Vacuum pump front end inlet air impurity filtering device
By designing a raised filter unit and integrated structure at the front end of the vacuum pump, the problems of impurities damage and gas flow resistance in the molecular pump are solved, and more efficient filtration and convenient maintenance are achieved, ensuring pumping speed and portability.
Patent Information
- Application Number
- CN202421223382.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-30
- Publication Date
- 2025-01-07
- Estimated Expiration
- 2034-05-30
AI Technical Summary
During the vacuuming process of molecular pumps, impurities and glass fragments may damage the impeller. Although the existing filters can intercept small particles, the gas flow resistance is greater due to the large number of mesh, which affects the pumping speed.
A vacuum pump front-end air intake impurity filter device is designed, and a raised filter mesh unit is used to reduce resistance by increasing the filter surface area, and an integrated structure is used to facilitate cleaning and maintenance.
It effectively reduces the resistance of the filter to air flow, ensures the pumping speed, simplifies the cleaning and maintenance process of the device, and improves the portability of the device.
Smart Images
Figure CN222315404U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of molecular pump auxiliary equipment, in particular to a vacuum pump front end air intake impurity filtering device. Background Art
[0002] A molecular pump is a vacuum pump that uses a high-speed rotating rotor to transfer momentum to gas molecules, allowing them to obtain a directional velocity, thereby being compressed and driven to the exhaust port to be drawn away by the front stage.
[0003] However, during the vacuuming process of the molecular pump, there are often some debris in the container, or some glass containers break when being vacuumed, thus generating a large amount of glass fragments. Due to the operating principle of the molecular pump, small particles will cause great damage to the impeller after continuously gaining kinetic energy. Generally speaking, a filter mesh is used to filter the gas passing through, and small particles are intercepted to prevent small particles from entering the interior of the molecular pump. However, in order to improve the filtering and interception effect, the filter mesh often chooses a larger mesh model, but a larger mesh filter will cause greater gas flow resistance. Utility Model Content
[0004] The utility model aims to provide a device for filtering impurities in the air intake at the front end of a vacuum pump, so as to solve the problems raised in the above-mentioned background technology.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vacuum pump front-end air intake impurity filtering device, comprising: a molecular pump housing interface, a connecting ring, a mounting base plate, a sealing gasket, and a filter unit, wherein the molecular pump housing interface is a connecting port at the upper end of the molecular pump outer shell, the outer diameter of the connecting ring is equal to the inner diameter of the molecular pump housing interface, the connecting ring is horizontally fixedly connected to the upper side of the molecular pump housing interface, the mounting base plate is a circular plate, the diameter of the mounting base plate is larger than the inner diameter of the connecting ring and smaller than the outer diameter of the connecting ring, the mounting base plate is fixedly connected to the connecting ring by at least three groups of connecting bolts, at least two mounting through holes are evenly opened on the mounting base plate, the sealing gasket is arranged between the connecting ring and the mounting base plate, the sealing gasket seals the gap between the connecting ring and the mounting base plate, the filter unit is fixedly connected to the mounting through hole of the mounting base plate, the filter in the filter unit is convex, and the surface area of the filter is larger than the area of the mounting through hole.
[0006] Furthermore, the filter unit includes a fixing ring, a filter, and a sealing gasket. The shape of the fixing ring matches the mounting through hole of the mounting substrate. The fixing ring is fixed to the mounting through hole of the mounting substrate by fixing bolts. The outer edge of the filter is fixed to the inner ring of the fixing ring. The sealing gasket is arranged between the fixing ring and the mounting substrate, and the sealing gasket seals the gap between the fixing ring and the mounting substrate.
[0007] Furthermore, the filter screen is in the shape of an arc sphere or a cylinder.
[0008] Compared with the prior art, the beneficial effects of the utility model are as follows: the air intake impurity filtering device at the front end of the vacuum pump of the utility model changes the arrangement of the filter screen, and adopts a filter screen unit with a raised filter screen to replace the original horizontally arranged sheet filter screen, thereby reducing the resistance of the filter screen to the air flow by increasing the filter surface area, thereby ensuring the pumping speed; the mounting base plate and the filter screen unit can be quickly disassembled, and an integrated structure is adopted to facilitate subsequent cleaning and maintenance, and increase the portability of the installation.
[0009] The utility model has the advantages of simple structure, safety, effectiveness and good use effect. BRIEF DESCRIPTION OF THE DRAWINGS
[0010] Figure 1 It is a schematic diagram of the structure of the utility model;
[0011] Figure 2 This is a schematic diagram of the structure of the filter unit of the utility model;
[0012] In the figure: 1-molecular pump housing interface; 2-connecting ring; 3-mounting base plate; 4-sealing gasket; 5-filter unit;
[0013] 11-fixing ring; 12-filter screen; 13-sealing gasket. DETAILED DESCRIPTION
[0014] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0015] See also Figure 1 , 2The utility model provides a vacuum pump front-end air intake impurity filtering device, comprising: a molecular pump housing interface 1, a connecting ring 2, a mounting substrate 3, a sealing gasket 4, and a filter unit 5. The molecular pump housing interface 1 is a connecting port at the upper end of the molecular pump outer shell, the outer diameter of the connecting ring 2 is equal to the inner diameter of the molecular pump housing interface 1, the connecting ring 2 is horizontally fixed to the upper side of the molecular pump housing interface 1, the mounting substrate 3 is a circular plate, the diameter of the mounting substrate 3 is larger than the inner diameter of the connecting ring 2 and smaller than the outer diameter of the connecting ring 2, the mounting substrate 3 is fixed to the connecting ring 2 by at least three groups of connecting bolts, and at least two mounting through holes are evenly opened on the mounting substrate 3, the sealing gasket 4 is arranged between the connecting ring 2 and the mounting substrate 3, the sealing gasket 4 seals the gap between the connecting ring 2 and the mounting substrate 3, the filter unit 5 is fixed to the mounting through hole of the mounting substrate 3, the filter in the filter unit 3 is convex, and the surface area of the filter is larger than the area of the mounting through hole.
[0016] The arrangement of the filter is changed, and a filter unit 5 with a raised filter is used to replace the original horizontally arranged sheet filter. By increasing the filter surface area, the resistance of the filter to the air flow is reduced, that is, the pumping speed is guaranteed. Specifically, after the gas enters the molecular pump, it will first pass through the filter unit 5. Since the filter in the filter unit 5 is raised and the surface area of the filter is larger than the area of the installation through hole, this is equivalent to increasing the area of the filter surface. As the area of the filter surface increases, the resistance of the filter surface decreases.
[0017] Furthermore, the filter unit 5 includes a fixing ring 11, a filter 12, and a sealing gasket 13. The shape of the fixing ring 11 matches the mounting through hole of the mounting substrate 3. The fixing ring 11 is fixed to the mounting through hole of the mounting substrate 3 by fixing bolts. The outer edge of the filter 12 is fixed to the inner ring of the fixing ring 11. The sealing gasket 13 is arranged between the fixing ring 11 and the mounting substrate 3. The sealing gasket 13 seals the gap between the fixing ring 11 and the mounting substrate 3.
[0018] The mounting base plate 3 and the filter unit 5 can be quickly disassembled, and the integrated structure is adopted to facilitate subsequent cleaning and maintenance, and increase the portability of the installation.
[0019] Furthermore, the filter screen 12 is in the shape of an arc sphere or a cylinder.
[0020] The arc spherical or cylindrical filter screens 12 are all convex. In a specific implementation, other convex filter screens can be used.
[0021] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A vacuum pump front end air intake impurity filtering device, characterized in that: include: A molecular pump housing interface (1), a connecting ring (2), a mounting substrate (3), a sealing gasket (4), and a filter unit (5), wherein the molecular pump housing interface (1) is a connecting port at the upper end of the molecular pump outer shell, the connecting ring (2) has an outer diameter equal to an inner diameter of the molecular pump housing interface (1), the connecting ring (2) is horizontally fixed to the upper side of the molecular pump housing interface (1), and the mounting substrate (3) is a circular plate, the diameter of the mounting substrate (3) is larger than the inner diameter of the connecting ring (2) and smaller than the outer diameter of the connecting ring (2). The mounting base plate (3) is fixedly connected to the connecting ring (2) by at least three groups of connecting bolts. At least two mounting through holes are evenly opened on the mounting base plate (3). The sealing gasket (4) is arranged between the connecting ring (2) and the mounting base plate (3). The sealing gasket (4) seals the gap between the connecting ring (2) and the mounting base plate (3). The filter unit (5) is fixedly connected to the mounting through hole of the mounting base plate (3). The filter in the filter unit (5) is convex, and the surface area of the filter is larger than the area of the mounting through hole.
2. The vacuum pump front-end air intake impurity filtering device according to claim 1, characterized in that: The filter unit (5) comprises a fixing ring (11), a filter (12), and a sealing gasket (13); the shape of the fixing ring (11) matches the mounting through hole of the mounting substrate (3); the fixing ring (11) is fixed to the mounting through hole of the mounting substrate (3) by means of fixing bolts; the outer edge of the filter (12) is fixed to the inner ring of the fixing ring (11); the sealing gasket (13) is arranged between the fixing ring (11) and the mounting substrate (3); and the sealing gasket (13) seals the gap between the fixing ring (11) and the mounting substrate (3).
3. The vacuum pump front-end air intake impurity filtering device according to claim 2, characterized in that: The filter screen (12) is in the shape of an arc sphere or a cylinder.