High-precision air floating sliding block

Abstract

The utility model belongs to the technical field of air floating sliding blocks, and particularly relates to a high-precision air floating sliding block which comprises a sliding block body, an exhaust assembly is arranged in the sliding block body, a filter box is fixedly installed on the sliding block body, one side of the filter box is fixedly connected with an air inlet head, a communicating pipe is communicated with the exhaust assembly, and the air inlet head is fixedly connected with an air outlet. A filter plate is arranged in the filter box, a threaded hole is formed in a limiting block, and a positioning bolt is in threaded connection with the interior of the threaded hole. Compressed air entering the high-precision air floating sliding block can be conveniently filtered through the installed filter plate, the air inlet head is connected with a pipeline for conveying the compressed air, the compressed air can enter the filter box, flows into the communicating pipe after being filtered through the filter plate, and then enters the exhaust assembly to be exhausted, and therefore the high-precision air floating sliding block is formed. And the filter plate filters impurities carried in the flowing air, so that the phenomenon that the impurities carried in the air are accumulated in the exhaust assembly to cause blockage of the exhaust hole is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of air floating sliders, in particular to a high-precision air floating slider. Background Art

[0002] The high-precision air-floating slider is a component that uses air-floating technology to achieve slider suspension. Since the slider and the guide rail are in contact through a gas film, the friction coefficient is extremely low, which can reduce energy loss and mechanical wear. The air-floating slider can run on a very smooth surface with good accuracy retention, and is suitable for high-precision positioning occasions. Since there is no direct contact between the slider and the guide rail, no pollutants such as oil will be generated, which is conducive to keeping the working environment clean.

[0003] High-precision air-floating sliders mainly rely on the precision drive of compressed air during operation. The operating principle is to inject compressed air into the bottom of the slider to form a tiny air cushion, so that the slider is suspended on the working surface to achieve ultra-smooth and low-friction movement. However, when the flowing compressed air carries tiny impurities, these impurities may easily enter the exhaust holes inside the slider, causing the exhaust holes to be blocked, which may affect the normal operation of the air-floating slider and reduce its movement accuracy and stability. Utility Model Content

[0004] The utility model aims to provide a high-precision air-floating slider to solve the technical problem of filtering tiny impurities carried in compressed air proposed in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a high-precision air floating slider, comprising a slider body, an exhaust assembly is arranged inside the slider body, a filter box is fixedly installed on the slider body, an air intake head is fixedly connected to one side of the filter box, a connecting pipe is fixedly connected to the other side of the filter box, and the connecting pipe is connected to the exhaust assembly;

[0006] A filter plate is arranged inside the filter box, a sealing block is fixedly installed on the top of the filter plate, a limiting block is fixedly connected to the bottom of the filter plate, a threaded hole is arranged inside the limiting block, and a positioning bolt is threadedly connected inside the threaded hole.

[0007] Preferably, the exhaust assembly includes a connecting pipe, a diverter groove and a nozzle, the diverter groove is fixedly installed inside the slider body, the connecting pipe is fixedly installed on the top of the diverter groove, and the other end of the connecting pipe is connected to the connecting pipe, and the nozzle array is arranged on the diverter groove.

[0008] Preferably, strip grooves are symmetrically installed inside the slider body.

[0009] Preferably, the inner array of the strip grooves is provided with a limit axis.

[0010] Preferably, a bearing is fixedly mounted on the limiting shaft.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] 1. The utility model facilitates filtering the compressed air entering the high-precision air floating slider by installing a filter plate. The air inlet head is connected to the pipeline for conveying compressed air. The compressed air will enter the interior of the filter box, flow into the connecting pipe after being filtered by the filter plate, and then enter the exhaust component for discharge. The filter plate filters the impurities carried in the flowing air to prevent the impurities carried by the air from accumulating inside the exhaust component, causing the exhaust hole to be blocked, affecting normal use, and improving the practicality of the high-precision air floating slider;

[0013] 2. The utility model can reduce the friction force when the high-precision air-floating slider moves by installing the bearing. When the high-precision air-floating slider floats and slides, the position of the slider body is adjusted by controlling the pressure of the compressed air. The movement of the slider body through the strip groove will cause the top of the bearing to contact the bottom of the slideway. Then, when the slider body moves, the bearing will be carried to roll under the slideway to assist the movement of the slider body position, thereby avoiding direct contact between the slider body and the slideway limit after the slider body floats, which will increase the friction force and affect the accuracy of the high-precision air-floating slider. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0015] Figure 2 This is a schematic diagram of the structure of the slider body of the utility model;

[0016] Figure 3 This is a schematic diagram of the filter box structure of the utility model;

[0017] Figure 4 This is a schematic diagram of the diverter trough structure of the utility model;

[0018] Figure 5 This is a schematic diagram of the strip groove structure of the utility model.

[0019] In the figure: 1. Slider body; 2. Filter box; 3. Inlet head; 4. Filter plate; 5. Limit block; 6. Threaded hole; 7. Positioning bolt; 8. Connecting pipe; 9. Diverter slot; 10. Injection head; 11. Strip slot; 12. Limit shaft; 13. Bearing; 14. Sealing block; 15. Connecting pipe. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] See also Figure 1 - Figure 4 A high-precision air-floating slider comprises a slider body 1, an exhaust assembly is arranged inside the slider body 1, a filter box 2 is fixedly installed on the slider body 1, an air inlet head 3 is fixedly connected to one side of the filter box 2, a connecting pipe 15 is fixedly connected to the other side of the filter box 2, and the connecting pipe 15 is connected to the exhaust assembly, a filter plate 4 is arranged inside the filter box 2, a sealing block 14 is fixedly installed on the top of the filter plate 4, a limiting block 5 is fixedly connected to the bottom of the filter plate 4, a threaded hole 6 is arranged inside the limiting block 5, and a positioning bolt 7 is threadedly connected inside the threaded hole 6. The high-precision air-floating slider is a device that uses air-floating technology to minimize the friction between the slider and the slideway, and is mainly used in occasions requiring high-precision positioning or motion control, such as semiconductor manufacturing equipment, precision instruments, high-performance robots, etc., through the exhaust assembly, compressed air is used to form a very thin air film between the slider and the slideway, so that the slider body 1 is suspended on the slideway surface, thereby greatly reducing the two The contact friction between them realizes ultra-low friction movement. Since the friction coefficient of the air-floating slider is extremely low, it can achieve nanometer-level precision, so it is very suitable for high-precision positioning and motion control. When using the high-precision air-floating slider, the air inlet head 3 is connected to the pipeline for conveying compressed air, and the compressed air will enter the interior of the filter box 2, and then flow into the connecting pipe 15 after being filtered by the filter plate 4, and then enter the exhaust component for discharge, generating an air film to cause the slider body 1 to displace, and the filter plate 4 filters the impurities carried in the flowing air to prevent the impurities carried by the air from accumulating inside the exhaust component, causing the exhaust component to be blocked and affecting normal use. When the filter plate 4 needs to be cleaned and replaced, the positioning bolt 7 is rotated to separate the positioning bolt 7 from the threaded hole 6, and then the limit block 5 is no longer limited, and pulling the sealing block 14 will drive the filter plate 4 to move, and then the filter plate 4 can be pulled out of the filter box 2 for cleaning or replacement to avoid clogging of the filter plate 4.

[0022] See also Figure 2 and Figure 4The exhaust assembly includes a connecting pipe 8, a diverter groove 9 and a nozzle 10. The diverter groove 9 is fixedly installed inside the slider body 1, the connecting pipe 8 is fixedly installed on the top of the diverter groove 9, and the other end of the connecting pipe 8 is connected to the connecting pipe 15. The nozzle 10 array is arranged on the diverter groove 9. The air filtered by the filter plate 4 will flow into the connecting pipe 15. The compressed air will flow into the connecting pipe 8 through the connecting pipe 15, and then enter the diverter groove 9. After that, it is discharged to the outside through the nozzle 10, forming an air film to support the slider body 1, so that the slider body 1 can float on the slide surface.

[0023] See also Figure 1 and Figure 2 The slider body 1 is symmetrically provided with strip grooves 11 inside, and the slider body 1 provides installation space for the strip grooves 11 .

[0024] See also Figure 1 and Figure 5 A limit shaft 12 is installed inside the array of the strip grooves 11, and a bearing 13 is fixedly installed on the limit shaft 12. When the high-precision air-floating slider floats up and slides, the position of the slider body 1 is adjusted by controlling the pressure of the compressed air. The slider body 1 moves through the strip grooves 11, which will cause the top of the bearing 13 to contact the bottom of the slide. Then, when the slider body 1 moves, it will carry the bearing 13 to roll under the slide, assisting the position movement of the slider body 1, thereby avoiding direct contact between the slider body 1 and the limit position of the slide after it floats up, resulting in large friction and affecting the accuracy of the high-precision air-floating slider.

[0025] Working principle: First, when using the high-precision air-floating slider, the air inlet head 3 is connected to the pipeline for conveying compressed air, and the compressed air will enter the interior of the filter box 2, and then flow into the connecting pipe 15 after being filtered by the filter plate 4, and then enter the exhaust component for discharge. The exhaust component uses compressed air to form a very thin air film between the slider and the slideway, so that the slider body 1 is suspended on the slideway surface, thereby greatly reducing the contact friction between the two and realizing ultra-low friction movement. When cleaning and replacing the filter plate 4, the positioning bolt 7 is turned to separate the positioning bolt 7 from the threaded hole 6, and then the limit block 5 is no longer moved. Limiting, pulling the sealing block 14 will drive the filter plate 4 to move, and then the filter plate 4 can be pulled out of the interior of the filter box 2 for cleaning or replacement to avoid clogging of the filter plate 4. When the high-precision air-floating slider floats up and slides, the position of the slider body 1 is adjusted by controlling the pressure of the compressed air. The movement of the slider body 1 through the strip groove 11 will cause the top of the bearing 13 to contact the bottom of the slideway, and then when the slider body 1 moves, it will carry the bearing 13 to roll under the slideway, assisting the position movement of the slider body 1, thereby avoiding direct contact between the slider body 1 and the slideway limit after floating, resulting in large friction and affecting the accuracy of the high-precision air-floating slider.

[0026] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A high-precision air-floating slider, comprising a slider body (1), characterized in that: An exhaust assembly is arranged inside the slider body (1), a filter box (2) is fixedly mounted on the slider body (1), an air intake head (3) is fixedly connected to one side of the filter box (2), a connecting pipe (15) is fixedly connected to the other side of the filter box (2), and the connecting pipe (15) is connected to the exhaust assembly; A filter plate (4) is arranged inside the filter box (2), a sealing block (14) is fixedly installed on the top of the filter plate (4), a limit block (5) is fixedly connected to the bottom of the filter plate (4), a threaded hole (6) is arranged inside the limit block (5), and a positioning bolt (7) is threadedly connected to the inside of the threaded hole (6).

2. A high-precision air-floating slider according to claim 1, characterized in that: The exhaust assembly comprises a connecting pipe (8), a diverter groove (9) and a nozzle (10); the diverter groove (9) is fixedly mounted inside the slider body (1); the connecting pipe (8) is fixedly mounted on the top of the diverter groove (9); and the other end of the connecting pipe (8) is connected to a connecting pipe (15); and the nozzle (10) is arranged in an array on the diverter groove (9).

3. A high-precision air-floating slider according to claim 2, characterized in that: The slider body (1) is symmetrically provided with strip grooves (11) inside.

4. A high-precision air-floating slider according to claim 3, characterized in that: The inner array of the strip-shaped grooves (11) is provided with a limiting axis (12).

5. A high-precision air-floating slider according to claim 4, characterized in that: A bearing (13) is fixedly mounted on the limiting shaft (12).

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