Lifting head of single crystal furnace and single crystal furnace

Abstract

The utility model is applicable to the technical field of single crystal furnaces, and provides a lifting head of a single crystal furnace and the single crystal furnace, the lifting head comprises a crystal rotating mechanism and a crystal lifting mechanism, the crystal lifting mechanism comprises a fixing plate, a lifting mechanism and a lifting mechanism, the fixing plate is rotatably supported on the crystal rotating mechanism; the sealing cover and the fixing plate are covered to form a closed space; the support is arranged in the closed space; the reel is in a disc type and is arranged in the closed space and rotatably arranged on the support, and a winding groove is formed in the peripheral surface of the reel; the limiting wheel is rotatably arranged on the support, and a limiting groove is formed in the peripheral surface of the limiting wheel; the crystal lifting driving motor is arranged in the closed space and is connected with the reel; the upper part of the lifting rope is wound on the winding groove, and the lower part of the lifting rope is embedded into the limiting groove and penetrates through the fixing plate and the crystal rotation mechanism. According to the lifting head of the single crystal furnace, the problem that the quality of a silicon rod is influenced by oxygen leakage in a furnace chamber in the operation process of the single crystal furnace can be avoided, the swing amplitude of the silicon rod driven by the lifting rope can be reduced, and the growth speed and quality of the silicon rod are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a pulling head of a single crystal furnace and a single crystal furnace. Background Art

[0002] Single crystal furnace is the most important product series in crystal growth equipment. It is used to make artificial crystals. The growth rate of single crystal is the highest and it is easiest to achieve manual control. Therefore, it has been widely used. Among them, the lifting head of the single crystal furnace plays a key role in the crystal growth process. It is the core component of the silicon single crystal furnace. The single crystal furnace needs to use the lifting head to lift and rotate the silicon rod in the furnace chamber to meet the production process requirements.

[0003] In the prior art, the lifting head of a single crystal furnace mainly includes a crystal lifting mechanism and a crystal rotating mechanism. The crystal lifting mechanism is located above the crystal rotating mechanism, and the crystal rotating mechanism is used to drive the crystal lifting mechanism to rotate; the crystal lifting mechanism mainly includes a cylindrical winding wheel, a rotating motor and a lifting rope. The crystal rotating drive motor drives the winding wheel to rotate using a spline, and the winding wheel drives the lifting rope to store or release, so that the lifting rope lifts and rotates the silicon rod. Among them, the winding wheel is sealed in a sealing cover, the upper end of the lifting rope is wound on the winding wheel, and the lower end of the lifting rope passes through the crystal rotating mechanism and is used to drive the silicon rod to lift and rotate. Since the crystal rotation drive motor is arranged outside the sealing cover, the output shaft of the rotating motor needs to be sealed by a magnetohydrodynamic seal. During the operation of the single crystal furnace, the magnetohydrodynamic seal of the output shaft of the rotating motor may fail to seal, resulting in oxygen leakage in the vacuum chamber of the furnace, causing high oxygen content in the silicon rod, affecting the quality of the silicon rod; in addition, since the winding wheel is a cylindrical winding wheel, the lifting rope is wound on the spiral winding groove on the winding wheel. During the lifting process of the lifting rope, the lifting rope will swing on the winding wheel along the length direction of the winding wheel. The swing amplitude of the silicon rod is large, affecting the growth speed and quality of the silicon rod, and even interrupting the growth. Utility Model Content

[0004] The utility model provides a lifting head for a single crystal furnace, aiming to solve the problems in the prior art of single crystal furnaces that the vacuum in the furnace chamber is prone to oxygen leakage affecting the quality of silicon rods, and the silicon rods are prone to swing during the lifting process, thus affecting the growth speed and quality of the silicon rods.

[0005] The utility model is implemented in this way, providing a pulling head of a single crystal furnace, including a crystal rotation mechanism and a crystal lifting mechanism supported on the crystal rotation mechanism, wherein the crystal lifting mechanism includes:

[0006] A fixed plate rotatably supported on the crystal rotation mechanism;

[0007] A sealing cover that is covered with the fixing plate to form a closed space;

[0008] A support disposed in the enclosed space and supported on the fixed plate;

[0009] A disc-shaped winding wheel is arranged in the enclosed space and rotatably arranged on the support, and a winding groove is arranged on the outer peripheral surface of the winding wheel;

[0010] A limiting wheel is arranged in the enclosed space, which is rotatably arranged on the support and is located below the winding wheel, and a limiting groove is arranged on the outer peripheral surface of the limiting wheel;

[0011] A Jingsheng driving motor is disposed in the enclosed space and connected to the winding wheel; and

[0012] A lifting rope, wherein the upper portion of the lifting rope is wound on the winding groove, and the lower portion of the lifting rope is embedded in the limiting groove and passes through the fixing plate and the crystal transfer mechanism.

[0013] Preferably, the crystal rotation mechanism includes a rotating shaft with a center hole therein, a magnetic fluid seal sleeved on the rotating shaft, a turntable fixedly connected to the rotating shaft, and a crystal rotation drive motor transmission-connected to the turntable and used to drive the turntable to rotate, and the lifting rope passes through the center hole of the rotating shaft.

[0014] Preferably, the crystal rotation mechanism further comprises a support plate and a pulley rotatably mounted on the support plate, the crystal rotation drive motor is connected to the pulley, and the pulley is driven by the turntable via a belt.

[0015] Preferably, the rotation center of the winding wheel and the rotation center of the rotating shaft are located on the same vertical line, and the rotation center of the limiting wheel is arranged to deviate from the vertical line.

[0016] Preferably, the crystal lifting mechanism further comprises a plurality of weighing sensors arranged on the fixed plate, and the support is supported on the plurality of weighing sensors.

[0017] Preferably, the sealing cover is provided with a transparent observation window.

[0018] Preferably, it also includes:

[0019] An aviation plug fixed to the outside of the sealing cover, the aviation plug being electrically connected to the Jingsheng drive motor;

[0020] A slip ring is fixed to the outside of the sealing cover, and the slip ring is provided with a wire hole coaxially arranged with the rotation center of the sealing cover. An external cable passes through the wire hole and is connected to the aviation plug.

[0021] Preferably, it also includes:

[0022] A U-shaped tube, one end of which is supported and fixed on the crystal transfer mechanism, and the other end of which is supported on the top of the slip ring, and the external cable passes through the inner hole of the U-shaped tube.

[0023] Preferably, it also includes a counterweight block fixed to the outside of the sealing cover.

[0024] The utility model also provides a single crystal furnace, comprising the above-mentioned pulling head of the single crystal furnace.

[0025] The utility model provides a lifting head for a single crystal furnace, which encapsulates a crystal lifting drive motor and a winding wheel in a sealing cover. There is no need to connect and seal the crystal lifting drive motor and the winding wheel through a magnetic fluid sealing device, thereby avoiding the problem of oxygen leakage in the furnace chamber affecting the quality of silicon rods due to the possible failure of the magnetic fluid sealing device between the crystal lifting drive motor and the winding wheel during the operation of the single crystal furnace, thereby improving the operating reliability of the single crystal furnace and ensuring the quality of silicon rods processed by the single crystal furnace. At the same time, by setting the winding wheel to a disc-type winding wheel, retracting and releasing the lifting rope through the disc-type winding wheel, and limiting the lifting rope through a limiting wheel, the swing amplitude of the silicon rod driven by the lifting rope can be reduced, thereby improving the growth speed and quality of the silicon rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A three-dimensional schematic diagram of a pulling head of a single crystal furnace provided in an embodiment of the utility model;

[0027] Figure 2 A side schematic diagram of a pulling head of a single crystal furnace provided by an embodiment of the utility model;

[0028] Figure 3 For along Figure 2 Schematic diagram of the cross section in the AA direction;

[0029] Figure 4 A three-dimensional diagram of the structure of a pulling head of a single crystal furnace provided in an embodiment of the utility model;

[0030] Figure 5 A three-dimensional diagram of a pulling head of a single crystal furnace provided in an embodiment of the present utility model when a winding wheel is connected to a rotating shaft. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0032] The lifting head of a single crystal furnace provided by the embodiment of the utility model encapsulates the crystal lifting drive motor and the winding wheel in a sealing cover, and there is no need to connect and seal the crystal lifting drive motor and the winding wheel through a magnetic fluid sealing device, thereby avoiding the problem that the magnetic fluid sealing device between the crystal lifting drive motor and the winding wheel may fail in the operation of the single crystal furnace, resulting in oxygen leakage in the furnace chamber and affecting the quality of the silicon rods, thereby improving the operating reliability of the single crystal furnace and ensuring the quality of the silicon rods processed by the single crystal furnace; at the same time, by setting the winding wheel to a disc-type winding wheel, retracting and releasing the lifting rope through the disc-type winding wheel, and limiting the lifting rope through a limiting wheel, the swing amplitude of the silicon rod driven by the lifting rope can be reduced, thereby improving the growth speed and quality of the silicon rods.

[0033] Please refer to Figure 1-Figure 5 The embodiment of the utility model provides a pulling head of a single crystal furnace, comprising a crystal transfer mechanism 1 and a crystal lifting mechanism 2 supported on the crystal transfer mechanism 1, wherein the crystal lifting mechanism 2 comprises:

[0034] A fixed plate 21 rotatably supported on the crystal rotation mechanism 1;

[0035] A sealing cover 22 that is covered with the fixing plate 21 to form a closed space 20;

[0036] A support 23 disposed in the enclosed space 20 and supported on the fixed plate 21;

[0037] A disc-shaped winding wheel 24 is disposed in the enclosed space 20 and rotatably disposed on the support 23, and a winding groove 241 is disposed on the outer circumference of the winding wheel 24;

[0038] The limiting wheel 25 is arranged in the enclosed space 20, and is rotatably arranged on the support 23 and is located below the winding wheel 24. The outer peripheral surface of the limiting wheel 25 is provided with a limiting groove 251;

[0039] A Jingsheng driving motor 26 is disposed in the enclosed space 20 and connected to the winding wheel 24; and

[0040] The lifting rope 27 has an upper portion wound on the winding groove 241 , and a lower portion of the lifting rope 27 is embedded in the limiting groove 251 and passes through the fixing plate 21 and the crystal transfer mechanism 1 .

[0041] In an embodiment of the utility model, a lifting head of a single crystal furnace is provided. By encapsulating a crystal lifting drive motor 26 in a sealing cover 22, the crystal lifting drive motor 26 and the winding wheel 24 do not need to be connected through a magnetic fluid sealing device, thereby avoiding the problem that the magnetic fluid seal between the crystal lifting drive motor 26 and the winding wheel 24 may fail to seal and cause oxygen leakage in the furnace chamber during the operation of the single crystal furnace to affect the quality of the silicon rod, thereby improving the reliability of the growth quality of the silicon rod; at the same time, by setting the winding wheel 24 as a disc-type winding wheel 24, the lifting rope 27 is wound by the disc-type winding wheel 24. Since the lifting rope 27 is wound by the winding groove 241 on the outer circumferential surface of the disc-type winding wheel 24, the lifting rope 27 has almost no swinging space on the disc-type winding wheel 24, and the limiting groove 251 on the limiting wheel 25 is used to limit the lifting rope 27 to prevent the lifting rope 27 from swinging during the lifting process, thereby greatly reducing the amplitude of the swing of the silicon rod driven by the lifting rope 27, thereby improving the growth speed and quality of the silicon rod.

[0042] As an embodiment of the utility model, the crystal rotation mechanism 1 includes a rotating shaft 11 with a center hole therein, a magnetic fluid seal 12 sleeved on the rotating shaft 11, a turntable 13 fixedly connected to the rotating shaft 11, and a crystal rotation drive motor 14 transmission-connected to the turntable 13 and used to drive the turntable 13 to rotate, and a lifting rope 27 passes through the center hole of the rotating shaft 11.

[0043] In this embodiment, a magnetic fluid is provided in the sealing gap between the inner side of the magnetic fluid seal 12 and the rotating shaft 11, and the magnetic fluid seal 12 uses magnetism to absorb the magnetic fluid into the sealing gap, thereby forming a dynamic seal between the magnetic fluid seal 12 and the rotating shaft 11. The rotating shaft 11 is used to support the turntable 13, and the crystal rotation drive motor 14 is used to drive the turntable 13 to rotate around the rotating shaft 11, and the turntable 13 then drives the entire crystal lifting mechanism 2 to rotate.

[0044] As an embodiment of the present invention, the crystal rotation mechanism 1 further includes a support plate 15 and a pulley 16 rotatably mounted on the support plate 15 . The crystal rotation drive motor 14 is connected to the pulley 16 , and the pulley 16 is driven by the turntable 13 through a belt 17 .

[0045] In this embodiment, the output shaft of the crystal rotation driving motor 14 is connected to the pulley 16, the output shaft of the crystal rotation driving motor 14 drives the pulley 16 to rotate, the pulley 16 drives the turntable 13 to rotate through the belt 17, and the turntable 13 drives the entire crystal lifting mechanism 2 to rotate.

[0046] As an embodiment of the present invention, the fixing plate 21 is fixed on the turntable 13 , and the turntable 13 is used to drive the fixing plate 21 to rotate synchronously.

[0047] In this embodiment, the crystal rotation driving motor 14 drives the turntable 13 to rotate around the rotating shaft 11, and the turntable 13 rotates synchronously, thereby driving the entire crystal lifting mechanism 2 to rotate. Among them, the fixing plate 21 is fixed on the turntable 13 and can be fixed on the turntable 13 by bolts or screws.

[0048] In the embodiment of the utility model, the support 23 is used to install the winding wheel 24 and the limiting wheel 25, so that the winding wheel 24 and the limiting wheel 25 can be rotatably installed on the support 23 to realize the rotation of the winding wheel 24 and the limiting wheel 25.

[0049] In the embodiment of the utility model, the sealing cover 22 is fixed on the fixed plate 21, and the sealing cover 22 and the fixed plate 21 cover each other to form a closed space 20. The support 23, the winding wheel 24, the limiting wheel 25 and the crystal rise drive motor 26 are all installed in the closed space 20, and the lower end of the lifting rope 27 passes through the central hole of the fixed plate 21 and the rotating shaft 11 and extends into the furnace cavity.

[0050] In the embodiment of the utility model, the winding wheel 24 is flattened as a whole. After the lifting rope 27 is wound on the winding groove 241, when the winding wheel 24 drives the lifting rope 27 to be retracted and released, the lifting rope 27 has almost no swing space along the thickness direction of the disc-shaped winding wheel 24. The winding groove 241 can be a spiral winding groove arranged around the outer circumference of the winding wheel 24, or it can be an annular winding groove arranged around the outer circumference of the winding wheel 24. Preferably, the winding groove 241 is an annular winding groove arranged around the outer circumference of the winding wheel 24, which can better reduce the swing of the lifting rope 27 on the winding wheel 24. As a case, the limiting groove 251 on the limiting wheel 25 is an annular limiting groove arranged around the outer circumference of the limiting wheel 25.

[0051] In the embodiment of the utility model, the winding wheel 24 is connected to the crystal lifting drive motor 26 through the rotating shaft 240. The crystal lifting drive motor 14 drives the winding wheel 24 to rotate through the rotating shaft 240, and drives the lifting rope 27 to rise and fall through the winding wheel 24 to realize the lifting of the silicon rod.

[0052] In the embodiment of the utility model, on the one hand, the limiting wheel 25 can support the lifting rope 27, and the diameter of the limiting wheel 25 or the rotation center position of the limiting wheel 25 can be adjusted so that the lifting rope 27 is just located at the center of the rotating shaft 11, so as to facilitate the smooth lifting and lowering of the lifting rope 27 relative to the rotating shaft 11; on the other hand, the limiting groove 251 of the limiting wheel 25 limits the lifting rope 27 to prevent the lifting rope 27 from swinging during the rotation process, thereby improving the growth speed and quality of the silicon rod.

[0053] As an embodiment of the present invention, the lifting rope 27 can be specifically a tungsten wire rope, which takes advantage of the high temperature resistance and strong load-bearing capacity of the tungsten wire rope to extend the service life of the lifting rope 27.

[0054] As an embodiment of the present invention, the rotation center of the winding wheel 24 and the rotation center of the rotating shaft 11 are located on the same vertical line, and the rotation center of the limiting wheel 25 is set away from the vertical line.

[0055] It can be understood that the rotation center of the winding wheel 24 is located directly above the rotation center of the rotating shaft 11, and the rotation center of the limiting wheel 25 is located obliquely below the rotation center of the winding wheel 24. This makes it convenient to use the limiting wheel 25 to limit the lifting rope 27 so that the lifting rope 27 is located in the center of the center hole of the rotating shaft 11.

[0056] As an embodiment of the present invention, the crystal lifting mechanism 2 further includes a plurality of weighing sensors 28 disposed on the fixing plate 21 , and the support 23 is supported on the plurality of weighing sensors 28 .

[0057] In this embodiment, the specific number of the weighing sensors 28 can be two, three or more. On the one hand, the weight of the silicon rod is measured by multiple weighing sensors 28, which has higher precision and more accurate measurement than a single sensor; on the other hand, multiple weighing sensors 28 are arranged below the support 23, which has a more stable and reliable structure and higher weighing precision than the traditional support hoisted below the weighing sensor.

[0058] As an embodiment of the present invention, the sealing cover 22 is provided with a transparent observation window 221. The transparent observation window 221 can be made of a high temperature resistant transparent material, and the specific material is not limited. By providing the transparent observation window 221 in the sealing cover 22, it is convenient for personnel to observe the working conditions of the various components in the sealing cover 22.

[0059] As an embodiment of the utility model, it also includes:

[0060] An aviation plug 29 fixed to the outside of the sealing cover 22, the aviation plug 29 is electrically connected to the Jingsheng driving motor 26;

[0061] The slip ring 210 is fixed to the outside of the sealing cover 22 . The slip ring 210 is provided with a wire hole (not shown) coaxially arranged with the rotation center of the sealing cover 22 . The external cable passes through the wire hole and is connected to the aviation plug 29 .

[0062] In this embodiment, the aviation plug 29 is connected to the control cabinet through an external cable to power and control the crystal rise drive motor 26. During the rotation of the crystal rise mechanism 2, the slip ring 210 rotates synchronously with the sealing cover 22, so that the slip ring 210 can rotate relative to the external cable, which facilitates the connection between the external cable and the aviation plug 29.

[0063] As an embodiment of the utility model, it also includes:

[0064] The U-shaped tube 3 has one end supported and fixed on the crystal transfer mechanism 1 and the other end supported on the top of the slip ring 210 . The external cable passes through the inner hole of the U-shaped tube 3 .

[0065] In this embodiment, the U-shaped tube 3 is used to protect the external cables, and to facilitate the fixed support of the external cables and the routing of the external cables.

[0066] As an embodiment of the utility model, a counterweight block 211 is further included which is fixed to the outside of the sealing cover 22. By setting the counterweight block 211, the position of the counterweight block 211 can be adjusted to adjust the center of gravity of the entire crystal lifting mechanism 2, so that the center of gravity of the entire crystal lifting mechanism 2 is located at the center of the lifting rope 27, making the lifting head structure of the entire single crystal furnace more stable.

[0067] The utility model also provides a single crystal furnace, comprising the above-mentioned pulling head of the single crystal furnace.

[0068] The embodiment of the utility model also provides a single crystal furnace, including the lifting head of the single crystal furnace of the above embodiment. The single crystal furnace of this embodiment is provided with the lifting head of the above single crystal furnace, and the crystal lifting drive motor and the winding wheel do not need to be connected and sealed by a magnetic fluid sealing device, thereby avoiding the problem that the magnetic fluid sealing device between the crystal lifting drive motor and the winding wheel may fail during the operation of the single crystal furnace, resulting in oxygen leakage in the furnace chamber and affecting the quality of the silicon rod, thereby improving the operating reliability of the single crystal furnace and ensuring the reliable quality of the silicon rod; at the same time, by setting the winding wheel as a disc-type winding wheel, retracting and releasing the lifting rope through the disc-type winding wheel, and limiting the lifting rope through the limiting wheel, the swing amplitude of the silicon rod driven by the lifting rope can be reduced, thereby improving the growth speed and quality of the silicon rod.

[0069] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A pulling head for a single crystal furnace, characterized in that: It includes a crystal rotation mechanism and a crystal lifting mechanism supported on the crystal rotation mechanism, and the crystal lifting mechanism includes: A fixed plate rotatably supported on the crystal rotation mechanism; A sealing cover that is covered with the fixing plate to form a closed space; A support disposed in the enclosed space and supported on the fixed plate; A disc-shaped winding wheel is arranged in the enclosed space and rotatably arranged on the support, and a winding groove is arranged on the outer peripheral surface of the winding wheel; A limiting wheel is arranged in the enclosed space, which is rotatably arranged on the support and is located below the winding wheel, and a limiting groove is arranged on the outer peripheral surface of the limiting wheel; A Jingsheng driving motor is disposed in the enclosed space and connected to the winding wheel; and A lifting rope, wherein the upper portion of the lifting rope is wound on the winding groove, and the lower portion of the lifting rope is embedded in the limiting groove and passes through the fixing plate and the crystal transfer mechanism.

2. The pulling head of the single crystal furnace according to claim 1, characterized in that: The crystal rotation mechanism includes a rotating shaft with a center hole therein, a magnetic fluid seal sleeved on the rotating shaft, a turntable fixedly connected to the rotating shaft, and a crystal rotation drive motor transmission-connected to the turntable and used to drive the turntable to rotate, and the lifting rope passes through the center hole of the rotating shaft.

3. The pulling head of the single crystal furnace according to claim 2, characterized in that: The crystal rotation mechanism further comprises a support plate and a pulley rotatably mounted on the support plate. The crystal rotation driving motor is connected to the pulley, and the pulley is driven by the turntable through a belt.

4. The pulling head of the single crystal furnace according to claim 2, characterized in that: The rotation center of the winding wheel and the rotation center of the rotating shaft are located on the same vertical line, and the rotation center of the limiting wheel is set away from the vertical line.

5. The pulling head of the single crystal furnace according to claim 1, characterized in that: The crystal lifting mechanism also includes a plurality of weighing sensors arranged on the fixing plate, and the support is supported on the plurality of weighing sensors.

6. The pulling head of the single crystal furnace according to claim 1, characterized in that: The sealing cover is provided with a transparent observation window.

7. The pulling head of the single crystal furnace according to claim 1, characterized in that: Also includes: An aviation plug fixed to the outside of the sealing cover, the aviation plug being electrically connected to the Jingsheng drive motor; A slip ring is fixed to the outside of the sealing cover, and the slip ring is provided with a wire hole coaxially arranged with the rotation center of the sealing cover. An external cable passes through the wire hole and is connected to the aviation plug.

8. The pulling head of the single crystal furnace according to claim 7, characterized in that: Also includes: A U-shaped tube, one end of which is supported and fixed on the crystal transfer mechanism, and the other end of which is supported on the top of the slip ring, and the external cable passes through the inner hole of the U-shaped tube.

9. The pulling head of the single crystal furnace according to claim 1, characterized in that: It also includes a counterweight block fixed outside the sealing cover.

10. A single crystal furnace, characterized in that: A pulling head for a single crystal furnace comprising the method according to any one of claims 1 to 9.

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