulating tank 2 to form the first liquid inlet pipe tank inner section 6, and the outlet end of the second liquid inlet pipe 4 does not penetrate into the interior of the first liquid regulating tank 1 to form the second liquid inlet pipe tank inner section 7;

[0063] That is, the bottom outlet of the first liquid regulating tank 1 is simply connected to the bottom inlet of the second liquid regulating tank through the first liquid inlet pipe 3, and the bottom outlet of the second liquid regulating tank 2 is simply connected to the bottom inlet of the first liquid regulating tank through the second liquid inlet pipe 4.

[0064] Comparative Example 2

[0065] This comparative example provides a liquid conditioning device for removing gas from copper electrolyte, such as Figure 3 As shown, compared with embodiment 1, the only difference is that: the second liquid regulating tank 2 and its related connection relationship are completely omitted;

[0066] The specific contents are:

[0067] A liquid regulating device for removing gas from a copper electrolyte, comprising a first liquid regulating tank 1, wherein a bottom outlet of the first liquid regulating tank 1 is connected to a bottom inlet of the first liquid regulating tank 1 through a first liquid inlet pipe 3, and a liquid inlet pump 5 is arranged on the first liquid inlet pipe 3;

[0068] The outlet end of the first liquid inlet pipe 3 penetrates into the first liquid regulating tank 1 to form a first liquid inlet pipe tank inner section 6, the outlet of the first liquid inlet pipe tank inner section 6 is sealed, and 40 liquid outlet holes are opened on the pipe; the diameter of the liquid outlet hole is 1.5 cm, and the average distance between two adjacent liquid outlet holes is 15 cm;

[0069] The first liquid inlet pipe groove inner section 6 is in contact with the groove bottom of the first liquid regulating groove 1; the liquid outlet direction of the liquid outlet hole is upward;

[0070] In a direction parallel to the inner section 6 of the first liquid inlet pipe groove, the length of the first liquid regulating groove 1 is 1.5 times the length of the inner section 6 of the first liquid inlet pipe groove;

[0071] It also includes an additive tank 8; the bottom outlet of the additive tank 8 is provided with an additive liquid outlet pipe 9, and the outlet of the additive liquid outlet pipe 9 is deep below the liquid level of the first liquid regulating tank 1;

[0072] A purification and filtering device 10 is arranged at the outlet of the liquid inlet pump 5 located on the first liquid inlet pipe 3 .

[0073] The same volume of copper electrolyte was prepared and treated by the liquid regulating device for removing gas from the copper electrolyte described in the above embodiment and the comparative example, 1-10 liters of hydrogen peroxide was added to each cubic meter of copper electrolyte, and the hydrogen peroxide was added to the first liquid regulating tank through the additive outlet pipe from the additive tank, and the circulation flow rate of the copper electrolyte was controlled to be 1-3 m / s. 3 / h, and the control cycle treatment time is 24h. The treated copper electrolyte was electrolyzed to prepare ultra-high purity electrolytic copper plates, and the yield of ultra-high purity electrolytic copper plates was calculated. The specific results are shown in Table 1.

[0074] Table 1

[0075] project Example 1 Example 2 Example 3 Example 4 Comparative Example 1 Comparative Example 2 Yield 99.3％ 99.2％ 99.3％ 99.5％ 82.0％ 87.8％

[0076] From Table 1, we can see the following points:

[0077] (1) The liquid regulating device for removing gas from copper electrolyte described in the utility model greatly improves the yield of ultra-high purity electrolytic copper, with a yield of ≥99%, and can reduce the pores on the ultra-high purity electrolytic copper plate, solving the problem of low qualified rate of ultra-high purity electrolytic copper produced by traditional electrolysis method;

[0078] (2) Comparing Example 1 with Example 4, the first liquid regulating tank and the second liquid regulating tank are respectively set as closed tank bodies, and a vacuum pumping device is set on the top of the tank. The yield rate is improved to a limited extent, but the equipment cost is greatly increased;

[0079] (3) Comparing Example 1 with Comparative Example 1, if the first liquid inlet pipe groove inner section 6 and the second liquid inlet pipe groove inner section 7 are omitted, only the circulation of the copper electrolyte is realized, and the gas in the copper electrolyte cannot be released when it gushes upward from the liquid outlet pipe opening to the liquid surface, and the yield is only 82.0%;

[0080] (4) Comparing Example 1 with Comparative Example 2, if the second liquid regulating tank 2 and its related connections are completely omitted, the degree of gas in the copper electrolyte gushing upward from the opening of the liquid outlet pipe will be greatly reduced, resulting in a yield of only 87.8%.

[0081] The above description is only a specific implementation method of the present utility model, but the protection scope of the present utility model is not limited thereto. Technicians in the relevant technical field should understand that any changes or substitutions that can be easily thought of by technicians in the relevant technical field within the technical scope disclosed in the present utility model fall within the protection scope and disclosure scope of the present utility model.

Claims

1. A liquid conditioning device for removing gas from a copper electrolyte, characterized in that: include: A first liquid regulating tank and a second liquid regulating tank, wherein the bottom outlet of the first liquid regulating tank is connected to the bottom inlet of the second liquid regulating tank via a first liquid inlet pipe, and the bottom outlet of the second liquid regulating tank is connected to the bottom inlet of the first liquid regulating tank via a second liquid inlet pipe, and a liquid inlet pump is provided on the first liquid inlet pipe and / or the second liquid inlet pipe; Among them, the outlet end of the first liquid inlet pipe penetrates into the interior of the second liquid regulating tank to form a first liquid inlet pipe groove inner section, and the outlet end of the second liquid inlet pipe penetrates into the interior of the first liquid regulating tank to form a second liquid inlet pipe groove inner section. The outlets of the first liquid inlet pipe groove inner section and the second liquid inlet pipe groove inner section are both sealed, and at least two liquid outlet holes are opened on the pipeline respectively.

2. The liquid regulating device for removing gas from copper electrolyte according to claim 1, characterized in that: The diameter of the liquid outlet hole is 1-2 cm.

3. The liquid regulating device for removing gas from copper electrolyte according to claim 1, characterized in that: The average distance between two adjacent liquid outlet holes is 10-20 cm.

4. The liquid regulating device for removing gas from copper electrolyte according to claim 1, characterized in that: The inner section of the first liquid inlet pipe groove contacts the bottom of the second liquid regulating groove; the inner section of the second liquid inlet pipe groove contacts the bottom of the first liquid regulating groove.

5. The liquid regulating device for removing gas from copper electrolyte according to claim 4, characterized in that: The liquid outlet direction of the liquid outlet is upward.

6. The liquid regulating device for removing gas from copper electrolyte according to claim 1, characterized in that: In a direction parallel to the inner section of the first liquid inlet pipe groove, the length of the second liquid regulating groove is 1.2-1.7 times the length of the inner section of the first liquid inlet pipe groove; In a direction parallel to the inner section of the second liquid inlet pipe groove, the length of the first liquid regulating groove is 1.2-1.7 times the length of the inner section of the second liquid inlet pipe groove.

7. The liquid regulating device for removing gas from copper electrolyte according to claim 1, characterized in that: It also includes an additive tank; the bottom outlet of the additive tank is provided with an additive liquid outlet pipe, and the outlet of the additive liquid outlet pipe is deep below the liquid level of the first liquid regulating tank.

8. The liquid regulating device for removing gas from copper electrolyte according to claim 1, characterized in that: A purification and filtering device is arranged at the outlet of the liquid inlet pump.

9. The liquid regulating device for removing gas from copper electrolyte according to claim 1, characterized in that: The first liquid regulating tank is a closed tank body, and a vacuum pumping device is arranged on the top of the first liquid regulating tank.

10. The liquid regulating device for removing gas from copper electrolyte according to claim 1 or 9, characterized in that: The second liquid adjusting tank is a closed tank body, and a vacuum pumping device is arranged on the top of the second liquid adjusting tank.

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