Vacuum magnetic driving device and vacuum sample transfer system

Abstract

The utility model relates to the technical field of vacuum equipment, and discloses a vacuum magnetic driving device which comprises an outer sleeve, a driving magnetic assembly and a transmission magnetic assembly. The outer sleeve is used for forming a vacuum cavity. The driving magnetic assembly comprises a rotary motion driving magnet and a linear motion driving magnet. And the rotary motion driving magnet is arranged outside the outer sleeve. And the linear motion driving magnet is arranged outside the outer sleeve, is rotationally connected with the rotary motion driving magnet, and can drive the rotary motion driving magnet to do linear motion. The transmission magnetic assembly comprises a transmission rod and a transmission magnet. The transmission magnet is connected with the transmission rod, and the driving magnetic assembly is magnetically coupled with the transmission magnet so as to drive the transmission rod to do linear motion or rotary motion.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum equipment, and in particular to a vacuum magnetic drive device and a vacuum sample transfer system. Background Art

[0002] The existing vacuum magnetic coupling sample transfer rod is divided into four parts: outer tube, outer magnetic sleeve, inner magnetic rod, and lifting seat. The outer magnetic sleeve can rotate around the outer tube, drive the inner magnetic rod to rotate through magnetic coupling, and the rotation of the inner magnetic rod drives the lifting seat up and down through the gear rack, thereby converting the rotational motion outside the vacuum into the up and down motion inside the vacuum; the outer magnetic sleeve can also move linearly along the outer tube, drive the inner magnetic rod and the lifting seat to move linearly as a whole through magnetic coupling, thereby converting the linear motion outside the vacuum into the linear motion inside the vacuum.

[0003] The outer magnetic sleeve of the existing vacuum magnetic coupling transfer rod has a single function and cannot achieve independent linear and rotational motion. When the outer magnetic sleeve moves linearly, it cannot be guaranteed that the outer magnetic sleeve does not rotate around the outer tube; when it moves rotationally, it cannot be guaranteed that the outer magnetic sleeve does not move linearly along the outer tube, thus affecting the accuracy of the motion. Utility Model Content

[0004] The present disclosure provides a vacuum magnetic drive device, comprising:

[0005] An outer sleeve, used for forming a vacuum chamber;

[0006] Drive magnetic assembly, including:

[0007] A rotational motion driving magnet is disposed outside the outer sleeve; and

[0008] A linear motion driving magnet is disposed outside the outer sleeve, is rotatably connected to the rotary motion driving magnet, and is capable of driving the rotary motion driving magnet to move linearly; and

[0009] Transmission magnetic assembly, including:

[0010] Transmission rod;

[0011] The transmission magnet is connected to the transmission rod, and the driving magnetic assembly is magnetically coupled with the transmission magnet to drive the transmission rod to perform linear motion or rotational motion.

[0012] In some embodiments of the present disclosure, the driving magnetic assembly further comprises:

[0013] A linear motion locking member for locking the linear motion drive magnet; and / or

[0014] A rotational motion locking member for locking the rotational motion driving magnet; and / or

[0015] The driving magnet bearing rotatably connects the linear motion driving magnet with the rotary motion driving magnet. The rotary motion driving magnet can perform rotational motion relative to the linear motion driving magnet. The linear motion driving magnet can drive the rotary motion driving magnet to perform linear motion.

[0016] In some embodiments of the present disclosure, the linear motion locking member includes a linear motion locking nut, which is passed through the linear motion driving magnet and has a distal end that can abut against the outer sleeve to lock the linear motion driving magnet; and / or

[0017] The rotary motion locking member comprises a rotary motion locking nut which is passed through the rotary motion driving magnet and whose end can abut against the linear motion driving magnet to lock the rotary motion driving magnet.

[0018] In some embodiments of the present disclosure, the transmission magnet assembly also includes a transmission rod sleeve, which is arranged between the transmission rod and the outer sleeve, the proximal end of the transmission rod sleeve is rotationally connected to the transmission magnet, and the outer wall of the transmission rod sleeve is slidingly connected to the outer sleeve.

[0019] In some embodiments of the present disclosure, the vacuum magnetic drive device further comprises at least one set of bearing assemblies, wherein the at least one set of bearing assemblies comprises:

[0020] A rear raceway bearing seat assembly is disposed at the proximal end of the transmission magnet, is rotationally connected to the transmission magnet, and is slidingly connected to the inner wall of the outer sleeve; and / or

[0021] The front raceway bearing seat assembly is arranged at the far end of the transmission magnet, is rotationally connected with the transmission magnet and / or the transmission rod, and is slidingly connected with the inner wall of the outer sleeve.

[0022] In some embodiments of the present disclosure, the rear raceway bearing seat assembly includes:

[0023] A rear raceway bearing frame is rotatably connected to the proximal end of the transmission magnet;

[0024] At least one rear track runner shaft is arranged on the rear track bearing frame at intervals along the circumference of the rear track bearing frame; and

[0025] At least one rear roller is mounted on at least one rear roller shaft, and the at least one rear roller can roll on the inner wall of the outer sleeve along the axial direction of the outer sleeve without gap; and / or

[0026] Front raceway bearing housing assembly, including:

[0027] A front raceway bearing frame is rotatably connected to the distal end of the transmission magnet and / or the proximal end of the transmission rod, and

[0028] Fixedly connected to the transmission rod sleeve;

[0029] At least one front raceway runner shaft is arranged on the front raceway bearing frame at intervals along the circumference of the front raceway bearing frame; and

[0030] At least one front roller is mounted on at least one front roller shaft. The at least one front roller can roll on the inner wall of the outer sleeve along the axial direction of the outer sleeve without any gap.

[0031] In some embodiments of the present disclosure, the vacuum magnetic drive device further comprises:

[0032] A guide support bar is fixedly arranged outside the transmission rod sleeve along the axial direction of the transmission rod sleeve;

[0033] A distal flange, sealed and fixedly connected to the distal end of the outer sleeve;

[0034] Front end support bearing housing assembly, including:

[0035] The front end supports the bearing frame and is connected to the far end flange;

[0036] A lower support bearing is arranged on the front end support bearing frame, and the lower support bearing is rollingly connected with the lower surface of the guide support strip;

[0037] The left guide bearing and the right guide bearing are arranged on the front end support bearing frame, and the left guide bearing and the right guide bearing are respectively connected with the left surface and the right surface of the guide support strip in a rolling manner.

[0038] In some embodiments of the present disclosure, the front end support bearing frame includes a through hole, and the front end support bearing seat assembly further includes:

[0039] A plurality of circumferential support bearings are disposed on an end surface of one side of the front end support bearing frame around the through hole, a transmission rod sleeve passes through the through hole, and an outer surface of the transmission rod sleeve is rollingly connected to the plurality of circumferential support bearings; and / or

[0040] At least one latch protrudes radially from the front end support bearing frame and is latched on the distal end flange.

[0041] In some embodiments of the present disclosure, the vacuum magnetic drive device also includes a spacing guide pad, which is arranged between the linear motion drive magnet and the outer sleeve, and the end of the linear motion locking member can abut against the spacing guide pad to lock the linear motion drive magnet.

[0042] In some embodiments of the present disclosure, the vacuum magnetic drive device further includes a linear slot plate, which is disposed outside the outer sleeve and fixedly connected to the outer sleeve, and the linear slot plate includes:

[0043] Linear card slots; and

[0044] The guide shaft is fixedly connected to the linear motion driving magnet, and at least a part of the guide shaft is located in the linear slot to guide the linear motion of the transmission rod.

[0045] In some embodiments of the present disclosure, the vacuum magnetic drive device further includes a scale for measuring the displacement of the linear motion part of the linear motion drive magnet; and / or

[0046] The rotary motion drive magnet or the linear motion drive magnet includes a scale for measuring the displacement amount of the rotary motion part.

[0047] In some embodiments of the present disclosure, the vacuum magnetic drive device further includes a sample transfer platform, which is arranged at the distal end of the transmission rod, and the sample transfer platform is driven to extend and retract through the linear movement of the transmission rod, and the sample transfer platform is driven to rise and fall through the rotational movement of the transmission rod;

[0048] The sample transfer station includes:

[0049] A bearing fixing seat is rotatably connected to the transmission rod and fixedly connected to the distal end of the transmission rod sleeve;

[0050] The gear is connected to the transmission rod, and the gear is driven to rotate through the transmission rod;

[0051] A lifting seat connected to the bearing fixing seat through a cross roller guide; and

[0052] The back of the rack is fixedly connected to the lifting seat, and the rack is meshed with the gear to drive the lifting seat to move up and down through the cross roller guide rail.

[0053] The present disclosure provides a vacuum sample transfer system, comprising:

[0054] a vacuum chamber; and

[0055] According to the vacuum magnetic drive device provided by any one of the embodiments of the present disclosure, the sample transfer table of the vacuum magnetic drive device is arranged in a vacuum chamber.

[0056] The vacuum magnetic drive device and vacuum sample transfer system according to some embodiments of the present disclosure can bring beneficial technical effects. For example, in the vacuum magnetic drive device and vacuum sample transfer system of some embodiments of the present disclosure, the linear motion outer magnetic sleeve and the rotational motion outer magnetic sleeve can move and lock independently, and do not affect each other during movement, thereby ensuring the accuracy of linear motion and rotational motion. For another example, in the vacuum magnetic drive device and vacuum sample transfer system of some embodiments of the present disclosure, the linear motion is coordinated with a ruler, and the outer scale of the rotating part is engraved, so that the precise position of the sample transfer table during movement can be known. For another example, in the vacuum magnetic drive device and vacuum sample transfer system of some embodiments of the present disclosure, the sample transfer table adopts a linear cross-roller structure: the load and accuracy of the sample transfer table are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0057] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0058] Figure 1 A schematic structural diagram of a vacuum magnetic drive device according to some embodiments of the present disclosure is shown;

[0059] Figure 2 Show Figure 1 AA section view;

[0060] Figure 3 A schematic diagram showing the structure of a driving magnetic assembly according to some embodiments of the present disclosure is shown;

[0061] Figure 4 A schematic cross-sectional view showing a driving magnetic assembly according to some embodiments of the present disclosure;

[0062] Figure 5A A schematic diagram showing the structure of a transmission magnetic assembly according to some embodiments of the present disclosure is shown;

[0063] Figure 5B Show Figure 5A CC profile of ;

[0064] Fig. 6A A schematic structural diagram showing a rear raceway bearing seat assembly according to some embodiments of the present disclosure;

[0065] Figure 6B A side view showing a rear raceway bearing seat assembly according to some embodiments of the present disclosure;

[0066] Figure 6C Show Figure 6B DD profile diagram;

[0067] Fig.6D Show Figure 6C A partial enlarged schematic diagram within the circle;

[0068] Fig. 7A A schematic structural diagram showing a front end support bearing seat assembly according to some embodiments of the present disclosure;

[0069] Figure 7B A side view showing a front end support bearing seat assembly according to some embodiments of the present disclosure;

[0070] Figure 7C Show Figure 7B EE profile of

[0071] Fig.7D A front view showing a front end support bearing seat assembly according to some embodiments of the present disclosure;

[0072] Fig. 7E A rear view of a front end support bearing seat assembly according to some embodiments of the present disclosure is shown;

[0073] Figure 8 A schematic diagram showing the structure of a linear slot plate of a vacuum magnetic drive device according to some embodiments of the present disclosure is shown;

[0074] Fig. 9 A cross-sectional schematic diagram showing a sample transfer station according to some embodiments of the present disclosure;

[0075] Fig.10 A schematic structural diagram of a vacuum sample transfer system according to some embodiments of the present disclosure is shown.

[0076] In the above drawings, the reference numerals represent:

[0077] 1000-Vacuum Sample Transfer System

[0078] 100-Vacuum Magnetic Drive Device

[0079] 110-Outer sleeve

[0080] 111-Far end flange

[0081] 120-Drive Magnetic Assembly

[0082] 121-Rotary motion drive magnet

[0083] 12101-Limiting column

[0084] 122-Linear Motion Drive Magnet

[0085] 12201-Limiting slot

[0086] 123-Drive Magnetic Bearing

[0087] 124-Rotation scale

[0088] 125-Rotational locking element

[0089] 126-Linear Motion Locking Parts

[0090] 130-Transmission magnetic assembly

[0091] 131-Transmission rod

[0092] 132-Transmission magnet

[0093] 13201-Transmission magnet fixed shaft

[0094] 133-Transmission rod sleeve

[0095] 134a, 134b-Coupling

[0096] 140-Sample transfer station

[0097] 141-Bearing fixing seat

[0098] 142-Gear

[0099] 14201-Gear shaft

[0100] 143-Lifting seat

[0101] 144-Rack

[0102] 145-Cross Roller Guide

[0103] 150-Bearing assembly

[0104] 151-Rear raceway bearing seat assembly

[0105] 15101-Rear raceway bearing frame

[0106] 15102-Rear raceway runner shaft

[0107] 15103-Rear Roller

[0108] 15104-Rear raceway bearing

[0109] 152-Front end support bearing seat assembly

[0110] 15201-Front end support bearing frame

[0111] 152011-Through hole

[0112] 15202-Lower support bearing

[0113] 15203-Circumferential support bearing

[0114] 15204a-Left guide bearing

[0115] 15204b-right guide bearing

[0116] 15205 - At least one tab

[0117] 153-Front raceway bearing seat assembly

[0118] 160-Guide support strip

[0119] 170-Linear Slot Plate

[0120] 171-Linear card slot

[0121] 172-Guide shaft

[0122] 180-ruler

[0123] 181-Indicator

[0124] 200-Vacuum Chamber

[0125] 210-lofting cavity

[0126] 220-gate valve

[0127] 230-Processing Chamber DETAILED DESCRIPTION

[0128] Some embodiments of the present disclosure will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0129] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "coupled" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. In the description of the present disclosure, the distal end or the distal side refers to an end or a side that penetrates into a vacuum environment (e.g., a vacuum chamber), and the proximal end or the proximal side refers to an end or a side opposite to the distal end or the distal side (e.g., an end or a side that is away from the vacuum chamber, or an end or a side that is close to the vacuum chamber wall in the vacuum chamber, etc.). For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0130] Figure 1 A schematic structural diagram of a vacuum magnetic drive device 100 according to some embodiments of the present disclosure is shown. Figure 2 Show Figure 1 AA cross-section diagram. Figure 3 A schematic structural diagram of a driving magnetic assembly according to some embodiments of the present disclosure is shown. Figure 4 A cross-sectional schematic diagram of a drive magnet assembly according to some embodiments of the present disclosure is shown.

[0131] like Figure 1-Figure 2As shown, in some embodiments of the present disclosure, the vacuum magnetic drive device 100 may include an outer sleeve 110, a driving magnetic assembly 120 and a transmission magnetic assembly 130. The outer sleeve 110 is used to form a vacuum chamber. Figure 3-Figure 4 As shown, the driving magnet assembly 120 may include a rotary motion driving magnet 121 and a linear motion driving magnet 122. The linear motion driving magnet 122 is rotationally connected to the rotary motion driving magnet 121 (for example, the linear motion driving magnet 122 and the rotary motion driving magnet 121 may be rotationally connected via a driving magnet bearing 123), and the linear motion driving magnet 122 can drive the rotary motion driving magnet 121 to move linearly. Figure 2 As shown, the transmission magnet assembly 130 may include a transmission rod 131 and a transmission magnet 132. The transmission magnet 132 is connected to the transmission rod 131, and the driving magnet assembly 120 is magnetically coupled to the transmission magnet 132 to drive the transmission rod 131 to perform linear motion or rotational motion.

[0132] Those skilled in the art will appreciate that, in the present disclosure, magnets (e.g., rotary motion drive magnets 121, linear motion drive magnets 122, or transmission magnets 132) should be interpreted broadly and may include magnetic objects (e.g., permanent magnets), materials that can magnetically couple with magnetic objects (e.g., iron), or devices that can generate magnetism (e.g., electromagnets), etc. In addition, for the convenience of description, in the present disclosure, magnets may refer to individual magnetic objects or devices, or to components of magnetic objects or devices. For example, a magnet may refer to a plurality of permanent magnets arranged in a distributed manner and a frame or body that supports the permanent magnets. For another example, the linear motion drive magnet 122 is rotatably connected to the rotary motion drive magnet 121, which can be achieved by connecting the frame in the linear motion drive magnet 122 to the frame in the rotary motion drive magnet 121 using a drive magnet bearing 123, such as Figure 4 As shown, and described in detail below.

[0133] like Figure 2 As shown, in some embodiments of the present disclosure, the transmission magnet 132 includes a transmission magnet fixing shaft 13201, and the transmission magnet fixing shaft 13201 is connected to the transmission rod 131 through a coupling 134a. In some embodiments, an intermediate connecting rod may be further provided between the transmission magnet fixing shaft 13201 and the transmission rod 131, such as Figure 2 and Figure 5B For simplicity, the intermediate connecting rod can be regarded as a part of the transmission magnet fixed shaft 13201 or the transmission rod 131. For example, in some embodiments, the intermediate connecting rod is a part of the transmission magnet fixed shaft 13201, the transmission magnet fixed shaft 13201 is a stepped shaft, and the distal end diameter of the transmission magnet fixed shaft 13201 is smaller than the proximal end diameter, so as to facilitate the distal end of the transmission magnet fixed shaft 13201 to be connected to the transmission rod 131 through the coupling 134a.

[0134] like Figure 3-Figure 4 As shown, in some embodiments of the present disclosure, the drive magnet assembly 120 may further include a linear motion locking member 126 and / or a rotational motion locking member 125. The linear motion locking member 126 is used to lock the linear motion drive magnet 122. When a rotational motion is performed, the linear motion drive magnet 122 is locked by the linear motion locking member 126, for example, the friction between the outer sleeve 110 and the linear motion drive magnet 122 is increased, thereby achieving linear motion locking. The rotational motion locking member 125 is used to lock the rotational motion drive magnet 121. When a linear motion is performed, the rotational motion drive magnet 121 is locked by the rotational motion locking member 125, for example, by locking the rotational motion drive magnet 121 with the linear motion drive magnet 122, thereby preventing rotational motion from occurring during linear motion.

[0135] In some embodiments of the present disclosure, Figure 3-Figure 4 As shown, the drive magnet assembly 120 may further include a drive magnet bearing 123. The drive magnet bearing 123 rotatably connects the linear motion drive magnet 122 with the rotary motion drive magnet 121 (e.g., Figure 4 As shown, the inner ring of the driving magnet bearing 123 is fixedly connected to the linear motion driving magnet 122, and the outer ring of the driving magnet bearing 123 is fixedly connected to the rotary motion driving magnet 121). The rotary motion driving magnet 121 can perform a rotary motion relative to the linear motion driving magnet 122, and the linear motion driving magnet 122 can drive the rotary motion driving magnet 121 to perform a linear motion.

[0136] like Figure 3-Figure 4 As shown, in some embodiments of the present disclosure, the linear motion locking member 126 may include a linear motion locking nut, and / or the rotary motion locking member 125 may include a rotary motion locking nut. The linear motion locking nut 126 is passed through the linear motion driving magnet 122, and the end thereof can abut against the outer sleeve 110 to lock the linear motion driving magnet 122. The rotary motion locking nut 125 is passed through the rotary motion driving magnet 121, and the end thereof can abut against the linear motion driving magnet 122 to lock the rotary motion driving magnet 121.

[0137] Those skilled in the art will understand that Figure 3-Figure 4 The linear motion locking nut and the rotary motion locking nut shown are only exemplary. The vacuum magnetic drive device 100 may include multiple linear motion locking nuts and / or multiple rotary motion locking nuts, or may include other types of locking members, such as a rebound bayonet, etc.

[0138] Figure 5A A schematic structural diagram of a transmission magnetic assembly 130 according to some embodiments of the present disclosure is shown. Figure 5BShow Figure 5A CC cross-section diagram.

[0139] like Figure 5A , Figure 5B , Figure 1 as well as Figure 2 As shown, in some embodiments of the present disclosure, the transmission magnet assembly 130 may further include a transmission rod sleeve 133. The transmission rod sleeve 133 is disposed between the transmission rod 131 and the outer sleeve 110, and is sleeved outside the transmission rod 131. The proximal end of the transmission rod sleeve 133 is rotatably connected to the transmission magnet 132, and the outer wall of the transmission rod sleeve 133 is slidably connected to the outer sleeve 110.

[0140] like Figure 5A and Figure 5B As shown, in some embodiments of the present disclosure, the vacuum magnetic drive device 100 may further include at least one set of bearing assemblies 150. At least one set of bearing assemblies 150 may include a rear raceway bearing seat assembly 151 and / or a front raceway bearing seat assembly 153. The rear raceway bearing seat assembly 151 is disposed at the proximal end of the transmission magnet 132 and is rotatably connected to the transmission magnet 132. For example, Figure 5B As shown, the rear raceway bearing seat assembly 151 can be rotatably connected to the transmission magnet 132 (for example, the transmission magnet fixed shaft 13201) through a bearing. The rear raceway bearing seat assembly 151 is slidably connected to the inner wall of the outer sleeve 110. The front raceway bearing seat assembly 153 is arranged at the far end of the transmission magnet 132, and is rotatably connected to the transmission magnet 132 and / or the transmission rod 131. For example, the front raceway bearing seat assembly 153 can be rotatably connected to the transmission magnet 132 (for example, the transmission magnet fixed shaft 13201) and / or the transmission rod 131 through a bearing. In addition, the front raceway bearing seat assembly 153 is fixedly connected to the transmission rod sleeve 133, and is slidably connected to the inner wall of the outer sleeve 110.

[0141] Fig. 6A A schematic structural diagram of a rear raceway bearing seat assembly 151 according to some embodiments of the present disclosure is shown.

[0142] Figure 6B A side view of a rear raceway bearing adapter assembly 151 is shown according to some embodiments of the present disclosure. Figure 6C Show Figure 6B DD cross-section diagram. Fig.6D Show Figure 6C A magnified schematic diagram of the area within the circle.

[0143] like Figure 6A-6DAs shown, in some embodiments of the present disclosure, the rear raceway bearing seat assembly 151 may include a rear raceway bearing frame 15101, at least one rear raceway wheel shaft 15102, and at least one rear raceway wheel 15103. The rear raceway bearing frame 15101 is rotatably connected to the proximal end of the transmission magnet 132, for example, the rear raceway bearing frame 15101 and the proximal end of the transmission magnet 132 may be rotatably connected to the proximal end of the transmission magnet fixed shaft 13201 through a bearing. At least one rear raceway wheel shaft 15102 is arranged on the rear raceway bearing frame 15101 at intervals along the circumference of the rear raceway bearing frame 15101. At least one rear raceway wheel 15103 is mounted on at least one rear raceway wheel shaft 15102, and at least one rear raceway wheel 15103 can roll on the inner wall of the outer sleeve 110 without gap along the axial direction of the outer sleeve 110.

[0144] When the linear motion driving magnet 122 performs linear motion, the transmission magnet assembly 130 can be driven to perform linear motion through magnetic coupling. The transfer magnet 132, the transmission rod 131 and the transmission rod sleeve 133 slide along the axial direction of the outer sleeve 110 through the rolling of the rear raceway bearing seat assembly 151 on the inner wall of the outer sleeve 110 to perform linear motion. In some embodiments of the present disclosure, the outer surface of the rear raceway wheel 15103 fits the inner surface of the outer sleeve 110, so that the outer wall of at least one rear raceway wheel 15103 can roll on the inner wall of the outer sleeve 110 along the axial direction of the outer sleeve 110 without gap, so that the rear raceway bearing seat assembly 151 can have a larger load, extend the service life of the rear raceway bearing seat assembly 151 and have better guiding performance.

[0145] In some embodiments of the present disclosure, Figure 6A-6D As shown, the rear raceway bearing seat assembly 151 may include a rear raceway bearing frame 15101, six rear raceway runner shafts 15102, and six rear raceway runners 15103. However, those skilled in the art will appreciate that this is merely exemplary, and the rear raceway bearing seat assembly 151 may also include other numbers of rear raceway runner shafts 15102 and rear raceway runners 15103.

[0146] like Fig.6D As shown, in some embodiments of the present disclosure, the rear raceway bearing seat assembly 151 may further include at least two rear raceway bearings 15104, which are respectively arranged at both ends of at least one rear raceway wheel shaft 15102, and at least one rear raceway wheel 15103 is connected to at least one rear raceway wheel shaft 15102 via at least two rear raceway bearings 15104, so that the rear raceway wheel 15103 is more stable during operation, thereby improving the working performance of the vacuum magnetic drive device 100.

[0147] In some embodiments of the present disclosure, the front raceway bearing seat assembly 153 may include a front raceway bearing frame, at least one front raceway wheel shaft, and at least one front raceway wheel. The front raceway bearing frame is rotatably connected to the distal end of the transmission magnet 132 and / or the proximal end of the transmission rod 131. The front raceway bearing frame is fixedly connected to the proximal end of the transmission rod sleeve 133. For example, Figure 5B As shown, the front raceway bearing frame can be rotatably connected to the distal end (e.g., the middle connecting rod shown in the figure) of the transmission magnet fixed shaft 13201 of the transmission magnet 132. At least one front raceway wheel shaft is arranged on the front raceway bearing frame at intervals along the circumference of the front raceway bearing frame. At least one front raceway wheel is installed on at least one front raceway wheel shaft, and at least one front raceway wheel can roll on the inner wall of the outer sleeve without gap along the axial direction of the outer sleeve.

[0148] Those skilled in the art will appreciate that in some embodiments of the present disclosure, the front raceway bearing seat assembly 153 may adopt a structure identical or similar to that of the rear raceway bearing seat assembly 151, which will not be described in detail herein. When the linear motion driving magnet 122 performs linear motion, the transmission magnet assembly 130 may be driven to perform linear motion through magnetic coupling. The transfer magnet 132, the transmission rod 131, and the transmission rod sleeve 133 move along the inner wall of the outer sleeve 110 through the rear raceway bearing seat assembly 151 and the front raceway bearing seat assembly 153, which may provide better support for the transmission rod sleeve 133. The outer surfaces of the rear raceway runner 15103 and the front raceway runner are both in contact with the inner wall of the outer sleeve 110, which may enable the rear raceway bearing seat assembly 151 and the front raceway bearing seat assembly 153 to have a greater load and better guiding performance.

[0149] like Figure 2 and Figure 5B As shown, in some embodiments of the present disclosure, the vacuum driven magnetic device 100 may further include a guide support bar 160. The guide support bar 160 is fixedly disposed on the outer wall of the transmission rod sleeve 133 along the axial direction of the transmission rod sleeve 133.

[0150] In some embodiments of the present disclosure, the cross section of the guide support bar 160 is rectangular or trapezoidal, so as to better support the transmission rod sleeve 133 and prevent the transmission rod sleeve 133 from sagging. However, those skilled in the art will appreciate that Figure 2 and Figure 5B This is merely exemplary, and the cross-section of the transmission rod sleeve 133 may also be other shapes, such as circular, elliptical, etc.

[0151] like Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the vacuum driven magnetic device 100 may further include a distal flange 111. The proximal end of the distal flange 111 is sealed and fixedly connected to the distal end of the outer sleeve 110.

[0152] Fig. 7A A schematic structural diagram of a front end support bearing seat assembly 152 according to some embodiments of the present disclosure is shown. Figure 7B A side view of a front end support bearing adapter assembly 152 is shown according to some embodiments of the present disclosure. Figure 7C Show Figure 7B BB cross-section diagram. Fig.7D A front view of a front support bearing adapter assembly 152 is shown according to some embodiments of the present disclosure. Fig. 7E A rear view of a front end support bearing adapter assembly 152 is shown, according to some embodiments of the present disclosure.

[0153] like Fig. 7A , 7B As shown in Figures 7C and 7C, in some embodiments of the present disclosure, the front end support bearing seat assembly 152 may include a front end support bearing frame 15201, a lower support bearing 15202, a left guide bearing 15204a and a right guide bearing 15204b. The front end support bearing frame 15201 is connected to the distal flange 111. The lower support bearing 15202 is disposed on the front end support bearing frame 15201, and the lower support bearing 15202 is rollingly connected to the lower surface of the guide support bar 160, so that the lower surface of the guide support bar 160 can slide by rolling the lower support bearing 15202. The left guide bearing 15204a and the right guide bearing 15204b are both arranged on the front end support bearing frame 15201. The left guide bearing 15204a and the right guide bearing 15204b are respectively rollingly connected to the left surface and the right surface of the guide support bar 160, so that the left surface and the right surface of the guide support bar 160 can slide respectively through the rolling of the left guide bearing 15204a and the right guide bearing 15204b.

[0154] In some embodiments of the present disclosure, Figure 7B and 7C As shown, the lower support bearing 15202 can support the guide support bar 160 from bottom to top to prevent the transmission rod sleeve 133 from sagging. Figure 7B As shown, the left guide bearing 15204a and the right guide bearing 15204b clamp the left and right sides of the guide support bar 160 to prevent the transmission rod sleeve 133 from moving left and right.

[0155] like Figures 7A-7E As shown, the front end support bearing frame 15201 includes a through hole 152011. In some embodiments of the present disclosure, as Fig.7D and 7EAs shown, the front end support bearing seat assembly 152 may further include a plurality of circumferential support bearings 15203. The plurality of circumferential support bearings 15203 surround the through hole 152011 and are disposed on an end surface of one side of the front end support bearing frame 15201. The transmission rod sleeve 133 can pass through the through hole, and the outer surface of the transmission rod sleeve 133 can be rollingly connected with the plurality of circumferential support bearings, so that the transmission rod sleeve 133 can slide by rolling the plurality of circumferential support bearings 15203.

[0156] In some embodiments of the present disclosure, Fig.7D and 7E As shown, the front end support bearing seat assembly 152 may further include at least one latching tongue 15205. The at least one latching tongue 15205 radially protrudes from the front end support bearing frame 15201 and is latched on the distal end flange 111.

[0157] like Fig.7D As shown, the plurality of circumferential support bearings 15203 include four circumferential support bearings, which are evenly distributed around the transmission rod sleeve 133, clamping the outer diameter of the transmission rod sleeve 133, and playing a guiding role. Fig. 7E As shown, a groove is provided on the distal flange 111, and at least one latching tongue 15205 includes two latching tongues, radially protruding from the front end support bearing frame 15201, and being clamped on the distal flange 111, which can prevent the front end support bearing seat assembly 152 from rotating, thereby preventing the transmission rod sleeve 133 from rotating. Those skilled in the art can understand that Figures 7A-7E All are exemplary, for example, the front end support bearing seat assembly 152 may also include other numbers of tabs or other numbers of circumferential support bearings 15203.

[0158] When the linear motion driving magnet 122 performs linear motion, the transmission rod sleeve 133 moves along the axial direction of the outer sleeve 110 through the rear raceway bearing seat assembly 151, the front raceway bearing seat assembly 153 and the front end support bearing seat assembly 152, so as to better support the transmission rod sleeve 133. And through at least one latch 15205, the transmission rod sleeve 133 can be prevented from rotating, thereby further ensuring the accuracy of linear motion and rotational motion.

[0159] In some embodiments of the present disclosure, the vacuum magnetic drive device 100 may further include a spacing guide pad (not shown in the figure) disposed between the linear motion drive magnet 122 and the outer sleeve 110 .

[0160] In some embodiments of the present disclosure, the spacing guide pad is made of plastic material, which not only plays a lubricating role but also plays a role similar to a spacer. The end of the linear motion locking member 126 can abut against the spacing guide ring to lock the linear motion driving magnet 122.

[0161] In some embodiments of the present disclosure, the spacing guide pad may be annular and installed between the linear motion drive magnet 122 and the outer sleeve 110 .

[0162] Figure 8 A schematic structural diagram of a linear slot plate 170 of a vacuum magnetic drive device 100 according to some embodiments of the present disclosure is shown.

[0163] like Figure 1 and Figure 8 As shown, in some embodiments of the present disclosure, the vacuum magnetic drive device 100 may further include a linear slot plate 170, which is disposed outside the outer sleeve 110 and fixedly connected to the outer sleeve 110. The linear slot plate 170 may include a linear slot 171 and a guide shaft 172. The guide shaft 172 is fixedly connected to the linear motion drive magnet 122, and the guide shaft 172 is at least partially located in the linear slot 171 to guide the linear motion of the transmission rod 131. The linear slot 171 and the guide shaft 172 can also limit the rotational motion of the linear motion drive magnet 122 and the transmission rod 131 during linear motion.

[0164] In some embodiments of the present disclosure, the linear slot plate 170 may further include a linear slot bearing (not shown in the figure), which is arranged in the linear slot 171, the outer ring of the linear slot bearing matches the linear slot 171, and the guide shaft 172 is arranged in the slot bearing.

[0165] like Figure 1 and Figure 8 As shown, in some embodiments of the present disclosure, the vacuum magnetic drive device 100 may further include a scale 180 for measuring the displacement of the linear motion part of the linear motion drive magnet 122 .

[0166] like Figure 8 As shown, in some embodiments of the present disclosure, the scale 180 includes an indicator 181, which is fixedly connected to the guide shaft 172 and is used to indicate the displacement of the linear motion part. In some embodiments, a connecting member may be provided between the indicator 181 and the guide shaft 172, and the indicator 181 and the guide shaft 172 are connected by the connecting member. In some embodiments, the scale 180 may be a digital scale, and the measuring head of the digital scale may be fixedly connected to the guide shaft 172, and as the guide shaft 172 moves in the linear slot 171, the displacement of the linear motion part is indicated.

[0167] In some embodiments of the present disclosure, the rotary motion driving magnet 121 or the linear motion driving magnet 122 is marked with a scale for measuring the displacement of the rotary motion part. Figure 3 As shown, the rotational motion drive magnet 121 is marked with a rotation scale 124 .

[0168] Those skilled in the art will appreciate that if the rotary motion driving magnet 121 is marked with a scale, then the linear motion driving magnet 122 may be provided with or marked with a scale pointer. If the linear motion driving magnet 122 is marked with a scale, then the rotary motion driving magnet 121 may be provided with or marked with a scale pointer.

[0169] Through the ruler 180 and the rotation scale 124, the precise position of the sample transfer platform 140 during movement can be known, making the sample transfer operation more convenient.

[0170] like Figure 4 As shown, in some embodiments of the present disclosure, the linear motion driving magnet 122 may further include a limiting groove 12201, which is disposed on the side of the linear motion driving magnet 122 facing the rotary motion driving magnet 121. The rotary motion driving magnet 121 may further include a limiting column 12101, one end of which is disposed on the side of the rotary motion driving magnet 121 facing the linear motion driving magnet 122, and the other end of the limiting column 12101 is located in the limiting groove 12102 and can slide in the limiting groove to limit the rotary motion.

[0171] Fig. 9 FIG. 1 is a schematic cross-sectional view of a sample transfer station 140 according to some embodiments of the present disclosure.

[0172] like Figure 1 and Figure 5A As shown, in some embodiments of the present disclosure, the vacuum magnetic drive device 100 may further include a sample transfer platform 140, which is disposed at the distal end of the transmission rod 131. The sample transfer platform 140 may be extended and retracted by the linear motion of the transmission rod 131. The sample transfer platform 140 may be raised and lowered by the rotational motion of the transmission rod 131. Fig. 9 As shown, the sample transfer platform 140 may include a bearing fixing seat 141, a gear 142, a lifting seat 143 and a rack 144. The bearing fixing seat 141 is rotatably connected to the transmission rod 131, and the bearing fixing seat 141 is fixedly connected to the distal end of the transmission rod sleeve 133. The gear 142 is connected to the transmission rod 131, and the gear 142 is driven to rotate by the transmission rod 131. The lifting seat 143 is connected to the bearing fixing seat 141 through a cross roller guide 145. The back of the rack 144 is fixedly connected to the lifting seat 144, and the rack 144 is meshed with the gear 142, driving the lifting seat 143 to move up and down through the cross roller guide 145.

[0173] Fig.10 A schematic structural diagram of a vacuum sample transfer system 1000 according to some embodiments of the present disclosure is shown.

[0174] like Fig.10As shown, in some embodiments of the present disclosure, a vacuum sample transfer system 1000 may include a vacuum chamber 200 and a vacuum magnetic drive device 100 according to any one embodiment of the present disclosure, and a sample transfer table 140 of the vacuum magnetic drive device 100 is disposed in the vacuum chamber.

[0175] In some embodiments of the present disclosure, Fig.10 As shown, the vacuum chamber 200 may include a sample placement chamber 210, a gate valve 220, and a processing chamber 230. The process of using the vacuum magnetic drive device 100 of any embodiment of the present disclosure to transfer samples in the vacuum sample transfer system 1000 may include: opening the sample placement chamber 210, placing the sample on the sample parking table of the sample transfer table 140; opening the gate valve 220, driving the transmission magnetic component 130 through the driving magnetic component 120, so that the sample transfer table 140 carries the sample from the sample placement chamber 210 to the processing chamber 230, and placing the sample on the sample parking table of the processing chamber 230; the transmission magnetic component 130 drives the sample transfer table 140 to return to the sample placement chamber 210, and the gate valve 220 is closed.

[0176] It should be pointed out that the above are only exemplary embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A vacuum magnetic drive device, characterized in that: include: An outer sleeve, used for forming a vacuum chamber; Drive magnetic assembly, including: A rotational motion driving magnet is disposed outside the outer sleeve; and a linear motion driving magnet, which is arranged outside the outer sleeve, is rotationally connected with the rotary motion driving magnet, and can drive the rotary motion driving magnet to move linearly; and a transmission magnetic assembly, comprising: Transmission rod; The transmission magnet is connected to the transmission rod, and the driving magnetic assembly is magnetically coupled with the transmission magnet to drive the transmission rod to perform linear motion or rotational motion.

2. The vacuum magnetic drive device according to claim 1, characterized in that: The drive magnetic assembly also includes: A linear motion locking member for locking the linear motion drive magnet; and / or A rotational motion locking member for locking the rotational motion driving magnet; and / or A driving magnet bearing, wherein the driving magnet bearing rotationally connects the linear motion driving magnet with the rotary motion driving magnet, the rotary motion driving magnet can perform rotational motion relative to the linear motion driving magnet, and the linear motion driving magnet can drive the rotary motion driving magnet to perform linear motion.

3. The vacuum magnetic drive device according to claim 2, characterized in that: The linear motion locking member comprises a linear motion locking nut, which is passed through the linear motion driving magnet and has a distal end capable of abutting against the outer sleeve to lock the linear motion driving magnet; and / or The rotary motion locking member comprises a rotary motion locking nut which is passed through the rotary motion driving magnet and has a distal end which can abut against the linear motion driving magnet to lock the rotary motion driving magnet.

4. The vacuum magnetic drive device according to claim 1, characterized in that: The transmission magnet assembly also includes a transmission rod sleeve, which is arranged between the transmission rod and the outer sleeve. The proximal end of the transmission rod sleeve is rotatably connected to the transmission magnet, and the outer wall of the transmission rod sleeve is slidably connected to the outer sleeve.

5. The vacuum magnetic drive device according to claim 4, characterized in that: Also included is at least one set of bearing assemblies, the at least one set of bearing assemblies comprising: a rear raceway bearing seat assembly, disposed at the proximal end of the transmission magnet, rotatably connected to the transmission magnet, and slidably connected to the inner wall of the outer sleeve; and / or The front raceway bearing seat assembly is arranged at the far end of the transmission magnet, is rotationally connected to the transmission magnet and / or the transmission rod, and is slidingly connected to the inner wall of the outer sleeve.

6. The vacuum magnetic drive device according to claim 5, characterized in that: The rear raceway bearing seat assembly comprises: A rear raceway bearing frame, rotatably connected to the proximal end of the transmission magnet; at least one rear track runner shaft, arranged on the rear track bearing frame at intervals along the circumference of the rear track bearing frame; and At least one rear roller is mounted on the at least one rear roller shaft, and the at least one rear roller can roll on the inner wall of the outer sleeve along the axial direction of the outer sleeve without gap; and / or The front raceway bearing seat assembly comprises: A front raceway bearing frame is rotatably connected to the distal end of the transmission magnet and / or the proximal end of the transmission rod, and is fixedly connected to the transmission rod sleeve; At least one front raceway runner shaft is arranged on the front raceway bearing frame at intervals along the circumference of the front raceway bearing frame; and At least one front roller is mounted on the at least one front roller shaft, and the at least one front roller can roll on the inner wall of the outer sleeve along the axial direction of the outer sleeve without gap.

7. The vacuum magnetic drive device according to claim 4, characterized in that: Also includes: A guide support bar, fixedly arranged outside the transmission rod sleeve along the axial direction of the transmission rod sleeve; A distal flange, sealed and fixedly connected to the distal end of the outer sleeve; Front support bearing housing assembly, including: A front end support bearing frame connected to the distal end flange; A lower support bearing, disposed on the front end support bearing frame, wherein the lower support bearing is rollingly connected to the lower surface of the guide support bar; The left guide bearing and the right guide bearing are arranged on the front end support bearing frame, and the left guide bearing and the right guide bearing are respectively connected in a rolling manner to the left surface and the right surface of the guide support bar.

8. The vacuum magnetic drive device according to claim 7, characterized in that: The front end support bearing frame includes a through hole, and the front end support bearing seat assembly also includes: A plurality of circumferential support bearings are arranged on the end surface of one side of the front end support bearing frame around the through hole, the transmission rod sleeve passes through the through hole, and the outer surface of the transmission rod sleeve is rollingly connected with the plurality of circumferential support bearings; and / or At least one latch protrudes radially from the front end support bearing frame and is latched on the distal end flange.

9. The vacuum magnetic drive device according to claim 2, characterized in that: It also includes a spacing guide pad, which is arranged between the linear motion driving magnet and the outer sleeve. The end of the linear motion locking member can abut against the spacing guide pad to lock the linear motion driving magnet.

10. The vacuum magnetic drive device according to claim 1, characterized in that: It also includes a linear slot plate, which is arranged outside the outer sleeve and fixedly connected to the outer sleeve, and the linear slot plate includes: Linear card slots; and A guide shaft is fixedly connected to the linear motion driving magnet, and at least a portion of the guide shaft is located in the linear slot to guide the linear motion of the transmission rod.

11. The vacuum magnetic drive device according to claim 1, characterized in that: Also includes a scale for measuring the displacement of the linear motion part of the linear motion drive magnet; and / or The rotary motion driving magnet or the linear motion driving magnet includes a scale for measuring the displacement of the rotary motion part.

12. The vacuum magnetic drive device according to claim 4, characterized in that: It also includes a sample transfer platform, which is arranged at the distal end of the transmission rod, and the sample transfer platform is driven to extend and retract through the linear movement of the transmission rod, and is driven to rise and fall through the rotational movement of the transmission rod; The sample transfer station comprises: A bearing fixing seat, rotatably connected to the transmission rod and fixedly connected to the distal end of the transmission rod sleeve; A gear connected to the transmission rod, and driven by the transmission rod to rotate the gear; A lifting seat connected to the bearing fixing seat via a cross roller guide rail; and A rack, the back of which is fixedly connected to the lifting seat, and the rack is meshed with the gear to drive the lifting seat to move up and down through the cross roller guide rail.

13. A vacuum sample transfer system, characterized in that: include: Vacuum chamber; According to the vacuum magnetic drive device according to any one of claims 1 to 12, the sample transfer table of the vacuum magnetic drive device is arranged in the vacuum chamber.

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