Gallium nitride segmented heating epitaxial furnace

Abstract

The utility model discloses a gallium nitride segmented heating epitaxial furnace which comprises a furnace base, a furnace cover is arranged at the upper end of the furnace base, a flange connecting part is installed between the lower end of the furnace cover and the furnace base, a furnace pipe is installed at the upper end of the furnace base and located in the furnace cover, and the flange connecting part is connected with the furnace cover. The front end and the rear end of the furnace pipe are connected with an air inlet pipeline and an air outlet pipeline correspondingly. A driving part is installed on the front side of the furnace pipe, a heating resistance rod is connected to the driving part, the driving part is used for driving the heating resistance rod to rotate, the rear end of the heating resistance rod is located in a supporting part, and the supporting part is installed in the rear end of the furnace pipe. According to the gallium nitride segmented heating epitaxial furnace, fine regulation and control on the growth process of gallium nitride can be realized through heating in different temperature zones, so that high-quality and high-performance gallium nitride materials and devices are obtained, multi-angle heating can be performed, and the heating uniformity is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of gallium nitride preparation, in particular to a gallium nitride segmented heating epitaxial furnace. Background Art

[0002] The third generation of semiconductor materials represented by gallium nitride can emit blue light with a wavelength shorter than infrared due to its wide bandgap. At the same time, gallium nitride also has the characteristics of high electron mobility, high breakdown voltage, stable chemical properties, high temperature resistance, and corrosion resistance. It is very suitable for the production of radiation-resistant, high-frequency, high-power and high-density integrated electronic devices, as well as blue, green and ultraviolet photoelectronic devices. Therefore, gallium nitride has broad application prospects in semiconductor light-emitting diodes, laser diodes, ultraviolet detectors, and high-energy and high-frequency electronic devices.

[0003] In the patent application with authorization publication number CN217556352U, authorization publication date 2022-10-11, and titled "A Gallium Nitride Segmented Heating Epitaxial Furnace", a heating resistor is provided on the top of each furnace bottom plate. When in use, after the growth rods are arranged, the furnace cover is closed and fixed, so that the growth rods are divided into multiple area segments by multiple furnaces, and the gas in the furnace is transported and exhausted through the air inlet and outlet pipes. Heating resistors of different powers arranged on different furnace bottom plates realize heating with different temperature differences in different furnaces. In the actual use of the above-mentioned device, it is not convenient to provide better multi-angle heating function, which reduces the practicality of the gallium nitride single crystal growth furnace.

[0004] Therefore, we propose a gallium nitride segmented heating epitaxial furnace to solve the above problems. Utility Model Content

[0005] 1. Technical problems to be solved by the utility model:

[0006] The utility model aims to provide a gallium nitride segmented heating epitaxial furnace to solve the problems in the current market raised by the above background technology.

[0007] 2. Technical solution:

[0008] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a gallium nitride segmented heating epitaxial furnace, comprising a furnace base, a furnace cover is arranged at the upper end of the furnace base, a flange connection portion is installed between the lower end of the furnace cover and the furnace base, and a support seat and a matching plate are fixedly installed at the upper end of the furnace base, a "U"-shaped growth rod is placed at the upper end of the support seat, and the upper and lower ends of the middle part of the growth rod are respectively fitted with the furnace core and the matching plate, and the furnace core is installed at the upper end of the furnace base, and the furnace core is located inside the furnace cover, and the front and rear ends of the furnace core are respectively connected with an air inlet pipeline and an air outlet pipeline;

[0009] A driving member is installed on the front side of the furnace, and a heating resistor rod is connected to the driving member. The driving member is used to drive the heating resistor rod to rotate, and the rear end of the heating resistor rod is located inside the supporting member, and the supporting member is installed inside the rear end of the furnace.

[0010] Furthermore, an electric push rod is installed on the front side of the upper end of the furnace base, and a rack is fixedly connected to the output end of the electric push rod, and the rack slides left and right inside the upper end of the furnace base.

[0011] Through the above technical solution, the electric push rod drives the rack to move left and right.

[0012] Furthermore, the driving member includes a first swivel and a second swivel mounted on a bearing at the front end of the furnace, the rear ends of the first swivel and the second swivel are fixedly connected to a mounting frame, and the mounting frame is fixed on the outer side of the end of the heating resistor rod, and the front ends of the first swivel and the second swivel are respectively connected to a first half-toothed ring and a second half-toothed ring, and the first swivel and the second swivel are cocentric.

[0013] Through the above technical solution, the first rotating ring and the second rotating ring can respectively drive the first half gear ring and the second half gear ring to rotate.

[0014] Furthermore, the first half gear ring and the second half gear ring are respectively meshed with two sides of the guide gear, and the guide gear bearing is installed at the front end of the furnace, and a driving gear is fixed to the end of the guide gear.

[0015] Through the above technical solution, when the guide gear rotates, the first half gear ring and the second half gear ring can be used to rotate in the opposite direction.

[0016] Furthermore, the driving gear and the rack form a meshing structure.

[0017] Through the above technical solution, when the rack is displaced, it can drive the driving gear to rotate.

[0018] Furthermore, the support member includes an upper guide ring fixed to the inner wall of the furnace and a lower guide ring at the upper end of the furnace base, and support rods are slidably installed inside the upper guide ring and the lower guide ring, and the support rods are fixedly sleeved on the outer side of the rear end of the heating resistor rod.

[0019] Through the above technical solution, the support rod can slide inside the upper guide ring and the lower guide ring, thereby improving the support stability.

[0020] 3. Beneficial effects:

[0021] By adopting the technical solution provided by the utility model, compared with the prior art, the gallium nitride segmented heating epitaxial furnace of the utility model can achieve fine control of the gallium nitride growth process by heating in different temperature zones, thereby obtaining high-quality and high-performance gallium nitride materials and devices, and can perform multi-angle heating to improve heating uniformity. The specific contents are as follows:

[0022] When in use, after the growth rods are arranged, the furnace cover is closed and fixed, so that the growth rods are divided into multiple area segments by multiple furnaces, and the gas in the furnace is transported and discharged through the air inlet pipeline and the air outlet pipeline. The heating resistors of different powers arranged on different heating resistor rods realize heating with different temperature differences in different furnaces;

[0023] After the electric push rod is started, it drives the rack to move left and right. When the rack moves left and right, it drives the guide gear to rotate by meshing with the driving gear. After the guide gear rotates, it drives the first rotating ring and the second rotating ring to rotate in the opposite direction by meshing with the first half gear ring and the second half gear ring. When the first rotating ring and the second rotating ring rotate, the two heating resistor rods can be synchronously driven to reciprocate through the mounting frame to perform multi-angle heating, thereby improving the uniformity of heating, thereby improving the uniformity of the reaction gas adhesion on the growth rod and the molding effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic diagram of the overall side-view stereoscopic structure of the utility model;

[0025] Figure 2 This is a schematic diagram of the three-dimensional structure of the utility model after the furnace is installed;

[0026] Figure 3 This is a schematic diagram of the three-dimensional structure of the furnace side section of the utility model;

[0027] Figure 4 This is a side view of the three-dimensional structure of the driving member of the utility model;

[0028] Figure 5 It is a schematic diagram of the three-dimensional structure of the support member of the utility model in side section.

[0029] In the figure: 1. furnace base; 2. furnace cover; 3. flange connection; 4. air inlet pipe; 5. air outlet pipe; 6. furnace core; 7. electric push rod; 8. rack; 9. driving gear; 10. growth rod; 11. driving member; 111. first rotating ring; 112. second rotating ring; 113. mounting frame; 114. first half gear ring; 115. second half gear ring; 116. guide gear; 12. heating resistor rod; 13. supporting member; 131. upper guide ring; 132. lower guide ring; 133. support rod; 14. supporting seat; 15. matching plate. DETAILED DESCRIPTION

[0030] In order to facilitate the understanding of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "page", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0032] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0033] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed", "provided with", etc. should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. Example

[0034] See also Figure 1-5 A gallium nitride segmented heating epitaxial furnace comprises a furnace base 1, a furnace cover 2 is arranged at the upper end of the furnace base 1, a flange connection part 3 is installed between the lower end of the furnace cover 2 and the furnace base 1, and a support seat 14 and a matching plate 15 are fixedly installed at the upper end of the furnace base 1, a "U"-shaped growth rod 10 is placed at the upper end of the support seat 14, and the upper and lower ends of the middle part of the growth rod 10 are respectively fitted with a furnace 6 and the matching plate 15, and the furnace 6 is installed at the upper end of the furnace base 1, and the furnace 6 is located inside the furnace cover 2, and the front and rear ends of the furnace 6 are respectively connected with an air inlet pipeline 4 and an air outlet pipeline 5;

[0035] When in use, the growth rods 10 are arranged, the furnace cover 2 is closed and fixed, so that the growth rods 10 are divided into multiple area sections by multiple furnaces 6, and the gas inlet pipe 4 and the gas outlet pipe 5 are used to realize the gas transmission and exhaust in the furnace 6, and the heating resistors of different powers arranged on different heating resistor rods 12 realize heating with different temperature differences in different furnaces 6;

[0036] A driving member 11 is installed on the front side of the furnace 6, and a heating resistor rod 12 is connected to the driving member 11. The driving member 11 is used to drive the heating resistor rod 12 to rotate, and the rear end of the heating resistor rod 12 is located inside the support member 13, and the support member 13 is installed inside the rear end of the furnace 6; an electric push rod 7 is installed on the front side of the upper end of the furnace base 1, and the output end of the electric push rod 7 is fixedly connected to a rack 8, and the rack 8 slides left and right inside the upper end of the furnace base 1; the driving member 11 includes a first rotating ring 111 and a second rotating ring 112 installed at the front end of the furnace 6 by a bearing, and the rear ends of the first rotating ring 111 and the second rotating ring 112 are fixedly connected to a mounting bracket 113, and the mounting bracket 113 is sleeved and fixed on the outer side of the end of the heating resistor rod 12, and The front ends of the first rotating ring 111 and the second rotating ring 112 are respectively connected with the first half gear ring 114 and the second half gear ring 115, and the first rotating ring 111 and the second rotating ring 112 are cocentric; the first half gear ring 114 and the second half gear ring 115 are respectively meshed with the two sides of the guide gear 116, and the guide gear 116 bearing is installed at the front end of the furnace 6, and the end of the guide gear 116 is fixed with the driving gear 9; the driving gear 9 and the rack 8 form a meshing structure; the support member 13 includes an upper guide ring 131 respectively fixed to the inner wall of the furnace 6 and a lower guide ring 132 at the upper end of the furnace base 1, and the upper guide ring 131 and the lower guide ring 132 are slidably installed with a support rod 133 inside, and the support rod 133 is fixedly sleeved on the outer side of the rear end of the heating resistor rod 12;

[0037] The electric push rod 7 is started, and the electric push rod 7 drives the rack 8 to move left and right. When the rack 8 moves left and right, the meshing action with the driving gear 9 drives the guide gear 116 to rotate. After the guide gear 116 rotates, the meshing action with the first half gear ring 114 and the second half gear ring 115 drives the first rotating ring 111 and the second rotating ring 112 to rotate in the opposite direction. When the first rotating ring 111 and the second rotating ring 112 rotate, the two heating resistor rods 12 can be synchronously driven to reciprocate through the mounting frame 113 to perform multi-angle heating, thereby improving the uniformity of heating, thereby improving the uniformity of the reaction gas adhesion on the growth rod 10 and the molding effect.

[0038] Working principle: When using the gallium nitride segmented heating epitaxial furnace, Figure 1-5As shown, the growth rod 10 is arranged on the support seat 14, the furnace 6 is covered and the furnace cover 2 is closed, and then fixed, so that the growth rod 10 is divided into a plurality of area sections by a plurality of furnaces 6, and the gas in the furnace 6 is transported and discharged through the air inlet pipeline 4 and the air outlet pipeline 5, and the heating resistors of different powers arranged on different heating resistor rods 12 realize heating with different temperature differences in different furnaces 6, and then the electric push rod 7 is started, and the meshing action of the rack 8 and the driving gear 9 and the meshing action of the guide gear 116 and the first half gear ring 114 and the second half gear ring 115 are used to drive the two heating resistor rods 12 to reciprocate, perform multi-angle heating, improve the uniformity of heating, and further improve the uniformity of the reaction gas adhering to the growth rod 10 and the molding effect.

[0039] The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0040] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art may still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A gallium nitride segmented heating epitaxial furnace, characterized in that: The invention comprises a furnace base (1), a furnace cover (2) being arranged at the upper end of the furnace base (1), a flange connection portion (3) being installed between the lower end of the furnace cover (2) and the furnace base (1), and a support seat (14) and a matching plate (15) being fixedly installed at the upper end of the furnace base (1), a "U"-shaped growth rod (10) being placed at the upper end of the support seat (14), and the upper and lower ends of the middle part of the growth rod (10) being respectively fitted with a furnace core (6) and the matching plate (15), and the furnace core (6) being installed at the upper end of the furnace base (1), and the furnace core (6) being located inside the furnace cover (2), and the front and rear ends of the furnace core (6) being respectively connected with an air inlet pipeline (4) and an air outlet pipeline (5); A driving member (11) is installed on the front side of the furnace (6), and a heating resistor rod (12) is connected to the driving member (11), the driving member (11) is used to drive the heating resistor rod (12) to rotate, and the rear end of the heating resistor rod (12) is located inside a supporting member (13), and the supporting member (13) is installed inside the rear end of the furnace (6).

2. The gallium nitride segmented heating epitaxial furnace according to claim 1, characterized in that: An electric push rod (7) is installed on the front side of the upper end of the furnace base (1), and a rack (8) is fixedly connected to the output end of the electric push rod (7), and the rack (8) slides left and right inside the upper end of the furnace base (1).

3. The gallium nitride segmented heating epitaxial furnace according to claim 1, characterized in that: The driving member (11) comprises a first rotating ring (111) and a second rotating ring (112) which are bearing-mounted on the front end of the furnace (6); the rear ends of the first rotating ring (111) and the second rotating ring (112) are fixedly connected to a mounting frame (113); the mounting frame (113) is sleeved and fixed on the outer side of the end of the heating resistor rod (12); the front ends of the first rotating ring (111) and the second rotating ring (112) are respectively connected to a first half-toothed ring (114) and a second half-toothed ring (115); and the first rotating ring (111) and the second rotating ring (112) are cocentric.

4. The gallium nitride segmented heating epitaxial furnace according to claim 3, characterized in that: The first half gear ring (114) and the second half gear ring (115) are respectively meshed with two sides of a guide gear (116), and a bearing of the guide gear (116) is mounted on the front end of the furnace (6), and a driving gear (9) is fixed to the end of the guide gear (116).

5. The gallium nitride segmented heating epitaxial furnace according to claim 4, characterized in that: The driving gear (9) and the rack (8) form a meshing structure.

6. The gallium nitride segmented heating epitaxial furnace according to claim 1, characterized in that: The support member (13) comprises an upper guide ring (131) respectively fixed to the inner wall of the furnace (6) and a lower guide ring (132) at the upper end of the furnace base (1); a support rod (133) is slidably mounted inside the upper guide ring (131) and the lower guide ring (132); and the support rod (133) is fixedly sleeved on the outer side of the rear end of the heating resistor rod (12).

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