Ultrahigh vacuum sealing gasket, connecting mechanism and ultrahigh vacuum system

Abstract

The utility model relates to the technical field of sealing, and provides a gasket for ultrahigh vacuum sealing, a connecting mechanism and an ultrahigh vacuum system.The gasket for ultrahigh vacuum sealing is used for being arranged between a pair of connecting flanges and comprises a gasket body; the end, close to the gasket body, of the connecting flange is provided with a sealing face, at least one end of the gasket body is provided with a sealing protrusion, the sealing protrusion is suitable for abutting against the sealing face, the sealing protrusion extends in the circumferential direction of the gasket body, and the sealing protrusion and the gasket body form an integrated structure. According to the arrangement, the back face of the knife edge of the all-metal knife edge flange in the prior art can serve as the sealing face, the sealing protrusion abuts against the back face of the knife edge, ultra-vacuum sealing is achieved, when the knife edge structure of the all-metal knife edge flange is damaged, only the gasket body needs to be replaced, the all-metal knife edge flange does not need to be detached and replaced, operation is convenient, and the maintenance cost is low; and the maintenance time is greatly shortened, and the working time of equipment can be prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of sealing, in particular to a gasket for ultra-high vacuum sealing, a connecting mechanism and an ultra-high vacuum system. Background Art

[0002] High vacuum system and ultra-high vacuum system have high requirements on the sealing performance of the system. At present, the sealing assembly of the all-metal knife-edge flange 1' and the oxygen-free copper gasket 2' is used to realize the sealing connection between the parts. Among them, a knife edge is arranged on the all-metal knife-edge flange 1', and the knife edge is pressed against the end face of the oxygen-free copper gasket 2'. The pre-tightening bolt is used to apply a pre-tightening force to the all-metal knife-edge flange 1' and the oxygen-free copper gasket 2'. With the increase of the pre-tightening force, the knife edge of the all-metal knife-edge flange 1' is squeezed into the oxygen-free copper gasket 2' to a certain depth, and the sealing requirements of the high vacuum system and the ultra-high vacuum system can be met.

[0003] In order to reduce the pre-tightening force of the pre-tightening bolt 12 required for sealing the all-metal knife-edge flange 1' and the oxygen-free copper gasket 2', the blade of the all-metal knife-edge flange 1' will be processed to be sharper, so the blade position of the all-metal knife-edge flange 1' itself is relatively fragile. Moreover, for the accelerator ultra-high vacuum system, it requires the flange and related vacuum pipelines to have polar magnetic permeability. During the production process, high-temperature demagnetization treatment is often carried out in a vacuum furnace, and sometimes repeated demagnetization treatment is carried out. Although high-temperature demagnetization can reduce the magnetic permeability of the all-metal knife-edge flange 1' to a certain extent, it will also cause the strength of the all-metal knife-edge flange 1' to be reduced, and the strength of the originally fragile blade position on the all-metal knife-edge flange 1' will be lower. During the processing, transportation, and use of high vacuum systems and ultra-high vacuum systems, the blade of the all-metal knife-edge flange 1' is easily damaged. Once the blade is damaged, it will affect the sealing performance of the system, and the all-metal knife-edge flange 1' needs to be replaced as a whole. The all-metal knife-edge flange 1' is generally connected to other components by welding, which is inconvenient to disassemble, assemble and replace, and has a high maintenance cost, which affects the operation time and efficiency of the vacuum system.

[0004] Therefore, how to solve the problem of high maintenance cost caused by the need to replace the all-metal knife-edge flange as a whole when the blade structure of the all-metal knife-edge flange in the prior art is damaged has become an important technical problem to be solved by technical personnel in this field. Utility Model Content

[0005] The utility model provides an ultra-high vacuum sealing gasket, a connecting mechanism and an ultra-high vacuum system, which are used to at least solve the defect of high maintenance cost caused by the need to replace the all-metal knife-edge flange as a whole when the knife-edge structure of the all-metal knife-edge flange in the prior art is damaged.

[0006] The utility model provides a gasket for ultra-high vacuum sealing, which is suitable for being arranged between a pair of connecting flanges. The gasket for ultra-high vacuum sealing comprises a gasket body;

[0007] A sealing surface is provided at one end of the connecting flange close to the gasket body, and a sealing protrusion is provided at at least one end of the gasket body. The sealing protrusion is suitable for abutting against the sealing surface, and the sealing protrusion extends along the circumference of the gasket body. The sealing protrusion and the gasket body form an integrated structure.

[0008] According to the ultra-high vacuum sealing gasket provided by the utility model, both ends of the gasket body are provided with the sealing protrusions.

[0009] According to a gasket for ultra-high vacuum sealing provided by the utility model, the sealing protrusion has a first annular surface and a second annular surface arranged coaxially, the first annular surface is located on the side of the second annular surface close to the axis of the gasket body, at least one of the generatrix of the first annular surface and the generatrix of the second annular surface is inclined relative to the cross-section of the gasket body, and the generatrix of the first annular surface is arranged at an angle to the generatrix of the second annular surface.

[0010] According to the ultra-high vacuum sealing gasket provided by the utility model, the angle between the generatrix of the first annular surface and the generatrix of the second annular surface is 30 to 135 degrees.

[0011] According to the ultra-high vacuum sealing gasket provided by the utility model, a first positioning step is provided at one end of the connecting flange close to the gasket body, and the first positioning step is located on a side of the sealing surface away from the axis of the connecting flange;

[0012] A second positioning step is provided at one end of the gasket body close to the connecting flange, and a side wall of the second positioning step away from the axis of the gasket body abuts against a side wall of the first positioning step close to the axis of the connecting flange.

[0013] The utility model also provides a connection mechanism for ultra-high vacuum sealing, comprising a sealing gasket, a pair of connecting flanges and a pre-tightening assembly, wherein the sealing gasket is arranged between the pair of connecting flanges, and the pre-tightening assembly is suitable for causing the pair of connecting flanges to generate a clamping force on the sealing gasket, and the sealing gasket is the above-mentioned ultra-high vacuum sealing gasket.

[0014] According to the ultra-high vacuum sealing connection mechanism provided by the utility model, the sealing surface of the connecting flange is a conical surface, and the generatrix of the sealing surface is arranged at an angle to the axis of the connecting flange;

[0015] Alternatively, the sealing surface of the connecting flange is a plane, and the sealing surface is perpendicular to the axis of the connecting flange.

[0016] According to a connection mechanism for ultra-high vacuum sealing provided by the utility model, it also includes an adjustment component, which is detachably arranged on the connecting flange, and an adjustment part is arranged on the outer edge of the sealing gasket, and the adjustment component is suitable for interacting with the adjustment part to make the axis of the sealing gasket parallel to the axis of the connecting flange.

[0017] According to a connection mechanism for ultra-high vacuum sealing provided by the utility model, the adjustment part includes an adjustment groove, the adjustment groove is arranged on the outer peripheral surface of the sealing gasket, the adjustment component includes a reference seat and an adjustment protrusion, the reference seat extends along the circumference of the connecting flange, the adjustment protrusion is arranged on the side of the reference seat facing the connecting flange, and the adjustment protrusion is suitable for interacting with the adjustment groove; at least two reference seats are provided, each of the reference seats is connected end to end to form a closed loop, and two adjacent reference seats are detachably connected.

[0018] The utility model also provides an ultra-high vacuum system, comprising the ultra-high vacuum sealing gasket mentioned above, or comprising the ultra-high vacuum sealing connecting mechanism mentioned above.

[0019] The ultra-high vacuum sealing gasket provided by the utility model is used to be arranged between a pair of connecting flanges. The ultra-high vacuum sealing gasket includes a gasket body, which is arranged between a pair of connecting flanges, and the pair of connecting flanges can apply a clamping force to the gasket body. A sealing surface is arranged at one end of the connecting flange close to the gasket body, and a sealing protrusion is arranged at at least one end of the gasket body, and the sealing protrusion extends along the circumference of the gasket body, and the sealing protrusion and the gasket body form an integrated structure. The sealing protrusion is used to press against the sealing surface to ensure the sealing fit between the sealing protrusion and the sealing surface, thereby realizing the sealing contact between the connecting flange and the gasket body. With such arrangement, the back side of the blade of the all-metal knife-edge flange in the prior art can be used as the above-mentioned sealing surface, and the sealing protrusion is pressed against the back side of the blade to realize ultra-vacuum sealing. When the blade structure of the all-metal knife-edge flange is damaged, it is only necessary to remove the original oxygen-free copper gasket and replace it with the ultra-high vacuum sealing gasket provided by the utility model. There is no need to remove and replace the all-metal knife-edge flange. The operation is convenient and the maintenance cost is low, which greatly shortens the maintenance time and is conducive to improving the working time of the equipment. It solves the problem of high maintenance cost caused by the need to replace the all-metal knife-edge flange as a whole when the blade structure of the all-metal knife-edge flange in the prior art is damaged.

[0020] In addition, the gasket body does not need to undergo high-temperature demagnetization treatment. The sealing protrusion is arranged on the gasket body, which eliminates the influence of high-temperature demagnetization treatment on the strength of the sealing protrusion, and is beneficial to improving the strength of the sealing protrusion and improving the stability of the gasket for ultra-high vacuum sealing.

[0021] Furthermore, in the ultra-high vacuum sealing connection mechanism provided by the present invention, since it is provided with the ultra-high vacuum sealing gasket as described above, it also has the various advantages as described above.

[0022] Furthermore, in the ultra-high vacuum system provided by the present invention, since it is provided with the ultra-high vacuum sealing gasket or the ultra-high vacuum sealing connecting mechanism as described above, it also has the various advantages as described above. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 The present invention is a schematic diagram of the structure of a full metal knife-edge flange and an oxygen-free copper gasket in the prior art when they are matched.

[0025] Figure 2 It is a cross-sectional view of the ultra-high vacuum sealing connection mechanism provided by the utility model.

[0026] Figure 3 yes Figure 2 Enlarged view of I.

[0027] Figure 4 The utility model is a schematic structural diagram of a gasket for ultra-high vacuum sealing.

[0028] Figure 5 It is a structural schematic diagram of a connection mechanism for ultra-high vacuum sealing provided by the utility model.

[0029] Figure 6 It is a structural schematic diagram of the reference seat provided by the utility model.

[0030] Figure 7 It is a structural schematic diagram of the adjustment component provided by the utility model.

[0031] Reference numerals:

[0032] 1', all-metal knife-edge flange; 2', oxygen-free copper gasket; 1, connecting flange; 2, sealing gasket; 3, sealing surface; 4, sealing protrusion; 5, first annular surface; 6, second annular surface; 7, first positioning step; 8, second positioning step; 9, adjustment groove; 10, reference seat; 11, adjustment protrusion; 12, pre-tightening bolt; 13, inner skirt; 14, outer skirt. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described clearly and completely in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] Combine the following Figures 1 to 7 The utility model describes a gasket for ultra-high vacuum sealing.

[0035] like Figures 1 to 7 As shown, the ultra-high vacuum sealing gasket provided in the embodiment of the utility model is used to be arranged between a pair of connecting flanges 1.

[0036] Specifically, the gasket for ultra-high vacuum sealing includes a gasket body, which is arranged between a pair of connecting flanges 1. The pair of connecting flanges 1 can apply a clamping force to the gasket body so that the gasket body is tightly pressed against any one of the connecting flanges 1 to ensure the sealing contact between the gasket body and any one of the connecting flanges 1.

[0037] A sealing surface 3 is provided at one end of the connecting flange 1 close to the gasket body. For the all-metal knife-edge flange 1 ′ in the prior art, the back side of the knife edge can be regarded as the sealing surface 3 .

[0038] A sealing protrusion 4 is provided at at least one end of the gasket body. The sealing protrusion 4 extends along the circumference of the gasket body. The sealing protrusion 4 and the gasket body form an integrated structure.

[0039] The sealing protrusion 4 is used to abut against the sealing surface 3 to ensure the sealing fit between the sealing protrusion 4 and the sealing surface 3, thereby achieving sealing contact between the connecting flange 1 and the gasket body.

[0040] With such arrangement, the back side of the blade of the all-metal knife-edge flange 1' in the prior art can be used as the above-mentioned sealing surface 3, and the sealing protrusion 4 is pressed against the back side of the blade to achieve ultra-vacuum sealing. When the blade structure of the all-metal knife-edge flange 1' is damaged, it is only necessary to remove the original oxygen-free copper gasket 2' and replace it with the ultra-high vacuum sealing gasket provided by the embodiment of the utility model. There is no need to remove and replace the all-metal knife-edge flange 1'. The operation is convenient and the maintenance cost is low, which greatly shortens the maintenance time and is conducive to improving the working time of the equipment. It solves the problem of high maintenance cost caused by the need to replace the all-metal knife-edge flange as a whole when the blade structure of the all-metal knife-edge flange in the prior art is damaged.

[0041] In addition, the gasket body does not need to undergo high-temperature demagnetization treatment. The sealing protrusion 4 is arranged on the gasket body, which eliminates the influence of high-temperature demagnetization treatment on the strength of the sealing protrusion 4, is beneficial to improving the strength of the sealing protrusion 4, and improving the stability of the gasket for ultra-high vacuum sealing.

[0042] It should be noted that a through hole is provided at the center of the connecting flange 1 for communicating the inner cavities of the pipes and other components connected by the pair of connecting flanges 1. A through hole is provided at the center of the gasket body for communicating the through holes of the pair of connecting flanges 1. Figure 2 and Figure 5 The through holes on the connecting flange 1 and the gasket body are not shown.

[0043] The cross-sectional shape of the connecting flange 1, the cross-sectional shape of the gasket body and the cross-sectional shape of the through hole may be, but are not limited to, circular, rectangular, square, elliptical, polygonal, waist-shaped, etc. No specific limitation is made here, as long as the sealing protrusion 4 of the gasket body can be tightly pressed against the sealing surface 3 of any connecting flange 1 and the through holes on a pair of connecting flanges 1 are connected.

[0044] In some embodiments, the sealing protrusion 4 is provided at only one end of the gasket body. In this case, the gasket body is only applicable to the situation where the blade structure of only one of the pair of connecting flanges 1 is damaged.

[0045] In the embodiment of the utility model, the above-mentioned sealing protrusions 4 are provided at both ends of the gasket body. At this time, the gasket body can be applicable to the scenario where the blade structure of only one of a pair of connecting flanges 1 is damaged, and can also be applicable to the scenario where the blade structures of both connecting flanges 1 in a pair of connecting flanges 1 are damaged, and has strong applicability.

[0046] In the embodiment of the utility model, the sealing protrusion 4 has a first annular surface 5 and a second annular surface 6, and the first annular surface 5 and the second annular surface 6 are coaxially arranged, wherein the first annular surface 5 is located on the side of the second annular surface 6 close to the axis of the gasket body.

[0047] At least one of the generatrix of the first annular surface 5 and the generatrix of the second annular surface 6 is arranged obliquely relative to the cross section of the gasket body, with reference to Figure 3 The generatrix of the first annular surface 5 and the generatrix of the second annular surface 6 are both inclined relative to the cross section of the gasket body.

[0048] The generatrix of the first annular surface 5 is arranged at an angle to the generatrix of the second annular surface 6, so that the sealing protrusion 4 is in a sharp-edged structure. When the connecting flange 1 is pressed against the gasket body, the sharp-edged portion of the sealing protrusion 4 is in tight contact with the sealing surface 3, which is beneficial to improving the sealing between the connecting flange 1 and the gasket body and reducing the requirement for the size of the preload force required to be provided by the preload assembly.

[0049] In this embodiment, the angle between the generatrix of the first annular surface 5 and the generatrix of the second annular surface 6 is controlled within a range of 30 to 135 degrees. Specifically, the angle between the generatrix of the first annular surface 5 and the generatrix of the second annular surface 6 may be 75 degrees.

[0050] A first positioning step 7 is provided at one end of the connecting flange 1 close to the gasket body, and the first positioning step 7 is located on the side of the sealing surface 3 away from the axis of the connecting flange 1. Correspondingly, in this embodiment, a second positioning step 8 is provided at one end of the gasket body close to the connecting flange 1, and the side wall of the second positioning step 8 away from the axis of the gasket body abuts against the side wall of the first positioning step 7 close to the axis of the connecting flange 1.

[0051] The relative position of the connecting flange 1 and the gasket body is positioned through the interaction between the first positioning step 7 and the second positioning step 8. When the gasket body is assembled and connected to the connecting flange 1, the relative position of the gasket body and the connecting flange 1 can be adjusted conveniently and quickly, thereby improving the assembly efficiency. Moreover, the positioning structure can also ensure the stability of the relative position of the connecting flange 1 and the gasket body when the pre-tightening force is applied to the connecting flange 1 and the gasket body by the pre-tightening assembly, thereby avoiding the relative displacement of the gasket body and the connecting flange 1 in a direction perpendicular to their own axes, thereby ensuring the sealing performance of the connecting flange 1 and the gasket body. In addition, the interaction between the first positioning step 7 and the second positioning step 8 can cause the axis of the gasket body to be parallel to the axis of the connecting flange 1.

[0052] Generally, the axis of the gasket body coincides with the axis of the connecting flange 1 , that is, the interaction between the first positioning step 7 and the second positioning step 8 is conducive to promoting the coincidence of the axis of the gasket body with the axis of the connecting flange 1 .

[0053] In this embodiment, the gasket body has an inner skirt portion 13, and the inner skirt portion 13 is located on a side of the sealing protrusion 4 close to the axis of the gasket body. The provision of the inner skirt portion 13 is beneficial to improving the strength of the gasket body.

[0054] The sealing protrusion 4, the inner skirt portion 13 and the gasket body form an integrated structure, which can be formed integrally by casting or machining. The material of the gasket for ultra-high vacuum sealing provided by the embodiment of the utility model can be, but is not limited to, oxygen-free copper.

[0055] To sum up, for a high vacuum system or an ultra-high vacuum system, when the knife-edge flange is damaged, the ultra-high vacuum sealing gasket provided by the embodiment of the utility model is used to directly replace the original oxygen-free copper gasket 2', and the maintenance is completed without removing or replacing the knife-edge flange. This can reduce the scrap rate of the knife-edge flange, improve the stability of the ultra-high vacuum sealing gasket, and ensure the operating time of the ultra-high vacuum system.

[0056] In addition, when the high vacuum system or ultra-high vacuum system is assembled for the first time, the ultra-high vacuum sealing gasket provided by the embodiment of the utility model can be directly used in combination with the all-metal knife-edge flange. The ultra-high vacuum sealing gasket provided by the embodiment of the utility model can replace the oxygen-free copper gasket 2' in the prior art, and be combined with the all-metal knife-edge flange 1' in the prior art as a connection mechanism for the high vacuum system or ultra-high vacuum system.

[0057] On the other hand, an embodiment of the utility model further provides a connection mechanism for ultra-high vacuum sealing, including the ultra-high vacuum sealing gasket provided by any of the above embodiments. The ultra-high vacuum sealing gasket provided by the above embodiments has high strength and strong stability, and can cooperate with the sealing of the all-metal knife-edge flange 1' with a damaged knife-edge structure. Therefore, the ultra-high vacuum sealing connection mechanism provided by this embodiment has the advantages of strong stability, long service life, and convenient maintenance. The derivation process of the beneficial effects of the ultra-high vacuum sealing connection mechanism in the embodiment of the utility model is generally similar to the derivation process of the beneficial effects of the above-mentioned ultra-high vacuum sealing gasket, so it will not be repeated here.

[0058] The ultra-high vacuum sealing connection mechanism provided in the embodiment of the utility model includes a sealing gasket 2, a pair of connecting flanges 1 and a pre-tightening component. The sealing gasket 2 is arranged between the pair of connecting flanges 1, and the pre-tightening component is used to make the pair of connecting flanges 1 generate clamping force on the sealing gasket 2.

[0059] Specifically, a connection hole is provided on the connection flange 1, and the connection hole penetrates the connection flange 1 along the axial direction of the connection flange 1. A plurality of connection holes are provided, and the plurality of connection holes are distributed at intervals along the circumference of the connection flange 1. The pre-tightening assembly includes a pre-tightening bolt 12 and a nut. The pre-tightening bolt 12 corresponds to the connection hole one by one. After the pre-tightening bolt 12 passes through the connection hole, the nut end of the pre-tightening bolt 12 abuts against the end face of one of the connection flanges 1, and the nut is threadedly connected to the pre-tightening bolt 12, and the nut abuts against the end face of the other connection flange 1. By making the pre-tightening bolt 12 and the nut rotate relative to each other, a pre-tightening force can be applied to the connection flange 1 and the sealing gasket 2, so that a pair of connection flanges 1 generate a force on the sealing gasket 2 along the axial direction of the sealing gasket 2, so that the pair of connection flanges 1 clamp the sealing gasket 2, and the sealing protrusion 4 is deformed, thereby achieving ultra-high vacuum sealing.

[0060] In some embodiments, the sealing surface 3 on the connecting flange 1 is set as a plane perpendicular to the axis of the connecting flange 1. At this time, the sealing protrusion 4 on the sealing gasket 2 can effectively abut against the sealing surface 3. When the sealing surface 3 is set as a plane, the structure of the connecting flange 1 is simple, the processing difficulty is low, and the processing accuracy is easy to control, which is conducive to reducing the processing cost of the gasket for ultra-high vacuum sealing.

[0061] In other embodiments, the sealing surface 3 on the connecting flange 1 is set to a conical surface structure, and the generatrix of the sealing surface 3 is set at an angle to the axis of the connecting flange 1, that is, the generatrix of the sealing surface 3 is set inclined relative to the axis of the connecting flange 1.

[0062] For the convenience of explanation, the generatrix of the sealing surface 3 is called the third generatrix, so that the distance between the end of the third generatrix close to the sealing gasket 2 and the axis of the connecting flange 1 can be smaller than the distance between the end of the third generatrix far from the sealing gasket 2 and the axis of the connecting flange 1. When the cross-sectional shapes of the connecting flange 1, the cross-sectional shapes of the sealing gasket 2 and the cross-sectional shapes of the through hole are all circular, the diameter of the end of the sealing surface 3 close to the sealing gasket 2 is smaller than the diameter of the end of the sealing surface 3 far from the sealing gasket 2, referring to Figure 3 .

[0063] That is to say, the structure near the sealing surface 3 of the connecting flange 1 in this embodiment is consistent with the blade structure of the all-metal knife-edge flange 1' on the existing market. The all-metal knife-edge flange 1' in the prior art can be directly used as the connecting flange 1 of the ultra-high vacuum sealing connection mechanism provided in this embodiment. When the ultra-high vacuum sealing connection mechanism is improved, the all-metal knife-edge flange 1' in the prior art can be directly used in combination with the improved sealing gasket 2 provided in the embodiment of the utility model, thereby avoiding the scrap rate and waste of the existing all-metal knife-edge flange 1'.

[0064] In some other embodiments, the distance between the end of the third busbar close to the sealing gasket 2 and the axis of the connecting flange 1 is greater than the distance between the end of the third busbar far from the sealing gasket 2 and the axis of the connecting flange 1 .

[0065] In the embodiment of the utility model, a positioning structure is provided between the connecting flange 1 and the sealing gasket 2, and the positioning structure is used to position the relative position of the connecting flange 1 and the sealing gasket 2. When the sealing gasket 2 is assembled and connected to the connecting flange 1, the relative position of the sealing gasket 2 and the connecting flange 1 can be adjusted conveniently and quickly, thereby improving the assembly efficiency. Moreover, the positioning structure can also ensure the relative position of the connecting flange 1 and the sealing gasket 2 is stable when the pre-tightening force is applied to the connecting flange 1 and the sealing gasket 2 by the pre-tightening assembly, thereby avoiding the position dislocation of the sealing gasket 2 and ensuring the sealing performance of the connecting flange 1 and the sealing gasket 2.

[0066] In this embodiment, the positioning structure includes a first positioning step 7 and a second positioning step 8. The first positioning step 7 is arranged at one end of the connecting flange 1 close to the sealing gasket 2, and the first positioning step 7 is located on the side of the sealing surface 3 away from the axis of the connecting flange 1. The second positioning step 8 is arranged at one end of the sealing gasket 2 close to the connecting flange 1, and the side wall of the second positioning step 8 away from the axis of the sealing gasket 2 abuts against the side wall of the first positioning step 7 close to the axis of the connecting flange 1.

[0067] The relative positions of the connecting flange 1 and the sealing gasket 2 are positioned by the interaction between the first positioning step 7 and the second positioning step 8. When the sealing gasket 2 is assembled and connected to the connecting flange 1, the relative positions of the sealing gasket 2 and the connecting flange 1 can be adjusted conveniently and quickly, thereby improving the assembly efficiency. Moreover, the positioning structure can also ensure the relative position stability of the connecting flange 1 and the sealing gasket 2 when the pre-tightening force is applied to the connecting flange 1 and the sealing gasket 2 by the pre-tightening assembly, thereby avoiding the relative displacement of the sealing gasket 2 and the connecting flange 1 in a direction perpendicular to their own axes, thereby ensuring the sealing performance of the connecting flange 1 and the sealing gasket 2. In addition, the interaction between the first positioning step 7 and the second positioning step 8 can cause the axis of the sealing gasket 2 to be parallel to the axis of the connecting flange 1.

[0068] Generally, the axis of the sealing gasket 2 coincides with the axis of the connecting flange 1 , that is, the interaction between the first positioning step 7 and the second positioning step 8 is conducive to promoting the coincidence of the axis of the sealing gasket 2 with the axis of the connecting flange 1 .

[0069] In this embodiment, when the sealing surfaces 3 of the pair of connecting flanges 1 are both against the sealing protrusions 4 at both ends of the sealing gasket 2, there is a spacing between the first positioning steps 7 of the pair of connecting flanges 1. An adjustment portion is provided on the outer edge of the sealing gasket 2, and the adjustment portion is directly corresponding to the spacing between the first positioning steps 7 of the pair of connecting flanges 1. For the convenience of explanation, the spacing between the first positioning steps 7 of the pair of connecting flanges 1 is called the adjustment spacing.

[0070] The ultra-high vacuum sealing connection mechanism provided by the embodiment of the utility model further includes an adjustment component, which is detachably arranged on the connection flange 1. The adjustment component can act on the adjustment part by adjusting the spacing, and the axis of the sealing gasket 2 can be made parallel to or coincide with the axis of the connection flange 1 through the interaction between the adjustment component and the adjustment part.

[0071] It can be understood that the adjustment assembly and the adjustment part are mainly used to further adjust the position accuracy of the sealing gasket 2.

[0072] In the specific use process, after the sealing gasket 2 is placed between a pair of connecting flanges 1, each pre-tightening bolt 12 is passed through each connecting hole of the pair of connecting flanges 1, and each pre-tightening bolt 12 is connected to the corresponding nut to preliminarily pre-tighten the pair of connecting flanges 1 and the sealing gasket 2. The pre-tightening force at this time is very small. Then the adjustment component is installed on the connecting flange 1, and the position accuracy of the gasket is further adjusted by using the adjustment component, and the pre-tightening bolt 12 or nut is screwed to further pre-tighten the pair of connecting flanges 1 and the sealing gasket 2.

[0073] The sealing gasket 2 has an outer skirt portion 14, which is located on the side of the sealing protrusion 4 away from the axis of the sealing gasket 2, and the adjustment portion is arranged on the outer skirt portion 14. When the sealing gasket 2 is arranged between a pair of connecting flanges 1, the outer skirt portion 14 of the sealing gasket 2 is located between the first positioning steps 7 of the pair of connecting flanges 1, and both surfaces of the outer skirt portion 14 of the sealing gasket 2 distributed along the axial direction of the sealing gasket 2 are spaced from the first positioning steps 7.

[0074] In a specific embodiment, the adjustment portion includes an adjustment groove 9 , and the adjustment groove 9 is disposed on the outer peripheral surface of the sealing gasket 2 .

[0075] The adjustment assembly includes a reference seat 10 and an adjustment protrusion 11. The reference seat 10 extends along the circumference of the connecting flange 1, and the reference seat 10 can contact the outer surface of the connecting flange 1. The adjustment protrusion 11 is arranged on the side of the reference seat 10 facing the connecting flange 1. The adjustment protrusion 11 is used to enter the adjustment spacing and interact with the adjustment groove 9, thereby adjusting the position of the adjustment groove 9 and the sealing gasket 2, so that the axis of the sealing gasket 2 is parallel to or coincides with the axis of the connecting flange 1.

[0076] The sealing protrusion 4, the inner skirt portion 13 and the outer skirt portion 14 of the sealing gasket 2 are formed into an integrated structure. Specifically, the sealing protrusion 4, the inner skirt portion 13 and the outer skirt portion 14 can be integrally formed. The arrangement of the inner skirt portion 13 and the outer skirt portion 14 is conducive to improving the strength of the sealing gasket 2 and reducing deformation due to non-sealing requirements.

[0077] Specifically, the adjustment groove 9 extends along the circumference of the sealing gasket 2, and the cross-sectional shape of the adjustment groove 9 is semicircular. Figure 3 shown.

[0078] In a further embodiment, at least two reference seats 10 are provided, each of which is connected end to end to form a closed loop, and two adjacent reference seats 10 are detachably connected. During adjustment, the closed loop structure formed by each reference seat 10 is sleeved on the outside of the connecting flange 1, and the adjustment protrusion 11 is located within the adjustment interval, so that the relative position of the adjustment component and the connecting flange 1 is more stable, convenient to operate, and conducive to improving assembly efficiency.

[0079] In a specific embodiment, two adjacent reference seats 10 can be detachably connected together by connecting bolts and nuts. Figure 5 and Figure 7 .

[0080] On the other hand, the embodiment of the utility model further provides an ultra-high vacuum system, including the ultra-high vacuum sealing gasket or the ultra-high vacuum sealing connecting mechanism provided by any of the above embodiments. The ultra-high vacuum sealing gasket provided by the above embodiments has the advantages of high strength and strong stability. Therefore, the ultra-high vacuum system provided by this embodiment has strong reliability, convenient maintenance, and low maintenance cost. The derivation process of the beneficial effects of the ultra-high vacuum system in the embodiment of the utility model is generally similar to the derivation process of the beneficial effects of the ultra-high vacuum sealing gasket described above, so it will not be repeated here.

[0081] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A gasket for ultra-high vacuum sealing, characterized in that: Suitable for being arranged between a pair of connecting flanges, the ultra-high vacuum sealing gasket comprises a gasket body; A sealing surface is provided at one end of the connecting flange close to the gasket body, and a sealing protrusion is provided at at least one end of the gasket body. The sealing protrusion is suitable for abutting against the sealing surface, and the sealing protrusion extends along the circumference of the gasket body. The sealing protrusion and the gasket body form an integrated structure.

2. The ultra-high vacuum sealing gasket according to claim 1, characterized in that: The sealing protrusions are arranged at both ends of the gasket body.

3. The ultra-high vacuum sealing gasket according to claim 1, characterized in that: The sealing protrusion has a first annular surface and a second annular surface which are coaxially arranged, the first annular surface being located on a side of the second annular surface close to the axis of the gasket body, at least one of the generatrix of the first annular surface and the generatrix of the second annular surface being inclined relative to the cross-section of the gasket body, and the generatrix of the first annular surface being arranged at an angle to the generatrix of the second annular surface.

4. The ultra-high vacuum sealing gasket according to claim 3, characterized in that: The included angle between the generatrix of the first annular surface and the generatrix of the second annular surface is 30 to 135 degrees.

5. The ultra-high vacuum sealing gasket according to claim 1, characterized in that: A first positioning step is provided at one end of the connecting flange close to the gasket body, and the first positioning step is located on a side of the sealing surface away from the axis of the connecting flange; A second positioning step is provided at one end of the gasket body close to the connecting flange, and a side wall of the second positioning step away from the axis of the gasket body abuts against a side wall of the first positioning step close to the axis of the connecting flange.

6. A connection mechanism for ultra-high vacuum sealing, characterized in that: It comprises a sealing gasket, a pair of connecting flanges and a pre-tightening assembly, wherein the sealing gasket is arranged between the pair of connecting flanges, the pre-tightening assembly is suitable for causing the pair of connecting flanges to generate a clamping force on the sealing gasket, and the sealing gasket is an ultra-high vacuum sealing gasket as described in any one of claims 1-5.

7. The ultra-high vacuum sealing connection mechanism according to claim 6, characterized in that: The sealing surface of the connecting flange is a conical surface, and the generatrix of the sealing surface is arranged at an angle to the axis of the connecting flange; Alternatively, the sealing surface of the connecting flange is a plane, and the sealing surface is perpendicular to the axis of the connecting flange.

8. The ultra-high vacuum sealing connection mechanism according to claim 6, characterized in that: It also includes an adjustment component, which is detachably arranged on the connecting flange. An adjustment portion is arranged on the outer edge of the sealing gasket. The adjustment component is suitable for interacting with the adjustment portion to make the axis of the sealing gasket parallel to the axis of the connecting flange.

9. The ultra-high vacuum sealing connection mechanism according to claim 8, characterized in that: The adjustment portion includes an adjustment groove, which is arranged on the outer peripheral surface of the sealing gasket. The adjustment assembly includes a reference seat and an adjustment protrusion, wherein the reference seat extends along the circumference of the connecting flange, and the adjustment protrusion is arranged on a side of the reference seat facing the connecting flange, and the adjustment protrusion is suitable for interacting with the adjustment groove; At least two reference seats are provided, each of which is connected end to end to form a closed loop, and two adjacent reference seats are detachably connected.

10. An ultra-high vacuum system, characterized in that: It comprises the ultra-high vacuum sealing gasket as claimed in any one of claims 1 to 5, or comprises the ultra-high vacuum sealing connecting mechanism as claimed in any one of claims 6 to 9.

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