Silicon component etching tool

Abstract

The utility model provides a silicon component etching tooling, including two tooling plates and two bearing shafts, the two tooling plates are symmetrically arranged in parallel, the bearing shafts are used for supporting a silicon component, the two bearing shafts are symmetrically arranged in parallel, each bearing shaft includes a fixed shaft and a roller, and the fixed shaft is used for supporting the silicon component. The two ends of the fixing shaft are respectively connected with one tool plate, the roller is arranged on the fixing shaft in a sleeved mode, and the roller is connected with the fixing shaft in a rolling mode. According to the etching tool disclosed by the utility model, the silicon component is supported by the two bearing shafts, the contact area between the arc-shaped surfaces of the outer walls of the bearing shafts and the silicon component is small, and the rollers of the bearing shafts can rotate along with the silicon component, so that etching liquid can be in contact with the whole surface of the silicon component in the etching process, local etching leakage points are avoided, and the etching efficiency is improved. Therefore, uniform etching of the surface of the silicon component is realized.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor silicon component etching carriers, in particular to a silicon component etching tool. Background Art

[0002] Semiconductor silicon component products include silicon ingots, silicon barrels, silicon disks, silicon rings, silicon tubes, etc. These silicon components are mainly used to carry or participate in the manufacturing process of semiconductor wafers. The wet etching process is a key step in the processing of semiconductor silicon components. The principle of wet etching is to use chemical methods to remove pollutants attached to the surface of silicon components. Wet etching can make the surface of the parts reach a higher degree of cleanliness.

[0003] In the prior art, a dedicated wet etching device is used for the etching process. First, the silicon component is installed in the etching tool, and then the tool is immersed in the etching liquid to etch and clean the surface of the workpiece. During the etching process, the surface of the silicon component will contact the tool, and the etching liquid cannot act on these contact parts, resulting in poor uniformity of the etching effect on the surface of the silicon component, which will leave marks locally and affect subsequent use. Utility Model Content

[0004] The problem to be solved by the utility model is how to make the etching liquid contact completely with the surface of the silicon component and improve the etching uniformity.

[0005] In order to solve the above problems, the utility model provides a silicon component etching tool, including two tooling plates and two bearing shafts, the two tooling plates are arranged in parallel and symmetrically, the bearing shaft is used to support the silicon component, the two bearing shafts are arranged in parallel and symmetrically, the bearing shaft includes a fixed shaft and a roller, the two ends of the fixed shaft are respectively connected to one of the tooling plates, the roller is sleeved on the fixed shaft, and the roller is rollingly connected to the fixed shaft.

[0006] The etching tool of the utility model supports the silicon component by two bearing shafts. The arc surface of the outer wall of the bearing shaft has a small contact area with the silicon component, and the roller of the bearing shaft can rotate with the silicon component. Therefore, during the etching process, the etching liquid will contact the entire surface of the silicon component, avoiding the occurrence of local etching leaks, thereby achieving uniform etching of the surface of the silicon component.

[0007] Furthermore, the roller is provided with at least one circumferentially arranged limiting groove, which can be used to limit the assembly of silicon parts with smaller thickness, such as silicon rings, silicon plates, etc., to improve the versatility of the tooling.

[0008] Furthermore, the groove walls on both sides of the limiting groove are symmetrically inclined, and the limiting groove gradually increases from the groove bottom to the groove opening. The limiting groove adopts a V-shaped opening structure to reduce interference and facilitate the loading of silicon components.

[0009] Furthermore, the tooling plate is provided with two long strip adjustment holes, the two adjustment holes on one tooling plate are symmetrically and tiltedly arranged, the two ends of the fixed shaft are positioned in the adjustment holes, and the installation positions of the two ends of the fixed shaft in the adjustment holes are adjustable. The long strip adjustment holes are provided to adjust the installation position of the bearing shaft, so that the tooling can be adapted to silicon components of different sizes, thereby improving versatility.

[0010] Furthermore, the fixed shaft includes a shaft body and threaded columns arranged at both ends of the shaft body, and the threaded columns pass through the corresponding adjustment holes and are fixedly connected to the nuts. The fixed shaft adopts a threaded connection form, which can realize rapid position adjustment and reliable positioning.

[0011] Furthermore, the etching tool further comprises two reinforcing bars, which are arranged in parallel and symmetrically, and the two ends of the reinforcing bars are respectively connected to one of the tooling plates. The reinforcing bars play a role in reinforcing the overall structure and preventing the tooling plate from being damaged by force.

[0012] Furthermore, the symmetry axes of the two reinforcing bars coincide with the symmetry axes of the two bearing axes, and the distance between the two reinforcing bars is greater than the distance between the two bearing axes, thereby preventing the reinforcing bars from interfering with the loading of the silicon components.

[0013] Furthermore, at least one clamping groove is provided on the reinforcing strip, and the opening direction of the clamping groove on each reinforcing strip faces the other reinforcing strip. The clamping groove is provided so that the reinforcing strip can provide limited support for the thinner sheet-shaped silicon component.

[0014] Furthermore, the tooling plate is provided with two positioning grooves, and one end of each reinforcement strip enters into the corresponding positioning groove. Providing the positioning groove is conducive to the stable installation of the reinforcement strip and prevents the reinforcement strip from falling off.

[0015] Furthermore, at least one weight-reducing hole is provided on the tooling plate. Providing the weight-reducing hole can reduce the overall weight of the tooling, which is beneficial to increasing the loading capacity of the transmission device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural diagram of the etching tooling in the embodiment of the utility model.

[0017] Figure 2 It is a structural diagram of the tooling plate in the embodiment of the utility model.

[0018] Figure 3 It is a structural diagram of the bearing shaft in an embodiment of the utility model.

[0019] Figure 4 It is a structural diagram of the reinforcement strip in the embodiment of the utility model.

[0020] Description of reference numerals:

[0021] 1- tooling plate, 11- adjustment hole, 12- positioning slot, 13- weight reduction hole, 14- slot, 2- load-bearing shaft, 21- fixed shaft, 22- threaded column, 23- roller, 24- limit slot, 3- reinforcement strip, 31- clamping slot. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0023] It should be noted that similar symbols and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not require further definition and explanation in the subsequent drawings.

[0024] In the description of the present utility model, it should be noted that the terms "upper", "lower", "left", "right", "inner", "outer", "front", "back" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or are the positions or positional relationships in which the utility model product is usually placed when in use, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. The drawings of the embodiments of the present utility model are provided with a coordinate system XYZ, wherein the positive direction of the X-axis represents the front, the reverse direction of the X-axis represents the back, the positive direction of the Y-axis represents the right, the reverse direction of the Y-axis represents the left, the positive direction of the Z-axis represents the top, and the reverse direction of the Z-axis represents the bottom.

[0025] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "setting", "connection", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0027] Combination Figures 1 to 4 As shown, the embodiment of the utility model provides a silicon component etching tool for loading silicon components for etching operations. The etching tool comprises two parallel and symmetrically arranged tool plates 1, the setting plane of the tool plates 1 is Figure 1 The planes where the Y axis and the Z axis are located are parallel. The two tooling plates 1 are connected by two bearing shafts 2, which are arranged in parallel and symmetrically. The extension direction of the bearing shafts 2 is Figure 1 The two bearing shafts 2 form a supporting structure for the silicon component, and the silicon component can be placed on the bearing shafts 2 .

[0028] The etching tool also includes two reinforcing bars 3, which are arranged in parallel and symmetrically. The extending direction of the reinforcing bars 3 is Figure 1 The two ends of the reinforcing strip 3 are respectively connected to a tooling plate 1, which plays a role in reinforcing the overall structure of the etching tooling and preventing the tooling plate 1 from being damaged by force.

[0029] The symmetry axes of the two reinforcing bars 3 coincide with the symmetry axes of the two bearing axes 2, and the distance between the two reinforcing bars 3 is greater than the distance between the two bearing axes 2, so that the reinforcing bars 3 can be prevented from interfering with the loading of silicon components. Figure 1 The middle Z axis is parallel, and the two reinforcing bars 3 and the two bearing shafts 2 are symmetrically distributed on both sides of the symmetrical center line of the tooling plate 1.

[0030] Combination Figure 2 As shown, the tooling plate 1 is provided with two long strip-shaped adjustment holes 11, which are symmetrically inclined, and the two ends of the bearing shaft 2 are positioned in the adjustment holes 11, and the installation positions of the two ends of the bearing shaft 2 in the adjustment holes 11 are adjustable. By adjusting the position of the bearing shaft 2 along the adjustment holes 11, the installation height of the bearing shaft 2 and the distance between the two bearing shafts 2 can be changed synchronously, so that the tooling can be adapted to silicon components of different sizes, and has good versatility.

[0031] Each tooling plate 1 is provided with two positioning grooves 12 on one side facing the other tooling plate 1, and the positions of the positioning grooves 12 correspond to the installation positions of the reinforcing strips 3. When the reinforcing strips 3 are assembled, the two ends thereof enter the corresponding positioning grooves 12, which can achieve stable installation and prevent the reinforcing strips 3 from falling off.

[0032] When etching silicon parts, the etching tool needs to be connected to the transmission device. A slot 14 is provided on the left and right sides of the bottom of the tool plate 1, which is used to connect with the corresponding slot structure on the transmission device to ensure that the etching tool is installed stably and will not deviate during movement. Preferably, the tool plate 1 is also provided with a plurality of weight-reducing holes 13, and the shapes of the weight-reducing holes 13 can be the same or different, which can reduce the overall weight of the tool while ensuring the structural strength, which is conducive to increasing the loading capacity of the transmission device.

[0033] Combination Figure 3 As shown, the bearing shaft 2 includes a fixed shaft 21 and a roller 23. The two ends of the fixed shaft 21 are respectively connected to a tooling plate 1. The roller 23 is sleeved on the fixed shaft 21, and the roller 23 is rollingly connected with the fixed shaft 21. The fixed shaft 21 includes a shaft body and threaded columns 22 arranged at both ends of the shaft body. The threaded columns 22 pass through the corresponding adjustment holes 11 and are fixedly connected with nuts. The fixed shaft 21 adopts a threaded connection form, which can realize rapid position adjustment.

[0034] When the silicon component is installed on the tooling, its surface contacts the roller 23. The arc-shaped outer wall surface of the roller 23 has a small contact area with the silicon component, and the roller 23 can rotate with the silicon component. Therefore, during the etching process, the etching liquid will contact the entire surface of the silicon component, avoiding local etching leaks, thereby improving the etching uniformity of the silicon component surface.

[0035] In this embodiment, a plurality of circumferentially arranged limiting grooves 24 are provided on the roller 23, and the limiting grooves 24 are used to limit the assembly of silicon parts with smaller thickness, such as silicon rings, silicon plates, etc., to improve the versatility of the tooling. Preferably, the groove walls on both sides of the limiting groove 24 are symmetrically inclined, and the opening gradually increases from the bottom of the groove to the groove mouth, that is, the limiting groove 24 adopts a V-shaped opening structure, which can reduce assembly interference and facilitate the loading of silicon parts.

[0036] Combination Figure 4 As shown, the reinforcing strip 3 is provided with a plurality of clamping grooves 31, and the opening direction of the clamping groove 31 on each reinforcing strip 3 faces another reinforcing strip 3. The position of the clamping groove 31 matches the position of the upper limit groove 24 on the roller 23, so that the reinforcing strip 3 can limit and support the thinner sheet-like silicon component, thereby improving the assembly stability.

[0037] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in the field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model.

Claims

1. A silicon component etching tool, characterized in that: The invention comprises two tooling plates (1) and two bearing shafts (2), wherein the two tooling plates (1) are arranged in parallel and symmetrically, the bearing shafts (2) are used to support silicon components, the two bearing shafts (2) are arranged in parallel and symmetrically, the bearing shafts (2) comprise fixed shafts (21) and rollers (23), the two ends of the fixed shafts (21) are respectively connected to one of the tooling plates (1), the rollers (23) are sleeved on the fixed shafts (21), and the rollers (23) are rollingly connected to the fixed shafts (21).

2. The silicon component etching tool according to claim 1, characterized in that: The roller (23) is provided with at least one circumferentially arranged limiting groove (24).

3. The silicon component etching tool according to claim 2, characterized in that: The groove walls on both sides of the limiting groove (24) are symmetrically inclined, and the limiting groove (24) gradually increases from the groove bottom to the groove opening.

4. The silicon component etching tool according to claim 1, characterized in that: The tooling plate (1) is provided with two long strip-shaped adjustment holes (11); the two adjustment holes (11) on one tooling plate (1) are symmetrically and tiltedly arranged; the two ends of the fixed shaft (21) are positioned in the adjustment holes (11); and the installation positions of the two ends of the fixed shaft (21) in the adjustment holes (11) are adjustable.

5. The silicon component etching tool according to claim 4, characterized in that: The fixed shaft (21) comprises a shaft body and threaded columns (22) arranged at both ends of the shaft body, and the threaded columns (22) pass through the corresponding adjustment holes (11) and are fixedly connected to nuts.

6. The silicon component etching tool according to any one of claims 1 to 5, characterized in that: It also comprises two reinforcing strips (3), the two reinforcing strips (3) are arranged in parallel and symmetrically, and the two ends of the reinforcing strips (3) are respectively connected to one of the tooling plates (1).

7. The silicon component etching tool according to claim 6, characterized in that: The symmetry axes of the two reinforcing strips (3) coincide with the symmetry axes of the two bearing axes (2), and the distance between the two reinforcing strips (3) is greater than the distance between the two bearing axes (2).

8. The silicon component etching tool according to claim 6, characterized in that: At least one clamping groove (31) is provided on the reinforcing strip (3), and the opening direction of the clamping groove (31) on each reinforcing strip (3) faces toward another reinforcing strip (3).

9. The silicon component etching tool according to claim 6, characterized in that: Two positioning grooves (12) are provided on the tooling plate (1), and one end of each reinforcement strip (3) enters into the corresponding positioning groove (12).

10. The silicon component etching tool according to any one of claims 1 to 5, characterized in that: At least one weight-reducing hole (13) is provided on the tooling plate (1).

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