Flexible wafer sorting device

Abstract

The utility model discloses a flexible wafer arranging device, which comprises a base, a driving assembly, a rotary wafer arranging frame and a follow-up elastic structure, and is characterized in that the driving assembly is mounted on the base; the rotary wafer arranging frame is rotatably mounted on the base, and a bearing plane suitable for placing wafers is arranged on the rotary wafer arranging frame; the driving assembly is suitable for driving the rotary sheet arranging frame to rotate on the base; the follow-up elastic structure is arranged on the base, the follow-up elastic structure is connected with the rotary sheet sorting frame, and the follow-up elastic structure is suitable for slowing down rotation of the rotary sheet sorting frame and driving the rotary sheet sorting frame to return after the rotary sheet sorting frame rotates. According to the utility model, hard contact can be reduced in the process of taking out and putting in the wafer, the damage such as corner chipping and fragment of the wafer is avoided, the economic loss is reduced, and the efficiency is improved.

Description

Technical Field

[0001] The utility model relates to a flexible wafer sorting device, belonging to the technical field of wafer sorting. Background Art

[0002] At present, in the field of wafer inspection in the current semiconductor industry, due to the different arrangement positions of wafers in the box, the position of the wafers will be different during the robot's wafer removal process. This different position may make it impossible to accurately find the edge of the wafer after placing it in the edge finder, and even cause the wafer to be thrown out, so wafer sorting is required.

[0003] After searching the prior art, it was found that a Chinese patent with publication number CN218215246U disclosed a wafer sorter. The patent provides the use of a wafer basket to place wafers, but it was found during use that the placement and removal of wafers is a rigid process. Therefore, when using a robot to take out the wafers, it is easy to cause some wafers to have broken corners and fragments, and the wafers cannot be protected. This not only affects the progress of the next process, but also requires the wafers to be made from scratch, which is not only economical, but also time-consuming and labor-intensive. Summary of the invention

[0004] The technical problem to be solved by the utility model is to overcome the defects of the prior art and provide a flexible wafer sorting device, which can reduce hard contact in the process of taking out and putting in wafers, avoid damage to the wafers such as chipping and fragmentation, reduce economic losses and improve efficiency.

[0005] In order to solve the above technical problems, the technical solution of the utility model is: a wafer flexible wafer handling device, comprising:

[0006] Base;

[0007] A drive assembly, wherein the drive assembly is mounted on the base;

[0008] A rotating wafer sorting frame, the rotating wafer sorting frame is rotatably mounted on the base, and the rotating wafer sorting frame is provided with a bearing plane suitable for placing wafers;

[0009] The driving assembly is suitable for driving the rotating sheet sorting frame to rotate on the base;

[0010] A follow-up elastic structure is arranged on the base, the follow-up elastic structure is connected to the rotating film sorting frame, the follow-up elastic structure is suitable for slowing down the rotation of the rotating film sorting frame, and driving the rotating film sorting frame to return to its original position after the rotating film sorting frame rotates.

[0011] Furthermore, in order to obtain the rotation position of the rotating wafer handling rack, the wafer flexible handling device further includes a position sensing structure, and the position sensing structure is installed on the base;

[0012] The in-position sensing structure is suitable for detecting the rotation position of the rotating sheet sorting rack on the base.

[0013] Furthermore, a specific structure of a position sensing structure is provided, and the position sensing structure comprises:

[0014] Two position sensors, the two position sensors are respectively mounted on the base corresponding to the rotation limit positions of the rotating film sorting rack;

[0015] A sensor triggering member is installed on the rotating film sorting rack, and the sensor triggering member is suitable for triggering the corresponding position sensor when the rotating film sorting rack rotates into place.

[0016] Further, in order to realize driving the rotating sheet sorting rack to rotate, the driving assembly includes:

[0017] A driving source, the driving source being mounted on the base;

[0018] A transmission mechanism, the transmission mechanism is connected to the driving source and the rotating sheet sorting frame respectively;

[0019] The driving source is suitable for driving the rotating sheet sorting rack to rotate through the transmission mechanism.

[0020] Furthermore, a specific type of driving source is provided, wherein the driving source is a motor.

[0021] Furthermore, in order to achieve the transmission of the driving force of the driving source, the transmission mechanism includes:

[0022] A driving wheel, the driving wheel is installed on the output end of the driving source;

[0023] A driven wheel, the driven wheel is mounted on the rotating sheet sorting frame;

[0024] A transmission belt, the transmission belt is wound around the driving wheel and the driven wheel;

[0025] The driving wheel is suitable for driving the driven wheel to rotate through the transmission belt.

[0026] Furthermore, the rotating film sorting frame comprises:

[0027] A rotating column, the rotating column is rotatably mounted on the base;

[0028] A frame is fixedly arranged on the rotating column, and the bearing plane is arranged on the frame.

[0029] Furthermore, in order to limit the rotation of the rotating film sorting frame, the rotating film sorting frame further includes:

[0030] A limiter is installed on the base, and the limiter is suitable for abutting against the frame when the rotating column rotates to limit the rotation range of the rotating column.

[0031] Furthermore, in order to slow down the rotation of the rotating sheet-sorting rack and return it to its original position, the follow-up elastic structure includes:

[0032] A fixed column, wherein the fixed column is fixedly mounted on the base;

[0033] A connecting column, wherein the connecting column is fixedly mounted on the rotating sheet sorting frame;

[0034] A spring, two ends of which are respectively connected to the fixing column and the connecting column;

[0035] When the rotary sheet-sorting frame rotates, the spring is suitable for slowing down the rotation of the rotary sheet-sorting frame, and driving the rotary sheet-sorting frame to return to its original position after the rotation is completed.

[0036] By adopting the above technical solution, the utility model has the following beneficial effects:

[0037] During the use of the utility model, the wafer is first placed on the bearing plane of the rotating wafer sorting frame. Then, during the process of the robot taking and placing the wafer, and the process of the driving component driving the rotating wafer sorting frame to rotate, since the rotating wafer sorting frame itself has the ability to rotate, combined with the follow-up elastic structure and the linkage design of the rotating wafer sorting frame, the rotating wafer sorting frame has a certain flexibility while meeting the requirements of taking and placing the wafer.

[0038] The flexibility brought by the follow-up elastic structure has the function of slowing down the rotation speed of the rotating wafer sorting rack, and helps the rotating wafer sorting rack return to its original position after the rotation is completed. This operation method greatly reduces the occurrence of destructive phenomena such as chipping and fragmentation caused by hard contact during the process of wafer removal and placement, thus effectively solving the problems caused by hard placement and removal of wafers.

[0039] In addition, the utility model is provided with an in-position sensing structure on the base, which can detect the rotation position of the rotating sheet sorting frame on the base and provide instant feedback when the rotating sheet sorting frame is in position, thereby improving the execution efficiency of the operation.

[0040] In summary, the utility model reduces hard contact during the process of taking out and putting in wafers, avoids damage to the wafers such as chipping corners and fragments, reduces economic losses, and increases the safety and efficiency of operations. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 It is a three-dimensional structural schematic diagram of the flexible wafer sorting device of the utility model;

[0042] Figure 2 It is a three-dimensional structural schematic diagram of the frame of the flexible wafer sorting device of the present invention. DETAILED DESCRIPTION

[0043] In order to make the content of the utility model more clearly understood, the utility model is further described in detail below based on specific embodiments and in conjunction with the accompanying drawings.

[0044] like Figure 1-2 As shown, a flexible wafer handling device comprises:

[0045] Base 100;

[0046] A driving assembly, the driving assembly is mounted on the base 100;

[0047] A rotating wafer sorting rack, which is rotatably mounted on the base 100 and is provided with a bearing plane suitable for placing wafers;

[0048] The driving assembly is suitable for driving the rotating sheet-sorting frame to rotate on the base 100;

[0049] The follow-up elastic structure is arranged on the base 100 and is connected to the rotating film sorting frame. The follow-up elastic structure is suitable for slowing down the rotation of the rotating film sorting frame and driving the rotating film sorting frame to return to its original position after the rotating film sorting frame rotates.

[0050] In this embodiment, the wafer is first placed on the bearing plane of the rotating wafer sorting rack. Then, during the process of the robot taking and placing the wafer, and the process of the driving component driving the rotating wafer sorting rack to rotate, since the rotating wafer sorting rack itself has the ability to rotate, combined with the linkage design of the follow-up elastic structure and the rotating wafer sorting rack, the rotating wafer sorting rack has a certain flexibility while meeting the requirements of taking and placing the wafer. The flexibility brought by the follow-up elastic structure has the function of slowing down the rotation speed of the rotating wafer sorting rack, and after the rotation is completed, it helps the rotating wafer sorting rack return to its position. This mode of operation greatly reduces the occurrence of destructive phenomena such as chipping and fragmentation caused by hard contact during the process of taking out and putting in the wafer, thereby effectively solving the problems caused by hard placement and taking of the wafer.

[0051] Specifically, Figure 1 As shown, the wafer flexible handling device further includes a position sensing structure, and the position sensing structure is mounted on the base 100;

[0052] The in-position sensing structure is suitable for detecting the rotation position of the rotating sheet-sorting rack on the base 100 .

[0053] Specifically, Figure 1 As shown, the in-position sensing structure may be as follows:

[0054] Two position sensors 210, the two position sensors 210 are respectively mounted on the base 100 corresponding to the rotation limit positions of the rotating film rack;

[0055] The sensor trigger 220 is installed on the rotating film sorting rack. The sensor trigger 220 is suitable for triggering the corresponding position sensor 210 when the rotating film sorting rack rotates to a certain position.

[0056] In this embodiment, if Figure 1-2 As shown, the two position sensors 210 are sensors for sensing the rotation limit positions of the rotating film rack, and can be photoelectric sensors, Hall sensors, etc. The two position sensors 210 are fixedly mounted on the base 100, respectively corresponding to the two rotation limit positions of the rotating film rack, and are used to sense whether the rotating film rack has rotated to the corresponding position. The sensor trigger 220 can be a beam plate or a shielding plate, fixedly mounted on the rotating film rack. When the rotating film rack rotates, the sensor trigger 220 rotates together. When it rotates to a certain limit position, the sensor trigger 220 will move to the position of the corresponding position sensor 210, blocking or triggering the position sensor 210, so that the position sensor 210 detects that the rotating film rack has rotated to the limit position. Through the above structural design, the cooperation of the position sensor 210 and the sensor trigger 220 can realize accurate detection of the rotation position of the rotating film rack.

[0057] Specifically, Figure 1 As shown, the drive component can be structured as follows:

[0058] A driving source 310, the driving source 310 is mounted on the base 100;

[0059] A transmission mechanism, the transmission mechanism is connected to the driving source 310 and the rotating sheet sorting frame respectively;

[0060] The driving source 310 is suitable for driving the rotating sheet sorting rack to rotate through a transmission mechanism.

[0061] In this embodiment, if Figure 1-2 As shown, the driving source 310 is an actuator that provides power and is installed on the base 100. The driving source 310 can also be other rotating parts such as a cylinder. The transmission mechanism is connected between the driving source 310 and the rotating film sorting frame to transmit and convert the output power of the driving source 310 to drive the rotating film sorting frame to rotate. The transmission mechanism can also be a mechanical transmission structure such as a gear transmission and a chain transmission.

[0062] Specifically, Figure 1 As shown, the driving source 310 is a motor.

[0063] In this embodiment, if Figure 1-2 As shown, the driving source 310 can be a brushless servo motor or a stepper motor. This type of motor has the advantages of small size, high power, and adjustable speed. The brushless servo motor has a wide speed range and can achieve smooth rotation; the stepper motor has high angular accuracy and can accurately rotate the angle according to the control signal. The motor is used as the driving source 310, which matches the working environment and can meet the requirements of parameters such as speed and power, and realize accurate and controllable driving of the rotating wafer unscrambler, so that the wafer unscrambling effect is better. At the same time, the motor is low-priced, easy to install and maintain, and is conducive to reducing costs.

[0064] Specifically, Figure 1 As shown, the transmission mechanism can be of the following structure:

[0065] A driving wheel, which is mounted on the output end of the driving source 310;

[0066] A driven wheel, which is mounted on a rotating film sorting frame;

[0067] A transmission belt 320, the transmission belt 320 is wrapped around the driving wheel and the driven wheel;

[0068] The driving wheel is suitable for driving the driven wheel to rotate through the transmission belt 320 .

[0069] In this embodiment, if Figure 1 As shown, the driving wheel preferably adopts a gear with a toothed structure, and the driven wheel also adopts a corresponding gear structure. The driving wheel is fixedly mounted on the motor output shaft of the driving source 310, and the driven wheel is fixedly mounted on one end of the rotating column 410 of the rotating film sorting frame. The gear ratio of the driving wheel and the driven wheel is designed to match to achieve an accurate transmission ratio. The transmission belt 320 can be a rubber toothed rubber ring, and its inner ring surface is meshed with the tooth structure of the driving wheel and the driven wheel to achieve the effect of the driving wheel driving the driven wheel to rotate. The transmission belt 320 surrounds the driving wheel and the driven wheel and is connected at both ends to form a closed-loop transmission structure. When working, the driving source 310 starts and drives the output shaft to rotate, thereby driving the driving wheel fixed to the output shaft to rotate; the driving wheel then drives the driven wheel to rotate by meshing with the transmission belt 320, and finally drives the entire rotating film sorting frame to rotate.

[0070] Specifically, Figure 1-2 As shown, the rotating film sorting frame can have the following structure:

[0071] A rotating column 410, the rotating column 410 is rotatably mounted on the base 100;

[0072] The frame 420 is fixedly disposed on the rotating column 410 , and the bearing plane is disposed on the frame 420 .

[0073] In this embodiment, if Figure 1-2As shown, the rotating column 410 is a cylindrical structure. The bottom end of the rotating column 410 is mounted on the base 100 through a bearing to achieve rotation relative to the base 100. The frame 420 can be made of a lightweight aluminum alloy material to form a frame structure. The frame 420 is provided with a connecting piece and a wafer sorting column. The connecting piece and the wafer sorting column form a bearing plane for placing wafers. When working, the rotating column 410 drives the frame 420 and the wafer on the bearing plane of the frame 420 to rotate, and positions and sorts the wafers placed on the bearing plane. The lightweight design of the frame 420 ensures a fast and smooth rotation process. In this way, the matching design of the rotating column 410 and the frame 420 constitutes an integral mechanism for rotation positioning and wafer sorting, which provides effective hardware support for wafer sorting.

[0074] Specifically, Figure 1-2 As shown, the rotating film rack also includes:

[0075] The limiting member 430 is installed on the base 100 . The limiting member 430 is suitable for abutting against the frame 420 when the rotating column 410 rotates to limit the rotation range of the rotating column 410 .

[0076] In this embodiment, if Figure 1-2 As shown, the stopper 430 is a rod-shaped structure, and the position of the stopper 430 determines the maximum angle range of the rotation of the rotating wafer unscrambler. When the rotating column 410 drives the rotating wafer unscrambler to rotate, the side of the frame 420 will abut against the stopper 430, thereby limiting the rotation angle. In this way, through the limiting effect of the stopper 430, the rotating wafer unscrambler can be prevented from excessive rotation, ensuring that it positions and unscrambles the wafers within a suitable angle range, thereby avoiding damage to the wafers. The setting of the stopper 430 improves the safety and reliability of the equipment.

[0077] Specifically, Figure 1 As shown, the follow-up elastic structure can be as follows:

[0078] A fixed column 510, wherein the fixed column 510 is fixedly mounted on the base 100;

[0079] A connecting column 520, wherein the connecting column 520 is fixedly mounted on the rotating sheet sorting frame;

[0080] A spring 530, two ends of which are connected to the fixing column 510 and the connecting column 520 respectively;

[0081] When the rotary sheet-scraping frame rotates, the spring 530 is adapted to slow down the rotation of the rotary sheet-scraping frame and drive the rotary sheet-scraping frame to return to its original position after the rotation is completed.

[0082] In this embodiment, if Figure 1As shown, the spring 530 is a spiral cylindrical compression spring, and the fixing rings at both ends are respectively connected to the fixing column 510 and the connecting column 520. The stiffness of the spring 530 is designed to provide appropriate elastic resistance when the rotating wafer sorting frame rotates. During operation, when the rotating wafer sorting frame rotates under the drive, the elastic flexibility of the spring 530 will buffer the inertia of the rotating wafer sorting frame to prevent the wafer from being impacted by the wafer sorting process being too fast. After the rotation is completed, the retraction force of the spring 530 drives the rotating wafer sorting frame back to its original position. In this way, the spring 530 realizes the buffering and return functions of the movement of the rotating wafer sorting frame, making the wafer sorting action softer and reducing the risk of damage to the wafer.

[0083] The specific embodiments described above further illustrate the technical problems, technical solutions and beneficial effects solved by the present invention. It should be understood that the above are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A flexible wafer handling device, characterized in that: include: Base (100); A drive assembly, the drive assembly being mounted on the base (100); A rotating wafer sorting frame, the rotating wafer sorting frame is rotatably mounted on the base (100), and the rotating wafer sorting frame is provided with a bearing plane suitable for placing wafers; The driving assembly is suitable for driving the rotating sheet sorting frame to rotate on the base (100); A follow-up elastic structure, wherein the follow-up elastic structure is arranged on the base (100), the follow-up elastic structure is connected to the rotating film sorting frame, the follow-up elastic structure is suitable for slowing down the rotation of the rotating film sorting frame, and driving the rotating film sorting frame to return to its original position after the rotating film sorting frame rotates.

2. The wafer flexible sorting device according to claim 1, characterized in that: It also includes a position sensing structure, which is installed on the base (100); The in-position sensing structure is suitable for detecting the rotational position of the rotating sheet sorting rack on the base (100).

3. The flexible wafer handling device according to claim 2, characterized in that: The in-position sensing structure comprises: Two position sensors (210), the two position sensors (210) being respectively mounted on the base (100) corresponding to the rotation limit positions of the rotating film arrangement frame; A sensor trigger (220), wherein the sensor trigger (220) is mounted on the rotating film sorting frame, and the sensor trigger (220) is suitable for triggering the corresponding position sensor (210) when the rotating film sorting frame rotates to a certain position.

4. The flexible wafer handling device according to claim 1, characterized in that: The drive assembly comprises: A driving source (310), the driving source (310) being mounted on the base (100); A transmission mechanism, the transmission mechanism being connected to the driving source (310) and the rotating sheet sorting frame respectively; The driving source (310) is suitable for driving the rotating sheet sorting rack to rotate through the transmission mechanism.

5. The flexible wafer handling device according to claim 4, characterized in that: The driving source (310) is a motor.

6. The flexible wafer handling device according to claim 4, characterized in that: The transmission mechanism comprises: A driving wheel, the driving wheel being mounted on an output end of the driving source (310); A driven wheel, the driven wheel is mounted on the rotating sheet sorting frame; A transmission belt (320), the transmission belt (320) being wound around the driving wheel and the driven wheel; The driving wheel is suitable for driving the driven wheel to rotate through the transmission belt (320).

7. The flexible wafer handling device according to claim 1, characterized in that: The rotating film handling frame comprises: A rotating column (410), wherein the rotating column (410) is rotatably mounted on the base (100); A frame (420), the frame (420) being fixedly arranged on the rotating column (410), and the bearing plane being arranged on the frame (420).

8. The flexible wafer handling device according to claim 7, characterized in that: The rotating film handling frame also includes: A limit member (430), wherein the limit member (430) is mounted on the base (100), and the limit member (430) is suitable for abutting against the frame (420) when the rotating column (410) rotates to limit the rotation range of the rotating column (410).

9. The flexible wafer handling device according to claim 1, characterized in that: The follow-up elastic structure comprises: A fixed column (510), wherein the fixed column (510) is fixedly mounted on the base (100); A connecting column (520), wherein the connecting column (520) is fixedly mounted on the rotating sheet sorting frame; A spring (530), wherein two ends of the spring (530) are respectively connected to the fixing column (510) and the connecting column (520); When the rotating film sorting frame rotates, the spring (530) is suitable for slowing down the rotation of the rotating film sorting frame, and driving the rotating film sorting frame to return to its original position after the rotation is completed.

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