Ultrasonic dust removal device

Abstract

The utility model relates to an ultrasonic dust removal device which comprises a positive pressure cavity and an air blowing cavity which are sequentially arranged in a first direction, the air blowing cavity comprises a communicating flow channel and at least two ultrasonic generating cavities which are connected in series through the communicating flow channel, and the air blowing cavity is communicated with the positive pressure cavity through the communicating flow channel; the communicating flow channel far away from the positive pressure cavity forms a blowing flow channel capable of blowing air to the outside; the ultrasonic generating cavity expands outwards relative to the communicating flow channel in the second direction; the negative pressure cavity and the air suction hole are communicated with each other; the air suction hole and the blowing runner are positioned at the same end of the ultrasonic dust removal device in the first direction; the cavity wall of at least one ultrasonic generating cavity included in the air blowing cavity is concave inwards to form at least one first groove, and the positive pressure cavity, the air blowing cavity and the first grooves all extend in the third direction; the first cross section of the first groove is arc-shaped. The arc-shaped groove in the ultrasonic generating cavity is beneficial to sound wave movement, energy (sound wave energy generated by agitation) loss is reduced, the audio frequency effect is improved, and then the gas flow is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of dust removal equipment, in particular to an ultrasonic dust removal device. Background Art

[0002] During the production process of battery cells, dust, debris and other impurities are easily generated and fall on the electrodes. If they are not cleaned in time, it will affect the quality of the battery and cause micro-short circuits inside the battery cells.

[0003] At present, the dust removal methods in the lithium battery industry include brush dust removal and air knife dust removal. Brush dust removal is a contact dust removal method, which will affect the surface quality and physical properties of the electrode itself to a certain extent, and the brush is easy to adhere to dust particles, which may cause secondary pollution to the electrode. Although air knife dust removal is a non-contact dust removal method, the gas blown by the air knife will form a stable flow field on the surface of the electrode, so it cannot have an effect on dust and other particles in the air viscosity layer above the electrode, and the dust removal effect is not good.

[0004] In order to improve the above defects, ultrasonic dust removal has been applied in the lithium battery industry. However, the existing ultrasonic dust removal has an unstable dust removal effect due to the unreasonable setting of the ultrasonic generating chamber, and the dust removal performance still needs to be improved. Utility Model Content

[0005] Based on this, it is necessary to provide an ultrasonic dust removal device that can improve the dust removal performance in order to address the problem of poor dust removal performance of traditional ultrasonic dust removal.

[0006] An ultrasonic dust removal device, comprising:

[0007] A positive pressure chamber and a blowing chamber are arranged in sequence in a first direction, the blowing chamber comprises a connecting flow channel and at least two ultrasonic generating chambers connected in series through the connecting flow channel, the blowing chamber is connected with the positive pressure chamber through the connecting flow channel, and the connecting flow channel away from the positive pressure chamber forms a blowing flow channel capable of blowing air to the outside; the ultrasonic generating chamber expands outwardly relative to the connecting flow channel in the second direction;

[0008] A negative pressure chamber and an air suction hole are interconnected, wherein the air suction hole and the air blowing channel are located at the same end of the ultrasonic dust removal device in the first direction;

[0009] The cavity wall of at least one of the ultrasonic generating cavities included in the blowing cavity is concave to form at least one first groove, and the positive pressure cavity, the blowing cavity and the first groove all extend along a third direction; the first cross-section of the first groove is in the shape of an arc; the first direction, the second direction and the third direction intersect with each other, and the first direction and the second direction are both parallel to the first cross-section.

[0010] In the ultrasonic dust removal device, the arc groove in the ultrasonic generating chamber facilitates the movement of sound waves, reduces energy (sound wave energy generated by agitation) loss, improves the audio frequency effect, and thus saves gas flow. That is, the arc groove is provided on the cavity wall of the ultrasonic generating chamber, which can further promote the generation of high-frequency noise and gas, thereby ensuring the stability of the dust removal effect and thus improving the dust removal performance.

[0011] In one embodiment, the cavity walls of all the ultrasonic generating cavities included in the blowing cavity are concave to form at least one first groove; and / or

[0012] The cavity wall of the ultrasonic generating cavity is concave to form at least two first grooves spaced apart from each other.

[0013] In one embodiment, the shape of the first cross section is semicircular, and the radius of the semicircle is 0.2 mm-0.8 mm.

[0014] In one embodiment, in the first direction, the distance between each two adjacent ultrasonic generating cavities is 2 mm-3 mm; and / or

[0015] In the first direction, the size of the blowing channel is 3 mm-5 mm; in the second direction, the size of the blowing channel is 0.1 mm-0.3 mm.

[0016] In one embodiment, the second cross-section of the ultrasonic generating cavity is in the shape of a rectangle, the length direction of the rectangle is parallel to the second direction, and the rectangle has rounded corners; the first direction and the second direction are both parallel to the second cross-section.

[0017] In one embodiment, the chamfer radius of the rounded corner is 0.2 mm-0.8 mm.

[0018] In one embodiment, the ratio of the size of the second cross-section of the ultrasonic generating cavity in the second direction to the size of the second cross-section in the first direction is 1-2; and / or

[0019] The size of the second cross section of the ultrasonic generating cavity in the first direction is 2 mm to 3 mm;

[0020] The first direction and the second direction are both parallel to the second cross section.

[0021] In one embodiment, the blowing air channel extends in an arc shape along the first direction, and an end of the blowing air channel away from the ultrasonic generating cavity deflects toward a direction close to the air suction hole;

[0022] The angle between the tangent line formed by the arc formed by the blowing air channel and the second plane is 45°-90°; the second plane is formed by the intersection of the second direction and the third direction.

[0023] In one embodiment, the shape of the third cross section of the cavity wall of the positive pressure cavity is an arc shape, and the size of the third cross section of the positive pressure cavity in the second direction gradually decreases from one end away from the blowing cavity to the other end close to the blowing cavity;

[0024] The cavity wall of the positive pressure cavity is concave to form a second groove extending along the third direction;

[0025] The first direction and the second direction are both parallel to the third cross section.

[0026] In one embodiment, the ultrasonic dust removal device includes two groups of positive pressure chamber groups, each group of the positive pressure chamber group includes a positive pressure chamber and a blowing chamber that are interconnected;

[0027] The negative pressure chamber is located between the two groups of positive pressure chambers in the second direction, and the air suction hole is located between the two blowing air channels in the second direction.

[0028] In one of the embodiments, the ultrasonic dust removal device includes a cover plate, a bottom plate, two splicing mechanisms and two side plates;

[0029] The two splicing mechanisms are arranged at intervals in the second direction, the cover plate and the bottom plate are respectively installed at two ends of the two splicing mechanisms in the first direction, and the two side plates are respectively installed at two ends of the two splicing mechanisms in the third direction;

[0030] Each of the splicing mechanisms and the two side panels together form a group of the positive pressure chamber group, or each of the splicing mechanisms, the two side panels and the cover plate together form a group of the positive pressure chamber group, the two splicing mechanisms, the cover plate, the bottom plate and the two side panels together form the negative pressure chamber, and the air suction hole is provided on the bottom plate;

[0031] The side plate is provided with an air inlet hole communicating with the positive pressure chamber, and the cover plate is provided with an air outlet hole communicating with the negative pressure chamber;

[0032] Wherein, the splicing mechanism is formed by splicing a plurality of structures.

[0033] In one embodiment, the splicing mechanism includes two splicing plates, the two splicing plates are spliced ​​in the second direction, and the two splicing plates, the cover plate and the two side plates together form the positive pressure chamber and the blowing chamber; or

[0034] The splicing mechanism includes a first splicing plate, a second splicing plate and a third splicing plate. The first splicing plate and the second splicing plate are spliced ​​in the second direction, and the third splicing plate and the first splicing plate and the second splicing plate are spliced ​​in the first direction. The first splicing plate, the second splicing plate, the cover plate and the two side plates together form the positive pressure chamber and the ultrasonic generating chamber, and the blowing air channel is arranged in the third splicing plate.

[0035] In one embodiment, the splicing mechanism includes a housing and at least two splicing plates;

[0036] The housing has an opening at one end close to the air intake hole in the first direction, and the splicing plate is arranged in the housing through the opening and spliced ​​in the first direction and / or the second direction;

[0037] The shell, the splicing plate and the two side plates together form the positive pressure chamber and the blowing chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 A cross-sectional view of an ultrasonic dust removal device provided in one embodiment of the present application;

[0039] Figure 2 for Figure 1 An enlarged view of point A of the ultrasonic dust removal device shown in FIG.

[0040] Figure 3 for Figure 1 A front view of the ultrasonic dust removal device shown in;

[0041] Figure 4 for Figure 1 A side view of the ultrasonic dust removal device shown in;

[0042] Figure 5 for Figure 1 A top view of the ultrasonic dust removal device shown in;

[0043] Figure 6 A cross-sectional view of an ultrasonic dust removal device provided in another embodiment of the present application;

[0044] Figure 7 A cross-sectional view of an ultrasonic dust removal device provided in yet another embodiment of the present application;

[0045] Figure 8 for Figure 7 A front view of the ultrasonic dust removal device shown in;

[0046] Fig. 9 for Figure 7 A side view of the ultrasonic dust removal device shown in;

[0047] Fig.10 for Figure 7 A top view of the ultrasonic dust removal device shown in FIG.

[0048] Description of reference numerals:

[0049] 100, ultrasonic dust removal device; 10, positive pressure chamber; 20, blowing chamber; 21, ultrasonic generating chamber; 22, blowing air channel; 30, negative pressure chamber; 40, suction hole; 50, first groove; 60, cover plate; 70, bottom plate; 80, splicing mechanism; 81, splicing plate; 81a, first splicing plate; 81b, second splicing plate; 81c, third splicing plate; 82, outer shell; 821, opening; 90, side plate; 110, air inlet; 120, air outlet; 130, second groove; 140, screw; 150, second plane; α, angle; Z, first direction; X, second direction; Y, third direction. DETAILED DESCRIPTION

[0050] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0051] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0052] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0053] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0054] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0055] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0056] See also Figure 1 In one embodiment of the present application, an ultrasonic dust removal device 100 is provided to generate ultrasonic waves to remove dust on a workpiece to be cleaned. Specifically, the ultrasonic dust removal device 100 is applied to a die-cutting machine or a winding machine to remove dust on a pole piece.

[0057] Of course, in some other embodiments, there is no limitation on the type of equipment used for the ultrasonic dust removal device 100, and there is no limitation on the type of parts to be cleaned, that is, the ultrasonic dust removal device 100 can also be used in other occasions to remove dust from other parts to be cleaned.

[0058] The following describes the present application in detail by taking the ultrasonic dust removal device 100 used for dust removal of a pole piece as an example. However, this description is only for example and does not limit the protection scope of the present application.

[0059] The ultrasonic dust removal device 100 has a positive pressure chamber 10 and a blowing chamber 20, and the blowing chamber 20 is arranged in sequence and connected with the positive pressure chamber 10 in the first direction Z. The blowing chamber 20 includes a connecting flow channel and at least two ultrasonic generating chambers 21. The ultrasonic generating chamber 21 is connected with the positive pressure chamber 10 through the connecting flow channel, and each ultrasonic generating chamber 21 is arranged in series in the first direction Z, and each adjacent two ultrasonic generating chambers 21 are connected through the connecting flow channel. Figure 1 and Figure 2 , wherein the connecting flow channel away from the positive pressure chamber 10 forms a blowing flow channel 22 capable of blowing air to the outside, that is, in the flow direction of the air flow, the connecting flow channel located at the most downstream is the blowing flow channel 22. The ultrasonic generating chamber 21 expands outwardly relative to the connecting flow channel in the second direction X, that is, the ultrasonic generating chamber 21 expands outwardly relative to the connecting flow channel to form an expanded portion (or expanded portion) of the blowing chamber 20.

[0060] In this way, the high-pressure gas in the positive pressure chamber 10 can flow through each ultrasonic generating chamber 21 in sequence through the connecting flow channel, and finally flow to the outside through the blowing flow channel 22. Furthermore, the ultrasonic dust removal device 100 is also provided with an air inlet 110, through which the high-pressure gas can enter the positive pressure chamber 10.

[0061] With the above arrangement, when a high-speed fluid passes through the high-pressure chamber, the self-excited oscillation of the fluid generates acoustic wave energy, and a phenomenon of shed vortex-acoustic wave-new shed vortex-new acoustic wave is generated in the flow field of the high-pressure chamber. Furthermore, by connecting a plurality of ultrasonic generating chambers 21 in series, an acoustic-fluid resonance phenomenon (i.e., a standing wave mode) will occur, thereby generating high-frequency noise and gas, with a frequency of more than 20kHz, which can be evaluated as ultrasonic waves. Finally, the gas is blown out through the blowing flow channel 22. When the gas is blown out of the blowing flow channel 22, the high-frequency vibrating gas will continue to vibrate and swirl on the end face of the ultrasonic dust removal device 100 in the first direction Z, thereby acting on the pole piece for dust removal.

[0062] Continue reading Figure 1 The ultrasonic dust removal device 100 also has a negative pressure chamber 30 and an air suction hole 40, and the negative pressure chamber 30 is connected to the outside through the air suction hole 40. The air suction hole 40 and the air blowing channel 22 are located at the same end of the ultrasonic dust removal device 100 in the first direction Z, so that when the air blowing channel 22 blows gas toward the pole piece, dust can be sucked into the negative pressure chamber 30 through the air inlet hole 110, thereby achieving the purpose of dust removal.

[0063] Furthermore, the ultrasonic dust removal device 100 also includes an air outlet 120 connected to the negative pressure chamber 30. The air outlet 120 is used to connect to the negative pressure pipe. The dust in the negative pressure chamber 30 can flow into the negative pressure pipe through the air outlet 120 to facilitate dust collection.

[0064] Continue reading Figure 2, the cavity wall of at least one ultrasonic generating cavity 21 included in the blowing cavity 20 is concave to form at least one first groove 50. The positive pressure cavity 10, the blowing cavity 20 and the first groove 50 all extend longitudinally along the third direction Y. The shape of the first cross section of the first groove 50 is arc-shaped, that is, the first groove 50 is an arc-shaped groove. Among them, the first direction Z and the second direction X are both parallel to the first cross section, that is, the straight line extending along the first direction Z and the straight line extending along the second direction X are both located in the first cross section. The first direction Z, the second direction X and the third direction Y intersect each other. Specifically, the first direction Z, the second direction X and the third direction Y are perpendicular to each other. In some specific embodiments, the ultrasonic dust removal device 100 is a hollow rectangular parallelepiped structure, and the first direction Z, the second direction X and the third direction Y are the height direction, the width direction and the length direction of the ultrasonic dust removal device 100, respectively. Of course, in some other specific embodiments, the shape of the ultrasonic dust removal device 100 is not limited.

[0065] In the ultrasonic dust removal device 100 provided in the embodiment of the present application, the arc groove in the ultrasonic generating chamber 21 facilitates the movement of sound waves, reduces energy (sound wave energy generated by agitation) loss, improves the audio frequency effect, and thus saves gas flow. That is, the arc groove is provided in the cavity wall of the ultrasonic generating chamber 21, which can further promote the generation of high-frequency noise and gas, thereby ensuring the stability of the dust removal effect, thereby improving the dust removal performance.

[0066] In some embodiments, continue to refer to Figure 1 The ultrasonic dust removal device 100 includes two positive pressure chamber groups, each positive pressure chamber group includes a positive pressure chamber 10 and a blowing chamber 20 that are connected to each other. The negative pressure chamber 30 is located between the two positive pressure chamber groups in the second direction X, and the suction hole 40 is located between the two blowing air channels 22 in the second direction X. In this way, the ultrasonic dust removal device 100 as a whole adopts the positive pressure chamber 10-negative pressure chamber 30-positive pressure chamber 10 design, thereby completing the target action of ultrasonic vibration-dust suction-ultrasonic vibration, and ensuring the dust removal effect.

[0067] Further reading Figure 1 , and see Figure 3-Figure 5 The ultrasonic dust removal device 100 includes a cover plate 60, a bottom plate 70, two splicing mechanisms 80 and two side plates 90. The two splicing mechanisms 80 are arranged at intervals in the second direction X, the cover plate 60 and the bottom plate 70 are respectively installed at both ends of the two splicing mechanisms 80 in the first direction Z, and the two side plates 90 are respectively installed at both ends of the two splicing mechanisms 80 in the third direction Y. Among them, the splicing mechanism 80 is formed by splicing multiple structures.

[0068] Optionally, each splicing mechanism 80 and two side panels 90 together form a positive pressure chamber group. Alternatively, each splicing mechanism 80, two side panels 90 and the cover plate 60 together form a positive pressure chamber group. The two splicing mechanisms 80, the cover plate 60, the bottom plate 70 and the two side panels 90 together form a negative pressure chamber 30, and the suction hole 40 is provided on the bottom plate 70. Specifically, the suction hole 40 includes a plurality of sub-holes provided on the bottom plate 70 to ensure the suction effect. An air inlet 110 connected to the positive pressure chamber 10 is provided on the side panel 90, and an air outlet 120 connected to the negative pressure chamber 30 is provided on the cover plate 60. In this way, the ultrasonic dust removal device 100 is formed by assembling a plurality of structures, which is convenient for disassembly and reduces maintenance costs.

[0069] It should be noted that the side panels 90 and the splicing mechanism 80 , the cover panel 60 and the splicing mechanism 80 , and the bottom panel 70 and the splicing mechanism 80 can be fixedly connected by screws 140 for easy disassembly.

[0070] In some specific embodiments, one side plate 90 is provided with an air inlet 110 respectively connected to the two positive pressure chambers 10. In other specific embodiments, both side plates 90 are provided with an air inlet 110 respectively connected to the two positive pressure chambers 10.

[0071] In some embodiments, continue to refer to Figure 1 The splicing mechanism 80 includes two splicing plates 81, the two splicing plates 81 are spliced ​​in the second direction X, and the two splicing plates 81, the cover plate 60 and the two side plates 90 together form a positive pressure chamber 10 and an air blowing chamber 20. Specifically, the screws 140 are inserted through the cover plate 60 and the splicing plates 81 along the first direction Z to fix the two, and the screws 140 are inserted through the side plates 90 and the splicing plates 81 along the third direction Y to fix the two. In this way, the ultrasonic dust removal device 100 only has two splicing plates 81 to form the positive pressure chamber 10, the air blowing chamber 20 and the negative pressure chamber 30, and the structure is simple.

[0072] In some other embodiments, see Figure 6, the splicing mechanism 80 includes three splicing plates 81, and the three splicing plates 81 are respectively a first splicing plate 81a, a second splicing plate 81b and a third splicing plate 81c. The first splicing plate 81a and the second splicing plate 81b are spliced ​​in the second direction X, and the third splicing plate 81c is spliced ​​with the first splicing plate 81a and the second splicing plate 81b in the first direction Z. The first splicing plate 81a, the second splicing plate 81b, the cover plate 60 and the two side plates 90 together form a positive pressure chamber 10 and an ultrasonic generating chamber 21, and the blowing air channel 22 is opened in the third splicing plate 81c. Specifically, the screws 140 are penetrated through the cover plate 60 and the first splicing plate 81a along the first direction Z, and penetrated through the cover plate 60 and the second splicing plate 81b along the first direction Z to fix them, and the screws 140 are penetrated through the side plates 90 and the splicing plates along the third direction Y to fix them. In this way, the blowing flow channel 22 is directly opened in the third splicing plate 81 c , which ensures the dimensional stability of the blowing flow channel 22 compared to the method of splicing two splicing plates 81 to form the blowing flow channel 22 .

[0073] In some other embodiments, see Figure 7-Figure 10 The splicing mechanism 80 includes a shell 82 and at least two splicing plates 81. The shell 82 has an opening 821 at one end close to the air intake hole 40 in the first direction Z. The splicing plate 81 is arranged in the shell 82 through the opening 821 and is spliced ​​in the first direction Z and / or the second direction X. The shell 82, the splicing plate 81 and the two side plates 90 together form a positive pressure chamber 10 and a blowing chamber 20. In this way, the screw 140 can be passed through the shell 82 and the splicing plate 81 along the second direction X. When the positive pressure chamber 10 is filled with high-pressure gas, the axial direction of the screw 140 extends along the second direction X, which can improve the anti-deformation ability to a certain extent, that is, it can reduce the tendency of the splicing plates 81 to separate from each other in the second direction X.

[0074] In some specific implementations, please refer to Figure 7 , the splicing mechanism 80 includes two splicing plates 81, which are arranged in the shell 82 through the opening 821 and spliced ​​in the second direction X. The shell 82, the two splicing plates 81 and the two side plates 90 together form the positive pressure chamber 10, and the two splicing plates 81 and the two side plates 90 together form the blowing chamber 20. In other specific embodiments, the splicing mechanism 80 includes three splicing plates 81, which are arranged in the shell 82 through the opening 821. Two of the splicing plates 81 are spliced ​​in the second direction X, and another splicing plate 81 is spliced ​​with the above-mentioned two splicing plates 81 in the first direction Z. The shell 82, the two splicing plates 81 spliced ​​in the second direction X and the two side plates 90 together form the positive pressure chamber 10 and the ultrasonic generating chamber 21, and the blowing air channel 22 is directly opened on another splicing plate 81.

[0075] In particular, the ultrasonic dust removal device 100 needs to ensure airtightness, and the gaps between the plates need to be coated with sealant or sealed with gaskets to ensure that the air pressure in the cavity is relatively stable, thereby achieving stable ultrasonic output and dust removal effect.

[0076] When in use, the ultrasonic dust removal device 100 provided in the embodiment of the present application can be hung upright (the air blowing channel 22 and the air suction hole 40 are facing downward) or upside down (the air blowing channel 22 and the air suction hole 40 are facing upward). Specifically, the bottom plate 70 needs to be kept within 5 mm of the pole piece to ensure the cleaning effect. More specifically, before the ultrasonic dust removal device 100 is used, the pole piece needs to be subjected to static elimination before ultrasonic dust removal.

[0077] The positive pressure chamber 10, the blowing chamber 20 and the first groove 50 have the same length extending along the third direction Y. At this time, the first groove 50 and the ultrasonic generating chamber 21 have the same length extending along the third direction Y. In this way, it is more conducive to the movement of sound waves, further reducing energy loss and improving the audio effect.

[0078] Further reading Figure 1 , Figure 6 and Figure 7 The negative pressure chamber 30 and the air suction hole 40 are arranged in sequence in the first direction Z, so that dust can flow into the negative pressure chamber 30 through the air suction hole 40. At the same time, the negative pressure chamber 30 and the positive pressure chamber 10 have the same extension length in the third direction Y, so that the volume of the negative pressure chamber 30 is larger, and more dust can flow into the negative pressure pipe through the negative pressure chamber 30.

[0079] In some embodiments, the shape of the third cross section of the cavity wall of the positive pressure cavity 10 is an arc shape. Specifically, the shapes of the two ends of the third cross section in the second direction X are arc shapes, and the size of the third cross section of the positive pressure cavity 10 in the second direction X gradually decreases from the end away from the blowing cavity 20 to the end close to the blowing cavity 20. Among them, the first direction Z and the second direction X are parallel to the third cross section. The cavity wall of the positive pressure cavity 10 is concave to form a second groove 130 extending along the second direction X. When gas (such as compressed air) is filled into the positive pressure cavity 10, the volume and density of the gas in the positive pressure cavity 10 will not only increase, but also the gas will exert pressure on the cavity wall of the positive pressure cavity 10, so that the cavity wall of the positive pressure cavity 10 has a tendency to expand outward, thereby increasing the load on the structure forming the positive pressure cavity 10, resulting in reduced reliability of the device. In addition, when the positive pressure chamber 10 is formed by splicing in the second direction X, after the splicing plate 81 produces the above-mentioned movement tendency, due to the existence of the cover plate 60, the slits (i.e., the blowing flow channel 22) formed at the lower part of the positive pressure chamber 10 will have a movement tendency to approach each other, causing the slits to become narrower and unable to guarantee the theoretical parameters required by the design.

[0080] When the shape of the third cross section of the positive pressure chamber 10 is designed to be an arc shape (that is, the cavity wall of the positive pressure chamber 10 is an arc surface) and a second groove 130 is provided on the cavity wall, the gas pressure can be dispersed, thereby optimizing the load borne by the splicing plate 81, reducing the load of the screws fixing the cover plate 60 and the splicing plate 81, improving the structural reliability, and relatively ensuring the size parameters of the lower slit. In addition, the cavity wall of the positive pressure chamber 10 is designed to be an arc surface, which reduces the air pressure loss to a certain extent compared with the rectangular cavity, thereby saving fluid flow and reducing the load of the plant.

[0081] In some embodiments, two second grooves 130 are provided in each positive pressure chamber 10, and the two second grooves 130 are respectively provided on two different splicing plates 81 and are opposite to each other in the second direction X. It is conceivable that in other embodiments, the number and specific positions of the second grooves 130 are not limited. For example, the number of the second grooves 130 in each positive pressure chamber 10 can be set to one, three, or more than three, and all the second grooves 130 can be provided on the same splicing plate 81.

[0082] Continue reading Figure 2 , the shape of the second cross section of the ultrasonic generating cavity 21 is a rectangle, the length direction of the rectangle is parallel to the second direction X, and the rectangle has rounded corners to ensure the ultrasonic generating effect. Among them, the first direction Z and the second direction X are parallel to the second cross section. That is, the first cross section, the second cross section and the third cross section are cross sections parallel to each other. It should be understood that in some other embodiments, the shape of the second cross section of the ultrasonic generating cavity 21 is not limited, such as it can also be circular, triangular, etc.

[0083] Specifically, the radius of the rounded corner is 0.2 mm to 0.8 mm. In this way, when the first groove 50 is provided in the ultrasonic generating chamber 21, the shape of the ultrasonic generating chamber 21 can be approximately circular, which is conducive to the movement of sound waves, reduces energy (sound wave energy generated by agitation) loss, improves the audio effect, and thus saves gas flow.

[0084] The distance between each two adjacent ultrasonic generating cavities 21 in the first direction Z is 2mm-3mm. In the first direction Z, the size of the blowing channel 22 is 3mm-5mm; in the second direction X, the size of the blowing channel 22 is 0.1mm-0.3mm. Such a design can ensure a better ultrasonic generating effect.

[0085] Further, the ratio of the size of the second cross section of the ultrasonic generating cavity 21 in the second direction X to the size in the first direction Z is 1-2. The size of the second cross section of the ultrasonic generating cavity 21 in the first direction Z is 2mm-3mm. Such a design can ensure a better ultrasonic generating effect.

[0086] It should be noted that the dimensions of the second cross section of the ultrasonic generating cavity 21 in the second direction X and the first direction Z are both the maximum dimensions in the directions. In some specific embodiments, when the shape of the second cross section of the ultrasonic generating cavity 21 is a rectangle, its dimension in the first direction Z is the width dimension of the rectangle, and its dimension in the second direction X is the length dimension of the rectangle. At this time, the ratio of the dimension of the second cross section of the ultrasonic generating cavity 21 in the length direction to the dimension in the width direction is 1-2, and the dimension in the width direction is 2mm-3mm, then the dimension in the length direction is 2mm-6mm.

[0087] In some embodiments, continue to refer to Figure 1 and Figure 2 The walls of all ultrasonic generating cavities 21 included in the blowing cavity 20 are concave to form a first groove 50. Specifically, the wall of each ultrasonic generating cavity 21 is concave to form at least two mutually spaced first grooves 50. In this way, when the gas flows through each ultrasonic generating cavity 21, the arc grooves therein can help the sound wave to move and reduce energy loss; at the same time, the multiple arc grooves in each ultrasonic generating cavity 21 interact with each other, so that the sound wave energy loss is smaller and the sound wave effect is better, which greatly saves the gas flow and ensures the dust removal effect.

[0088] In some specific implementations, please refer to Figure 2 , the blowing chamber 20 includes two ultrasonic generating chambers 21 connected in series, and each ultrasonic generating chamber 21 is provided with four first grooves 50. Among them, two first grooves 50 are provided on the top cavity wall of the ultrasonic generating chamber 21 in the first direction Z, and two first grooves 50 are provided on the bottom cavity wall of the ultrasonic generating chamber 21 in the first direction Z, and the upper and lower first grooves 50 are provided opposite to each other. Of course, in some other embodiments, the number of ultrasonic generating chambers 21 included in the blowing chamber 20 is not limited, and at the same time, the number of first grooves 50 in each ultrasonic generating chamber 21 is also not limited. For example, the blowing chamber 20 can also be provided to include 3, 4 or more than 4 ultrasonic generating chambers 21 connected in series, or each ultrasonic generating chamber 21 can be provided to have 1, 2, 3 or more than 4 first grooves 50.

[0089] Optionally, the first cross section of the first groove 50 is in the shape of a semicircle, and the radius of the semicircle is 0.2 mm-0.8 mm.

[0090] Continue reading Figure 2The blowing channel 22 extends in an arc shape along the first direction Z, and the end of the blowing channel 22 away from the ultrasonic generating cavity 21 deflects toward the direction close to the suction hole 40. The angle α between the tangent second plane 150 tangent to the arc formed by the blowing channel 22 is 45°-90°. The second plane 150 is formed by the intersection of the second direction X and the third direction Y.

[0091] When the gas is blown out of the blowing flow channel 22 (also called the slit), the high-frequency vibrating gas will continue to vibrate and swirl on the end face of the blowing port of the blowing flow channel 22. In terms of parameters, when the slit tangent angle is lower than 45°, the gas flow will be hindered, thereby affecting the ultrasonic effect of the gas on the surface of the pole piece; and when the slit tangent angle is higher than 90°, serious escape will occur. By setting the slit tangent angle to 45°-90°, the gas escape phenomenon can be reduced. At the same time, impurities such as dust will tend to move toward the suction hole 40, thereby improving the collection rate of impurities, making it difficult for impurities to splash from the pole piece surface into the equipment, and reducing the possibility of secondary pollution.

[0092] In some specific embodiments, the end surface where the air suction hole 40 or the air blowing port is located is parallel to the second plane 150, and the slit tangent angle is 60°. It is understandable that in some other embodiments, the slit tangent angle is not specifically limited, such as 65°, 70°, 75°, 80°, etc.

[0093] It should be noted here that the cross-sectional design of the ultrasonic chamber 21 and the first groove 50 and the selection of each size are obtained through the experimental design analysis method (DOE). The specific process of the experimental design analysis method includes DOE planning, simulation analysis, data processing, mathematical modeling, mathematical model optimization, parameter optimization, theoretical optimal solution output, structural design, and prototype verification. Through the mutual coordination of the above-mentioned various sizes, it is possible to facilitate the stable output of ultrasonic waves, so that impurities such as dust move toward the direction of the air suction hole 40 to ensure the dust removal effect. It is conceivable that in some other embodiments, there is no limitation on the cross-sectional shape of the ultrasonic chamber 21 and the first groove 50, and there is no limitation on the selection of each size, as long as the ultrasonic dust removal device 100 can stably output ultrasonic waves.

[0094] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0095] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. An ultrasonic dust removal device, characterized in that: include: A positive pressure chamber (10) and a blowing chamber (20) are arranged in sequence in a first direction (Z), the blowing chamber (20) comprising a connecting flow channel and at least two ultrasonic generating chambers (21) connected in series through the connecting flow channel, the blowing chamber (20) is connected to the positive pressure chamber (10) through the connecting flow channel, and the connecting flow channel away from the positive pressure chamber (10) forms a blowing flow channel (22) capable of blowing air to the outside; the ultrasonic generating chamber (21) expands outward relative to the connecting flow channel in a second direction (X); A negative pressure chamber (30) and an air suction hole (40) that are interconnected, wherein the air suction hole (40) and the air blowing channel (22) are located at the same end of the ultrasonic dust removal device in the first direction (Z); The cavity wall of at least one of the ultrasonic generating cavities (21) included in the blowing cavity (20) is concave to form at least one first groove (50); the positive pressure cavity (10), the blowing cavity (20) and the first groove (50) all extend along a third direction (Y); the first cross section of the first groove (50) is in the shape of an arc; the first direction (Z), the second direction (X) and the third direction (Y) intersect each other, and the first direction (Z) and the second direction (X) are both parallel to the first cross section.

2. The ultrasonic dust removal device according to claim 1, characterized in that: The cavity walls of all the ultrasonic generating cavities (21) included in the blowing cavity (20) are concave to form at least one of the first grooves (50); and / or The cavity wall of the ultrasonic generating cavity (21) is concave to form at least two first grooves (50) spaced apart from each other.

3. The ultrasonic dust removal device according to claim 1, characterized in that: The shape of the first cross section is semicircular, and the radius of the semicircle is 0.2 mm-0.8 mm.

4. The ultrasonic dust removal device according to claim 1, characterized in that: In the first direction (Z), the distance between each two adjacent ultrasonic generating cavities (21) is 2 mm to 3 mm; and / or In the first direction (Z), the size of the blowing channel (22) is 3 mm-5 mm; in the second direction (X), the size of the blowing channel (22) is 0.1 mm-0.3 mm.

5. The ultrasonic dust removal device according to claim 1, characterized in that: The second cross section of the ultrasonic generating cavity (21) is in the shape of a rectangle, the length direction of the rectangle is parallel to the second direction (X), and the rectangle has rounded corners; the first direction (Z) and the second direction (X) are both parallel to the second cross section.

6. The ultrasonic dust removal device according to claim 5, characterized in that: The chamfer radius of the rounded corner is 0.2mm-0.8mm.

7. The ultrasonic dust removal device according to claim 1, characterized in that: The ratio of the size of the second cross section of the ultrasonic generating cavity (21) in the second direction (X) to the size in the first direction (Z) is 1-2; and / or The size of the second cross section of the ultrasonic generating cavity (21) in the first direction (Z) is 2 mm to 3 mm; The first direction (Z) and the second direction (X) are both parallel to the second cross section.

8. The ultrasonic dust removal device according to claim 1, characterized in that: The blowing air channel (22) extends in an arc shape along the first direction (Z), and an end of the blowing air channel (22) away from the ultrasonic generating cavity (21) is bent toward a direction close to the air suction hole (40); The angle α between the tangent line formed by the arc formed by the blowing air channel (22) and the second plane is 45°-90°; the second plane is formed by the intersection of the second direction (X) and the third direction (Y).

9. The ultrasonic dust removal device according to claim 1, characterized in that: The shape of the third cross section of the cavity wall of the positive pressure cavity (10) is an arc shape, and the dimension of the third cross section of the positive pressure cavity (10) in the second direction gradually decreases from one end away from the blowing cavity (20) to the other end close to the blowing cavity (20); The cavity wall of the positive pressure cavity (10) is concave to form a second groove (130) extending along the third direction (Y); The first direction (Z) and the second direction (X) are both parallel to the third section.

10. The ultrasonic dust removal device according to any one of claims 1 to 9, characterized in that: The ultrasonic dust removal device comprises two groups of positive pressure chamber groups, each group of the positive pressure chamber groups comprises a positive pressure chamber (10) and a blowing chamber (20) which are interconnected; The negative pressure chamber (30) is located between the two groups of positive pressure chambers in the second direction (X), and the air suction hole (40) is located between the two blowing air channels (22) in the second direction (X).

11. The ultrasonic dust removal device according to claim 10, characterized in that: The ultrasonic dust removal device comprises a cover plate (60), a bottom plate (70), two splicing mechanisms (80) and two side plates (90); The two splicing mechanisms (80) are arranged at intervals in the second direction (X), the cover plate (60) and the bottom plate (70) are respectively installed at two ends of the two splicing mechanisms (80) in the first direction (Z), and the two side plates (90) are respectively installed at two ends of the two splicing mechanisms (80) in the third direction (Y); Each of the splicing mechanisms (80) and the two side plates (90) together form a group of the positive pressure chamber group, or each of the splicing mechanisms (80), the two side plates (90) and the cover plate (60) together form a group of the positive pressure chamber group, the two splicing mechanisms (80), the cover plate (60), the bottom plate (70) and the two side plates (90) together form the negative pressure chamber (30), and the air suction hole (40) is provided on the bottom plate (70); The side plate (90) is provided with an air inlet (110) communicating with the positive pressure chamber (10), and the cover plate (60) is provided with an air outlet (120) communicating with the negative pressure chamber (30); Wherein, the splicing mechanism (80) is formed by splicing a plurality of structures.

12. The ultrasonic dust removal device according to claim 11, characterized in that: The splicing mechanism (80) comprises two splicing plates (81), the two splicing plates (81) are spliced ​​in the second direction (X), and the two splicing plates (81), the cover plate (60) and the two side plates (90) together form the positive pressure chamber (10) and the blowing chamber (20); or The splicing mechanism (80) comprises a first splicing plate (81a), a second splicing plate (81b) and a third splicing plate (81c); the first splicing plate (81a) and the second splicing plate (81b) are spliced ​​in the second direction (X); the third splicing plate (81c) and the first splicing plate (81a) and the second splicing plate (81b) are spliced ​​in the first direction (Z); the first splicing plate (81a), the second splicing plate (81b), the cover plate (60) and the two side plates (90) together form the positive pressure chamber (10) and the ultrasonic generating chamber (21); the blowing flow channel (22) is arranged in the third splicing plate (81c).

13. The ultrasonic dust removal device according to claim 11, characterized in that: The splicing mechanism (80) comprises a shell (82) and at least two splicing plates (81); The outer shell (82) has an opening (821) at one end close to the air intake hole (40) in the first direction (Z), and the splicing plate (81) is arranged in the outer shell (82) through the opening (821) and is spliced ​​in the first direction (Z) and / or the second direction (X); The outer shell (82), the splicing plate (81) and the two side plates (90) together form the positive pressure chamber (10) and the blowing chamber (20).

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