Storage mechanism, feeding and discharging device and spin coating equipment
By designing the storage mechanism and loading and unloading device, the substrate is clamped with the avoidance gap of the extension plate and the clamping member, and combined with the robot arm to achieve automatic loading and unloading, the problem of low manual loading and unloading efficiency in spin coating technology is solved and the rotation is improved Coating efficiency and safety.
Patent Information
- Application Number
- CN202421265117.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-04
- Publication Date
- 2025-01-10
- Estimated Expiration
- 2034-06-04
AI Technical Summary
In spin coating technology, manual loading and unloading efficiency is low and automatic loading and unloading devices are difficult to effectively grasp the substrate stored in the standard material box, resulting in limited spin coating efficiency.
A storage mechanism is designed, including an extension plate and a load-bearing assembly, to clamp the substrate at the avoidance gap by clamping the clamping member, and to combine the robotic arm and clamping member to achieve automatic loading and unloading, simplifying the storage and removal process of the substrate.
It improves loading and unloading efficiency, reduces labor costs and working strength, ensures the safety of the substrate and the efficient operation of spin coating equipment.
Smart Images
Figure CN222330652U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of spin coating, in particular to a storage mechanism, a loading and unloading device and spin coating equipment. Background Art
[0002] Spin coating is a commonly used surface coating technology. Its basic principle is to drop the solution to be coated on a rotating substrate and evenly distribute the liquid on the surface of the substrate through centrifugal force to form a uniform coating. Spin coating technology is widely used in microelectronics manufacturing, materials science and other fields.
[0003] The substrate is stored in a standard material box. When spin coating, the substrate must first be loaded onto the spin coating panel of the spin coater. In small-scale application scenarios such as laboratory testing, loading and unloading are usually done manually. Manual loading and unloading is inefficient and labor-intensive, and cannot be applied to large-scale production. In large-scale production application scenarios, clamps are usually used to complete automatic loading and unloading. However, due to the limitations of the standard material box, it is difficult for the clamp to grasp the edge of the substrate stored in the standard material box to take out the substrate, which brings inconvenience to substrate loading and unloading and affects the efficiency of spin coating.
[0004] Therefore, it is necessary to provide a storage mechanism, a loading and unloading device and a spin coating device to solve the above problems. Utility Model Content
[0005] The utility model aims to provide a storage mechanism, a loading and unloading device and a spin coating device, which have a simple structure and can meet the needs of automatic loading and unloading, so that the loading and unloading efficiency is high, the labor cost is reduced, and the work intensity is reduced.
[0006] To achieve this purpose, the utility model adopts the following technical solutions:
[0007] Depository institutions, including:
[0008] At least two extension plates are spaced apart along a first direction;
[0009] A bearing assembly, used for bearing the substrate, the bearing assembly comprising two bearing plates, the two bearing plates are respectively arranged on opposite wall surfaces of two adjacent extension plates, and a first avoidance gap is formed between the two bearing plates;
[0010] A clamping member for clamping the substrate can pass through the first avoidance gap to take out the substrate.
[0011] Preferably, the storage mechanism further comprises:
[0012] A shielding plate is arranged on a side wall of the extension plate along the second direction, the substrate can abut against the shielding plate, a second avoidance gap is provided between two adjacent shielding plates, the clamping member can pass through the second avoidance gap, and the second direction is perpendicular to the first direction.
[0013] Preferably, a plurality of groups of the bearing components are arranged between two adjacent extension plates, and the plurality of groups of the bearing components are arranged at intervals along a third direction, and the third direction is perpendicular to the first direction.
[0014] Preferably, the distance between two adjacent groups of the supporting components is greater than the dimension of the substrate along the third direction.
[0015] Preferably, the storage mechanism further comprises:
[0016] A bottom plate, wherein the extension plate is arranged on the bottom plate.
[0017] The loading and unloading device comprises the above-mentioned storage mechanism and a grabbing assembly, wherein the grabbing assembly comprises a mechanical arm and a clamping member arranged on the mechanical arm, and the clamping member is configured to clamp the substrate.
[0018] Preferably, the loading and unloading device further comprises:
[0019] A bracket, the storage mechanism is placed on the bracket, and the height of the bracket is adjustable.
[0020] Preferably, a slot is provided on the bracket, and the storage mechanism is mounted in the slot.
[0021] The spin coating equipment comprises the above-mentioned loading and unloading device and the spin coating machine.
[0022] Preferably, the spin coating machine comprises a spin coating panel, and the size of the spin coating panel is smaller than the size of the substrate.
[0023] Beneficial effects of the utility model:
[0024] The storage mechanism includes at least two extension plates and a bearing assembly, at least two extension plates are arranged at intervals along a first direction; the bearing assembly is used to carry a substrate, the bearing assembly includes two bearing plates, the two bearing plates are respectively arranged on the opposite wall surfaces of two adjacent extension plates, a first avoidance gap is provided between the two bearing plates, and a clamping member used to clamp a substrate can pass through the first avoidance gap to take out the substrate. An accommodating space is formed between the two adjacent extension plates, the two bearing plates can jointly support the substrate so that the substrate is accommodated in the accommodating space, and a first avoidance gap is provided between the two bearing plates for the clamping member to pass through, so that the clamping member can grab the substrate placed on the bearing assembly and then move out of the storage mechanism through the first avoidance gap to take the substrate out of the storage mechanism. The storage mechanism has a simple structure and can store substrates, and the setting of the first avoidance gap enables the clamping member to smoothly move out of the storage mechanism after grabbing the substrate, so that the loading and unloading of the substrate is very convenient, the loading and unloading efficiency is high, and automatic loading and unloading can be realized, which reduces labor costs and reduces work intensity.
[0025] The loading and unloading device includes the above-mentioned storage mechanism and the grabbing assembly, and the grabbing assembly includes a mechanical arm and a clamping member arranged on the mechanical arm, and the mechanical arm can accurately move to a specified position to take out the substrate from the storage mechanism or put the substrate into the storage mechanism. The clamping member is used to clamp and fix the substrate to ensure that the substrate will not fall off during the movement of the mechanical arm, which helps to protect the substrate from damage.
[0026] The spin coating equipment is used for surface coating of substrates, including loading and unloading devices and a spin coater. The substrate to be coated is placed on the spin coater through the loading and unloading devices. The spin coater can drive the substrate to rotate at high speed. Through the action of centrifugal force, the solution dripped on the substrate is evenly diffused to the entire substrate surface to form a coating. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] Figure 1 It is a structural schematic diagram of the storage mechanism provided by the utility model;
[0028] Figure 2 It is a schematic diagram of the loading process of the loading and unloading device provided by the utility model;
[0029] Figure 3 It is a schematic diagram of the spin coating equipment provided by the utility model.
[0030] In the figure:
[0031] 100. storage mechanism; 200. substrate;
[0032] 1. Extension board;
[0033] 2. Load-bearing assembly; 21. Load-bearing plate; 22. First avoidance gap;
[0034] 3. Shielding plate; 31. Second avoidance gap;
[0035] 4. Bottom plate;
[0036] 5. Clamping parts;
[0037] 6. Bracket;
[0038] 7. Spin coater; 71. Spin coating panel. DETAILED DESCRIPTION
[0039] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.
[0040] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0041] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0042] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.
[0043] The substrate is stored in a standard material box. When spin coating, the substrate must first be loaded onto the spin coating panel of the spin coater. In small-scale application scenarios such as laboratory testing, loading and unloading are usually done manually. Manual loading and unloading is inefficient and labor-intensive, and cannot be applied to large-scale production. In large-scale production application scenarios, clamps are usually used to complete automatic loading and unloading. However, due to the limitations of the standard material box, it is difficult for the clamp to grasp the edge of the substrate stored in the standard material box to take out the substrate, which brings inconvenience to substrate loading and unloading and affects the efficiency of spin coating.
[0044] In order to solve the above problems, Figures 1 to 3 As shown, this embodiment provides a storage mechanism 100. The storage mechanism 100 includes at least two extension plates 1 and a bearing assembly 2, wherein the at least two extension plates 1 are spaced apart along a first direction; the bearing assembly 2 is used to carry a substrate 200, and the bearing assembly 2 includes two bearing plates 21, which are respectively arranged on opposite walls of two adjacent extension plates 1, that is, the substrate 200 is placed on two oppositely arranged bearing plates 21, and there is a first avoidance gap 22 between the two bearing plates 21, and the clamping member 5 for clamping the substrate 200 can pass through the first avoidance gap 22 to take out the substrate 200. An accommodating space is formed between two adjacent extension plates 1, and the two carrying plates 21 can jointly support the substrate 200 so that the substrate 200 is accommodated in the accommodating space. A first avoidance gap 22 is provided between the two carrying plates 21 for the clamping member 5 to pass through, so that the clamping member 5 can grab the substrate 200 placed on the carrying assembly 2, and then move out of the storage mechanism 100 through the first avoidance gap 22 to take the substrate 200 out of the storage mechanism 100. The storage mechanism 100 has a simple structure and can store the substrate 200, and the setting of the first avoidance gap 22 enables the clamping member 5 to smoothly move out of the storage mechanism 100 after grabbing the substrate 200, so that the loading and unloading of the substrate 200 is very convenient, the loading and unloading efficiency is high, and automatic loading and unloading can be realized, which reduces labor costs and reduces work intensity.
[0045] It should be noted that the fewer the number of extension plates 1, the smaller the overall volume of the storage mechanism 100, the smaller the space occupied, and accordingly, the fewer substrates 200 that can be stored; the more the number of extension plates 1, the larger the overall volume of the storage mechanism 100, the larger the space occupied, and accordingly, the more substrates 200 that can be stored. The number of extension plates 1 is determined according to actual needs, and this embodiment does not limit this. For example, Figure 1 As shown, the number of the extension plates 1 is 6, and the number of the formed accommodation spaces is 5. The 5 accommodation spaces can all accommodate the substrate 200 through the supporting assembly 2.
[0046] Specifically, Figure 1As shown, the storage mechanism 100 further includes a shielding plate 3, which is disposed on a side wall of the extension plate 1 along the second direction, the substrate 200 can abut against the shielding plate 3, and a second avoidance gap 31 is provided between two adjacent shielding plates 3, and the clamping member 5 can pass through the second avoidance gap 31. The second direction is perpendicular to the first direction.
[0047] When the clamping member 5 is used to clamp the substrate 200 and store it in the storage mechanism 100, the shielding plate 3 can be used as a reference to help the clamping member 5 quickly and accurately locate the position of the substrate 200, that is, when the substrate 200 abuts against the shielding plate 3, it can be confirmed that the substrate 200 has been correctly placed on the carrier assembly 2; and the setting of the shielding plate 3 can effectively prevent the substrate 200 from sliding off or deviating from the carrier assembly 2. There is a second avoidance gap 31 between the two shielding plates 3, so that the clamping member 5 will not interfere with the shielding plate 3 when entering the storage mechanism 100 to clamp or place the substrate 200. It can be understood that when taking and placing the substrate 200, the substrate 200 leaves or enters the accommodating space from the other side of the extension plate 1 along the second direction.
[0048] In some embodiments, the shielding plate 3 and the extension plate 1 are integrally formed, and the manufacturing process of the integral forming is simpler and more efficient, which can reduce the cost of the manufacturing process. In other embodiments, the shielding plate 3 and the extension plate 1 are formed separately and then fixed together by a connecting piece. When one of the shielding plate 3 or the extension plate 1 is damaged, it can be removed and replaced separately, reducing the maintenance cost.
[0049] Preferably, if Figure 1 As shown, multiple groups of bearing components 2 are arranged between two adjacent extension plates 1, and the multiple groups of bearing components 2 are arranged at intervals along the third direction, wherein the third direction is perpendicular to the first direction. By arranging multiple groups of bearing components 2, the accommodation space between the two extension plates 1 can accommodate multiple substrates 200, and the multiple substrates 200 are carried on the multiple groups of bearing components 2 one by one. When taking out materials, the clamping member 5 sequentially takes the substrates 200 out of the storage mechanism 100 from top to bottom; when unloading materials, the clamping member 5 sequentially puts the substrates 200 back into the storage mechanism 100 from bottom to top.
[0050] In this embodiment, the distance between two adjacent groups of supporting components 2 is greater than the dimension of the substrate 200 along the third direction. It can be understood that at this time, there is a gap between the substrate 200 and the supporting components 2 located thereon. Figure 2As shown, after the clamping member 5 clamps the substrate 200, it first moves slightly upward. Since the spacing between the two adjacent groups of bearing components 2 is greater than the size of the substrate 200 along the third direction, the two sides of the substrate 200 along the third direction are not in contact with the bearing plate 21 at this time, and then it moves along the second direction to take it out of the storage mechanism 100. This setting can reduce the friction and wear that may be generated when moving the substrate 200, and avoid damage to the surface of the substrate 200 during the loading and unloading process. It can be understood that the unloading process is the reverse operation of the loading process.
[0051] Specifically, the storage mechanism 100 further includes a bottom plate 4, and the extension plate 1 is disposed on the bottom plate 4. The bottom plate 4 is the bottom structure of the storage mechanism 100, and is responsible for bearing and supporting the extension plate 1.
[0052] This embodiment also provides a loading and unloading device, including the above-mentioned storage mechanism 100 and a gripping assembly, the gripping assembly including a robot arm and the above-mentioned clamping member 5 disposed on the robot arm, the clamping member 5 being configured to clamp the substrate 200. The robot arm can accurately move to a specified position to take the substrate 200 out of the storage mechanism 100 or put the substrate 200 into the storage mechanism 100. The clamping member 5 is used to clamp and fix the substrate 200, ensuring that the substrate 200 does not fall off during the movement of the robot arm, which helps to protect the substrate 200 from damage.
[0053] In this embodiment, the clamping member 5 is a two-finger clamp, which has high precision and its opening and closing angle can be precisely controlled, which can ensure that the substrate 200 will not be damaged during the process of clamping and carrying the substrate 200; the two-finger clamp has a faster clamping and releasing speed, which can improve work efficiency; in addition, the two-finger clamp is smaller in size and is more suitable for operation in a small space. It should be noted that the clamping member 5 can also be a multi-finger clamp or a vacuum suction cup clamp, and any structure in the prior art that can clamp the substrate 200 can be used as the clamping member 5 in this embodiment, and this embodiment does not limit this.
[0054] Preferably, if Figure 3 As shown, the loading and unloading device also includes a bracket 6, and the storage mechanism 100 is placed on the bracket 6, and the height of the bracket 6 is adjustable. The height-adjustable bracket 6 allows the storage mechanism 100 to be adjusted in height according to actual needs, so that the grabbing component can clamp the substrate 200 more conveniently and quickly, reducing the moving distance of the robot arm, thereby improving work efficiency. And when the grabbing component fails and manual loading is required, the bracket 6 can be adjusted according to the height of the operator to adjust the storage mechanism 100 to a suitable height.
[0055] Specifically, a slot is provided on the bracket 6, and the storage mechanism 100 is locked in the slot. The slot design can ensure that the storage mechanism 100 is stably fixed on the bracket 6, avoid the storage mechanism 100 from shifting, improve stability and safety, and facilitate the positioning of the grab assembly.
[0056] like Figure 3 As shown, this embodiment also provides a spin coating device for coating the surface of a substrate 200. The spin coating device includes a loading and unloading device and a spin coater 7. The substrate 200 to be coated is placed on the spin coater 7 through the loading and unloading device. The spin coater 7 can drive the substrate 200 to rotate at a high speed. Through the action of centrifugal force, the solution dripped on the substrate 200 is evenly diffused to the entire surface of the substrate 200 to form a coating. The spin coater 7 is a common device in the prior art. With respect to its specific structure and principle, this embodiment will not be described in detail.
[0057] In this embodiment, the spin coating machine 7 includes a spin coating panel 71, and the size of the spin coating panel 71 is smaller than the size of the substrate 200. Since the size of the spin coating panel 71 is smaller than the size of the substrate 200, when the clamping member 5 places the substrate 200 on the spin coating panel 71, the clamping member 5 will not interfere with the spin coating panel 71, thereby protecting the clamping member 5 and the spin coating panel 71.
[0058] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.
Claims
1. A storage mechanism, characterized in that: include: At least two extension plates (1) are arranged at intervals along a first direction; A bearing assembly (2) for bearing a substrate (200), the bearing assembly (2) comprising two bearing plates (21), the two bearing plates (21) being respectively arranged on opposite wall surfaces of two adjacent extension plates (1), and a first avoidance gap (22) being provided between the two bearing plates (21); The clamping member (5) for clamping the substrate (200) can pass through the first avoidance gap (22) to take out the substrate (200).
2. The storage mechanism (100) according to claim 1, characterized in that: The storage mechanism (100) further comprises: A shielding plate (3), wherein the shielding plate (3) is arranged on a side wall of the extension plate (1) along a second direction, the substrate (200) can abut against the shielding plate (3), a second avoidance gap (31) is provided between two adjacent shielding plates (3), the clamping member (5) can pass through the second avoidance gap (31), and the second direction is perpendicular to the first direction.
3. The storage mechanism (100) according to claim 1, characterized in that: A plurality of groups of the bearing components (2) are arranged between two adjacent extension plates (1), and the plurality of groups of the bearing components (2) are arranged at intervals along a third direction, and the third direction is perpendicular to the first direction.
4. The storage mechanism (100) according to claim 3, characterized in that: The distance between two adjacent groups of the bearing components (2) is greater than the dimension of the substrate (200) along the third direction.
5. The storage mechanism (100) according to claim 1, characterized in that: The storage mechanism (100) further comprises: A bottom plate (4), the extension plate (1) being arranged on the bottom plate (4).
6. Loading and unloading device, characterized in that: It comprises a storage mechanism (100) as claimed in any one of claims 1 to 5 and a gripping assembly, wherein the gripping assembly comprises a robot arm and a clamping member (5) arranged on the robot arm, and the clamping member (5) is configured to clamp the substrate (200).
7. The loading and unloading device according to claim 6, characterized in that: The loading and unloading device also includes: A bracket (6), the storage mechanism (100) is placed on the bracket (6), and the height of the bracket (6) is adjustable.
8. The loading and unloading device according to claim 7, characterized in that: The bracket (6) is provided with a slot, and the storage mechanism (100) is locked in the slot.
9. Spin coating equipment, characterized in that It comprises the loading and unloading device and the spin coater (7) as described in claim 6.
10. The spin coating device according to claim 9, characterized in that: The spin coating machine (7) comprises a spin coating panel (71), and the size of the spin coating panel (71) is smaller than the size of the substrate (200).