PVD (Physical Vapor Deposition) coating device

Abstract

A PVD film coating device is used for coating a product and comprises a supporting assembly, a film coating assembly and a film coating assembly, the supporting assembly comprises a base, a supporting platform and a driving supporting rod, the supporting platform is rotationally connected with the base, and the driving supporting rod is arranged in the middle of the base; the lifting assembly comprises a first driving gear, a second driving gear, a first one-way flywheel, a second one-way flywheel, a flywheel frame and a lifting rod, the flywheel frame is connected to the base, the first one-way flywheel and the second one-way flywheel are arranged in the flywheel frame, and the first driving gear and the second driving gear are both connected to the driving supporting rod; the lifting rod is arranged in the flywheel frame and is in threaded connection with the first one-way flywheel and the second one-way flywheel, and the lifting rod is further connected to the supporting platform; the positioning jig is arranged on the driving supporting rod in a sleeving mode, attached to the supporting platform and used for positioning the product. The PVD coating device can improve the uniformity of the film thickness at different positions when a product is coated.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum physical vapor deposition, and in particular to a PVD coating device. Background Art

[0002] In the process of coating products using vacuum physical vapor deposition (PVD) technology, it is necessary to use a fixture to place the product in a PVD furnace and then coat the product. However, when the product has a curved or irregular surface structure, the distance and angle between each part of these curved surfaces and the target material are different, which can easily lead to uneven thickness of the coating and even color differences. How to improve the thickness uniformity of vacuum physical vapor deposition coating on curved and irregular surfaces is a problem that technicians in this field need to solve urgently. Utility Model Content

[0003] In view of the above, it is necessary to propose a PVD coating device that can improve the uniformity of film thickness at different positions during product coating.

[0004] The embodiment of the present application provides a PVD coating device for coating products, comprising: a support assembly, comprising a base, a support platform and an active support rod, the support platform is rotatably connected to the base, the active support rod passes through the support platform and is arranged in the middle of the base; a lifting assembly, comprising a first active gear, a second active gear, a first one-way flywheel, a second one-way flywheel, a flywheel frame and a lifting rod, the flywheel frame is connected to the base and is arranged corresponding to an end of the support platform away from the base, the first one-way flywheel and the second one-way flywheel are arranged in the flywheel frame at intervals, the first active gear and the second active gear are both connected to the active support rod and are respectively meshed with the first one-way flywheel and the second one-way flywheel, one end of the lifting rod is slidably arranged in the flywheel frame and meshed with the first one-way flywheel and the second one-way flywheel The flywheel is threadedly connected, and the other end of the lifting rod is movably connected to the supporting platform; and a positioning fixture is sleeved on the active support rod and fits the supporting platform for positioning the product; wherein, the active support rod drives the first one-way flywheel and the second one-way flywheel to rotate through the first driving gear and the second driving gear, and when the active support rod rotates counterclockwise, the first one-way flywheel and the second one-way flywheel rotate clockwise, the first one-way flywheel guides the lifting rod to descend through the thread, the second one-way flywheel rotates idly, and then guides the supporting platform to rotate downward, and when the active support rod rotates clockwise, the first one-way flywheel and the second one-way flywheel rotate counterclockwise, the first one-way flywheel rotates idly, and the second one-way flywheel guides the lifting rod to rise through the thread, and then guides the supporting platform to rotate upward.

[0005] In the above-mentioned PVD coating device, when the active support rod rotates in the counterclockwise direction, it drives the first active gear and the second active gear to rotate counterclockwise, and then drives the first one-way flywheel and the second one-way flywheel to rotate clockwise. At this time, the inner shaft of the first one-way flywheel rotates synchronously with the first one-way flywheel, and then the first one-way flywheel guides the lifting rod to descend through the thread. At this time, the second one-way flywheel rotates idly, and the lifting rod pulls the support platform to rotate downward. When the active support rod rotates in the clockwise direction, it drives the first active gear and the second active gear to rotate clockwise, and then drives the first one-way flywheel and the second one-way flywheel to rotate counterclockwise. The inner shaft of the second one-way flywheel rotates synchronously with the second one-way flywheel, and then the second one-way flywheel guides the lifting rod to rise through the thread. At this time, the first one-way flywheel rotates idly, and the lifting rod pulls the support platform to rotate upward. The above-mentioned PVD coating device positions the product through a positioning fixture, and the positioning fixture is attached to the support platform. With the support of the support platform, the product is driven to reciprocate on the vertical plane, thereby improving the freedom of the product during coating, and thus improving the thickness uniformity of the product during coating.

[0006] In some embodiments, the lifting rod includes a first idle section, a threaded section, and a second idle section arranged in sequence; when the first one-way flywheel and the second one-way flywheel rotate clockwise, the first one-way flywheel guides the lifting rod to descend until the first idle section corresponds to the first one-way flywheel, thereby stopping the lifting rod from descending; when the first one-way flywheel and the second one-way flywheel rotate counterclockwise, the second one-way flywheel guides the lifting rod to rise until the second idle section corresponds to the second one-way flywheel, thereby stopping the lifting rod from rising.

[0007] In some embodiments, one end of the lifting rod connected to the support platform is set to a T shape, and the support platform is provided with a waist-shaped groove corresponding to the lifting rod. The end of the lifting rod set to a T shape is movably inserted in the waist-shaped groove, so that when the lifting rod moves up and down, the support platform is pulled to rotate by cooperating with the waist-shaped groove through the end of the lifting rod set to a T shape.

[0008] In some embodiments, the positioning fixture includes a rotating assembly, which includes a guide seat and a driven support rod. The guide seat is rotatably disposed on a support platform and is provided with multiple first universal joints. The active support rod and the driven support rod are rotatably connected to the guide seat through different first universal joints.

[0009] In some embodiments, the positioning fixture also includes a fixing component for fixing the product, the fixing component is provided with a plurality of second universal joints, and the plurality of second universal joints are respectively connected to the active support rod and the driven support rod, and when the active support rod rotates and drives the guide seat to rotate in a plane parallel to the support platform, the fixing component is driven by the active support rod to rotate.

[0010] In some embodiments, the first universal joint and the second universal joint each include a fixed sleeve, a first sleeve rotatably mounted on the outer peripheral side of the fixed sleeve, and a second sleeve rotatably mounted on the outer peripheral side of the first sleeve, and the rotation axis of the first sleeve is perpendicular to the rotation axis of the second sleeve.

[0011] In some embodiments, heights of the first sleeve and the second sleeve are both lower than a height of the fixing sleeve.

[0012] In some embodiments, the guide seat includes a main body, the first universal joint is embedded in the main body, and the second sleeve of the first universal joint is connected to the main body.

[0013] In some embodiments, the fixing assembly includes a base plate and a cover plate connected to the base plate, the cover plate is provided with a pressing portion for pressing and fixing the product to the base plate; the second universal joint is connected to the base plate.

[0014] In some embodiments, a buckle is provided on a side of the bottom plate facing the cover plate, and a slot for engaging with the buckle is provided on a side of the cover plate facing the bottom plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A schematic diagram of the structure of a PVD coating device provided in an embodiment of the present application.

[0016] Figure 2 for Figure 1 The schematic diagram of the exploded structure of the support assembly and the lifting assembly in the PVD coating device is shown.

[0017] Figure 3 for Figure 1 The schematic diagram of the structure of the matching state of the active support rod, the first active gear, the second active gear, the first one-way flywheel, the second one-way flywheel and the lifting rod in the PVD coating device shown.

[0018] Figure 4 for Figure 3 The schematic diagram shows the state when the lifting rod is lowered to the first idling section and corresponds to the first one-way flywheel.

[0019] Figure 5 for Figure 3The schematic diagram shows the state when the lifting rod rises to the second idling section and corresponds to the second one-way flywheel.

[0020] Figure 6 for Figure 1 The schematic diagram of the structure of the positioning fixture in the PVD coating device is shown.

[0021] Figure 7 A schematic structural diagram of the first universal joint and the second universal joint in the PVD coating device provided in an embodiment of the present application.

[0022] Figure 8 for Figure 1 The schematic diagram of the state of the active support rod in the PVD coating device after rotating a certain angle is shown.

[0023] Main component symbols

[0024] PVD coating device 100

[0025] Support assembly 10

[0026] Base 11

[0027] Support platform 12

[0028] Waist-shaped groove 121

[0029] Active support rod 13

[0030] Lifting assembly 20

[0031] The first driving gear 21

[0032] The second driving gear 22

[0033] First unidirectional flywheel 23

[0034] The second one-way flywheel 24

[0035] External gear 25

[0036] Inner shaft 26

[0037] Flywheel frame 27

[0038] Lifting rod 28

[0039] First idling section 281

[0040] Threaded segment 282

[0041] Second idling section 283

[0042] Positioning fixture 30

[0043] Rotating assembly 31

[0044] Guide seat 311

[0045] Main body 3111

[0046] Driven support rod 312

[0047] First Universal Joint 313

[0048] Fixing assembly 32

[0049] Second universal joint 321

[0050] Bottom plate 322

[0051] Buckle 3221

[0052] Cover 323

[0053] Card slot 3231

[0054] Fixed sleeve 33

[0055] First sleeve 34

[0056] Second sleeve 35

[0057] Product 200 DETAILED DESCRIPTION

[0058] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0059] In the description of the present application, it should be understood that the terms indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, in the description of the present application, it should be noted that the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0060] In the description of the present application, it should be noted that, unless otherwise clearly specified and limited, the term "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication, it can be a direct connection, or it can be indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances. Some embodiments of the present application will be described in detail below in conjunction with the accompanying drawings.

[0061] The embodiments of the present application are further described below in conjunction with the accompanying drawings.

[0062] See also Figure 1 The embodiment of the present application provides a PVD coating device 100, which is used to coat a product 200, wherein the product 200 is an annular shell with a curved or irregular surface, a mobile phone component, a watch component, etc. The PVD coating device 100 includes a support component 10, a lifting component 20 and a positioning fixture 30.

[0063] Specifically, see Figure 1 and Figure 2 The support assembly 10 includes a base 11, a support platform 12 and an active support rod 13. The support platform 12 is rotatably connected to the base 11. The active support rod 13 passes through the support platform 12 and is arranged in the middle of the base 11. The base 11 is used to be fixedly connected to an external device (not shown) such as a PVD coating chamber to improve the support stability. The support platform 12 can be a plate-like structure. It can be understood that the middle part of the support platform 12 can be a hollow structure to avoid the active support rod 13 and avoid the support platform 12 and the active support rod 13 from abutting against each other during rotation. The end of the active support rod 13 away from the base 11 is connected to an external device so that it can rotate clockwise or counterclockwise under the drive of the external device.

[0064] See also Figure 1 , Figure 2 and Figure 3 The lifting assembly 20 includes a first driving gear 21, a second driving gear 22, a first one-way flywheel 23, a second one-way flywheel 24, a flywheel frame 27 and a lifting rod 28. The flywheel frame 27 is connected to the base 11 and is arranged corresponding to one end of the support platform 12 on the principle of the base 11. The first one-way flywheel 23 and the second one-way flywheel 24 are arranged in the flywheel frame 27 at intervals. The first driving gear 21 and the second driving gear 22 are both connected to the active support rod 13 and are respectively meshed with the first one-way flywheel 23 and the second one-way flywheel 24. One end of the lifting rod 28 is slidably arranged in the flywheel frame 27 and is threadedly connected to the first one-way flywheel 23 and the second one-way flywheel 24. The other end of the lifting rod 28 is movably connected to the support platform 12.

[0065] The first one-way flywheel 23 and the second one-way flywheel 24 both include an outer gear 25 and an inner shaft 26. The outer gear 25 and the inner shaft 26 move synchronously in one direction, that is, when the outer gear 25 rotates in the clockwise direction, the inner shaft 26 moves synchronously with the outer gear 25 in the clockwise direction, and when the outer gear 25 rotates in the counterclockwise direction, the inner shaft 26 and the outer gear 25 slide relative to each other, which is referred to as idling below. Alternatively, when the outer gear 25 rotates in the counterclockwise direction, the inner shaft 26 and the outer gear 25 move synchronously in the counterclockwise direction, and when the outer gear 25 rotates in the clockwise direction, the inner shaft 26 and the outer gear 25 slide relative to each other, which is referred to as idling below.

[0066] It can be understood that the lifting rod 28 is provided with threads, and the inner shafts 26 of the first one-way flywheel 23 and the second one-way flywheel 24 are also provided with threads that match the lifting rod 28, so that when the inner shaft 26 rotates, the lifting rod 28 can be driven to move through the threads.

[0067] See also Figure 1 and Figure 6 , the positioning jig 30 is sleeved on the active support rod 13 and fits the support platform 12, and is used to position the product 200. It can be understood that the positioning jig 30 can be fixedly connected to the support platform 12, and slidably connected to the active support rod 13, thereby driving the product 200 to reciprocate only with the support platform 12 on the vertical plane, and not with the active support rod 13. Alternatively, the positioning jig 30 is fixedly connected to the active support rod 13, and is slidably set on the support platform 12, so that the positioning jig 30 can rotate synchronously with the active support rod 13, thereby further improving the degree of freedom of the product 200 during coating and the uniformity of coating.

[0068] The active support rod 13 drives the first one-way flywheel 23 and the second one-way flywheel 24 to rotate through the first active gear 21 and the second active gear 22. When the active support rod 13 rotates counterclockwise, the first one-way flywheel 23 and the second one-way flywheel 24 rotate clockwise, the first one-way flywheel 23 guides the lifting rod 28 to descend through the thread, and the second one-way flywheel 24 rotates idly, thereby guiding the supporting platform 12 to rotate downward. When the active support rod 13 rotates clockwise, the first one-way flywheel 23 and the second one-way flywheel 24 rotate counterclockwise, the first one-way flywheel 23 rotates idly, and the second one-way flywheel 24 guides the lifting rod 28 to rise through the thread, thereby guiding the supporting platform 12 to rotate upward.

[0069] When the active support rod 13 in the PVD coating device 100 provided in the embodiment of the present application rotates in the counterclockwise direction, it drives the first active gear 21 and the second active gear 22 to rotate counterclockwise, and then drives the first one-way flywheel 23 and the second one-way flywheel 24 to rotate clockwise. At this time, the inner shaft 26 of the first one-way flywheel 23 rotates synchronously with the first one-way flywheel 23, and then the first one-way flywheel 23 is guided by the thread to lower the lifting rod 28. At this time, the second one-way flywheel 24 is idle, and the lifting rod 28 pulls the support platform 12 to rotate downward. When the active support rod 13 rotates in the clockwise direction, it drives the first active gear 21 and the second active gear 22 to rotate clockwise, and then drives the first one-way flywheel 23 and the second one-way flywheel 24 to rotate counterclockwise. The inner shaft 26 of the second one-way flywheel 24 rotates synchronously with the second one-way flywheel 24, and then the second one-way flywheel 24 is guided by the thread to rise the lifting rod 28. At this time, the first one-way flywheel 23 is idle, and the lifting rod 28 pulls the support platform 12 to rotate upward. The above-mentioned PVD coating device 100 positions the product 200 through the positioning fixture 30. The positioning fixture 30 is attached to the support platform 12, and drives the product 200 to reciprocate on the vertical plane under the support of the support platform 12, thereby improving the freedom of the product 200 during coating, and further improving the thickness uniformity of the product 200 during coating.

[0070] See also Figure 2 In some embodiments, the lifting rod 28 includes a first idle section 281, a threaded section 282, and a second idle section 283 which are sequentially arranged. Figure 4 When the first one-way flywheel 23 and the second one-way flywheel 24 rotate clockwise, the first one-way flywheel 23 guides the lifting rod 28 to descend until the first idle section 281 corresponds to the first one-way flywheel 23, thereby stopping the lifting rod 28 from descending. Figure 5 When the first one-way flywheel 23 and the second one-way flywheel 24 rotate counterclockwise, the second one-way flywheel 24 guides the lifting rod 28 to rise until the second idle section 283 corresponds to the second one-way flywheel 24, thereby stopping the lifting rod 28 from rising. The first idle section 281 and the second idle section 283 are not provided with threads, and their diameters are not greater than the minor diameter of the threaded section 282.

[0071] It can be understood that when the lifting rod 28 needs to be lowered, the active support rod 13 drives the first active gear 21 and the second active gear 22 to rotate counterclockwise, and the first one-way flywheel 23 and the second one-way flywheel 24 rotate clockwise. At this time, the inner shaft 26 of the first one-way flywheel 23 moves synchronously with the outer gear 25, and the first one-way flywheel 23 guides the lifting rod 28 to descend through the threaded section 282 until the first idle section 281 completely moves into the inner shaft 26 of the first one-way flywheel 23. At this time, the first one-way flywheel 23 no longer drives the lifting rod 28 to move, and the lifting rod 28 is connected to the second one-way flywheel 24, but at this time, the inner shaft 26 of the second one-way flywheel 24 does not move synchronously with the outer gear 25, that is, it idles, and the second one-way flywheel 24 does not drive the lifting rod 28 to move downward. At this time, the active support rod 13 can continue to rotate in the counterclockwise direction, and the lifting rod 28 does not drive the support platform 12 to rotate.

[0072] When the lifting rod 28 needs to be raised, the active support rod 13 drives the first active gear 21 and the second active gear 22 to rotate clockwise, and the first one-way flywheel 23 and the second one-way flywheel 24 rotate counterclockwise. At this time, the inner shaft 26 of the second one-way flywheel 24 moves synchronously with the outer gear 25, and the second one-way flywheel 24 guides the lifting rod 28 to rise through the threaded section 282 until the second idle section 283 completely moves into the inner shaft 26 of the second one-way flywheel 24. At this time, the second one-way flywheel 24 no longer drives the lifting rod 28 to move, and the lifting rod 28 is connected to the first one-way flywheel 23, but at this time, the inner shaft 26 of the first one-way flywheel 23 and the outer gear 25 do not move synchronously, that is, they are idle, and the first one-way flywheel 23 does not drive the lifting rod 28 to move upward. At this time, the active support rod 13 can continue to rotate in the clockwise direction, and the lifting rod 28 does not drive the support platform 12 to rotate.

[0073] See also Figure 1 and Figure 2 In some embodiments, one end of the lifting rod 28 connected to the support platform 12 is set in a T-shape, and the support platform 12 is provided with a waist-shaped groove 121 corresponding to the lifting rod 28. One end of the lifting rod 28 set in a T-shape is movably inserted in the waist-shaped groove 121, so that when the lifting rod 28 is lifted and lowered, the one end of the lifting rod 28 set in a T-shape cooperates with the waist-shaped groove 121 to pull the support platform 12 to rotate. It can be understood that two waist-shaped grooves 121 on the support platform 12 can be provided to accommodate the T-shaped structure of the lifting rod 28. The lifting rod 28 moves only in the vertical direction under the drive of the first one-way flywheel 23 and the second one-way flywheel 24. Therefore, by providing the waist-shaped groove 121, it can be prevented that the support platform 12 pushes the lifting rod 28 to deviate when rotating.

[0074] See also Figure 1 and Figure 6In some embodiments, the positioning fixture 30 includes a rotating assembly 31, and the rotating assembly 31 includes a guide seat 311 and a driven support rod 312. The guide seat 311 is rotatably disposed on the support platform 12 and is provided with a plurality of first universal joints 313. The active support rod 13 and the driven support rod 312 are rotatably connected to the guide seat 311 through different first universal joints 313. The active support rod 13 is connected to the guide seat 311 through one of the first universal joints 313. During the rotation of the active support rod 13, the guide seat 311 can be driven to rotate through the first universal joint 313. The extension direction of the driven support rod 312 is the same as the extension direction of the active support rod 13, and the driven support rod 312 is connected to the guide seat 311 through another first universal joint 313, so that the driven support rod 312 rotates with the guide seat 311.

[0075] Please continue reading Figure 1 and Figure 6 In some embodiments, the positioning fixture 30 further includes a fixing assembly 32 for fixing the product 200. The fixing assembly 32 is provided with a plurality of second universal joints 321. The plurality of second universal joints 321 are respectively connected to the active support rod 13 and the driven support rod 312. When the active support rod 13 rotates and drives the guide seat 311 to rotate in a plane parallel to the support platform 12, the fixing assembly 32 is driven by the active support rod 13 to rotate. The active support rod 13 is connected to the fixing assembly 32 through a second universal joint 321. During the rotation of the active support rod 13, the fixing assembly 32 can be driven to rotate through the second universal joint 321. The driven support rod 312 is connected to the fixing assembly 32 through another second universal joint 321, so that the position stability of the fixing assembly 32 during rotation can be improved.

[0076] It is understood that in the actual vacuum physical vapor deposition coating process, multiple fixing components 32 are generally connected to the active support rod 13, and the multiple fixing components 32 are sequentially stacked on the guide seat 311. Of course, according to actual conditions, only one or two fixing components 32 can be connected to the active support rod 13.

[0077] See also Figure 6 and Figure 7In some embodiments, the first universal joint 313 and the second universal joint 321 are both provided with a fixed sleeve 33, a first sleeve 34 rotatably sleeved on the outer peripheral side of the fixed sleeve 33, and a second sleeve 35 rotatably sleeved on the outer peripheral side of the first sleeve 34, and the rotation axis of the first sleeve 34 is perpendicular to the rotation axis of the second sleeve 35. The fixed sleeve 33 can be connected to the active support rod 13 or the driven support rod 312 by a connecting pin or other structure, which facilitates assembly and improves the stability of the connection between the fixed sleeve 33 and the active support rod 13 or the driven support rod 312. The rotation axis of the first sleeve 34 is along the X-axis direction, and the rotation axis of the second sleeve 35 is along the Y-axis direction. It can be understood that the first sleeve 34 and the second sleeve 35 can be as follows Figure 5 The annular structure shown may also be a non-closed open ring structure, such as a C-shaped structure, which is determined according to actual conditions.

[0078] See also Figure 7 In some embodiments, the heights of the first sleeve 34 and the second sleeve 35 are both lower than the height of the fixed sleeve 33. In this way, the fixed sleeve 33 can be prevented from being affected by the first sleeve 34 and the second sleeve 35 during rotation. The heights of the first sleeve 34 and the second sleeve 35 can be the same or different, depending on the actual situation. At the same time, in order to make the fixed sleeve 33 rotate smoothly relative to the first sleeve 34 and the second sleeve 35, a gap can be set between the second sleeve 35 and the first sleeve 34 along the axial direction of the second sleeve 35.

[0079] See also Figure 1 and Figure 6 In some embodiments, a plurality of fixed components 32 are provided, and the plurality of fixed components 32 are sequentially arranged along the axial direction of the active support rod 13 and have a gap. In this way, the positioning fixture 30 can carry multiple products 200 at the same time, which is beneficial to improving the coating efficiency. And there are gaps between the plurality of fixed components 32, which facilitates the exposure of the coating position of the product 200, which is beneficial to the coating. The guide seat 311 is provided with three first universal joints 313, and the rotation axes of at least two of the three first universal joints 313 are not collinear. The fixed component 32 is provided with three second universal joints 321, and the rotation axes of at least two of the three second universal joints 321 are not collinear. The number of the driven support rods 312 is two, and the first universal joint 313 and the second universal joint 321 are respectively sleeved and connected to the corresponding active support rod 13 and the driven support rod 312. In this way, by providing two driven support rods 312, the stability of the plurality of fixed components 32 during the rotation process can be improved.

[0080] According to the basic properties of a plane, three non-collinear points determine a plane. Therefore, when the fixed component 32 is placed on the guide seat 311, the three second universal joints 321 are respectively in contact with the three first universal joints 313. Therefore, when the active support rod 13 drives the guide seat 311 and the fixed component 32 to rotate, the plane where the fixed component 32 is located is always parallel to the plane where the guide seat 311 is located, and the guide seat 311 is always close to the support platform 12 under the action of gravity. Therefore, the plane where the fixed component 32 is located is always parallel to the plane where the support platform 12 is located. Therefore, when the active support rod 13 rotates, the fixed component 32 drives the product 200 to rotate, but the plane where the product 200 is located is always parallel to the plane where the support platform 12 is located, which can improve the degree of freedom of the product 200 during the coating process, which is conducive to improving the uniformity of the coating thickness.

[0081] It can be understood that when multiple fixing components 32 are provided, the second universal joints 321 in adjacent fixing components 32 are correspondingly abutted. Therefore, the adjacent fixing components 32 always remain parallel during the rotation of the active support rod 13, thereby ensuring that the multiple products 200 always remain parallel during coating.

[0082] See also Figure 6 , Figure 7 and Figure 8 During coating, the active support rod 13 rotates under the drive of the external device, and at the same time drives the guide seat 311 to rotate around the active support rod 13. Since the guide seat 311 is closely arranged on the support platform 12, and there is an angle between the active support rod 13 and the support platform 12, the guide seat 311 is affected by the support platform 12 during the process of rotating around the active support rod 13, which will cause the first universal joint 313 connected to the active support rod 13 to rotate around the rotation axis in the X-axis and Y-axis directions, so that the guide seat 311 rotates in a plane parallel to the support platform 12, and at the same time drives the driven support rod 312 to rotate relative to the first universal joint 313 connected to it around the rotation axis of the X-axis and the Y-axis, so that the driven support rod 312 always remains parallel to the active support rod 13 and rises or falls along the axial direction. During the process of the driven support rod 312 rising or falling axially, the driven support rod 312 rotates around the X-axis and the Y-axis relative to the second universal joint 321, so that the product 200 fixing component 32 maintains a swing consistent with the guide seat 311, and the fixing component 32 swings relative to the active support rod 13 while rotating around the active support rod 13, so that the product 200 swings relative to the active support rod 13, thereby increasing the freedom of movement of the product 200 during the coating process.

[0083] See also Figure 1 and Figure 6In some embodiments, the guide seat 311 includes a main body 3111, a first universal joint 313 is embedded in the main body 3111, and a second sleeve 35 of the first universal joint 313 is connected to the main body 3111. The main body 3111 may be a circular structure, and the circular main body 3111 may always fit the support platform 12 during rotation, which is beneficial to improving the stability of the movement of the guide seat 311, thereby improving the stability of the support fixing assembly 32 and the product 200.

[0084] See also Figure 1 and Figure 6 In some embodiments, the fixing assembly 32 includes a bottom plate 322 and a cover plate 323 connected to the bottom plate 322, and the cover plate 323 is provided with a pressing portion for pressing and fixing the product 200 to the bottom plate 322. The second universal joint 321 is connected to the bottom plate 322. The cover plate 323 and the bottom plate 322 are both adapted to the structure of the product 200, so that after the product 200 is fixed, the position of the product 200 to be coated is exposed. It can be understood that the cover plate 323 is provided with a hollow structure corresponding to the active support rod 13 and the driven support rod 312 to avoid abutting against the active support rod 13 or the driven support rod 312 during the rotation process.

[0085] See also Figure 6 In some embodiments, a buckle 3221 is provided on one side of the bottom plate 322 facing the cover plate 323, and a slot 3231 is provided on one side of the cover plate 323 facing the bottom plate 322 to engage with the buckle 3221. In this way, the bottom plate 322 and the cover plate 323 can be fastened to each other to fix the product 200. It can be understood that the positions of the buckle 3221 and the slot 3231 do not correspond to the part to be coated on the product 200 to avoid affecting the coating of the product 200.

[0086] The working process of the PVD coating device 100 provided in the embodiment of the present application is roughly as follows:

[0087] First, see Figure 1 and Figure 6 , fix the product 200 by the bottom plate 322 and the cover plate 323 of the fixing assembly 32, then install the fixing assembly 32 loaded with the product 200 on the active support rod 13 and the driven support rod 312, and make the second universal joint 321 of the fixing assembly 32 abut against the first universal joint 313 on the guide seat 311. If multiple fixing assemblies 32 are installed, the other fixing assemblies 32 are sequentially stacked and installed on the active support rod 13 and the driven support rod 312, and make the second universal joints 321 on adjacent fixing assemblies 32 abut against each other.

[0088] Then, the PVD coating device 100 is installed in the PVD coating chamber, and the active support rod 13 is connected to the driving member (not shown). During coating, the active support rod 13 rotates under the drive of the driving member, thereby driving the first driving gear 21 and the second driving gear 22 to rotate. Please refer to Figure 8 When the active support rod 13 rotates in the counterclockwise direction, it drives the first active gear 21 and the second active gear 22 to rotate counterclockwise, and then drives the first one-way flywheel 23 and the second one-way flywheel 24 to rotate clockwise. At this time, the inner shaft 26 of the first one-way flywheel 23 rotates synchronously with the first one-way flywheel 23, and the second one-way flywheel 24 rotates idly, so that the first one-way flywheel 23 guides the lifting rod 28 to descend through the thread, and the lifting rod 28 pulls the support platform 12 to rotate downward. When the active support rod 13 rotates in the clockwise direction, it drives the first active gear 21 and the second active gear 22 to rotate clockwise, and then drives the first one-way flywheel 23 and the second one-way flywheel 24 to rotate counterclockwise. At this time, the first one-way flywheel 23 rotates idly, and the inner shaft 26 of the second one-way flywheel 24 rotates synchronously with the second one-way flywheel 24, so that the second one-way flywheel 24 guides the lifting rod 28 to rise through the thread, and the lifting rod 28 pulls the support platform 12 to rotate upward.

[0089] At the same time, when the active support rod 13 rotates, the first universal joint 313 and the second universal joint 321 connected thereto drive the guide seat 311 and the fixed assembly 32 to rotate. When the guide seat 311 and the fixed assembly 32 rotate, the guide seat 311 and the fixed assembly 32 are parallel to the support platform 12. Therefore, the product 200 continuously changes its angle and position when rotating with the fixed assembly 32, which is beneficial to improving the uniformity of the coating thickness.

[0090] In this way, the PVD coating device 100 provided in the embodiment of the present application can not only make the fixed component 32 reciprocate on the vertical plane with the support platform 12 during coating, but also drive the fixed component 32 to rotate on the plane parallel to the support platform 12, thereby improving the degree of freedom of the product 200 during coating and improving the uniformity of the film thickness when coating the product 200.

[0091] It is obvious to those skilled in the art that the present application is not limited to the details of the exemplary embodiments described above, and that the present application can be implemented in other specific forms without departing from the spirit or essential features of the present application. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive, and the scope of the present application is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present application.

[0092] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present application and are not intended to limit it. Although the present application has been described in detail with reference to the preferred embodiments, a person of ordinary skill in the art should understand that the technical solution of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present application.

Claims

1. A PVD coating device for coating a product, characterized in that: include: A support assembly, comprising a base, a support platform and an active support rod, wherein the support platform is rotatably connected to the base, and the active support rod passes through the support platform and is disposed in the middle of the base; A lifting assembly, comprising a first driving gear, a second driving gear, a first one-way flywheel, a second one-way flywheel, a flywheel frame and a lifting rod, wherein the flywheel frame is connected to the base and is arranged corresponding to an end of the support platform away from the base, the first one-way flywheel and the second one-way flywheel are arranged in the flywheel frame at intervals, the first driving gear and the second driving gear are both connected to the active support rod and meshed with the first one-way flywheel and the second one-way flywheel respectively, one end of the lifting rod is slidably arranged in the flywheel frame and is threadedly connected to the first one-way flywheel and the second one-way flywheel, and the other end of the lifting rod is movably connected to the support platform; and A positioning fixture is sleeved on the active support rod and fits the support platform, and is used to position the product; wherein, The active support rod drives the first one-way flywheel and the second one-way flywheel to rotate through the first active gear and the second active gear. When the active support rod rotates counterclockwise, the first one-way flywheel and the second one-way flywheel rotate clockwise, the first one-way flywheel guides the lifting rod to descend through the thread, the second one-way flywheel rotates idly, and then guides the supporting platform to rotate downward. When the active support rod rotates clockwise, the first one-way flywheel and the second one-way flywheel rotate counterclockwise, the first one-way flywheel rotates idly, and the second one-way flywheel guides the lifting rod to rise through the thread, and then guides the supporting platform to rotate upward.

2. The PVD coating device according to claim 1, characterized in that: The lifting rod comprises a first idle section, a threaded section and a second idle section which are arranged in sequence; When the first one-way flywheel and the second one-way flywheel rotate clockwise, the first one-way flywheel guides the lifting rod to descend until the first idle section corresponds to the first one-way flywheel, thereby stopping the lifting rod from descending; When the first one-way flywheel and the second one-way flywheel rotate counterclockwise, the second one-way flywheel guides the lifting rod to rise until the second idling section corresponds to the second one-way flywheel, thereby stopping the lifting rod from rising.

3. The PVD coating device according to claim 1, characterized in that: One end of the lifting rod connected to the support platform is set in a T shape, and the support platform is provided with a waist-shaped groove corresponding to the lifting rod. One end of the lifting rod set in a T shape is movably inserted in the waist-shaped groove, so that when the lifting rod is lifted or lowered, the support platform is pulled to rotate by cooperating with the waist-shaped groove through the one end of the lifting rod set in a T shape.

4. The PVD coating device according to claim 1, characterized in that: The positioning fixture includes a rotating assembly, which includes a guide seat and a driven support rod. The guide seat is rotatably arranged on a supporting platform and is provided with a plurality of first universal joints. The active support rod and the driven support rod are rotatably connected to the guide seat through different first universal joints.

5. The PVD coating device according to claim 4, characterized in that: The positioning fixture also includes a fixing component for fixing the product, the fixing component is provided with a plurality of second universal joints, and the plurality of second universal joints are respectively connected to the active support rod and the driven support rod, and when the active support rod rotates and drives the guide seat to rotate in a plane parallel to the support platform, the fixing component is driven by the active support rod to rotate.

6. The PVD coating device according to claim 5, characterized in that: The first universal joint and the second universal joint each include a fixed sleeve, a first sleeve rotatably mounted on the outer peripheral side of the fixed sleeve, and a second sleeve rotatably mounted on the outer peripheral side of the first sleeve, wherein the rotation axis of the first sleeve is perpendicular to the rotation axis of the second sleeve.

7. The PVD coating device according to claim 6, characterized in that: The heights of the first sleeve and the second sleeve are both lower than the height of the fixing sleeve.

8. The PVD coating device according to claim 7, characterized in that: The guide seat comprises a main body, the first universal joint is embedded in the main body, and the second sleeve of the first universal joint is connected to the main body.

9. The PVD coating device according to claim 8, characterized in that: The fixing assembly comprises a bottom plate and a cover plate connected to the bottom plate, wherein the cover plate is provided with a pressing portion for pressing and fixing the product to the bottom plate; The second universal joint is connected to the base plate.

10. The PVD coating device according to claim 9, characterized in that: A buckle is arranged on one side of the bottom plate facing the cover plate, and a slot for engaging with the buckle is arranged on one side of the cover plate facing the bottom plate.

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