Vibration reduction platform based on low-frequency limit cooperative control

Abstract

The utility model discloses a vibration reduction platform based on low-frequency limit cooperative control, which belongs to the technical field of vibration reduction platforms and comprises a bottom plate, a top plate, a vibration reduction component, a pressure bearing part and a sliding component. The top plate is connected with the bottom plate through the damping assembly. The vibration reduction assembly comprises a supporting block, a wedge-shaped piece, a movable piece, a movable rod, a fixed plate and a vibration reduction spring A; the four supporting blocks are evenly arranged on one side of the top plate through the pressure bearing pieces. The wedge-shaped piece is connected with one end of the supporting block; the two movable parts are symmetrically arranged on the two sides of the wedge-shaped part. The movable rods are fixedly arranged on the sides, deviating from each other, of the two movable parts; the fixed plate is sleeved on the movable rod; according to the vibration reduction platform based on low-frequency limit cooperative control, vibration force can be dispersed and buffered through the arranged vibration reduction assembly, the vibration frequency can be reduced, low-frequency limit vibration reduction is achieved, cooperative control over the vibration force can be achieved through multiple dispersion and buffering, and the vibration reduction effect is improved. Therefore, the effect of low-frequency limit cooperative control is realized.

Description

Technical Field

[0001] The utility model belongs to the technical field of vibration reduction platforms, in particular to a vibration reduction platform based on low-frequency limit cooperative control. Background Art

[0002] With the development of science and technology, ultra-precision processing and measuring equipment represented by lithography machines, scanning tunneling microscopes (STM), scanning probe microscopes (SPM), atomic force microscopes (AFM), etc. have been increasingly widely used.

[0003] At present, most vibration reduction platforms on the market can only achieve high-frequency vibration reduction effects. However, due to the high precision of ultra-precision processing and measurement equipment such as lithography machines, it is difficult for most vibration reduction platforms to achieve low-frequency extreme coordinated control of ultra-precision processing and measurement equipment such as lithography machines, thus affecting the use effect of the vibration reduction platform. Utility Model Content

[0004] The utility model aims to provide a vibration reduction platform based on low-frequency limit cooperative control to solve the problems raised in the background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vibration reduction platform based on low-frequency limit collaborative control, comprising a bottom plate, a top plate, a vibration reduction assembly, a pressure-bearing member and a sliding assembly; the top plate is connected to the bottom plate through the vibration reduction assembly; wherein the vibration reduction assembly comprises a support block, a wedge-shaped member, a movable member, a movable rod, a fixed plate and a vibration reduction spring A; the four support blocks are evenly arranged on the side of the top plate close to the bottom plate through the pressure-bearing member; the wedge-shaped member is fixedly connected to the end of the support block away from the top plate; the two movable members are symmetrically arranged on both sides of the wedge-shaped member through a sliding assembly; wherein the movable member is slidably matched with the bottom plate; the movable rod is fixedly arranged on the side opposite to the two movable members; the fixed plate is sleeved on the movable rod, and the fixed plate is fixedly connected to the bottom plate; the vibration reduction spring A is sleeved on the movable rod, and the two ends of the vibration reduction spring A are respectively fixedly connected to the movable member and the fixed plate.

[0006] As a preferred embodiment, the wedge-shaped piece is in an isosceles trapezoidal structure, and the size of the side of the wedge-shaped piece close to the bottom plate is smaller than the size of the side of the wedge-shaped piece away from the bottom plate.

[0007] As a preferred embodiment, the movable member is in a right-angle trapezoidal structure, and the inclined surface of the movable member is in sliding contact with the inclined surface of the wedge-shaped member.

[0008] As a preferred embodiment, the vibration reduction assembly also includes a damping telescopic rod and a vibration reduction spring B; one end of the damping telescopic rod is fixedly connected to the base plate, and the other end is fixedly connected to the wedge-shaped piece; the vibration reduction spring B is sleeved on the damping telescopic rod, and the two ends of the vibration reduction spring B are respectively fixedly connected to the base plate and the wedge-shaped piece.

[0009] As a preferred embodiment, the pressure-bearing member is composed of a plurality of X-shaped members.

[0010] As a preferred embodiment, the sliding assembly includes a sliding groove and a sliding block; the sliding grooves are provided on the opposite surfaces of the two movable parts; the two sliding blocks are symmetrically fixed on both sides of the wedge-shaped part; wherein the sliding blocks are slidably matched with the sliding grooves.

[0011] As a preferred embodiment, the sliding block is in a T-shaped structure.

[0012] Compared with the prior art, the technical effects and advantages of the utility model are as follows:

[0013] The vibration reduction platform based on low-frequency limit collaborative control is provided with a vibration reduction component. When it is subjected to the vibration force generated by ultra-precision processing and measuring equipment such as a photolithography machine, the vibration force will be transmitted to the pressure-bearing part, so that the pressure-bearing part can initially reduce the vibration force. Then, the vibration force will be transmitted to the wedge-shaped part through the support block, so that the wedge-shaped part moves downward, and the wedge-shaped part squeezes the movable part through the sliding component, so that the two movable parts slide away from each other on the bottom plate, so that the wedge-shaped part and the movable part can disperse the vibration force, and the vibration reduction of the vibration force is achieved again. When the two movable parts slide away from each other on the bottom plate, the movable rod will slide on the fixed plate, so that the vibration reduction spring A is forced to contract, so that the vibration reduction spring A can further reduce and buffer the vibration force.

[0014] This vibration reduction platform based on low-frequency extreme collaborative control can not only reduce the frequency of vibration and achieve low-frequency extreme vibration reduction by dispersing and buffering the vibration force, but also achieve collaborative control of the vibration force through multiple dispersions and buffers, thereby achieving the effect of low-frequency extreme collaborative control.

[0015] The vibration reduction platform based on low-frequency limit collaborative control is provided with a damping telescopic rod and a vibration reduction spring B, so that when the wedge moves downward, the damping telescopic rod and the vibration reduction spring B are forced to contract, so that the vibration reduction spring B further reduces the vibration force.

[0016] The vibration reduction platform based on low-frequency extreme collaborative control can not only improve the connection strength of the pressure-bearing part itself by setting a pressure-bearing part, so that the utility model can remain stable when subjected to vibration force, but also can make the pressure-bearing part undergo preliminary vibration reduction due to its own shape structure when subjected to vibration force, thereby greatly improving the effect of low-frequency extreme vibration reduction.

[0017] The vibration reduction platform based on low-frequency limit collaborative control sets a sliding groove and a sliding block, utilizes the sliding block and the sliding groove to slide together, sets the sliding block into a T-shaped structure, restricts the sliding block in the sliding groove, makes the inclined surface of the wedge-shaped part always contact the inclined surface of the movable part, thereby ensuring the fixation of the position between the bottom plate and the top plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0020] Figure 2 It is a cross-sectional view of the overall structure of the utility model;

[0021] Figure 3 It is a partial structural split cross-sectional view of the utility model;

[0022] Figure 4 For the utility model Figure 2 Enlarged schematic diagram at point A in the middle.

[0023] Description of reference numerals:

[0024] In the figure:

[0025] 1. Bottom plate; 2. Top plate; 3. Vibration reduction assembly; 4. Pressure bearing member; 5. Sliding assembly;

[0026] 301, support block; 302, wedge-shaped member; 303, movable member; 304, movable rod; 305, fixed plate; 306, damping spring A; 307, damping telescopic rod; 308, damping spring B;

[0027] 501. Sliding groove; 502. Sliding block. DETAILED DESCRIPTION

[0028] In the following description, a large number of specific details are given to provide a more thorough understanding of the utility model. However, it is obvious to those skilled in the art that the utility model can be implemented without one or more of these details. In other examples, in order to avoid confusion with the utility model, some technical features known in the art are not described.

[0029] Unless otherwise defined, the directions of up, down, left, right, front, back, inside and outside involved in this document are based on the directions of up, down, left, right, front, back, inside and outside in the figures shown in the present utility model, and are explained here together.

[0030] The connection method can be bonding, welding, bolt connection, etc., depending on actual needs.

[0031] See also Figures 1 to 4 As shown, this embodiment includes a bottom plate 1, a top plate 2, a vibration reduction assembly 3, a pressure bearing member 4 and a sliding assembly 5;

[0032] The top plate 2 is connected to the bottom plate 1 through a vibration reduction assembly 3; wherein the vibration reduction assembly 3 includes a support block 301, a wedge 302, a movable part 303, a movable rod 304, a fixed plate 305 and a vibration reduction spring A306; four support blocks 301 are evenly arranged on the side of the top plate 2 close to the bottom plate 1 through a pressure-bearing member 4; the wedge 302 is fixedly connected to the end of the support block 301 away from the top plate 2; two movable parts 303 are symmetrically arranged on both sides of the wedge 302 through a sliding assembly 5; wherein the movable part 303 is slidably matched with the bottom plate 1; the movable rod 304 is fixedly arranged on the opposite side of the two movable parts 303; the fixed plate 305 is sleeved on the movable rod 304, and the fixed plate 305 is fixedly connected to the bottom plate 1; the vibration reduction spring A306 is sleeved on the movable rod 304, and the two ends of the vibration reduction spring A306 are respectively fixedly connected to the movable part 303 and the fixed plate 305.

[0033] The utility model sets a vibration reduction component 3. When the vibration force generated by ultra-precision processing and measuring equipment such as a photolithography machine is subjected to, the vibration force will be transmitted to the pressure-bearing member 4, so that the pressure-bearing member 4 can initially reduce the vibration force. Then, the vibration force will be transmitted to the wedge-shaped member 302 through the support block 301, so that the wedge-shaped member 302 moves downward, and the wedge-shaped member 302 squeezes the movable member 303 through the sliding component 5, so that the two movable members 303 slide away from each other on the bottom plate 1, so that the wedge-shaped member 302 and the movable member 303 can disperse the vibration force, and the vibration reduction of the vibration force is achieved again. When the two movable members 303 slide away from each other on the bottom plate 1, the movable rod 304 will slide on the fixed plate 305, so that the vibration reduction spring A306 is forced to contract, so that the vibration reduction spring A306 can further reduce and buffer the vibration force.

[0034] The utility model can not only reduce the frequency of vibration and achieve vibration reduction at the low-frequency limit by dispersing and buffering the vibration force, but also realize coordinated control of the vibration force through multiple dispersions and buffers, thereby achieving the effect of coordinated control of the low-frequency limit.

[0035] As a preferred embodiment, the wedge 302 is in an isosceles trapezoidal structure, and the size of the side of the wedge 302 close to the bottom plate 1 is smaller than the size of the side of the wedge 302 away from the bottom plate 1, and the movable member 303 is in a right-angled trapezoidal structure, and the inclined surface of the movable member 303 is in sliding contact with the inclined surface of the wedge 302. The wedge 302 is moved downward, and the inclined surface of the wedge 302 presses the inclined surface of the movable member 303, so that the two movable members 303 slide away from each other on the bottom plate 1, and the inclined surfaces of the wedge 302 and the movable member 303 are in contact, which can offset the transmission of part of the vibration force, and disperse the vibration force, and achieve vibration reduction again.

[0036] As a preferred embodiment, the vibration reduction assembly 3 further includes a damping telescopic rod 307 and a vibration reduction spring B308; one end of the damping telescopic rod 307 is fixedly connected to the bottom plate 1, and the other end is fixedly connected to the wedge 302; the vibration reduction spring B308 is sleeved on the damping telescopic rod 307, and the two ends of the vibration reduction spring B308 are respectively fixedly connected to the bottom plate 1 and the wedge 302. The utility model provides the damping telescopic rod 307 and the vibration reduction spring B308, so that when the wedge 302 moves downward, the damping telescopic rod 307 and the vibration reduction spring B308 are forced to contract, so that the vibration reduction spring B308 further reduces the vibration force.

[0037] As a preferred embodiment, the pressure-bearing member 4 is formed by two X-shaped members. By providing the pressure-bearing member 4, the utility model can not only improve the connection strength of the pressure-bearing member 4 itself, so that the utility model can remain stable when subjected to vibration force, but also can make the pressure-bearing member 4 bear vibration force. Due to the shape and structure of the pressure-bearing member 4 itself, the vibration force can be initially reduced, greatly improving the effect of low-frequency limit vibration reduction.

[0038] As a preferred embodiment, the sliding assembly 5 includes a sliding groove 501 and a sliding block 502; the sliding groove 501 is provided on the opposite surfaces of the two movable members 303; the two sliding blocks 502 are symmetrically fixed on both sides of the wedge-shaped member 302; wherein the sliding block 502 is slidably matched with the sliding groove 501; wherein the sliding block 502 is in a T-shaped structure. The utility model sets the sliding groove 501 and the sliding block 502, utilizes the sliding block 502 to slide with the sliding groove 501, sets the sliding block 502 in a T-shaped structure, restricts the sliding block 502 in the sliding groove 501, makes the inclined surface of the wedge-shaped member 302 always contact the inclined surface of the movable member 303, thereby ensuring the fixation of the position between the bottom plate 1 and the top plate 2.

[0039] How it works

[0040] When the vibration reduction platform based on low-frequency limit cooperative control is subjected to the vibration force generated by ultra-precision processing and measuring equipment such as a photolithography machine, the vibration force will be transmitted to the pressure-bearing member 4, so that the pressure-bearing member 4 can initially reduce the vibration force, and then the vibration force will be transmitted to the wedge-shaped member 302 through the support block 301, so that the wedge-shaped member 302 moves downward, so that the inclined surface of the wedge-shaped member 302 presses the inclined surface of the movable member 303, so that the sliding block 502 slides in the sliding groove 501, and the two movable members 303 slide away from each other on the bottom plate 1, so that the wedge-shaped member 302 and the movable member 303 slide away from each other on the bottom plate 1. The inclined contact between 03 can offset the transmission of part of the vibration force and disperse the vibration force, thereby realizing the vibration reduction of the vibration force again, and when the two movable parts 303 slide away from each other on the base plate 1, the movable rod 304 will slide on the fixed plate 305, causing the vibration reduction spring A306 to be forced to contract, so that the vibration reduction spring A306 can further reduce the vibration force, and when the wedge-shaped part 302 moves downward, the damping telescopic rod 307 and the vibration reduction spring B308 will be forced to contract, so that the vibration reduction spring B308 can further reduce the vibration force.

[0041] It should be noted that, in this article, relational terms such as one and two are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions. The sentence "includes an element defined by ... does not exclude the existence of other identical elements in the process, method, article or device including the element".

[0042] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vibration reduction platform based on low-frequency limit cooperative control, characterized in that: include: Bottom plate (1); A top plate (2) connected to the bottom plate (1) via a vibration reduction assembly (3); The vibration reduction assembly (3) comprises a support block (301), a wedge-shaped member (302), a movable member (303), a movable rod (304), a fixed plate (305) and a vibration reduction spring A (306); the four support blocks (301) are evenly arranged on a side of the top plate (2) close to the bottom plate (1) through a pressure-bearing member (4); the wedge-shaped member (302) is fixedly connected to an end of the support block (301) away from the top plate (2); the two movable members (303) are symmetrically arranged on the wedge-shaped member through a sliding assembly (5). (302) on both sides; wherein the movable member (303) is slidably matched with the bottom plate (1); the movable rod (304) is fixedly arranged on the opposite side of the two movable members (303); the fixed plate (305) is sleeved on the movable rod (304), and the fixed plate (305) is fixedly connected to the bottom plate (1); the damping spring A (306) is sleeved on the movable rod (304), and the two ends of the damping spring A (306) are respectively fixedly connected to the movable member (303) and the fixed plate (305).

2. A vibration reduction platform based on low-frequency limit cooperative control according to claim 1, characterized in that: The wedge-shaped piece (302) has an isosceles trapezoidal structure, and the size of the side of the wedge-shaped piece (302) close to the bottom plate (1) is smaller than the size of the side of the wedge-shaped piece (302) away from the bottom plate (1).

3. A vibration reduction platform based on low-frequency limit cooperative control according to claim 2, characterized in that: The movable member (303) has a right-angled trapezoidal structure, and the inclined surface of the movable member (303) is in sliding contact with the inclined surface of the wedge-shaped member (302).

4. A vibration reduction platform based on low-frequency limit cooperative control according to claim 3, characterized in that: The vibration reduction assembly (3) further comprises: A damping telescopic rod (307), one end of which is fixedly connected to the base plate (1), and the other end of which is fixedly connected to the wedge-shaped member (302); The vibration-damping spring B (308) is sleeved on the damping telescopic rod (307), and two ends of the vibration-damping spring B (308) are respectively fixedly connected to the bottom plate (1) and the wedge-shaped member (302).

5. The vibration reduction platform based on low-frequency limit cooperative control according to claim 1, characterized in that: The pressure-bearing member (4) is composed of a plurality of X-shaped members.

6. A vibration reduction platform based on low-frequency limit cooperative control according to claim 4, characterized in that: The sliding assembly (5) comprises: Sliding grooves (501) are provided on the opposing surfaces of the two movable parts (303); Two sliding blocks (502) are symmetrically fixed on both sides of the wedge-shaped member (302); Wherein, the sliding block (502) is slidably matched with the sliding groove (501).

7. A vibration reduction platform based on low-frequency limit cooperative control according to claim 6, characterized in that: The sliding block (502) has a T-shaped structure.

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