Cleaning device
By designing a negative pressure environment and cleaning devices of multiple sets of water outlet pipes, the problems of high cost and poor flexibility of mechanized cleaning equipment in semiconductor production are solved, and the effective prevention of dust impurities and convenience of multi-person operation is achieved.
Patent Information
- Application Number
- CN202420985281.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-08
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2034-05-08
AI Technical Summary
In semiconductor production, mechanized cleaning equipment is costly and has poor flexibility, and cannot adapt to complex parts, resulting in dust and impurities that are prone to diffuse into the air during the cleaning process, causing secondary pollution.
A cleaning device including the box body and the pump assembly is designed. The box body is equipped with an independent chamber and exhaust port system to form a negative pressure environment, and the air exhaust volume is adjusted in combination with the inclined orifice plate and the air valve to avoid leakage of dust and impurities. , and effectively cleaned through multiple sets of water outlet pipes and spray guns.
It effectively avoids the diffusion of dust and impurities outward, forms a uniform negative pressure environment, adaptively adjusts the air exhaust volume, facilitates multiple people to operate, and reduces the risk of energy consumption and secondary pollution.
Smart Images
Figure CN222241641U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor production, in particular to a cleaning device. Background Art
[0002] In semiconductor production, not only the cleanliness of the processing equipment is extremely high, but also the cleanliness of the processing space environment is extremely high. In addition, the processing equipment includes complex pipelines, and even dust and impurities deposited in the pipelines need to be cleaned in time. In the existing technology, mechanized cleaning is often costly and inflexible, and cannot be adapted to complex parts. Direct manual cleaning can easily cause dust and impurities to spread into the air, causing secondary pollution. Utility Model Content
[0003] The utility model discloses a cleaning device, which solves the technical problem in the prior art that cleaning of pipes and other parts easily causes dust and impurities to spread outward, and has the technical effect of reasonable structure, convenient operation and preventing dust and impurities from spreading outward. The technical scheme adopted is as follows:
[0004] A cleaning device comprises a box body and a pump assembly, wherein the box body comprises a first chamber and a second chamber which are independent of each other, the pump assembly is accommodated in the second chamber, the box body forming the first chamber comprises a door panel which can open or close the first chamber, a cleaning tank is formed in the first chamber (11), the pump assembly is used to pump clean water into the cleaning tank, the sewage in the cleaning tank can be discharged after filtering, a plurality of exhaust ports are arranged on the top surface of the box body above the cleaning tank, the exhaust ports can be connected to the air inlet of the fan to form a negative pressure in the box body
[0005] On the basis of the above technical solution, a perforated plate is also fixedly provided in the first chamber. The perforated plate is arranged above the cleaning tank and covers the exhaust port. The perforated plate has a downward tilt angle from the door plate to the back plate of the box body so that the perforated plate faces the door plate to prevent impurities from leaking out.
[0006] On the basis of the above technical solution, there are multiple exhaust ports and each of them is provided with an air valve, and the air valve is used to adjust the exhaust volume of the exhaust port.
[0007] On the basis of the above technical solution, the pump assembly includes a plurality of water outlet pipes, the plurality of water outlet pipes are divided into a plurality of groups, and the plurality of groups of water outlet pipes are arranged at intervals at the cleaning tank to facilitate simultaneous operation by multiple persons.
[0008] On the basis of the above technical solution, the bottom of the cleaning tank is partially recessed to form a sink, a drainage port is provided on the bottom surface of the sink, and the notch of the sink is covered with a filter plate.
[0009] On the basis of the above technical solution, at least one of the water outlet pipes includes a spring water pipe, and the end of the spring water pipe is connected to a spray gun for washing objects.
[0010] Based on the above technical solution, a lighting unit is provided in the first chamber to illuminate the operating area at the cleaning tank.
[0011] Based on the above technical solution, the cleaning tank and the sedimentation box are integrally formed of PVC material.
[0012] Beneficial Effects
[0013] The utility model has a reasonable structure. The cleaning groove is arranged in the box body, and a negative pressure environment can be formed in the box body during operation, so that dust or foreign particles suspended in the air can be prevented from diffusing outwards during the cleaning process to cause secondary pollution. The arrangement of the orifice plate can make the air flow evenly upward, so that a uniform negative pressure is formed in the box body. In addition, the orifice plate is arranged obliquely and toward the door panel, so that dust or foreign particles can be adsorbed in time at the moment the door panel is opened.
[0014] The utility model also has an air valve at the air outlet, so that the exhaust volume at the air outlet can be adaptively adjusted according to the usage situation, which is beneficial to saving energy. In addition, a plurality of water outlet pipe groups are arranged at the cleaning tank, so that multiple people can perform cleaning operations at the same time. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.
[0016] Figure 1 : A schematic diagram of the three-dimensional structure of the utility model;
[0017] Figure 2 : Schematic diagram of the three-dimensional structure of the utility model after removing the door panel;
[0018] Figure 3 : Structural diagram of the cleaning tank front view; DETAILED DESCRIPTION
[0019] The following description and accompanying drawings fully illustrate the specific embodiments of this article so that those skilled in the art can practice them. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. The scope of the embodiments of this article includes the entire scope of the claims, as well as all available equivalents of the claims. Herein, the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the embodiments can be referred to each other.
[0020] The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, it can also be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.
[0021] As used herein, the term "plurality" means two or more than two, unless otherwise specified.
[0022] In this document, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B means: A or B.
[0023] In this article, the term "and / or" is a description of the association relationship between objects, indicating that three relationships may exist. For example, A and / or B means: A or B, or, A and B.
[0024] like Figures 1 to 3A cleaning device as shown, comprising a box body 1 and a pump assembly 2, as shown in Figure 2 As shown, the box body 1 includes a shell, and the shell is formed with two independent chambers, namely a first chamber 11 and a second chamber 12, wherein the second chamber 12 is used to store the pump assembly 2, so that dry and wet separation can be achieved, which is conducive to improving the safety of use. The first chamber 11 includes a door panel 10 that can open or close the chamber. In this embodiment, the door panel 10 includes two leaves, which are push-pull mounted on the box body 1 using a slide rail. A cleaning tank 3 is formed in the first chamber 11, and the cleaning tank 3 is integrally formed with PVC material. The bottom of the cleaning tank 3 is partially recessed to form a sink 6, as shown in FIG. Figure 3 As shown, in this embodiment, the trough 6 is in an elongated shape, and a drainage port is provided on the bottom surface of the trough 6. The notch of the trough 6 is covered with a filter plate 7, and the filter plate 7 includes a plurality of evenly arranged circular holes, so that large debris can be blocked on the filter plate 7.
[0025] The pump assembly 2 is used to pump clean water into the cleaning tank 3. In this embodiment, the pump assembly 11 includes a sewage self-priming pump. The outlet of the pump assembly 2 is connected to a plurality of water outlet pipes. The plurality of water outlet pipes are divided into two groups, and the two groups of water outlet pipes are arranged at both ends of the length direction of the cleaning tank 3 to facilitate two people to operate at the same time. In other embodiments of the utility model, three or more groups of water outlet pipes can be arranged to facilitate multiple people to clean at the same time. Among them, the multiple water blowing pipes in each water outlet pipe group are connected to a spring water pipe 8, and the end of the spring water pipe 8 is connected to a spray gun. On the one hand, it is convenient for workers to pull and clean objects from multiple angles. On the other hand, the setting of the spray gun can form a larger water pressure to better clean objects.
[0026] The sewage in the cleaning tank 3 is filtered and discharged. Figure 2 As shown, three exhaust vents 4 are provided on the top surface of the box body 1 above the cleaning tank 3, and air valves are provided at the exhaust vents 4. The air valves are used to adjust the exhaust volume of the exhaust vents 4. The exhaust vents 4 can be connected to the air inlet of the fan to form a negative pressure in the box body 1. A perforated plate 5 is also fixed in the first chamber 11. The perforated plate 5 is arranged above the cleaning tank 3 and covers the three exhaust vents 4, so that the air flow is discharged from the exhaust vents 4 after passing through the perforated plate 5. The perforated plate 5 is provided with a number of evenly arranged long holes. In addition, the perforated plate 5 has a downward tilt angle from the door panel 10 to the back panel of the box body 1, that is, the perforated plate 5 is arranged toward the door panel 10. In this way, when the door panel 10 is opened, dust and impurities near the door panel 10 can be adsorbed in time to prevent dust and impurities in the box body 1 from spreading outward.
[0027] In addition, the inner surface of the first chamber 11 is also provided with three lighting units, which use LED lighting to facilitate workers to perform cleaning operations.
[0028] In addition, in order to avoid rust or hard contact with the objects to be washed, which may cause damage to the objects, the cleaning tank 3 is formed in one piece with PVC, which is safer to use, and the box body 1 is formed by bending sheet metal to facilitate cleaning.
[0029] In addition, to facilitate automated control, a controller is embedded in the box body 1 forming the second chamber 12, and the pump assembly 2, the lighting unit and the fan are all electrically connected to the controller.
[0030] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.
Claims
1. A cleaning device, characterized in that: The invention comprises a box body (1) and a pump assembly (2), wherein the box body (1) comprises a first chamber (11) and a second chamber (12) which are independent of each other, the pump assembly (2) being accommodated in the second chamber (12), the box body (1) forming the first chamber (11) comprising a door panel (10) which can open or close the first chamber (11), a cleaning tank (3) being formed in the first chamber (11), the pump assembly (2) being used for pumping clean water into the cleaning tank (3), the sewage in the cleaning tank (3) being able to be discharged after being filtered, and a plurality of exhaust ports (4) being provided on the top surface of the box body (1) above the cleaning tank (3), the exhaust ports (4) being able to be connected to the air inlet of a fan so as to form a negative pressure in the box body (1).
2. The cleaning device according to claim 1, characterized in that: A perforated plate (5) is also fixedly disposed in the first chamber (11). The perforated plate (5) is disposed above the cleaning tank (3) and covers the exhaust port (4). The perforated plate (5) is inclined downward from the door plate (10) to the back plate of the box body (1) so that the perforated plate (5) faces the door plate (10) to prevent impurities from leaking out.
3. The cleaning device according to claim 2, characterized in that: There are multiple air outlets (4) and each of them is provided with an air valve, and the air valve is used to adjust the exhaust volume of the air outlet (4).
4. The cleaning device according to any one of claims 1 to 3, characterized in that: The pump assembly (2) comprises a plurality of water outlet pipes, which are divided into a plurality of groups, and the plurality of groups of water outlet pipes are arranged at intervals in the cleaning tank (3) to facilitate simultaneous operation by multiple persons.
5. The cleaning device according to claim 4, characterized in that: The bottom of the cleaning tank (3) is partially recessed to form a sink (6), a drainage port is provided on the bottom surface of the sink (6), and the notch of the sink (6) is covered with a filter plate (7).
6. The cleaning device according to claim 5, characterized in that: At least one of the water outlet pipes comprises a spring water pipe (8), the end of which is connected to a spray gun for washing objects.
7. The cleaning device according to claim 5 or 6, characterized in that: The first chamber (11) is provided with a lighting unit for illuminating an operating area at the cleaning tank (3).
8. The cleaning device according to claim 7, characterized in that: The cleaning tank (3) is integrally formed using PVC material, and the box body (1) is formed by bending sheet metal.