Vacuum degree measuring device for parylene coating equipment

Abstract

The utility model relates to the technical field of coating equipment, in particular to a vacuum degree measuring device for parylene coating equipment. Comprising a shell, a partition plate, a stand column, a heating assembly and an electronic vacuum gauge, the shell is in a barrel shape, a sealing cover is arranged on the shell, the barrel is wrapped with the heating assembly, a connecting pipe is arranged on the sealing cover and communicated with a vacuum coating cavity, and the partition plate is arranged in an inner cavity of the barrel. The partition plates are discs with the same inner diameter as the barrel body and are arranged in multiple layers, a center hole is formed in the middle of each layer, stand columns penetrate through the center holes to fix the partition plates in an inner cavity of the barrel body at intervals, and the stand columns are fixed to the bottom of the barrel body. Each partition plate is divided into eight areas according to 45 degrees, a plurality of through holes are formed in four of the eight areas, and the areas with the through holes and the areas without the through holes are arranged at intervals. In the multiple layers of partition plates in the inner cavity of the barrel body, the area with the through holes in the lower-layer partition plate corresponds to the area without the through holes in the upper-layer partition plate. And the electronic vacuum gauge is positioned below the bottommost partition plate. And the inner cavity of the barrel body is heated to 50-120 DEG C during working.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating equipment, in particular to a vacuum degree measuring device for parylene film coating equipment. Background Art

[0002] In the Parylene vacuum coating equipment, the coating chamber needs to accurately measure the internal pressure. However, Parylene coating occurs in almost all parts of the chamber, so the pressure sensor may also be covered by the Parylene film, which may reduce the sensitivity of the vacuum pressure sensor or even destroy it. Utility Model Content

[0003] The main purpose of the utility model is to provide a method for effectively solving the problems raised in the background technology.

[0004] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a vacuum degree measuring device for parylene coating equipment, comprising a shell, a partition, a column, a heating component, and an electronic vacuum gauge. The shell is in the shape of a barrel with a sealing cover on it, a heating component wrapped around the outside of the barrel, an electronic vacuum gauge arranged on the lower side of the barrel, a connecting pipe arranged on the sealing cover to connect to the vacuum coating cavity, and a partition arranged in the inner cavity of the barrel.

[0005] Preferably, the partition is a disc with the same diameter as the barrel body, and is provided with multiple layers, with a center hole in the middle of each layer. The partition is fixed in the barrel body cavity by passing through the center hole with a column, and the column is fixed to the bottom of the barrel body.

[0006] Preferably, the partition is divided into eight areas at 45 degrees each, wherein four areas are provided with a plurality of through holes, and the areas with through holes are spaced apart from the areas without through holes.

[0007] Preferably, in the multi-layer partitions in the upper cavity of the barrel body, the area with through holes on the lower partition corresponds to the area without through holes on the upper partition.

[0008] Preferably, the electronic vacuum gauge is located below the bottommost partition.

[0009] Preferably, the inner cavity of the barrel is heated to 50-120° C. during operation.

[0010] Beneficial effects of the utility model: the device is connected to the coating cavity through a pipeline, but a multi-layer partition is provided to effectively prevent active parylene molecules from entering the bottom layer and contacting the pressure sensor. Because parylene preferentially adheres to the low-temperature surface to form a film, the inner cavity of the barrel is heated to 50-120°C during operation, which effectively reduces the probability of parylene adhering to the device to form a film. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Attached Figure 1 It is a sectional view of the three-dimensional structure of the utility model.

[0012] Attached Figure 2 This is a three-dimensional diagram of the appearance of the utility model.

[0013] Attached Figure 1 , 2 Among them, a heating component 1, a barrel body 2, a connecting pipe 3, a sealing cover 4, an electronic vacuum gauge 5, a vacuum coating chamber 6, a column 7, and a partition 8. DETAILED DESCRIPTION

[0014] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0015] Example 1

[0016] Attached Figure 1 , 2 As shown in the figure, a vacuum degree measuring device for parylene coating equipment includes a shell, a partition, a column, a heating component, and an electronic vacuum gauge. The shell is in the shape of a barrel body 2 with a sealing cover 4 on it. The heating component 1 is wrapped around the outer side of the barrel body 2. An electronic vacuum gauge 5 is arranged on the lower side of the barrel body 2. A connecting pipe 3 is arranged on the sealing cover 4 to connect to the vacuum coating cavity 6, and a partition 8 is arranged in the inner cavity of the barrel body.

[0017] The partition 8 is a disc with the same inner diameter as the barrel body 2, and is provided with multiple layers. A center hole is provided in the middle of each layer. The partition is fixed to the inner cavity of the barrel body 2 by passing through the center hole with a column 7, and the column 7 is fixed to the bottom of the barrel body 2.

[0018] The partition plate 8 is divided into eight areas at 45 degrees each, wherein four areas are provided with a plurality of through holes, and the areas with through holes are spaced apart from the areas without through holes.

[0019] The multi-layer partitions 8 in the inner cavity of the barrel body 2 are arranged in sequence, with the area with through holes on the lower partition corresponding to the area without through holes on the upper partition.

[0020] The electronic vacuum gauge 5 is located below the bottommost partition plate.

[0021] The inner cavity of the barrel body 2 is heated to 70° C. during operation.

[0022] The device is connected to the coating chamber through a pipeline, but a multi-layer partition is set to effectively prevent the active parylene molecules from entering the bottom layer and contacting the pressure sensor. Because parylene preferentially adheres to the low-temperature surface to form a film, the inner cavity of the barrel is heated to 50-120°C during operation, which effectively reduces the probability of parylene adhering to the device to form a film.

[0023] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum degree measuring device for parylene coating equipment, characterized in that: It includes a shell, a partition, a column, a heating component, and an electronic vacuum gauge. The shell is in the shape of a barrel with a sealing cover on it. The heating component is wrapped around the outside of the barrel, an electronic vacuum gauge is arranged on the lower side of the barrel, a connecting pipe is arranged on the sealing cover to connect to the vacuum coating cavity, and a partition is arranged in the inner cavity of the barrel.

2. The vacuum degree measuring device of Parylene coating equipment according to claim 1, characterized in that: The partition is a disc with the same diameter as the barrel body, and is provided with multiple layers. A center hole is provided in the middle of each layer. The partition is fixed in the barrel body cavity by passing through the center hole with a column, and the column is fixed at the bottom of the barrel body.

3. The vacuum degree measuring device of Parylene coating equipment according to claim 1, characterized in that: The partition is divided into eight areas at 45 degrees each, wherein four areas are provided with a plurality of through holes, and the areas with through holes are spaced apart from the areas without through holes.

4. The vacuum degree measuring device of Parylene coating equipment according to claim 1, characterized in that: The multiple-layer partitions in the inner cavity of the barrel body, the area with through holes on the lower partition corresponds to the area without through holes on the upper partition.

5. The vacuum degree measuring device of Parylene coating equipment according to claim 1, characterized in that: The electronic vacuum gauge is located below the bottommost partition plate.

6. The vacuum degree measuring device of Parylene coating equipment according to claim 1, characterized in that: The inner cavity of the barrel is heated to 50-120° C. during operation.

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