High-rotating-speed servo motor for semiconductor equipment

Abstract

The utility model discloses a high rotating speed servo motor for semiconductor equipment, which comprises a noise reduction box, a base is arranged on the outer wall of one side of the noise reduction box, a motor body is arranged on the outer wall of one side, far away from the noise reduction box, of the base, a lead is arranged on one side of the top end of the motor body, and a rotating shaft is movably connected to the outer wall of the lower end of one side, far away from the base, of the noise reduction box. One end of the rotating shaft extends into the noise reduction box, a driving shaft is arranged at the end, close to the base, of the motor body, a lubricating structure is arranged at the center of the top end of the noise reduction box, a transmission frame is arranged at the center of the bottom of the noise reduction box, and locking screws are installed at the corners of the outer wall of the side, away from the noise reduction box, of the base. According to the utility model, the rotation speed of the high-rotation-speed servo motor in use is improved, and the phenomenon of passivation abrasion of parts on the inner side of the transmission frame is reduced, so that the transmission efficiency of the high-rotation-speed servo motor is guaranteed, and the assembly efficiency of the high-rotation-speed servo motor is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of motors, in particular to a high-speed servo motor for semiconductor equipment. Background Art

[0002] Semiconductor devices are electronic devices made of semiconductor elements. There are many types of semiconductor equipment, including laser marking machines, laser inkjet printers, packaging machines, water purifiers, etc. In order to drive the semiconductor equipment, corresponding high-speed servo motors are usually used.

[0003] Reference publication number CN214480058U is a high-speed motor, which includes a housing, a rotating shaft and a bearing sleeve. The housing is an annular structure with both left and right ends open. A mounting ring coaxial with the housing is arranged in the housing. The outer diameter of the mounting ring is smaller than the inner diameter of the housing and the length of the mounting ring along the left and right direction is smaller than the length of the housing along the left and right direction. A plurality of air guide plates are evenly distributed between the mounting ring and the inner wall of the housing. A stator mounting cavity and a bearing mounting cavity are arranged in sequence from left to right in the mounting ring. An annular convex portion is arranged in the middle of the stator mounting cavity of the mounting ring. The right outer wall of the bearing sleeve is matched with the left inner wall of the casing and the right outer wall of the bearing sleeve is inserted into the left inner wall of the casing, the rotating shaft is inserted into the bearing sleeve and the casing along the left and right directions, the middle upper sleeve of the rotating shaft is provided with a magnetic ring, and the stator mounting cavity is provided with a stator assembly. The motor has the advantages of not easy to resonate and low noise. According to the above, although the motor can be well applied, it is usually not convenient to further increase the rotation speed of the shaft component, so that the rotation rate of the motor is still difficult to reach the established expectations, which often troubles users. Utility Model Content

[0004] The purpose of the utility model is to provide a high-speed servo motor for semiconductor equipment to solve the problem that although the motor mentioned in the above background technology can be well applied, it is usually not convenient to further increase the speed of the shaft component, making it difficult for the rotation rate of the motor to reach the expected value.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a high-speed servo motor for semiconductor equipment, comprising a noise reduction box, a base is installed on the outer wall of one side of the noise reduction box, a motor body is arranged on the outer wall of the base away from the noise reduction box, a lead is arranged on one side of the top of the motor body, a rotating shaft is movably connected on the outer wall of the lower end of the noise reduction box away from the base, one end of the rotating shaft extends to the interior of the noise reduction box, a driving shaft is arranged at one end of the motor body close to the base, and the end of the driving shaft away from the motor body extends to the interior of the noise reduction box, a lubrication structure is arranged at the center position of the top of the noise reduction box, and a transmission frame is arranged at the center position of the bottom of the noise reduction box.

[0006] Preferably, locking screws are installed at the corner positions of the outer wall of the base away from the noise reduction box. One end of the locking screw passes through the base and is threadedly connected to the outer wall of the noise reduction box. The locking screws are arranged so that the base can be installed on the outer wall of the noise reduction box.

[0007] Preferably, the lubrication structure includes a support frame, a liquid storage tank and a box cover. The support frame is arranged at the center position of the top of the noise reduction box, the liquid storage tank is arranged at the top of the support frame, and the box cover is installed at the top of the liquid storage tank. The support frame is arranged so that the liquid storage tank can be placed.

[0008] Preferably, the lubrication structure also includes a valve and a three-way lubrication pipe. The valve is installed on the surface of the liquid storage tank, and a three-way lubrication pipe is arranged at the bottom end of the liquid storage tank. The bottom end of the three-way lubrication pipe extends to the interior of the noise reduction box. The three-way lubrication pipe is arranged to facilitate the dripping of the lubricating liquid.

[0009] Preferably, a first driving gear is rotatably mounted on the inner wall of one side of the transmission frame, a first linkage shaft is provided on the outer wall of one side of the first driving gear, an end of the first linkage shaft away from the first driving gear is connected to one end of the driving shaft, and the first linkage shaft is provided so that the first driving gear is driven to rotate when the driving shaft rotates.

[0010] Preferably, a first driven gear is rotatably mounted on the inner wall of the transmission frame below the first driving gear, and the first driven gear meshes with the first driving gear. The first driven gear meshes with the first driving gear so that the first driven gear is driven to rotate when the first driving gear rotates.

[0011] Preferably, a second driving gear is provided on the outer wall of one side of the first driven gear through a guide shaft, and a second driven gear is rotatably mounted on the inner wall of the transmission frame below the second driving gear, and the second driven gear and the second driving gear are meshed with each other, and the second driven gear and the second driving gear are meshed with each other, so that the second driven gear can be driven to rotate when the second driving gear rotates.

[0012] Preferably, a second linkage shaft is provided on the outer wall of one side of the second driven gear, and the end of the second linkage shaft away from the second driven gear is connected to one end of the rotating shaft. Through the provision of the second linkage shaft, the rotating shaft is driven to rotate when the second driven gear rotates.

[0013] Compared with the prior art, the utility model has the following beneficial effects: the high-speed servo motor for semiconductor equipment not only improves the rotation rate of the high-speed servo motor when in use, but also reduces the phenomenon of passivation wear of the inner parts of the transmission frame, so as to ensure the transmission efficiency of the high-speed servo motor, and ensure the assembly efficiency of the high-speed servo motor;

[0014] (1) The motor body drives the driving shaft to rotate, so that the driving shaft drives the first driving gear to rotate through the first linkage shaft. Since the diameter of the first driving gear is larger than the diameter of the first driven gear, the first driving gear drives the first driven gear to rotate rapidly. Since the diameter of the second driving gear is larger than the diameter of the second driven gear, the first driven gear drives the second driven gear to rotate rapidly through the second driving gear. The second driven gear drives the rotating shaft to rotate synchronously through the second linkage shaft, thereby improving the rotation rate of the high-speed servo motor when in use;

[0015] (2) By injecting lubricating liquid into the liquid storage tank and opening the three-way lubricating pipe by the valve, the lubricating liquid drips onto the outer wall of the first driving gear and the second driving gear through the three-way lubricating pipe, and the first driving gear and the second driving gear transmit the lubricating liquid to the outer wall of the first driven gear and the second driven gear when meshing with the first driven gear and the second driven gear, the inner parts of the transmission frame can be lubricated, thereby reducing the phenomenon of passivation wear of the inner parts of the transmission frame, so as to ensure the transmission efficiency of the high-speed servo motor;

[0016] (3) By passing one end of the locking screw through the base and screwing it into the outer wall of the noise reduction box, the base can be installed on the outer wall of the noise reduction box to quickly place the motor body, thereby ensuring the assembly efficiency of the high-speed servo motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a three-dimensional structural schematic diagram of the utility model from a top view;

[0018] Figure 2 This is a schematic diagram of the front cross-sectional structure of the utility model;

[0019] Figure 3 This is a schematic diagram of the structure of the transmission frame of the utility model when viewed from above;

[0020] Figure 4 It is an enlarged structural diagram of the lubrication structure of the utility model.

[0021] In the figure: 1. noise reduction box; 2. base; 3. motor body; 4. locking screw; 5. lead wire; 6. rotating shaft; 7. lubrication structure; 701. support frame; 702. liquid storage tank; 703. tank cover; 704. valve; 705. three-way lubrication pipe; 8. transmission frame; 9. driving shaft; 10. first linkage shaft; 11. second linkage shaft; 12. first driving gear; 13. first driven gear; 14. second driving gear; 15. second driven gear. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figure 1-4 The utility model provides an embodiment: a high-speed servo motor for semiconductor equipment, comprising a noise reduction box 1, a base 2 is installed on the outer wall of one side of the noise reduction box 1, and locking screws 4 are installed at the corner positions of the base 2 away from the outer wall of one side of the noise reduction box 1, and one end of the locking screw 4 passes through the base 2 and is threadedly connected to the outer wall of the noise reduction box 1;

[0024] When in use, the base 2 is mounted on the outer wall of the noise reduction box 1 by setting the locking screw 4;

[0025] A motor body 3 is arranged on the outer wall of the side of the base 2 away from the noise reduction box 1, a lead 5 is arranged on one side of the top of the motor body 3, a rotating shaft 6 is movably connected on the outer wall of the lower end of the noise reduction box 1 away from the base 2, one end of the rotating shaft 6 extends to the inside of the noise reduction box 1, a driving shaft 9 is arranged on the end of the motor body 3 close to the base 2, and the end of the driving shaft 9 away from the motor body 3 extends to the inside of the noise reduction box 1, a lubrication structure 7 is arranged at the center position of the top of the noise reduction box 1, the lubrication structure 7 includes a support frame 701, a liquid storage tank 702 and a box cover 703, a support frame 701 is arranged at the center position of the top of the noise reduction box 1, a liquid storage tank 702 is arranged on the top of the support frame 701, and a box cover 703 is installed on the top of the liquid storage tank 702;

[0026] When in use, the support frame 701 is provided to place the liquid storage tank 702;

[0027] The lubrication structure 7 further includes a valve 704 and a three-way lubrication pipe 705. The valve 704 is installed on the surface of the liquid storage box 702. The bottom end of the liquid storage box 702 is provided with a three-way lubrication pipe 705. The bottom end of the three-way lubrication pipe 705 extends to the interior of the noise reduction box 1.

[0028] When in use, the three-way lubrication pipe 705 is provided so that the lubricating liquid can drip;

[0029] A transmission frame 8 is provided at the center of the bottom of the noise reduction box 1, a first driving gear 12 is rotatably mounted on the inner wall of one side of the transmission frame 8, a first linkage shaft 10 is provided on the outer wall of one side of the first driving gear 12, and one end of the first linkage shaft 10 away from the first driving gear 12 is connected to one end of the driving shaft 9;

[0030] When in use, the first linkage shaft 10 is arranged so that when the driving shaft 9 rotates, the first driving gear 12 is driven to rotate;

[0031] A first driven gear 13 is rotatably mounted on the inner wall of the transmission frame 8 below the first driving gear 12, and the first driven gear 13 is meshed with the first driving gear 12;

[0032] When in use, the first driven gear 13 is meshed with the first driving gear 12 so that the first driven gear 13 is driven to rotate when the first driving gear 12 rotates;

[0033] A second driving gear 14 is provided on the outer wall of one side of the first driven gear 13 through a guide shaft, and a second driven gear 15 is rotatably mounted on the inner wall of the transmission frame 8 below the second driving gear 14, and the second driven gear 15 meshes with the second driving gear 14;

[0034] When in use, the second driven gear 15 is meshed with the second driving gear 14 so that the second driven gear 15 is driven to rotate when the second driving gear 14 rotates;

[0035] A second linkage shaft 11 is disposed on an outer wall of one side of the second driven gear 15, and one end of the second linkage shaft 11 away from the second driven gear 15 is connected to one end of the rotating shaft 6;

[0036] When in use, the second linkage shaft 11 is arranged so that the second driven gear 15 rotates and drives the rotating shaft 6 to rotate.

[0037] When the embodiment of the present application is used, firstly, one end of the locking screw 4 is passed through the base 2 and screwed into the outer wall of the noise reduction box 1, so that the base 2 can be installed on the outer wall of the noise reduction box 1, so as to quickly place the motor body 3 and improve the assembly efficiency of the high-speed servo motor. Then, the lubricating liquid is injected into the liquid storage tank 702, and the three-way lubrication pipe 705 is opened by the valve 704, so that the lubricating liquid drips to the outer wall of the first driving gear 12 and the second driving gear 14 through the three-way lubrication pipe 705. When the first driving gear 12 and the second driving gear 14 are meshed with the first driven gear 13 and the second driven gear 15 for transmission, the lubricating liquid on the outer wall of the first driving gear 12 and the second driving gear 14 can be transferred to the outer wall of the first driven gear 13 and the second driven gear 15 to lubricate the inner parts of the transmission frame 8. Finally, the motor body 3 drives the driving shaft 9 to rotate, so that the driving shaft 9 drives the first driving gear 12 to rotate via the first linkage shaft 10. Since the first driving gear 12 and the first driven gear 13 are meshed with each other, and the diameter of the first driving gear 12 is greater than the diameter of the first driven gear 13, the first driving gear 12 drives the first driven gear 13 to rotate rapidly. Since the second driving gear 14 and the second driven gear 15 are meshed with each other, and the diameter of the second driving gear 14 is greater than the diameter of the second driven gear 15, the first driven gear 13 drives the second driven gear 15 to rotate rapidly via the second driving gear 14, and the second driven gear 15 can drive the rotating shaft 6 to rotate synchronously via the second linkage shaft 11, thereby further improving the rotation rate of the high-speed servo motor, thereby completing the use of the high-speed servo motor.

Claims

1. A high-speed servo motor for semiconductor equipment, characterized in that: The invention comprises a noise reduction box (1), wherein a base (2) is installed on the outer wall of one side of the noise reduction box (1), a motor body (3) is arranged on the outer wall of the base (2) on the side away from the noise reduction box (1), a lead (5) is arranged on one side of the top of the motor body (3), a rotating shaft (6) is movably connected to the outer wall of the lower end of the noise reduction box (1) on the side away from the base (2), one end of the rotating shaft (6) extends to the inside of the noise reduction box (1), a driving shaft (9) is arranged on the end of the motor body (3) close to the base (2), and the end of the driving shaft (9) away from the motor body (3) extends to the inside of the noise reduction box (1), a lubrication structure (7) is arranged at the center position of the top of the noise reduction box (1), and a transmission frame (8) is arranged at the center position of the bottom of the noise reduction box (1).

2. The high speed servo motor for semiconductor equipment according to claim 1, characterized in that: A locking screw (4) is installed at a corner position of the outer wall of the base (2) away from the noise reduction box (1), and one end of the locking screw (4) passes through the base (2) and is threadedly connected to the outer wall of the noise reduction box (1).

3. The high speed servo motor for semiconductor equipment according to claim 1, characterized in that: The lubrication structure (7) comprises a support frame (701), a liquid storage tank (702) and a tank cover (703); the support frame (701) is arranged at the center position of the top of the noise reduction tank (1); the liquid storage tank (702) is arranged at the top of the support frame (701); and the tank cover (703) is installed at the top of the liquid storage tank (702).

4. The high speed servo motor for semiconductor equipment according to claim 3, characterized in that: The lubrication structure (7) further comprises a valve (704) and a three-way lubrication pipe (705); the valve (704) is installed on the surface of the liquid storage tank (702); the bottom end of the liquid storage tank (702) is provided with a three-way lubrication pipe (705); the bottom end of the three-way lubrication pipe (705) extends to the interior of the noise reduction box (1).

5. The high speed servo motor for semiconductor equipment according to claim 1, characterized in that: A first driving gear (12) is rotatably mounted on the inner wall of one side of the transmission frame (8), a first linkage shaft (10) is arranged on the outer wall of one side of the first driving gear (12), and one end of the first linkage shaft (10) away from the first driving gear (12) is connected to one end of the driving shaft (9).

6. The high speed servo motor for semiconductor equipment according to claim 5, characterized in that: A first driven gear (13) is rotatably mounted on the inner wall of the transmission frame (8) below the first driving gear (12), and the first driven gear (13) and the first driving gear (12) are meshed with each other.

7. The high speed servo motor for semiconductor equipment according to claim 6, characterized in that: A second driving gear (14) is arranged on the outer wall of one side of the first driven gear (13) via a guide shaft, and a second driven gear (15) is rotatably mounted on the inner wall of the transmission frame (8) below the second driving gear (14), and the second driven gear (15) and the second driving gear (14) are meshed with each other.

8. The high speed servo motor for semiconductor equipment according to claim 7, characterized in that: A second linkage shaft (11) is provided on an outer wall of one side of the second driven gear (15); an end of the second linkage shaft (11) away from the second driven gear (15) is connected to one end of the rotating shaft (6).

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