Waterproof cover structure of rotating mechanism in photoresist removing process chamber
By setting up a central boss, transverse blocking edges and nitrogen through the holes in the rotating mechanism waterproof cover of the semiconductor degluing process equipment, the problem of potassium flowing into the motor under high pressure and flow is solved, and effective protection of the motor and stability of the equipment is achieved. run.
Patent Information
- Application Number
- CN202323260171.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-01
- Publication Date
- 2024-12-31
- Estimated Expiration
- 2033-12-01
AI Technical Summary
In the existing semiconductor glue removal process equipment, the waterproof cover structure of the rotating mechanism cannot effectively prevent the water from flowing into the motor area under high pressure and flow, resulting in the risk of motor damage.
A waterproof cover structure of the rotating mechanism in the glue removal process chamber is designed, including a central boss and a transverse barrier edge on the top of the waterproof cover body to form a barb-like cross-sectional shape, and a positive pressure protection through the hole through nitrogen gas to prevent The potion enters the motor area.
Effectively block the flow of potions into the adapter shaft and motor area to prevent motor damage, and ensure the safety of the motor and the stable operation of the equipment through barb structure and nitrogen protection mechanism.
Smart Images
Figure CN222281930U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductor debonding process equipment, in particular to a waterproof cover structure of a rotating mechanism in a debonding process chamber. Background Art
[0002] Currently in the semiconductor stripping process, with the updating and development of the process, there are more and more types of chemicals acting on the wafer surface, and the pressure and flow rate of the chemicals used are getting higher and higher. The waterproof cover used in the sealing structure of the rotating mechanism in the original stripping process chamber cannot protect the motor well.
[0003] Specifically, in semiconductor degumming process equipment, the wafer is generally directly supported by a carrier, which is connected via the upper end of a transfer shaft 002, the lower end of which extends into a through hole at the center of the top boss of the prior art waterproof cover 001, and the outer periphery of the transfer shaft 002 is provided with a bent edge portion 0021 for covering the top boss of the prior art waterproof cover 001. Figure 1 As shown, the outer peripheral surface of the top boss of the waterproof cover 001 of the prior art is generally only a cylindrical surface. During the semiconductor degumming process, when the flow rate or pressure of the solution is too large, the solution can easily flow directly along the gap between the outer peripheral surface of the top boss of the waterproof cover 001 of the prior art and the bent edge 0021 of the adapter shaft 002 into the inner side of the waterproof cover 001 of the prior art and reach the area where the motor connected to the adapter shaft 002 is located, which makes the motor at risk of being easily damaged. Utility Model Content
[0004] In view of the above problems, the purpose of the present utility model is to provide a waterproof cover structure of a rotating mechanism in a degumming process chamber.
[0005] The purpose of this utility model is achieved through the following technical solutions:
[0006] A waterproof cover structure of a rotating mechanism in a degumming process chamber, comprising a waterproof cover body, the outer circumference of which extends downward and forms a accommodating space on the inner side of the waterproof cover body, a central boss portion is provided in the middle of the top surface of the waterproof cover body, the height position of the top surface of the central boss portion is higher than the height position of the top surface of the waterproof cover body, a transfer shaft through hole is provided at the center of the central boss portion, the transfer shaft through hole is connected with the accommodating space, a transverse blocking edge is protruded from the top of the outer circumference of the central boss portion extending toward the periphery, and a gap A is provided between the lower surface of the transverse blocking edge and the top surface of the waterproof cover body.
[0007] A vertical annular protrusion is provided on the lower surface of the lateral blocking edge, extending downward from the outer peripheral surface of the central boss portion, and a gap B is provided between the inner side surface of the vertical annular protrusion and the outer peripheral surface of the central boss portion.
[0008] A nitrogen passage is provided inside the central boss portion outside the adapter shaft through hole, the nitrogen passage is connected with a plurality of nitrogen input passages connected with the accommodating space, the nitrogen passage is also connected with a plurality of nitrogen output passages, and the openings of each nitrogen output passage away from the nitrogen passage are all located on the top surface of the central boss portion.
[0009] The openings of all the nitrogen output channels on the top surface of the central boss portion are evenly distributed along the circumferential direction.
[0010] The top surface of the waterproof cover body gradually slopes downward from the center to the periphery.
[0011] A top surface of the waterproof cover body forms an inclination angle between a projection line in a vertical plane and a horizontal plane, and the inclination angle is 1-3 degrees.
[0012] The advantages and positive effects of the utility model are:
[0013] 1. The utility model can play a role in blocking the medicine by setting the lateral blocking edge, so as to prevent the medicine from directly flowing into the hole through which the adapter shaft passes, and entering the accommodating space and reaching the area where the motor connected to the adapter shaft is located along the gap between the outer peripheral surface and the top surface of the central boss part and the bent edge part of the adapter shaft.
[0014] 2. The utility model, through the provision of the vertical annular protrusion, can make the lateral blocking edge and the vertical annular protrusion form a structure with a cross-sectional shape of a barb, which can more effectively make the medicine flowing up along the outer peripheral surface of the central boss part flow back along the lower surface of the lateral blocking edge and the inner surface of the vertical annular protrusion. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a schematic diagram of the main structure of the waterproof cover in the prior art;
[0016] Figure 2 It is an external schematic diagram of the waterproof cover structure of the utility model;
[0017] Figure 3 It is a cross-sectional schematic diagram of the waterproof cover structure of the utility model;
[0018] Figure 4 It is a schematic diagram of the use state of the waterproof cover structure of the utility model after being connected to the adapter shaft.
[0019] In the figure: 1 is the waterproof cover body, 100 is the accommodating space, 101 is the central boss portion, 102 is the adapter shaft through hole, 103 is the horizontal blocking edge, 104 is the vertical annular protrusion, 105 is the nitrogen through channel, 106 is the nitrogen input channel, and 107 is the nitrogen output channel;
[0020] 001 is a waterproof cover in the prior art, 002 is a transfer shaft, and 0021 is a bent edge portion. DETAILED DESCRIPTION
[0021] The following is combined with Figure 2-4 The utility model is further described in detail.
[0022] A waterproof cover structure for a rotating mechanism in a degumming process chamber, such as Figure 2-4 As shown, the present embodiment includes a waterproof cover body 1, the outer circumference of the waterproof cover body 1 extends downward, and the inner side of the waterproof cover body 1 forms a receiving space 100, and the shape of the receiving space 100 is arranged according to the prior art. A central boss portion 101 is arranged in the middle of the top surface of the waterproof cover body 1, and the height position of the top surface of the central boss portion 101 is higher than the height position of the top surface of the waterproof cover body 1, and a transfer shaft through hole 102 is opened at the center of the central boss portion 101, and the transfer shaft through hole 102 is connected to the receiving space 100, and a transverse blocking edge 103 is convexly provided on the top of the outer circumference of the central boss portion 101 extending toward the periphery, and a gap A is provided between the lower surface of the transverse blocking edge 103 and the top surface of the waterproof cover body 1. The size of the gap A in the present embodiment can be 10-20 mm, and is specifically 14 mm in the present embodiment. The setting of the lateral blocking edge 103 can play a role in blocking the medicine, preventing the medicine from directly flowing into the gap between the outer peripheral surface and top surface of the central boss portion 101 and the bent edge portion 0021 of the adapter shaft 002, and entering the accommodating space 100 and reaching the area where the motor connected to the adapter shaft 002 is located.
[0023] Specifically, in this embodiment, a vertical annular protrusion 104 is extended downward from the outer peripheral surface of the central boss portion 101 on the lower surface of the lateral blocking edge 103, and a gap B is provided between the inner side surface of the vertical annular protrusion 104 and the outer peripheral surface of the central boss portion 101. In this embodiment, the size of the gap B can be 4-5 mm, and specifically 4.5 mm in this embodiment. Through the provision of the vertical annular protrusion 104, the lateral blocking edge 103 and the vertical annular protrusion 104 can form a structure with a barb-shaped cross-section, which can more effectively make the medicine flowing up along the outer peripheral surface of the central boss portion 101 flow back along the lower surface of the lateral blocking edge 103 and the inner side surface of the vertical annular protrusion 104.
[0024] Specifically, in this embodiment, a nitrogen passage 105 is provided inside the central boss portion 101 outside the adapter shaft through hole 102, and the nitrogen passage 105 is connected to a plurality of nitrogen input passages 106 connected to the accommodating space 100, and the nitrogen passage 105 is also connected to a plurality of nitrogen output passages 107, and the openings of each nitrogen output passage 107 away from the nitrogen passage 105 are all located on the top surface of the central boss portion 101. In this embodiment, the openings of all nitrogen output passages 107 on the top surface of the central boss portion 101 are evenly distributed along the circumferential direction to achieve uniform nitrogen output. In this embodiment, the arrangement of the nitrogen passage 105, the nitrogen input passage 106 and the nitrogen output passage 107 all adopts the existing technology, and the nitrogen input passage 106 is connected to an external nitrogen gas source. When working in the degumming process chamber, an external nitrogen gas source inputs nitrogen into the nitrogen through-hole 105 through the nitrogen input hole 106, and the nitrogen flows out from each nitrogen output hole 107. Then, the nitrogen flows out from the gap between the outer peripheral surface and the top surface of the central boss portion 101 and the bent edge portion 0021 of the adapter shaft 002, forming a layer of positive pressure nitrogen protection, which can effectively prevent the mist formed by the solution from entering the area where the motor is located.
[0025] Specifically, in this embodiment, the top surface of the waterproof cover body 1 gradually tilts downward from the center to the periphery, and an inclination angle is formed between the projection line of the top surface of the waterproof cover body 1 in the vertical plane and the horizontal plane. The inclination angle is 1-3 degrees, which can enable most of the medicine falling on the top surface of the waterproof cover body 1 to flow better from the top surface of the waterproof cover body 1 to the outside of the waterproof cover body 1.
Claims
1. A waterproof cover structure of a rotating mechanism in a degumming process chamber, comprising a waterproof cover body (1), wherein the outer peripheral surface of the waterproof cover body (1) extends downward and an accommodating space (100) is formed inside the waterproof cover body (1), characterized in that: A central boss portion (101) is provided in the middle of the top surface of the waterproof cover body (1), the height position of the top surface of the central boss portion (101) is higher than the height position of the top surface of the waterproof cover body (1), a transfer shaft through hole (102) is provided at the center of the central boss portion (101), the transfer shaft through hole (102) is connected to the accommodating space (100), and a transverse blocking edge (103) is protruded from the top of the outer peripheral surface of the central boss portion (101) extending toward the periphery, and a gap A is provided between the lower surface of the transverse blocking edge (103) and the top surface of the waterproof cover body (1).
2. The waterproof cover structure of the rotating mechanism in the degumming process chamber according to claim 1, characterized in that: A vertical annular protrusion (104) is provided on the lower surface of the lateral blocking edge (103) and extends downward from the outer peripheral surface away from the central boss portion (101), and a gap B is provided between the inner side surface of the vertical annular protrusion (104) and the outer peripheral surface of the central boss portion (101).
3. The waterproof cover structure of the rotating mechanism in the degumming process chamber according to claim 1, characterized in that: A nitrogen passageway (105) is provided inside the central boss portion (101) outside the adapter shaft through hole (102), the nitrogen passageway (105) is connected to a plurality of nitrogen input passageways (106) connected to the accommodating space (100), the nitrogen passageway (105) is also connected to a plurality of nitrogen output passageways (107), and the openings of the nitrogen output passageways (107) away from the nitrogen passageway (105) are all located on the top surface of the central boss portion (101).
4. The waterproof cover structure of the rotating mechanism in the degumming process chamber according to claim 3, characterized in that: The openings of all the nitrogen output channels (107) on the top surface of the central boss portion (101) are evenly distributed along the circumferential direction.
5. The waterproof cover structure of the rotating mechanism in the degumming process chamber according to claim 1, characterized in that: The top surface of the waterproof cover body (1) gradually slopes downward from the center to the periphery.
6. The waterproof cover structure of the rotating mechanism in the degumming process chamber according to claim 5, characterized in that: The top surface of the waterproof cover body (1) forms an inclination angle between the projection line in the vertical plane and the horizontal plane, and the inclination angle is 1-3 degrees.