Oxygen recovery device of sintering furnace
By designing an oxygen recovery device in a sintering furnace, including oxygen pipes, air outlet pipes, cooling devices, filter devices, compression devices and booster devices, the problem of insufficient external oxygen supply is solved, efficient oxygen recycling and utilization is achieved, and ITO is reduced Target sintering cost.
Patent Information
- Application Number
- CN202420757696.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-12
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2034-04-12
AI Technical Summary
During the sintering process of ITO targets, it is difficult to effectively mix and supply oxygen when external oxygen is insufficient, resulting in high sintering costs.
A sintering furnace oxygen recovery device is designed, including an oxygen pipe, an outlet pipe, a cooling device, a filtration device, a compression device and a booster device. Through these devices, the recovered oxygen is recycled into the sintering furnace again, and the booster device is used to supply the Replenish oxygen when there is insufficient oxygen to ensure constant oxygen supply.
It effectively improves the recovery and utilization rate of oxygen, reduces the use of new oxygen, and reduces the overall oxygen usage during the sintering of the target material, thereby reducing the sintering cost.
Smart Images
Figure CN222257722U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of oxygen recovery devices, in particular to an oxygen recovery device for a sintering furnace. Background Art
[0002] ITO target is an indium tin composite oxide ceramic, an important optoelectronic functional material, often used as a magnetron sputtering target to prepare transparent conductive films on glass, plastic and other substrate materials, and used in the production of flat panel display devices such as liquid crystal displays and touch screens. There are two main costs in the sintering process of ITO targets: the first is the electricity cost required during the sintering process of the target, and the second is the oxygen cost required during the sintering process of the target. At present, oxygen needs to be continuously supplied during the sintering process of ITO targets, and the amount of oxygen required is huge.
[0003] In the process of sintering ITO target materials, the following problems usually occur. See the patent publication number CN206739906U, which discloses an oxygen recovery and utilization device for a kiln for sintering high-nickel ternary materials, including a kiln and an oxygen inlet pipe connected to the kiln for providing oxygen, and a circulation pipeline for recovering oxygen. The two ends of the circulation pipeline are respectively connected to the rear section of the kiln and the inlet end of the oxygen inlet pipe. A cooling pipe and an air induced draft device are also provided on the circulation pipeline. Although the patent improves the oxygen recovery rate and reduces the production cost, it still has the problem of difficulty in mixing the oxygen supply to save costs when the external oxygen supply is insufficient, thereby affecting the sintering cost. Utility Model Content
[0004] In view of this, the purpose of the utility model is to provide an oxygen recovery device for a sintering furnace to solve the problem that it is difficult to mix and supply oxygen to save costs when the external oxygen supply is insufficient.
[0005] Based on the above-mentioned purpose, the utility model provides an oxygen recovery device for a sintering furnace, comprising: a sintering furnace body, an oxygen pipe fixedly installed on one side of the sintering furnace body and communicating with the sintering furnace body, and an air outlet pipe fixedly installed on the other side of the sintering furnace body and communicating with the sintering furnace body; also comprising: a cooling device, arranged on one side of the outer periphery of the sintering furnace body, and one end of the air outlet pipe away from the sintering furnace body is fixedly connected with the cooling device; a filtering device, arranged on one side of the cooling device, a compression device is arranged on one side of the filtering device, and a boosting device is arranged on one side of the compression device; wherein, after the oxygen in the oxygen pipe passes through the sintering furnace body to maintain a constant pressure, it passes through the cooling device, the filtering device, the compression device and the boosting device in sequence through the air outlet pipe, so that the recovered oxygen flows back to the sintering furnace body through the oxygen pipe again for recycling.
[0006] Preferably, a cooling output pipe is fixedly installed on one side of the cooling device, and one end of the cooling output pipe away from the cooling device is fixedly connected to the filtering device.
[0007] Preferably, a filter output tube is fixedly installed on one side of the filter device, and one end of the filter output tube away from the filter device is fixedly connected to the compression device.
[0008] Preferably, a compression output pipe is fixedly installed on one side of the compression device, and one end of the compression output pipe away from the compression device is fixedly connected to the boosting device.
[0009] Preferably, a boost output pipe is fixedly installed on one side of the boost device, and one end of the boost output pipe away from the boost device is fixedly connected to the oxygen pipe.
[0010] Preferably, a temperature sensor, an air pressure sensor and an oxygen sensor are provided inside the sintering furnace body, and the oxygen pipe and the air outlet pipe are both stainless steel pipe structures.
[0011] The beneficial effects of the utility model are as follows: the air outlet pipe passes through the cooling device, the filtering device, the compressing device and the boosting device in sequence, so that the recovered oxygen flows back to the sintering furnace body through the oxygen pipe for recycling; when the oxygen supply inside the oxygen pipe is insufficient, the oxygen in the compression tank is transported together with the new oxygen in the oxygen pipe to the sintering furnace body through the boosting device for oxygen supply, thereby realizing the recycling of oxygen and improving the oxygen supply effect, thereby effectively reducing the amount of new oxygen required to be invested, achieving the goal of reducing the overall oxygen usage in the target material sintering process, achieving the result of cost reduction in the target material sintering process, and greatly reducing the sintering cost of the target material. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0013] Figure 1 It is a schematic diagram of the structure of the utility model.
[0014] The markings in the figure are: 1. sintering furnace body; 11. oxygen pipe; 12. air outlet pipe; 2. cooling device; 21. cooling output pipe; 3. filtering device; 31. filtering output pipe; 4. compression device; 41. compression output pipe; 5. boosting device; 51. boosting output pipe. DETAILED DESCRIPTION
[0015] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.
[0016] like Figure 1 As shown, an oxygen recovery device for a sintering furnace comprises: a sintering furnace body 1, wherein a temperature sensor, an air pressure sensor and an oxygen sensor are arranged inside the sintering furnace body 1, an oxygen pipe 11 fixedly installed on one side of the sintering furnace body 1 by bolts and communicating with the sintering furnace body 1, and an air outlet pipe 12 fixedly installed on the other side of the sintering furnace body 1 by bolts and communicating with the sintering furnace body 1, wherein both the oxygen pipe 11 and the air outlet pipe 12 are stainless steel pipe structures; and further comprises: a cooling device 2, which is arranged on one side of the outer periphery of the sintering furnace body 1, The end of the air outlet pipe 12 away from the sintering furnace body 1 is fixedly connected to the cooling device 2 by bolts; the filtering device 3 is arranged on one side of the cooling device 2, and a compression device 4 is arranged on one side of the filtering device 3, and a boosting device 5 is arranged on one side of the compression device 4. After the oxygen in the oxygen pipe 11 passes through the sintering furnace body 1 to maintain a constant pressure, it passes through the cooling device 2, the filtering device 3, the compression device 4 and the boosting device 5 in sequence through the air outlet pipe 12, so that the recovered oxygen flows back to the sintering furnace body 1 through the oxygen pipe 11 for recycling.
[0017] Among them, the ITO target material is put into the sintering furnace body 1 for combustion. During the sintering process, the temperature inside the sintering furnace body 1 is detected by a temperature sensor. When the temperature reaches the point where oxygen needs to be introduced, external oxygen is transported to the sintering furnace body 1 through the oxygen pipe 11. After oxygen is introduced into the sintering furnace body 1 and a certain oxygen pressure is maintained inside the sintering furnace body 1, the gas outlet pipe 12 is opened to allow the gas generated after sintering to be transmitted to the cooling device 2 through the gas outlet pipe 12 until it is cooled to about 80 degrees Celsius. The cooled gas is transmitted to the filtering device 3 for filtering and impurity removal to screen oxygen. After the oxygen is purified, it is compressed by the compression device 4 and stored in the compression tank of the compression device 4. When the oxygen supply inside the oxygen pipe 11 is insufficient, the oxygen in the compression tank is transported to the sintering furnace body 1 together with the new oxygen in the oxygen pipe 11 through the booster device 5 to supply oxygen, thereby realizing the recycling of oxygen and improving the oxygen supply effect.
[0018] In order to further allow the gas generated in the sintering furnace body 1 to be smoothly recycled and utilized, a cooling output pipe 21 is fixedly installed on one side of the cooling device 2 by bolts, and the end of the cooling output pipe 21 away from the cooling device 2 is fixedly connected to the filter device 3 by bolts, and a filter output pipe 31 is fixedly installed on one side of the filter device 3 by bolts, and the end of the filter output pipe 31 away from the filter device 3 is fixedly connected to the compression device 4 by bolts, and a compression output pipe 41 is fixedly installed on one side of the compression device 4 by bolts, and the end of the compression output pipe 41 away from the compression device 4 is fixedly connected to the boosting device 5 by bolts, and a boosting output pipe 51 is fixedly installed on one side of the boosting device 5 by bolts, and the end of the boosting output pipe 51 away from the boosting device 5 is fixedly connected to the oxygen pipe 11 by bolts.
[0019] Among them, the cooling device 2, the filtering device 3, the compression device 4 and the boosting device 5 can be connected through the cooling output pipe 21, the filtering output pipe 31, the compression output pipe 41 and the boosting output pipe 51, so that the gas output in the sintering furnace body 1 can be recycled and reused, further mixed with the new oxygen flowing in the oxygen pipe 11 and put into the sintering furnace body 1 again to implement oxygen supply, thereby effectively reducing the amount of new oxygen that needs to be invested, achieving the goal of reducing the overall oxygen usage during the target material sintering process, achieving the result of cost reduction during the target material sintering process, and greatly reducing the sintering cost of the target material.
[0020] Working principle: When in use, the ITO target material is put into the sintering furnace body 1 for combustion. During the sintering process, the temperature inside the sintering furnace body 1 is detected by a temperature sensor. When the temperature reaches the point where oxygen needs to be introduced, external oxygen is transported to the sintering furnace body 1 through the oxygen pipe 11. After oxygen is introduced into the sintering furnace body 1 and a certain oxygen pressure is maintained inside the sintering furnace body 1, the gas outlet pipe 12 is opened to allow the gas generated after sintering to be transmitted to the cooling device 2 through the gas outlet pipe 12 until it is cooled to about 80 degrees Celsius. The cooled gas is transmitted to the filtering device 3 for filtering and impurity removal to screen oxygen. After the oxygen is purified, it is compressed by the compression device 4 and stored in the compression tank of the compression device 4. When the oxygen supply inside the oxygen pipe 11 is insufficient, the oxygen in the compression tank is transported to the sintering furnace body 1 together with the new oxygen in the oxygen pipe 11 through the booster device 5 to supply oxygen, thereby realizing the recycling of oxygen and improving the oxygen supply effect.
Claims
1. A sintering furnace oxygen recovery device, comprising: A sintering furnace body (1), an oxygen pipe (11) fixedly mounted on one side of the sintering furnace body (1) and communicating with the sintering furnace body (1), and an air outlet pipe (12) fixedly mounted on the other side of the sintering furnace body (1) and communicating with the sintering furnace body (1); characterized in that it also includes: A cooling device (2) is arranged on one side of the outer periphery of the sintering furnace body (1), and one end of the air outlet pipe (12) away from the sintering furnace body (1) is fixedly connected to the cooling device (2); A filter device (3) is arranged on one side of the cooling device (2), a compression device (4) is arranged on one side of the filter device (3), and a booster device (5) is arranged on one side of the compression device (4); The oxygen in the oxygen pipe (11) is maintained at a constant pressure through the sintering furnace body (1), and then passes through the cooling device (2), the filtering device (3), the compression device (4) and the boosting device (5) in sequence through the gas outlet pipe (12), so that the recovered oxygen flows back to the sintering furnace body (1) through the oxygen pipe (11) for recycling.
2. The oxygen recovery device for a sintering furnace according to claim 1, characterized in that: A cooling output pipe (21) is fixedly installed on one side of the cooling device (2), and one end of the cooling output pipe (21) away from the cooling device (2) is fixedly connected to the filtering device (3).
3. The oxygen recovery device for a sintering furnace according to claim 1, characterized in that: A filter output pipe (31) is fixedly installed on one side of the filter device (3), and one end of the filter output pipe (31) away from the filter device (3) is fixedly connected to the compression device (4).
4. The oxygen recovery device for a sintering furnace according to claim 1, characterized in that: A compression output pipe (41) is fixedly inserted on one side of the compression device (4), and one end of the compression output pipe (41) away from the compression device (4) is fixedly connected to the boosting device (5).
5. The oxygen recovery device for a sintering furnace according to claim 1, characterized in that: A boost output pipe (51) is fixedly installed on one side of the boost device (5), and one end of the boost output pipe (51) away from the boost device (5) is fixedly connected to the oxygen pipe (11).
6. The oxygen recovery device for a sintering furnace according to claim 1, characterized in that: A temperature sensor, an air pressure sensor and an oxygen sensor are arranged inside the sintering furnace body (1), and the oxygen pipe (11) and the air outlet pipe (12) are both stainless steel pipe structures.