Silicon core size detection equipment

Abstract

The utility model discloses silicon core size detection equipment, which comprises a detection part and a fixing part arranged on the detection part, the detection part comprises a linear motion module with a side part provided with a basic frame; the two sets of lifting pieces are designed and symmetrically installed on the linear module, an extension frame is installed on the side portion of each set of lifting piece, and a visual sensor and a distance sensor are installed on each extension frame; a clamping mechanism is designed to clamp the middle position of a silicon rod, then the section size of a silicon core is detected through a visual sensor designed on an extension frame, after detection is completed, a set of lifting pieces are driven to move through a linear motion module, and during movement, the extension frame abuts against the silicon core till the silicon core abuts against the other set of extension frame, and then the silicon core is detected. At the moment, the distance between the two extension frames is sensed through the distance sensor, the length of the silicon core is detected, the section of the silicon core is not blocked by the clamping mechanism when the section size is detected, and the distance between the two extension frames is detected through the distance sensor without being influenced by blocking of the silicon core.

Description

Technical Field

[0001] The utility model relates to the field of silicon core detection, in particular to a silicon core size detection device. Background Art

[0002] Silicon rods are raw materials that are used in large quantities in the semiconductor and photovoltaic related industries.

[0003] In order to facilitate transportation and further processing, a silicon rod with a diameter of 200-300 mm and a length of 1.5-4 m needs to be cut into square rods of appropriate size.

[0004] After the silicon core is cut, it is necessary to check whether it meets the specifications, so as to avoid the outflow of products that do not meet the size specifications. The traditional inspection method is to use a fixture with a visual sensor to complete the inspection.

[0005] When the clamp clamps the silicon core, it has an obstruction effect. When the clamp clamps the two ends of the silicon core, the clamp will block part of the cross section, thereby affecting the dimensional accuracy of the cross section of the silicon rod detected by the visual sensor. When the clamp clamps the middle position of the silicon core or any position other than the two ends, the clamp will block part of the length of the silicon core, thereby affecting the accuracy of the visual sensor in detecting the length of the silicon rod. Utility Model Content

[0006] Purpose of the utility model: to provide a silicon core size detection device to solve the above-mentioned problems existing in the prior art.

[0007] Technical solution: A silicon core size detection device, comprising:

[0008] A detection part, and a fixing part arranged on the detection part;

[0009] The detection unit comprises:

[0010] The linear motion module has a base frame on the side;

[0011] Two sets of lifting parts are designed and symmetrically installed on the linear module. An extension frame is installed on the side of each set of lifting parts, and a visual sensor and a distance sensor are installed on the extension frame;

[0012] When the selected distance sensor requires a receiving end and a transmitting end (such as an optical or acoustic wave distance sensor), the receiving end and the transmitting end can be designed on two sets of extension frames respectively;

[0013] The fixing part includes two groups of clamping mechanisms symmetrically mounted on the lifting member, each group of clamping mechanisms includes a fixing frame connected to the lifting member, and three groups of clamping units connected to the fixing frame and placed in a T shape;

[0014] Each group of clamping units includes a fixed cylinder connected to a fixed frame, a wheel frame arranged at an output end of the fixed cylinder, and a rotating wheel movably connected to the wheel frame.

[0015] The utility model clamps the middle position of the silicon rod by designing a clamping mechanism, and then detects the cross-sectional size of the silicon core by using a visual sensor designed on the extension frame. After the detection is completed, a group of lifting parts are driven to move by a linear motion module. During the movement, the extension frame abuts the silicon core until the silicon core abuts another group of extension frames. At this time, the distance between the two groups of extension frames is sensed by a distance sensor, and then the length of the silicon core is detected. When detecting the cross-sectional size, the clamping mechanism does not block the cross-sectional size of the silicon core, and the detection length is detected by the distance sensor to detect the distance between the two groups of extension frames, which is not affected by the obstruction of the silicon core.

[0016] In a further embodiment, the linear motion module includes a module frame, a module motor installed at one end of the module frame, a module lead screw arranged at an output end of the module motor, and a module slider sleeved on the module lead screw;

[0017] The module frame is provided with a module slide rail, and the module slider is adapted to the module slide rail.

[0018] In a further embodiment, there are two groups of lifting members, one group is connected to the module frame, and the other group is connected to the module slide.

[0019] In a further embodiment, the lifting member comprises: a column, which is hollow and has a lifting cylinder disposed therein, and

[0020] There are slide grooves on both sides of the column;

[0021] A lifting column connected to the output end of the lifting cylinder and adapted to the column;

[0022] The upright column in the lifting member connected to the module frame is connected to the module frame;

[0023] The upright column in the lifting member connected to the module slider is connected to the module slider.

[0024] In a further embodiment, the extension frame is connected to the column.

[0025] In a further embodiment, the fixing frame is connected to a lifting column.

[0026] Beneficial effects: The utility model discloses a silicon core size detection device. The utility model clamps the middle position of the silicon rod by designing a clamping mechanism, and then detects the cross-sectional size of the silicon core by a visual sensor designed on the extension frame. After the detection is completed, a group of lifting parts are driven to move by a linear motion module. During the movement, the extension frame presses against the silicon core until the silicon core presses against another group of extension frames. At this time, the distance between the two groups of extension frames is sensed by the distance sensor, and then the length of the silicon core is detected. When detecting the cross-sectional size, the clamping mechanism does not block the cross-sectional area of ​​the silicon core. The detected length is detected by the distance sensor to detect the distance between the two groups of extension frames, which is not affected by the obstruction of the silicon core. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural schematic diagram of the utility model.

[0028] Figure 2 It is a schematic diagram of the fixing part of the utility model.

[0029] Figure 3 It is a schematic diagram of the detection unit of the utility model.

[0030] The accompanying drawings are marked as follows:

[0031] 1. Detection unit; 11. Basic frame; 12. Linear motion module; 13. Column; 14. Lifting column; 15. Extension frame; 16. Distance sensor; 17. Visual sensor;

[0032] 2. Fixed part; 21. Fixed frame; 22. Fixed cylinder; 23. Wheel frame; 24. Fixed wheel. DETAILED DESCRIPTION

[0033] The present application relates to a silicon core size detection device, which is explained in detail below through a specific implementation method.

[0034] A silicon core size detection device, comprising:

[0035] A detection part 1, and a fixing part 2 arranged on the detection part 1;

[0036] The detection unit 1 comprises:

[0037] The linear motion module 12 has a base frame 11 on the side;

[0038] Two sets of lifting parts are designed and symmetrically installed on the linear module. An extension frame 15 is installed on the side of each set of lifting parts. A visual sensor 17 and a distance sensor 16 are installed on the extension frame 15.

[0039] When the selected distance sensor 16 requires a receiving end and a transmitting end (such as an optical or acoustic wave distance sensor 16), the receiving end and the transmitting end can be designed on the two sets of extension frames 15 respectively;

[0040] The fixing part 2 includes two groups of clamping mechanisms symmetrically mounted on the lifting member, each group of clamping mechanisms includes a fixing frame 21 connected to the lifting member, and three groups of clamping units connected to the fixing frame 21 and placed in a T shape;

[0041] Each group of clamping units includes a fixed cylinder 22 connected to a fixed frame 21 , a wheel frame 23 arranged at an output end of the fixed cylinder 22 , and a rotating wheel movably connected to the wheel frame 23 .

[0042] The utility model clamps the middle position of the silicon rod by designing a clamping mechanism, and then detects the cross-sectional size of the silicon core by using a visual sensor 17 designed on the extension frame 15. After the detection is completed, a group of lifting parts are driven to move by the linear motion module 12. During the movement, the extension frame 15 abuts against the silicon core until the silicon core abuts against another group of extension frames 15. At this time, the distance between the two groups of extension frames 15 is sensed by the distance sensor 16, and then the length of the silicon core is detected. When detecting the cross-sectional size, the clamping mechanism does not block the cross-sectional size of the silicon core. The detected length is detected by the distance sensor 16 to detect the distance between the two groups of extension frames 15, and is not affected by the obstruction of the silicon core.

[0043] The linear motion module 12 includes a module frame, a module motor installed at one end of the module frame, a module lead screw arranged at the output end of the module motor, and a module slider sleeved on the module lead screw;

[0044] The module frame is provided with a module slide rail, and the module slider is adapted to the module slide rail.

[0045] Two groups of lifting parts, one group is connected with the module frame, and the other group is connected with the module slide block.

[0046] The lifting member comprises: a column 13, which is hollow, a lifting cylinder is arranged inside the column 13, and slide grooves are opened on both sides of the column 13;

[0047] A lifting column 14 is connected to the output end of the lifting cylinder and is adapted to the column 13;

[0048] The column 13 in the lifting member connected to the module frame is connected to the module frame;

[0049] The column 13 in the lifting member connected to the module slider is connected to the module slider.

[0050] The extension frame 15 is connected to the column 13 .

[0051] The fixing frame 21 is connected to the lifting column 14 .

[0052] Working principle description: Place the silicon core to be inspected on the fixing part 2, and drive the wheel frame 23 to move through the fixing cylinder 22, thereby driving the fixing wheel 24 to press against the silicon core to complete the fixing. After the fixing is completed, the cross-sectional size of the silicon core is detected by the visual sensor 17;

[0053] During the detection process, the relative height between the silicon core and the visual sensor 17 is adjusted by the lifting member, and the lifting cylinder drives the lifting column 14 to move, thereby completing the height adjustment of the silicon core;

[0054] During the detection process, the initial fixed position of the fixing part 2 is adjusted by the linear motion module 12 to avoid blocking the silicon core cross section and affecting the detection accuracy;

[0055] After the cross-section detection is completed, the relative height between the silicon core and the visual sensor 17 is lifted or lowered by the lifting member, so that the linear motion module 12 drives the extension frame 15 to resist the silicon core launch movement. During movement, the silicon core drives the fixed wheel 24 to move, and the fixed wheel 24 is used to prevent friction scratches on the silicon core until the other end of the silicon core abuts against another extension frame 15, and then the distance sensor 16 detects the distance between the two groups of extension frames 15, thereby completing the length detection of the silicon core.

[0056] The preferred embodiments of the present invention are described in detail above in conjunction with the accompanying drawings; however, the present invention is not limited to the specific details in the above embodiments. Within the technical concept of the present invention, various equivalent transformations can be made to the technical scheme of the present invention, and these equivalent transformations all belong to the protection scope of the present invention.

Claims

1. A silicon core size detection device, comprising: A detection portion (1), and a fixing portion (2) arranged on the detection portion (1); Characterized in that the detection unit (1) comprises: A linear motion module (12) having a base frame on the side; Two groups of lifting members are designed and symmetrically mounted on the linear motion module (12); an extension frame (15) is mounted on the side of each group of lifting members, and a visual sensor (17) and a distance sensor (16) are mounted on the extension frame (15); The fixing portion (2) comprises two groups of clamping mechanisms symmetrically mounted on the lifting member, each group of clamping mechanisms comprising a fixing frame (21) connected to the lifting member, and three groups of clamping units connected to the fixing frame (21) and arranged in a T shape; Each group of clamping units comprises a fixed cylinder (22) connected to a fixed frame (21), a wheel frame (23) arranged at an output end of the fixed cylinder (22), and a rotating wheel movably connected to the wheel frame (23).

2. The silicon core size detection device according to claim 1, characterized in that: The linear motion module (12) comprises a module frame, a module motor mounted on one end of the module frame, a module lead screw arranged at an output end of the module motor, and a module slider sleeved on the module lead screw; The module frame is provided with a module slide rail, and the module slider is adapted to the module slide rail.

3. The silicon core size detection device according to claim 2, characterized in that: Two groups of lifting parts, one group is connected with the module frame, and the other group is connected with the module slide block.

4. The silicon core size detection device according to claim 3 is characterized in that: The lifting member comprises: The column (13) is hollow, a lifting cylinder is arranged inside the column (13), and slide grooves are provided on both sides of the column (13); A lifting column (14) connected to the output end of the lifting cylinder and adapted to fit the upright column (13); A column (13) in a lifting member connected to the module frame is connected to the module frame; A column (13) in a lifting member connected to the module slider is connected to the module slider.

5. The silicon core size detection device according to claim 4, characterized in that: The extension frame (15) is connected to the column (13).

6. The silicon core size detection device according to claim 4, characterized in that: The fixing frame (21) is connected to the lifting column (14).

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