Sectional type upstream protection sheet

Abstract

The utility model discloses a sectional type upstream protection piece which comprises a front end protection piece and a rear end protection piece, an arc-shaped supporting opening is formed in the inner side of the rear end protection piece, and the arc-shaped supporting opening is used for being installed on the circumferential periphery of a rotating base disc to form protection supporting. The upstream protection sheet comprises the front-end protection sheet and the rear-end protection sheet, so that the front-end protection sheet at one end, close to source gas, of the upstream protection sheet is not easy to attach an epitaxial reaction product and is not easy to deform due to thermal expansion in a silicon carbide epitaxial growth process by using an LPE106 epitaxial furnace, the airflow stability is ensured, and meanwhile, the rear-end protection sheet is not influenced; therefore, only the front-end protection sheet needs to be replaced independently, the whole upstream protection sheet does not need to be replaced, and the economic cost is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of upstream protection sheets, in particular to a segmented upstream protection sheet. Background Art

[0002] The upstream protective sheet of the silicon carbide epitaxial reaction chamber is used to prevent the rotating base plate from flying out. The traditional upstream protective sheet is an integrated structure. During the silicon carbide epitaxial growth process using the LPE106 epitaxial furnace, only the side of the upstream protective sheet close to the source gas is easily attached to the epitaxial reaction products, which is prone to thermal expansion and deformation of the protective sheet, affecting the airflow. Frequent replacement is required, and the entire upstream protective sheet often needs to be replaced during replacement, which has a high economic cost. Utility Model Content

[0003] The utility model aims to provide a segmented upstream protective sheet to solve the above-mentioned technical problems.

[0004] To achieve the above-mentioned purpose, the technical solution of the utility model is: a segmented upstream protective plate, including a front end protective plate and a rear end protective plate, the inner side of the rear end protective plate is an arc-shaped support opening, and the arc-shaped support opening is used to be installed on the circumferential periphery of the rotating base plate to form a protective support.

[0005] Preferably, the thickness of the front protection sheet gradually decreases in a direction away from the rear protection sheet.

[0006] Preferably, the top surface of the front protection sheet is a plane, and the bottom surface is an inclined surface, and the inclined surface gradually inclines upward in a direction away from the rear protection sheet.

[0007] Preferably, a TAC coating is provided on the front protection sheet.

[0008] Preferably, in a top view, the outer side of the rear protection sheet is an L-shaped right-angle structure, the front protection sheet is a rectangular structure, and the front protection sheet is flush with one of the right-angle sides of the L-shaped right-angle structure.

[0009] Preferably, the rear protection sheet comprises a bottom protection sheet and a top protection sheet fixed on the bottom protection sheet, and the top surface of the front protection sheet is at the same level as the top surface of the top protection sheet.

[0010] Preferably, the arc-shaped support opening includes a bottom arc-shaped support opening and a top arc-shaped support opening respectively located on the inner sides of the bottom protective sheet and the top protective sheet. The bottom arc-shaped support opening and the top arc-shaped support opening are arranged at the same arc center, and the top arc-shaped support opening is closer to the outside than the bottom arc-shaped support opening.

[0011] The utility model has the following beneficial effects:

[0012] The utility model comprises a front-end protection sheet and a rear-end protection sheet, the inner side of the rear-end protection sheet is an arc-shaped support opening, the arc-shaped support opening is used to be installed on the circumferential periphery of a rotating base disk to form a protection support, and the upstream protection sheet is designed to be a segmented structure, namely comprising the front-end protection sheet and the rear-end protection sheet, so that in the process of using an LPE106 epitaxial furnace for epitaxial growth of silicon carbide, the front-end protection sheet at one end of the upstream protection sheet close to the source gas is not easy to be attached to the epitaxial reaction product, is not easy to be deformed due to thermal expansion, and ensures the stability of the gas flow, and at the same time will not affect the rear-end protection sheet, so that only the front-end protection sheet needs to be replaced alone, and the entire upstream protection sheet does not need to be replaced, thereby saving economic costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a top view of an embodiment of the utility model;

[0014] Figure 2 It is a side view of an embodiment of the utility model;

[0015] Figure 3 This is an inside perspective view of an embodiment of the utility model;

[0016] Figure 4 This is an outside perspective view of an embodiment of the utility model;

[0017] The accompanying drawings are marked with: 1 front end protection sheet, 2 rear end protection sheet, 21 bottom layer protection sheet, 211 bottom layer arc-shaped supporting opening, 22 top layer protection sheet, 221 top layer arc-shaped supporting opening. DETAILED DESCRIPTION

[0018] To further illustrate the various embodiments, the present invention provides drawings. These drawings are part of the disclosure of the present invention, which are mainly used to illustrate the embodiments and can be used in conjunction with the relevant descriptions in the specification to explain the operating principles of the embodiments. With reference to these contents, a person of ordinary skill in the art should be able to understand other possible implementations and advantages of the present invention. The components in the figures are not drawn to scale, and similar component symbols are generally used to represent similar components.

[0019] In the description of the present invention, unless otherwise specified, "multiple" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0020] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0021] See also Figure 1-4 As shown, as an embodiment of the utility model, a segmented upstream protective sheet is provided for a silicon carbide epitaxial reaction chamber, comprising a front end protective sheet 1 and a rear end protective sheet 2, the inner side of the rear end protective sheet 2 is an arc-shaped support opening, the arc-shaped support opening is used to be installed on the circumferential periphery of a rotating base disk to form a protective support, the upstream protective sheet of the utility model is a segmented structure, comprising a front end protective sheet 1 and a rear end protective sheet 2, so that during the process of using an LPE106 epitaxial furnace for silicon carbide epitaxial growth, the front end protective sheet 1 at one end of the upstream protective sheet close to the source gas is not easy to adhere to the epitaxial reaction product, and is not easy to deform due to thermal expansion, thereby ensuring the stability of the gas flow, and at the same time will not affect the rear end protective sheet 2, so that only the front end protective sheet 1 needs to be replaced alone, and there is no need to replace the entire upstream protective sheet, thereby saving economic costs.

[0022] In the present embodiment, the thickness of the front end protection sheet 1 gradually decreases in the direction away from the rear end protection sheet 2. Specifically, the top surface of the front end protection sheet 1 is a plane, and the bottom surface is an inclined surface, and the inclined surface gradually inclines upward in the direction away from the rear end protection sheet 2. The use of an inclined surface thinning design can improve the stability of the source gas intake airflow and extend the service life of spare parts; the front end protection sheet 1 is stress strengthened, which reduces the cracking frequency of the front end protection sheet 1 and further extends its service life; wherein, a TAC coating is provided on the front end protection sheet 1 to enhance hardness and strength, making it more reliable and durable, thereby extending its service life.

[0023] In this embodiment, when viewed from a top perspective, the outer side of the rear end protective sheet 2 is an L-shaped right-angle structure, and the front end protective sheet 1 is a rectangular structure. The front end protective sheet 1 is flush with one of the right-angle sides of the L-shaped right-angle structure to ensure the support stability of the rotating base plate.

[0024] In this embodiment, the rear end protective sheet 2 includes a bottom protective sheet 21 and a top protective sheet 22 fixed on the bottom protective sheet 21. The top surface of the front end protective sheet 1 and the top surface of the top protective sheet 22 are at the same horizontal height. This setting can improve the stability of the source gas intake airflow and extend the service life of the components.

[0025] In this embodiment, the arc-shaped support opening includes a bottom arc-shaped support opening 211 and a top arc-shaped support opening 221 which are respectively located on the inner sides of the bottom protective sheet 21 and the top protective sheet 22. The bottom arc-shaped support opening 211 and the top arc-shaped support opening 221 are arranged at the same arc center, and the top arc-shaped support opening 221 is closer to the outside than the bottom arc-shaped support opening 211, thereby ensuring the overall structural stability of the rear end protective sheet 2 and further improving the support stability of the rotating base plate.

[0026] Of course, in other cases, the segmented upstream protection sheet is not limited to two sections, but can also be multi-sectioned, as long as the segmentation is guaranteed, and there is no specific restriction on the shape used. It can also be adapted to different sizes of silicon carbide epitaxial cavities, so that the segmented upstream protection sheet is suitable for cavities of various sizes, for example, 6 inches is also suitable for 4 inches, 8 inches or other sizes of silicon carbide epitaxial cavities. The material for making the segmented upstream protection sheet is not limited, and other new materials can be used to achieve better results.

[0027] Although the present invention has been specifically demonstrated and described in conjunction with the preferred embodiments, those skilled in the art should understand that various changes made to the present invention in form and detail, without departing from the spirit and scope of the present invention as defined in the appended claims, shall fall within the scope of protection of the present invention.

Claims

1. A segmented upstream protection sheet, characterized in that: It comprises a front end protection sheet and a rear end protection sheet. The inner side of the rear end protection sheet is an arc-shaped support opening. The arc-shaped support opening is used to be installed on the circumferential periphery of the rotating base disc to form a protection support.

2. The segmented upstream protection sheet according to claim 1 is characterized in that: The thickness of the front protection sheet gradually decreases in a direction away from the rear protection sheet.

3. The segmented upstream protection sheet according to claim 1 is characterized in that: The top surface of the front protection sheet is a plane, and the bottom surface is an inclined surface, and the inclined surface is gradually inclined upward in a direction away from the rear protection sheet.

4. The segmented upstream protection sheet according to claim 1 is characterized in that: The front protection sheet is provided with a TAC coating.

5. The segmented upstream protection sheet according to claim 1 is characterized in that: In a top view, the outer side of the rear protection sheet is an L-shaped right-angle structure, the front protection sheet is a rectangular structure, and the front protection sheet is flush with one of the right-angle sides of the L-shaped right-angle structure.

6. The segmented upstream protection sheet according to claim 1 is characterized in that: The rear protection sheet comprises a bottom protection sheet and a top protection sheet fixed on the bottom protection sheet, and the top surface of the front protection sheet and the top surface of the top protection sheet are at the same level.

7. The segmented upstream protection sheet according to claim 6 is characterized in that: The arc-shaped support opening includes a bottom arc-shaped support opening and a top arc-shaped support opening respectively located on the inner sides of the bottom protective sheet and the top protective sheet. The bottom arc-shaped support opening and the top arc-shaped support opening are arranged at the same arc center, and the top arc-shaped support opening is closer to the outside than the bottom arc-shaped support opening.

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