Nitrogen purging device for vertical oxidation furnace

Abstract

The utility model discloses a vertical oxidizing furnace nitrogen purging device and relates to semiconductor processing equipment. Comprising a bottom ring, an upper ring and a plurality of nitrogen pipes, the plurality of nitrogen pipes are uniformly and fixedly arranged between the bottom ring and the upper ring; the bottom ring is provided with a plurality of air inlet holes matched with nitrogen pipes. A plurality of air blowing holes which are uniformly distributed from top to bottom are formed in the nitrogen pipe; and the blowing holes are used for blowing towards the adjacent nitrogen pipes. The beneficial effects of the utility model are that: when entering the boat, the PLC is used for controlling, nitrogen is introduced into the nitrogen pipe, the wafer is in the nitrogen atmosphere, oxygen is isolated, the generation of a thin oxide layer is resisted, and after the boat entering is finished, the introduction of nitrogen is stopped. And when the wafer is taken out of the boat, the PLC instructs to introduce nitrogen, so that the wafer is in the nitrogen atmosphere, oxygen is isolated, the generation of a thin oxide layer is resisted, and after the boat is taken out of the boat, the introduction of nitrogen is stopped after delaying for 30 minutes.

Description

Technical Field

[0001] The utility model relates to semiconductor processing equipment, in particular to a nitrogen purge device for a vertical oxidation furnace. Background Art

[0002] In the semiconductor diffusion process, it is necessary to use a normal pressure vertical oxidation furnace tube. When the wafer enters and leaves the boat, the wafer is exposed to the air. Since the standby temperature of the oxidation furnace is relatively high (about 750 "C), the wafer is in contact with the outside air at the furnace mouth when entering and leaving the boat, which is easy to generate a thin layer of oxidation (about 10 angstroms), which is not conducive to the film thickness process control of the thin layer (less than 50 angstroms) oxidation process. Utility Model Content

[0003] In view of the above problems, the utility model provides a nitrogen purge device for a vertical oxidation furnace which can protect silicon wafers from contacting with air at high temperature and avoid the formation of a natural oxide layer.

[0004] The technical solution of the utility model is:

[0005] A nitrogen purge device for a vertical oxidation furnace, comprising a bottom ring, an upper ring and a plurality of nitrogen pipes;

[0006] A plurality of the nitrogen pipes are evenly and fixedly arranged between the bottom ring and the upper ring;

[0007] The bottom ring is provided with a plurality of air inlet holes adapted to the nitrogen pipes;

[0008] The nitrogen pipe is provided with a plurality of blowing holes evenly distributed from top to bottom; the blowing holes blow air toward the direction of the nitrogen pipes adjacent thereto.

[0009] Specifically, the nitrogen pipe includes single pipe one and single pipe two.

[0010] Specifically, the angle between the upper blowing hole of the single tube 1 and the upper blowing hole of the single tube 2 is 90° to 180°.

[0011] Specifically, the included angle between the upper air blowing hole of the single tube 1 and the upper air blowing hole of the single tube 2 is 120°.

[0012] Specifically, the plurality of air inlet holes on the bottom ring are respectively connected to the pneumatic system; the pneumatic system comprises:

[0013] Solenoid valve, whose control end is connected to PLC;

[0014] A pneumatic valve, one end of which is connected to the electric valve, and the other end is connected to the air source through a filter;

[0015] The flow valve has an air inlet end connected to the pneumatic valve and an air outlet end connected to the air inlet hole of the bottom ring.

[0016] Beneficial effects of the utility model:

[0017] When entering the boat, the PLC controls the nitrogen pipe to pass nitrogen, and the wafers are placed in a nitrogen atmosphere to isolate oxygen and resist the formation of a thin oxide layer. After entering the boat, the nitrogen flow is stopped. When leaving the boat, the PLC instructs the nitrogen to be passed, and the wafers are also placed in a nitrogen atmosphere to isolate oxygen and resist the formation of a thin oxide layer. After leaving the boat, the nitrogen flow is stopped after a delay of 30 minutes. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional structural schematic diagram of the utility model.

[0019] Figure 2 This is a schematic diagram of the single-tube one and single-tube two configuration.

[0020] Figure 3 This is a three-dimensional structural diagram of the quartz boat set in the device of this case.

[0021] Figure 4 It is a schematic diagram of the pneumatic system principle;

[0022] In the figure, 100 is the bottom ring, 200 is the upper ring, 300 is the nitrogen pipe, 301 is the air inlet, 310 is the single tube one, 320 is the single tube two, 400 is the quartz boat, and 500 is the insulation furnace. DETAILED DESCRIPTION

[0023] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0024] In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", "vertical", "horizontal", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0025] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] The following describes an embodiment of the utility model with reference to FIGS. 1-4 ;

[0027] A nitrogen purge device for a vertical oxidation furnace, comprising a bottom ring 100, an upper ring 200 and a plurality of nitrogen pipes 300;

[0028] A plurality of nitrogen pipes 300 are evenly and fixedly arranged between the bottom ring 100 and the upper ring 200;

[0029] The bottom ring 100 is provided with a plurality of air inlet holes 301 adapted to the nitrogen pipe 300;

[0030] The nitrogen pipe 300 is provided with a plurality of blowing holes evenly distributed from top to bottom; the blowing holes blow toward the nitrogen pipe 300 adjacent thereto.

[0031] It is further defined that the nitrogen pipe 300 includes a single pipe 1 310 and a single pipe 2 320 .

[0032] The included angle between the blowing hole on the single tube 1 310 and the blowing hole on the single tube 2 320 is 90° to 180°.

[0033] The angle between the blowing hole on the single tube 1 310 and the blowing hole on the single tube 2 320 is 120°. Figure 2 shown.

[0034] It is further defined that the plurality of air inlet holes 301 on the bottom ring 100 are respectively connected to a pneumatic system; the pneumatic system comprises:

[0035] The solenoid valve, whose control end is connected to the PLC, controls the opening and closing of the pneumatic valve to drive the compressed air, thereby controlling the opening and closing of the pneumatic valve;

[0036] Pneumatic valve, whose driving compressed air end is connected to the electric valve, and the normally closed end of the valve body is connected to the air source through a filter; the pneumatic valve controls the entry and disconnection of nitrogen;

[0037] The flow valve has an air inlet end connected to the pneumatic valve, and an air outlet end connected to the air inlet hole 301 of the bottom ring 100 .

[0038] How to use this case:

[0039] 1. After the quartz boat 400 completes the film transfer, the device of this case is lowered to the insulation furnace 500 of the vertical oxidation furnace and is set on the outside of the quartz boat 400, that is, it is lowered to the same level as the quartz boat 400. Nitrogen is introduced into the nitrogen pipe 300 to purge and drive away the air. After a period of purge, the boat is raised. The quartz boat and the cage seat (including the bottom ring 100, several nitrogen pipes 300 and the upper ring 200 that are fixedly connected in sequence) must be detachably fixed to the insulation barrel by pins and enter the oxidation furnace together.

[0040] 2. After the oxidation furnace process is completed, chlorine gas is introduced for gas protection to isolate the air; when the quartz boat 400 is cooled to room temperature, the device in this case is hoisted and moved.

[0041] Regarding the contents disclosed in this case, there are a few points that need to be explained:

[0042] (1) The drawings of the embodiments disclosed in this case only involve the structures involved in the embodiments disclosed in this case. Other structures can refer to the general design;

[0043] (2) In the absence of conflict, the embodiments and features of the embodiments disclosed in this case may be combined with each other to obtain new embodiments;

[0044] The above are only specific implementation methods disclosed in this case, but the protection scope of the present disclosure is not limited thereto. The protection scope disclosed in this case should be based on the protection scope of the claims.

Claims

1. A nitrogen purge device for a vertical oxidation furnace, characterized in that: It includes a bottom ring, an upper ring and a number of nitrogen tubes; A plurality of the nitrogen pipes are evenly and fixedly arranged between the bottom ring and the upper ring; The bottom ring is provided with a plurality of air inlet holes adapted to the nitrogen pipes; The nitrogen pipe is provided with a plurality of blowing holes evenly distributed from top to bottom; the blowing holes blow air toward the direction of the nitrogen pipes adjacent thereto.

2. The nitrogen purge device for a vertical oxidation furnace according to claim 1, characterized in that: The nitrogen pipe includes a single pipe one and a single pipe two.

3. The nitrogen purge device for a vertical oxidation furnace according to claim 2, characterized in that: The angle between the upper air blowing hole of the single tube one and the upper air blowing hole of the single tube two is 90° to 180°.

4. The nitrogen purge device for a vertical oxidation furnace according to claim 2, characterized in that: The included angle between the upper air blowing hole of the single tube one and the upper air blowing hole of the single tube two is 120°.

5. The nitrogen purge device for a vertical oxidation furnace according to claim 2, characterized in that: The plurality of air inlet holes on the bottom ring are respectively connected to the pneumatic system; the pneumatic system comprises: Solenoid valve, whose control end is connected to PLC; A pneumatic valve, one end of which is connected to the electric valve, and the other end is connected to the air source through a filter; The flow valve has an air inlet end connected to the pneumatic valve and an air outlet end connected to the air inlet hole of the bottom ring.

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