Template carrying table and imprinting device

Abstract

The utility model discloses a template platform deck and coining device, template platform deck comprises a base, a gasket, an elastic piece and a template which are stacked in sequence, the base and the gasket enclose to form an accommodating cavity facing the elastic piece, the elastic piece comprises a first surface and a second surface which are oppositely arranged, the first surface is connected with the gasket, and the template is installed on the second surface; when the elastic piece elastically deforms to enable the second surface to be changed into a plane from a curved surface protruding downwards, part of the elastic piece is contained in the containing cavity. According to the template carrying table and the imprinting device provided by the utility model, the gasket and the elastic piece are arranged, so that the template can be changed into a plane from a downward convex curved surface in a laminating process, glue liquid can be uniformly diffused, bubbles in the glue liquid can be favorably discharged, the problem that the bubbles cannot be discharged due to rapid and large-area contact is avoided, and the production efficiency is improved. And the integrity of the embossed pattern is ensured.

Description

Technical Field

[0001] The utility model belongs to the technical field of imprinting devices, and in particular relates to a template carrier and an imprinting device. Background Art

[0002] Nanoimprinting technology includes first applying a glue liquid such as thermal nanoimprinting glue or ultraviolet nanoimprinting glue on a substrate, contacting it with a template with a micro-nanostructure pattern, applying mechanical force to the template, imprinting the glue liquid, curing the imprinted area under high temperature or ultraviolet light conditions after imprinting, and then demolding.

[0003] In the process of applying the glue on the substrate, it is generally done by dispensing, so there are gaps between each glue. The template and substrate used in the traditional imprinting device are both flat. During the imprinting process of the template and the substrate, the template and the substrate are in rapid and large-area contact, resulting in the inability to discharge bubbles, affecting the integrity of the imprinted pattern.

[0004] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0005] The utility model aims to provide a template carrier and an imprinting device, which can make the glue liquid diffuse evenly and avoid the problem that bubbles cannot be discharged due to rapid and large-area contact.

[0006] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0007] A template carrier, the template carrier includes a base, a gasket, an elastic member, and a template stacked in sequence, the base and the gasket enclose a receiving cavity arranged toward the elastic member, the elastic member includes a first surface and a second surface arranged opposite to each other, the first surface is connected to the gasket, and the template is installed on the second surface; when the elastic member undergoes elastic deformation to change the second surface from a downwardly convex curved surface to a flat surface, part of the elastic member is received in the receiving cavity.

[0008] In one or more embodiments of the present invention, the base includes a base layer and a support layer disposed on the base layer, and on the plane where the base layer is located, the orthographic projection of the support layer is located in the base layer.

[0009] In one or more embodiments of the present invention, the base layer and the support layer are separately arranged or integrally arranged.

[0010] In one or more embodiments of the present invention, the gasket includes a first body and a second body that are arranged opposite to each other, and the first body, the base, and the second body together form a receiving cavity.

[0011] In one or more embodiments of the present invention, the side wall of the first body toward the second body is arranged to be inclined outward from the base to the elastic member; and / or,

[0012] The side wall of the second body facing the first body is arranged obliquely outward from the base to the elastic member.

[0013] In one or more embodiments of the present invention, when the elastic member undergoes elastic deformation so that the second surface changes from a downwardly convex curved surface to a flat surface, the distance between the first surface and the surface of the base facing the elastic member is greater than or equal to 0.

[0014] In one or more embodiments of the present invention, a first adhesive layer is provided between the gasket and the base; and / or,

[0015] A second bonding layer is provided between the gasket and the elastic member.

[0016] Another specific embodiment of the present invention provides a technical solution as follows:

[0017] A stamping device comprises an upper fixed plate, a lower fixed plate, and a template carrier as described above; the upper fixed plate is provided with a mounting groove, the template carrier is installed in the mounting groove and the template of the template carrier protrudes out of the mounting groove, the lower fixed plate is arranged below the upper fixed plate, and the lower fixed plate is used for placing a substrate to be stamped.

[0018] In one or more embodiments of the present invention, the depth of the mounting groove is less than the thickness of the base.

[0019] In one or more embodiments of the present invention, the imprinting device further comprises a limiting member installed on the upper fixed plate, and the limiting member abuts against the base layer of the template carrier.

[0020] Compared with the prior art, the utility model has the following beneficial effects:

[0021] The utility model provides a template carrier and an imprinting device. By arranging a gasket and an elastic part, the template can be changed from a downwardly convex curved surface to a flat surface during the lamination process, so that the glue liquid can be evenly diffused, which is conducive to the discharge of bubbles in the glue liquid, avoiding the problem of bubbles being unable to be discharged due to rapid and large-area contact, and ensuring the integrity of the imprinted pattern. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 This is a schematic diagram of the structure of the template carrier in the first state in the first embodiment of the utility model;

[0024] Figure 2 It is a schematic diagram of the structure of the template carrier in the second state in the first embodiment of the utility model;

[0025] Figure 3 It is a schematic diagram of the structure of the imprinting device in the second embodiment of the present utility model. DETAILED DESCRIPTION

[0026] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0027] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0028] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0029] The technical solution of the present utility model will be described below in conjunction with the accompanying drawings.

[0030] Embodiment 1:

[0031] Reference Figure 1 , Figure 2As shown, the template carrier in this embodiment includes a base 1, a gasket 2, an elastic member 3, and a template 4 stacked in sequence. The base 1 and the gasket 2 enclose a receiving cavity 5 arranged toward the elastic member 3. The elastic member 3 includes a first surface 31 and a second surface 32 arranged opposite to each other. The first surface 31 is connected to the gasket 2, and the template 4 is installed on the second surface 32. When the elastic member 3 undergoes elastic deformation to change the second surface 32 from a downwardly convex curved surface to a flat surface, part of the elastic member 3 is accommodated in the receiving cavity 5. In the first state, the second surface 32 of the elastic member 3 is a downwardly convex curved surface, the first surface 31 is a flat surface, and the lower surface of the template 4 is a downwardly convex curved surface; in the second state, the second surface 32 of the elastic member 3 is a flat surface, a part of the first surface 31 is an upwardly convex curved surface, and the lower surface of the template 4 is a flat surface.

[0032] Since the template 4 is mounted on the second surface 32, when the elastic member 3 does not undergo elastic deformation, the template 4 is also a curved surface convex downwards. When the elastic member 3 undergoes elastic deformation, the template 4 also changes from a curved surface convex downwards to a flat surface. When the template carrier is used, since the substrate 81 to be imprinted is coated with glue 811, during the imprinting process (see the attached drawing), the template 4 is also a curved surface convex downwards. Figure 3 ), the glue 811 located below the lowest point of the curved surface will first contact with the template 4. In the process of the template 4 becoming continuously flat, the glue 811 can be evenly diffused, which is conducive to the discharge of bubbles in the glue 811 after the template 4 and the substrate 81 are completely imprinted, avoiding the inability to discharge bubbles caused by rapid and large-area contact, thereby ensuring the integrity of the imprinted pattern.

[0033] It should be noted that since the template 4 is flexible and can bend slightly, when the elastic member 3 undergoes elastic deformation, the elastic member 3 will expand slightly outward, thereby increasing the area of ​​the second surface 32, so that when the template 4 changes from a curved surface to a flat surface, it can be smoothly unfolded, thereby facilitating printing.

[0034] Specifically, the base 1 in this embodiment includes a base layer 11 and a support layer 12 disposed on the base layer 11, and on the plane where the base layer 11 is located, the orthographic projection of the support layer 12 is located in the base layer 11. Since the dimensions of the support layer 12 in the length direction and / or the width direction are smaller than the dimensions of the base layer 11 in the corresponding direction, the orthographic projection of the support layer 12 is located in the base layer 11. The gasket 2 is installed on the support layer 12, and the gasket 2 can be directly positioned to prevent the elastic member 3 and the template 4 from being installed incorrectly.

[0035] The base layer 11 and the support layer 12 in this embodiment are arranged separately or in an integrated manner. For example, when the base layer 11 and the support layer 12 are arranged separately, the base layer 11 and the support layer 12 can be fixed together by fasteners such as screws and bolts or adhesive materials.

[0036] The gasket 2 in this embodiment includes a first body 21 and a second body 22 that are arranged opposite to each other, with a gap between the first body 21 and the second body 22, and the first body 21, the base 1, and the second body 22 enclose a receiving cavity 5. The receiving cavity 5 needs to receive a portion of the elastic member 3 that has undergone elastic deformation, so that the second surface 32 of the elastic member 3 changes from a downwardly convex curved surface to a flat surface, thereby changing the lower surface of the template 4 from a downwardly convex curved surface to a flat surface.

[0037] Preferably, in this embodiment, the side wall of the first body 21 facing the second body 22 is arranged to be tilted outward from the base 1 to the elastic member 3, and the side wall of the second body 22 facing the first body 21 is arranged to be tilted outward from the base 1 to the elastic member 3. According to this design, a buffering effect can be played on the elastic member 3, so that the elastic deformation amplitude of the elastic member 3 is gentle, and excessive elastic deformation of the elastic member 3 is avoided, thereby increasing the service life of the elastic member 3.

[0038] Of course, the present application is not limited to this. When only one side wall of the main body 22 is tilted outward from the base 1 to the elastic member 3 toward the second main body 22; or, the side wall of the second main body 22 is tilted outward from the base 1 to the elastic member 3 toward the first main body 21, the service life of the elastic member 3 can be increased to a certain extent.

[0039] Since the accommodating cavity 5 needs to accommodate the portion of the elastic member 3 that has undergone elastic deformation so that the second surface 32 of the elastic member 3 changes from a downwardly protruding curved surface to a flat surface, thereby making the lower surface of the template 4 change from a downwardly protruding curved surface to a flat surface, when the elastic member 3 undergoes elastic deformation so that the second surface 32 changes from a downwardly protruding curved surface to a flat surface, the distance between the first surface 31 in this embodiment and the surface of the base 1 facing the elastic member 3 is greater than or equal to 0.

[0040] In order to mount the gasket 2 on the base 1 , a first adhesive layer 61 is provided between the gasket 2 and the base 1 in this embodiment.

[0041] In order to install the gasket 2 and the elastic member 3 , a second adhesive layer 62 is provided between the gasket 2 and the elastic member 3 in this embodiment.

[0042] Embodiment 2:

[0043] Reference Figure 3 As shown, the imprinting device in this embodiment includes an upper fixing plate 7, a lower fixing plate 8, and a template stage 90 as described in the first embodiment. The upper fixing plate 7 is provided with a mounting groove 71, the template stage 90 is installed in the mounting groove 71, and the template 4 of the template stage 90 protrudes out of the mounting groove 71, and the lower fixing plate 8 is provided below the upper fixing plate 7, and the lower fixing plate 8 is used to place a substrate 81 to be imprinted. There is a gap between the substrate 81 to be imprinted and the lower surface of the template 4.

[0044] During the imprinting process, the upper fixed plate 7 moves toward the lower fixed plate 8, so that the template stage 90 is closer and closer to the substrate to be imprinted 81, until the template 4 on the template stage 90 contacts the substrate with imprinting 81 to imprint the substrate 81. The glue 811 closest to the template 4 (i.e., the glue 811 located below the most downwardly protruding position of the template 4) first contacts the template 4, and then as the downward pressure increases, the elastic member 3 is squeezed, and the downwardly protruding area of ​​the second surface 32 of the elastic member 3 gradually flattens, and the template 4 on the flattened area gradually contacts the substrate to be imprinted 81, until the second surface 32 of the elastic member 3 is completely flattened, and the template 4 is also completely flattened, so that the template 4 is completely in contact with the substrate to be imprinted 81.

[0045] Since the substrate 81 to be imprinted is coated with the glue 811 distributed in an array, during this process, the glue 811 flows evenly to the surroundings, and bubbles can be discharged smoothly, thus avoiding the problem of bubbles being unable to be discharged due to rapid and large-area contact.

[0046] In order to make the lower surface of the base 1 protrude from the lower surface of the upper fixing plate 7 , the depth of the mounting groove 71 in this embodiment is smaller than the thickness of the base 1 .

[0047] The imprinting device in this embodiment further includes a limiter 72 mounted on the upper fixing plate 7, and the limiter 72 abuts against the base layer 11 of the template carrier 90. The base layer 11 is mounted in the mounting groove 71, and the support layer 12 and the limiter 72 avoid each other. According to this design, the template carrier 90 can be limited in the vertical direction, so that the template carrier 90 is securely mounted in the mounting groove 71.

[0048] It can be seen from the above technical solutions that the utility model has the following beneficial effects:

[0049] The utility model provides a template carrier and an imprinting device. By arranging a gasket and an elastic part, the template can be changed from a downwardly convex curved surface to a flat surface during the lamination process, so that the glue liquid can be evenly diffused, which is conducive to the discharge of bubbles in the glue liquid, avoiding the problem of bubbles being unable to be discharged due to rapid and large-area contact, and ensuring the integrity of the imprinted pattern.

[0050] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0051] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A template carrier, characterized in that: The template carrier includes a base, a gasket, an elastic member, and a template stacked in sequence, the base and the gasket enclose a receiving cavity arranged toward the elastic member, the elastic member includes a first surface and a second surface arranged opposite to each other, the first surface is connected to the gasket, and the template is installed on the second surface; when the elastic member undergoes elastic deformation to change the second surface from a downwardly protruding curved surface to a flat surface, part of the elastic member is accommodated in the receiving cavity.

2. The template carrier according to claim 1, characterized in that: The base includes a base layer and a support layer arranged on the base layer. On the plane where the base layer is located, the orthographic projection of the support layer is located in the base layer.

3. The template carrier according to claim 2, characterized in that: The base layer and the support layer are arranged in a separate manner or in an integrated manner.

4. The template carrier according to claim 1, characterized in that: The gasket comprises a first body and a second body which are arranged opposite to each other, and the first body, the base and the second body are surrounded to form a receiving cavity.

5. The template carrier according to claim 4, characterized in that: The side wall of the first body toward the second body is arranged to be inclined outward from the base to the elastic member; and / or, The side wall of the second body facing the first body is arranged obliquely outward from the base to the elastic member.

6. The template carrier according to claim 1, characterized in that: When the elastic member undergoes elastic deformation so that the second surface changes from a downwardly convex curved surface to a flat surface, a distance between the first surface and a surface of the base facing the elastic member is greater than or equal to 0.

7. The template carrier according to claim 1, characterized in that: A first adhesive layer is provided between the gasket and the base; and / or, A second bonding layer is provided between the gasket and the elastic member.

8. An imprinting device, characterized in that: The imprinting device includes an upper fixed plate, a lower fixed plate, and a template carrier as described in any one of claims 1 to 7; the upper fixed plate is provided with a mounting groove, the template carrier is installed in the mounting groove and the template of the template carrier protrudes out of the mounting groove, the lower fixed plate is arranged below the upper fixed plate, and the lower fixed plate is used to place the substrate to be imprinted.

9. The imprinting device according to claim 8, characterized in that: The depth of the mounting groove is less than the thickness of the base.

10. The imprinting device according to claim 8, characterized in that: The imprinting device further comprises a limiting member mounted on the upper fixing plate, wherein the limiting member abuts against a base layer of the template carrier.

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