Power transmission device for silicon component etching

Abstract

The utility model provides a power transmission device for silicon component etching, which comprises a transmission support, a first driving motor and a connecting rod assembly, the transmission support comprises a connecting plate and a supporting frame, the supporting frame is connected with the bottom of the connecting plate, an etching tool is suitable for being erected on the supporting frame, and the first driving motor is connected with the connecting rod assembly. The first driving motor is in driving connection with the transmission support through the connecting rod assembly, one end of the connecting rod assembly is connected with the first driving motor, the other end of the connecting rod assembly is rotationally connected with the lower portion of the connecting plate, and the first driving motor is suitable for driving the transmission support to do reciprocating translational motion. The motion range of the power transmission device is small, the needed groove body space is small, the use of etching liquid is reduced, and the process cost is saved; the connecting rod assembly is used for transmission, the motion force arm is short, only friction force needs to be overcome in the motion process, lifting of a silicon component and an etching tool are not needed to overcome gravity, the driving motor load is small, and the load upper limit is high.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon component cleaning equipment, and in particular to a power transmission device for etching silicon components. Background Art

[0002] Semiconductor silicon component products include silicon ingots, silicon barrels, silicon disks, silicon rings, silicon tubes, etc. These silicon components are mainly used to carry or participate in the manufacturing process of semiconductor wafers. The wet etching process is a key step in the processing of semiconductor silicon components. The principle of wet etching is to use chemical methods to remove pollutants attached to the surface of silicon components. Wet etching can make the surface of the parts reach a higher degree of cleanliness.

[0003] In industrial production, a dedicated wet etching device is used for etching process. The wet etching device includes an etching tank for carrying etching liquid. The silicon component is mounted on a tooling and immersed in the etching liquid in the etching tank to achieve surface etching and cleaning.

[0004] In order to improve the cleaning effect, the existing technology uses a mechanical arm to connect the etching tool, put the silicon component to be etched on the tool, and drive the mechanical arm to rotate by a motor to immerse the tool in the etching tank. The rotation of the mechanical arm can change the position of the silicon component and strengthen the contact between the surface of the component and the etching liquid. However, the existing etching tool is connected to the tail end of the mechanical arm, and the mechanical arm needs a long force arm to swing, which requires a high-power motor and is prone to overload during operation; and the swing of the mechanical arm requires a large tank space, which will consume a large amount of etching liquid, which is not conducive to the control of production costs and environmental protection. Utility Model Content

[0005] The problem to be solved by the utility model is how to reduce the movement range of the power transmission device, reduce the motor load and the required slot space.

[0006] In order to solve the above problems, the utility model provides a power transmission device for etching silicon parts, including a transmission bracket, a first drive motor and a connecting rod assembly, the transmission bracket includes a connecting plate and a support frame, the support frame is connected to the bottom of the connecting plate, the etching tool is suitable for being mounted on the support frame, the first drive motor is driven and connected to the transmission bracket through the connecting rod assembly, one end of the connecting rod assembly is connected to the first drive motor, and the other end is rotatably connected to the lower part of the connecting plate, and the first drive motor is suitable for driving the transmission bracket to reciprocate and translate.

[0007] The utility model provides a new type of power transmission device, which fixes the etching tool on the support frame, and the drive motor drives the transmission bracket to perform reciprocating translational motion as a whole, so as to realize the oscillation cleaning of the silicon parts in the etching tank and ensure the etching effect. Compared with the existing mechanical arm swing structure, the power transmission device has a small range of motion and requires a small tank space, which is conducive to reducing the use of etching liquid and saving process costs; it is driven by a connecting rod assembly, the motion arm is short, and the motion process only needs to overcome friction, and there is no need to lift the silicon parts and the etching tool to overcome gravity. The first drive motor has a small load, which can increase the upper limit of the load.

[0008] Furthermore, the connecting rod assembly includes a cam, a first arm and a second arm, the first drive motor is connected to the cam in a transmission manner, the two ends of the first arm are respectively connected to the cam and the second arm in a rotational manner, and the lower end of the second arm is connected to the transmission bracket in a rotational manner. By designing a connecting rod assembly with a specific structure, each part only needs to move slightly to drive the transmission bracket to perform reciprocating translational motion, thereby improving the reliability of the power transmission device.

[0009] Furthermore, the connecting rod assembly further comprises a transmission rod and a connecting rod, one end of the connecting rod is fixedly connected to the middle of the second arm, the other end is rotatably connected to the upper end of the transmission rod, and the lower end of the transmission rod is rotatably connected to the transmission bracket. The transmission rod and the connecting rod are arranged so that the transmission bracket has multiple transmission fulcrums, which is conducive to achieving smooth movement.

[0010] Furthermore, the support frame includes an end plate and support plates arranged on both sides of the end plate, and the two ends of the support plate are respectively connected to the end plate and the connecting plate. The support plates on both sides can effectively support the etching tooling, and the middle of the support frame is hollowed out to facilitate the layout of the rotating mechanism.

[0011] Furthermore, the power transmission device also includes a second drive motor, a gear set and a contact transmission shaft, the two ends of the contact transmission shaft are respectively connected to the end plate and the connecting plate, the second drive motor is connected to the contact transmission shaft through the gear set, the second drive motor is used to drive the contact transmission shaft to rotate, and the contact transmission shaft is used to contact the outer surface of the silicon component to drive the silicon component to rotate. The power transmission device can drive the silicon component to roll and rotate in the etching groove to improve the etching uniformity, and directly drive the silicon component to rotate through the contact transmission shaft, and the etching tool does not need to rotate, so that the load of the second drive motor is small, which can avoid motor overload.

[0012] Further, the contact transmission shaft comprises a first shaft section, a second shaft section and a third shaft section connected in sequence, the first shaft section and the third shaft section have the same diameter, the second shaft section has a diameter greater than the first shaft section, and the second shaft section is suitable for contacting the silicon component. The contact transmission shaft has a step structure, which is conducive to increasing the contact area with the silicon component and improving the driving effect.

[0013] Furthermore, the gear set includes a plurality of transmission gears meshed in sequence from top to bottom, the transmission gear at the upper end is transmission-connected to the second drive motor, the transmission gear at the lower end is transmission-connected to the contact transmission shaft, and the other transmission gears are rotationally connected to the rotating shaft disposed on the connecting plate. Providing a plurality of transmission gears can extend the length of the connecting plate, ensuring that the silicon component is completely immersed in the etching solution, while keeping a certain distance between the drive motor and the etching groove to prevent the drive motor from being corroded.

[0014] Furthermore, the second drive motor is installed in the second motor box, the second motor box is fixedly connected to the connecting plate, the first drive motor is installed in the first motor box, the first motor box is fixedly connected to the second motor box. The motor box can protect the corresponding drive motor and also allow the drive motor to move as a whole with the transmission bracket, ensuring that the power transmission device maintains the rotational drive function during the translation of the transmission bracket.

[0015] Furthermore, at least one slot for positioning the etching tool is provided on the upper part of the support plate. The provision of the slot facilitates the installation and positioning of the etching tool and avoids deviation during movement.

[0016] Furthermore, at least one roller protruding outward is provided on the side of the support plate. The roller can cooperate with the slide rail in the etching groove to ensure the directional movement of the transmission bracket and is conducive to reducing friction and driving motor load. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The structure of the power transmission device in the embodiment of the utility model is Figure 1 .

[0018] Figure 2 The structure of the power transmission device in the embodiment of the utility model is Figure 2 .

[0019] Figure 3 It is a structural diagram of the transmission bracket in the embodiment of the utility model.

[0020] Figure 4 1 is a structural diagram of a connecting rod assembly in an embodiment of the present utility model.

[0021] Figure 5 It is a structural diagram of the contact transmission shaft in an embodiment of the utility model.

[0022] Description of reference numerals:

[0023] 1-transmission bracket, 11-connecting plate, 12-end plate, 13-support plate, 131-slot, 132-roller, 14-ear, 2-connecting rod assembly, 21-cam, 22-first arm, 23-second arm, 24-transmission rod, 25-connecting rod, 3-contact transmission shaft, 31-first shaft section, 32-second shaft section, 33-third shaft section, 4-transmission gear, 5-first motor box, 6-second motor box. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0025] It should be noted that similar symbols and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not require further definition and explanation in the subsequent drawings.

[0026] In the description of the present utility model, it should be noted that the terms "upper", "lower", "left", "right", "inner", "outer", "front", "back" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or are the positions or positional relationships in which the utility model product is usually placed when in use, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present utility model. The drawings of the embodiments of the present utility model are provided with a coordinate system XYZ, wherein the positive direction of the X-axis represents the front, the reverse direction of the X-axis represents the back, the positive direction of the Y-axis represents the right, the reverse direction of the Y-axis represents the left, the positive direction of the Z-axis represents the top, and the reverse direction of the Z-axis represents the bottom.

[0027] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "setting", "connection", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0029] Combination Figures 1 to 5 As shown, the embodiment of the utility model provides a power transmission device for etching silicon parts, which can be connected to the etching tool, and make the etching tool and the silicon parts oscillate in the etching groove to improve the etching effect of the silicon parts. The power transmission device includes a transmission bracket 1, a translation mechanism and a rotation mechanism, the translation mechanism and the rotation mechanism are installed on the transmission bracket 1, and the transmission bracket 1 is also used to connect the etching tool; the translation mechanism is used to drive the transmission bracket 1 to translate; the rotation mechanism is used to drive the silicon parts to rotate.

[0030] Combination Figure 3 As shown, the transmission bracket 1 includes a connecting plate 11 and a support frame, the connecting plate 11 is vertically arranged, the support frame is horizontally arranged, and the transmission bracket 1 is L-shaped as a whole. The support frame includes an end plate 12 and two support plates 13, the end plate 12 is located at the front of the support frame, the two support plates 13 are located on the left and right sides of the support frame, and the front and rear ends of the support plate 13 are respectively connected to the end plate 12 and the connecting plate 11. The middle of the support frame is hollowed out to facilitate the layout of the rotating mechanism.

[0031] The etching tool is suitable for being mounted on the support frame, and its bottom is connected to the support plates 13 on both sides. In order to ensure accurate installation and positioning of the etching tool, at least two card slots 131 are provided on the upper part of the support plate 13, and the card slots 131 can cooperate with the corresponding slots on the etching tool to achieve a fixed connection between the two, and ensure that the transmission bracket 1 and the etching tool move synchronously.

[0032] Two rollers 132 protruding outward are also provided on the side of the support plate 13. The rollers 132 are used to cooperate with the slide rails in the etching groove to ensure the directional movement of the transmission bracket 1. The rollers 132 can move in a rolling manner, which is beneficial to reduce the movement friction.

[0033] Combination Figure 1 and Figure 2 As shown, the translation mechanism includes a first drive motor and a connecting rod assembly 2. The first drive motor is connected to the transmission bracket 1 through the connecting rod assembly 2. Specifically, the upper end of the connecting rod assembly 2 is connected to the first drive motor, and the lower end is rotatably connected to the lower part of the connecting plate 11. The first drive motor can drive the transmission bracket 1 to move back and forth. The transmission bracket 1 can move in a small range to achieve oscillating etching and cleaning of silicon parts. The required tank space is small, which is conducive to reducing the use of etching liquid and saving process costs. The translation mechanism is driven by the connecting rod assembly 2, and the motion arm is short. During the reciprocating translation movement, only friction needs to be overcome, and there is no need to lift the silicon parts and the etching tooling to overcome gravity. The load of the first drive motor is small, which can increase the upper limit of the load.

[0034] Combination Figure 4 As shown, the connecting rod assembly 2 includes a cam 21, a first arm 22, a second arm 23, a transmission rod 24 and a connecting rod 25. The first driving motor is connected to the cam 21 in a transmission manner. The two ends of the first arm 22 are respectively connected to the cam 21 and the second arm 23 in a rotational manner. One end of the connecting rod 25 is fixedly connected to the middle of the second arm 23, and the other end is connected to the upper end of the transmission rod 24 in a rotational manner. A lug 14 is provided on each side of the lower part of the connecting plate 11 of the transmission bracket 1. The lower end of the second arm 23 and the lower end of the transmission rod 24 are respectively connected to one side of the lug 14 in a rotational manner. When the first driving motor is working, the cam 21 rotates accordingly, thereby driving the first arm 22, the second arm 23, the transmission rod 24 and the connecting rod 25 to move. The force is transmitted from the two lugs 14 to the transmission bracket 1, so that the transmission bracket 1 moves smoothly. In the above process, each part in the connecting rod assembly 2 only needs to move slightly, and the reliability of the translation mechanism is good.

[0035] Combination Figure 1 and Figure 2 As shown, the rotating mechanism includes a second drive motor, a gear set and a contact transmission shaft 3. The second drive motor is driven and connected to the contact transmission shaft 3 through the gear set, and the second drive motor is used to drive the contact transmission shaft 3 to rotate; the two ends of the contact transmission shaft 3 are respectively rotatably connected to the end plate 12 and the connecting plate 11, which can contact the outer surface of the silicon component to drive the silicon component to rotate, thereby ensuring etching uniformity.

[0036] The installation position of the first drive motor and the second drive motor is close to the top of the transmission bracket 1, thereby reducing the influence of the etching liquid on the drive motor. The gear set includes a plurality of transmission gears 4 meshed in sequence from top to bottom, the transmission gear 4 at the upper end is transmission-connected to the second drive motor, the transmission gear 4 at the lower end is transmission-connected to the contact transmission shaft 3, and the other transmission gears 4 are rotationally connected to the rotating shaft arranged on the connecting plate 11. Arranging a plurality of transmission gears 4 can extend the length of the connecting plate 11, ensure that the silicon component is completely immersed in the etching liquid, and at the same time make the drive motor have a certain distance from the etching groove to prevent the drive motor from being corroded.

[0037] Furthermore, the second drive motor is installed in the second motor box 6, and the second motor box 6 is fixedly connected to the connecting plate 11; the first drive motor is installed in the first motor box 5, and the first motor box 5 is fixedly connected to the second motor box 6. The motor box can protect the corresponding drive motor and also enable the drive motor to move as a whole with the transmission bracket 1, ensuring that the rotating mechanism can work normally during the translation of the transmission bracket 1.

[0038] Combination Figure 5As shown, the contact transmission shaft 3 includes a first shaft section 31, a second shaft section 32 and a third shaft section 33 which are sequentially connected in the front-to-back direction, the first shaft section 31 and the third shaft section 33 have the same diameter, and the diameter of the second shaft section 32 is larger than the diameter of the first shaft section 31. The contact transmission shaft 3 has a step structure, wherein the second shaft section 32 with a larger diameter is used to contact with the silicon component, which is beneficial to increase the contact area with the silicon component and improve the rotation driving effect.

[0039] The power transmission device provided in the above embodiment can simultaneously realize the translational oscillation and rotation of the silicon component, thereby improving the etching effect of the silicon component. Compared with the existing robotic arm swing device, the power transmission device has the advantages of smaller required slot space, less etching liquid consumption, low process cost, small drive motor load, and upper load limit.

[0040] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in the field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model.

Claims

1. A power transmission device for etching silicon parts, characterized in that: The invention comprises a transmission support (1), a first driving motor and a connecting rod assembly (2); the transmission support (1) comprises a connecting plate (11) and a support frame; the support frame is connected to the bottom of the connecting plate (11); an etching tool is suitable for being mounted on the support frame; the first driving motor is drivingly connected to the transmission support (1) through the connecting rod assembly (2); one end of the connecting rod assembly (2) is connected to the first driving motor, and the other end is rotatably connected to the lower part of the connecting plate (11); the first driving motor is suitable for driving the transmission support (1) to perform reciprocating translational motion.

2. The power transmission device for etching silicon parts according to claim 1, characterized in that: The connecting rod assembly (2) comprises a cam (21), a first arm (22) and a second arm (23); the first drive motor is connected to the cam (21) in a transmission manner; the two ends of the first arm (22) are respectively connected to the cam (21) and the second arm (23) in a rotational manner; and the lower end of the second arm (23) is connected to the transmission bracket (1) in a rotational manner.

3. The power transmission device for etching silicon parts according to claim 2, characterized in that: The connecting rod assembly (2) also includes a transmission rod (24) and a connecting rod (25), one end of the connecting rod (25) is fixedly connected to the middle part of the second arm (23), and the other end is rotatably connected to the upper end of the transmission rod (24), and the lower end of the transmission rod (24) is rotatably connected to the transmission bracket (1).

4. The power transmission device for etching silicon parts according to any one of claims 1 to 3, characterized in that: The support frame comprises an end plate (12) and support plates (13) arranged on both sides of the end plate (12), and two ends of the support plate (13) are respectively connected to the end plate (12) and the connecting plate (11).

5. The power transmission device for etching silicon parts according to claim 4, characterized in that: It also includes a second drive motor, a gear set and a contact transmission shaft (3), wherein the two ends of the contact transmission shaft (3) are respectively rotatably connected to the end plate (12) and the connecting plate (11), the second drive motor is drivably connected to the contact transmission shaft (3) through the gear set, the second drive motor is used to drive the contact transmission shaft (3) to rotate, and the contact transmission shaft (3) is used to contact the outer surface of the silicon component to drive the silicon component to rotate.

6. The power transmission device for etching silicon parts according to claim 5, characterized in that: The contact transmission shaft (3) comprises a first shaft segment (31), a second shaft segment (32) and a third shaft segment (33) which are connected in sequence, the first shaft segment (31) and the third shaft segment (33) have the same diameter, the diameter of the second shaft segment (32) is larger than the diameter of the first shaft segment (31), and the second shaft segment (32) is suitable for contacting the silicon component.

7. The power transmission device for etching silicon parts according to claim 5, characterized in that: The gear set comprises a plurality of transmission gears (4) meshed in sequence from top to bottom, the transmission gear (4) at the upper end being transmission-connected to the second drive motor, the transmission gear (4) at the lower end being transmission-connected to the contact transmission shaft (3), and the other transmission gears (4) being rotationally connected to a rotating shaft arranged on the connecting plate (11).

8. The power transmission device for etching silicon parts according to claim 5, characterized in that: The second drive motor is installed in a second motor box (6), the second motor box (6) is fixedly connected to the connecting plate (11), and the first drive motor is installed in a first motor box (5), the first motor box (5) is fixedly connected to the second motor box (6).

9. The power transmission device for etching silicon parts according to claim 4, characterized in that: The upper part of the support plate (13) is provided with at least one slot (131) for positioning the etching tool.

10. The power transmission device for etching silicon parts according to claim 4, characterized in that: At least one roller (132) protruding outward is provided on the side surface of the support plate (13).

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