Automatic uncovering mechanism for deposition chamber

Abstract

The utility model discloses an automatic uncovering mechanism for a deposition chamber, and particularly relates to the technical field of uncovering mechanisms, which comprises a fixed support, a servo motor is fixedly mounted at the top of the fixed support, a synchronous belt is arranged on the outer side of an output shaft of the servo motor, a screw rod is arranged on one side of the synchronous belt, and the synchronous belt is arranged at the top of the fixed support. A top cover fixing frame is arranged on one side of the fixing support, a deposition chamber cover is fixedly installed at the bottom of the top cover fixing frame, guide rail pairs are arranged on the two sides of the top of the fixing support, and a safety plug pin is arranged on one side of the top of the fixing support. By arranging the servo motor, the synchronous belt, the lead screw, the safety bolt and other structures, the automatic deposition chamber cover opening and closing device is high in automation degree, the deposition chamber cover can be automatically opened and closed, the top end can be limited, the deposition chamber cover is prevented from falling off to hurt people, the purposes of saving time and labor can be achieved, and the safety is high; therefore, the practical use effect of the device is better.

Description

Technical Field

[0001] The utility model relates to the technical field of cover opening mechanisms, and more specifically, to an automatic cover opening mechanism for a deposition chamber. Background Art

[0002] Parylene coating machine is a kind of equipment used to form a uniform coating on the surface of an object. Its core technology lies in vacuum vapor deposition coating technology. As an important part of the Parylene coating machine, the deposition chamber plays a key role in the entire coating process. In the Parylene coating process, the main function of the deposition chamber is to receive the polyparaxylene gas generated by the pyrolysis chamber under a vacuum environment and convert it into a polymer in the chamber, so as to coat the surface of the object to be coated. During the deposition process, the polyparaxylene gas cools without any meaningful heating effect on the coated object for more than a few degrees, which ensures the uniformity and stability of the coating. The cover opening mechanism is one of the components of the Parylene coating machine, which can open the top cover of the deposition chamber.

[0003] Although the cover opening mechanism in the prior art can be used normally, it still has many disadvantages in actual use. For example, the cover opening mechanism in the prior art has a low degree of automation, and the opening and closing of the top cover needs to be done manually, which is time-consuming, labor-intensive and has certain risks. Therefore, the actual use effect of the cover opening mechanism in the prior art is poor. Utility Model Content

[0004] In order to overcome the above-mentioned defects of the prior art, an embodiment of the utility model provides an automatic lid opening mechanism for a deposition chamber. By providing structures such as a servo motor, a synchronous belt, a screw rod and a safety latch, the utility model has a high degree of automation. The opening and closing of the deposition chamber lid can be carried out automatically, and the lid can be limited when it reaches the top to prevent the deposition chamber lid from falling and injuring people. This can achieve the purpose of saving time and effort, and has higher safety. Therefore, the actual use effect of the utility model is better, so as to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an automatic opening mechanism for a deposition chamber, comprising a fixed bracket, a servo motor is fixedly installed on the top of the fixed bracket, a synchronous belt is arranged on the outside of the output shaft of the servo motor, a screw rod is arranged on one side of the synchronous belt, the synchronous belt is arranged on the top of the fixed bracket, a top cover fixing bracket is arranged on one side of the fixed bracket, a deposition chamber cover is fixedly installed on the bottom of the top cover fixing bracket, guide rail pairs are arranged on both sides of the top of the fixed bracket, a safety latch is arranged on one side of the top of the fixed bracket, and a latch hole is arranged on one side of the top cover fixing bracket.

[0006] In a preferred embodiment, the servo motor output shaft is connected to a synchronous belt transmission.

[0007] In a preferred embodiment, the screw rod is arranged to penetrate inside the top cover fixing frame.

[0008] In a preferred embodiment, the safety latch is matched with the latch hole.

[0009] In a preferred embodiment, two sides of the top cover fixing frame are slidably connected to the guide rail pair.

[0010] In a preferred embodiment, the synchronous belt is connected to a screw drive.

[0011] In a preferred embodiment, the screw rod is threadedly connected to the top cover fixing frame.

[0012] Technical effects and advantages of the utility model:

[0013] The utility model is provided with structures such as a servo motor, a synchronous belt, a screw rod and a safety latch, so that the utility model has a high degree of automation. The opening and closing of the deposition chamber cover can be carried out automatically, and the top end can be limited to prevent the deposition chamber cover from falling and injuring people. This can achieve the purpose of saving time and labor, and the safety is relatively high. Therefore, the actual use effect of the utility model is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0015] Figure 2 It is a schematic diagram of the overall side structure of the utility model.

[0016] Figure 3 It is a schematic diagram of the overall top view structure of the utility model.

[0017] The accompanying drawings are marked as follows: 1. fixed bracket; 2. screw rod; 3. servo motor; 4. synchronous belt; 5. deposition chamber cover; 6. safety latch; 7. guide rail pair; 8. top cover fixing bracket. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] As attached Figure 1-3As shown, the utility model provides an automatic lid opening mechanism for a deposition chamber, comprising a fixed bracket 1, a servo motor 3 is fixedly installed on the top of the fixed bracket 1, a synchronous belt 4 is arranged on the outer side of the output shaft of the servo motor 3, a screw rod 2 is arranged on one side of the synchronous belt 4, the synchronous belt 4 is arranged on the top of the fixed bracket 1, a top cover fixing bracket 8 is arranged on one side of the fixed bracket 1, a deposition chamber cover 5 is fixedly installed on the bottom of the top cover fixing bracket 8, guide rail pairs 7 are arranged on both sides of the top of the fixed bracket 1, a safety latch 6 is arranged on one side of the top of the fixed bracket 1, and a latch hole is arranged on one side of the top cover fixing bracket 8;

[0020] The output shaft of the servo motor 3 is transmission-connected with the synchronous belt 4;

[0021] The screw rod 2 is arranged to penetrate inside the top cover fixing frame 8;

[0022] The safety latch 6 is adapted to the latch hole;

[0023] Both sides of the top cover fixing frame 8 are slidably connected to the guide rail pair 7;

[0024] The synchronous belt 4 is transmission-connected with the screw rod 2;

[0025] The screw rod 2 is threadedly connected to the top cover fixing frame 8 .

[0026] The specific implementation method is as follows: when using the utility model, the servo motor 3 on the fixed bracket 1 drives the screw 2 through the synchronous belt 4 to drive the top cover fixing frame 8 to move up and down along the guide rail pair 7, so that the deposition chamber cover 5 moves up and down. When the deposition chamber cover 5 reaches the top, the safety pin 6 extends out and is inserted into the pin hole to prevent the deposition chamber cover 5 from falling and injuring people. This makes the utility model highly automated, and the opening and closing of the deposition chamber cover 5 can be performed automatically, and it can be limited when it reaches the top to prevent the deposition chamber cover 5 from falling and injuring people. This can achieve the purpose of saving time and effort, and has higher safety. Therefore, the actual use effect of the utility model is better.

[0027] Working principle of this utility model:

[0028] Refer to the instruction manual Figure 1-3 When using the utility model, by providing structures such as the servo motor 3, the synchronous belt 4, the screw rod 2 and the safety pin 6, the utility model has a high degree of automation, the deposition chamber cover 5 can be opened and closed automatically, and can be limited when reaching the top to prevent the deposition chamber cover 5 from falling and injuring people, which can achieve the purpose of saving time and effort, and has higher safety, so the actual use effect of the utility model is better.

[0029] Finally, a few points should be explained: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, which may refer to mechanical connection or electrical connection, or internal communication between two components, or direct connection. "upper", "lower", "left", "right", etc. are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may change;

[0030] Secondly: In the drawings of the embodiments disclosed in the present utility model, only the structures related to the embodiments disclosed in the present utility model are involved, and other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of the present utility model can be combined with each other;

[0031] Finally: The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model should be included in the protection scope of the present utility model.

Claims

1. An automatic cover opening mechanism for a deposition chamber, comprising a fixing bracket (1), characterized in that: A servo motor (3) is fixedly mounted on the top of the fixed bracket (1), a synchronous belt (4) is arranged on the outer side of the output shaft of the servo motor (3), a screw (2) is arranged on one side of the synchronous belt (4), the synchronous belt (4) is arranged on the top of the fixed bracket (1), a top cover fixing frame (8) is arranged on one side of the fixed bracket (1), a deposition chamber cover (5) is fixedly mounted on the bottom of the top cover fixing frame (8), guide rail pairs (7) are arranged on both sides of the top of the fixed bracket (1), a safety latch (6) is arranged on one side of the top of the fixed bracket (1), and a latch hole is arranged on one side of the top cover fixing frame (8).

2. The automatic cover opening mechanism of a deposition chamber according to claim 1, characterized in that: The output shaft of the servo motor (3) is drivingly connected to a synchronous belt (4).

3. The automatic cover opening mechanism of a deposition chamber according to claim 1, characterized in that: The screw rod (2) is arranged to penetrate the interior of the top cover fixing frame (8).

4. The automatic cover opening mechanism of a deposition chamber according to claim 1, characterized in that: The safety latch (6) is matched with the latch hole.

5. The automatic cover opening mechanism for a deposition chamber according to claim 1, characterized in that: Both sides of the top cover fixing frame (8) are slidably connected to the guide rail pair (7).

6. The automatic cover opening mechanism of a deposition chamber according to claim 1, characterized in that: The synchronous belt (4) is transmission-connected to the screw rod (2).

7. The automatic cover opening mechanism for a deposition chamber according to claim 1, characterized in that: The screw rod (2) is threadedly connected to the top cover fixing frame (8).

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