Diffusion furnace tail discharge device and diffusion furnace
By setting up a second pipeline and cooling, filtration and power units in the diffusion furnace tail-row device, and using corrosion-resistant materials, the corrosion problem of exhaust pipes is solved, the service life is extended and equipment losses are reduced.
Patent Information
- Application Number
- CN202420252396.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-01
- Publication Date
- 2025-01-10
- Estimated Expiration
- 2034-02-01
AI Technical Summary
The pipes of the existing diffusion furnace tail discharge device are prone to accumulate solutions such as metaphosphoric acid at the docking point between the exhaust pipe, causing corrosion of the exhaust pipe, shortening the service life and increasing cost consumption.
A diffusion furnace tail-draft device is designed, and the acidic substance generated at the docking of the first pipeline and the exhaust pipe is discharged to the collection assembly in time by providing a second pipeline, combining cooling, filtration and power units to reduce exhaust gas temperature and promote flow. , reduce the accumulation of acidic substances, and use high-temperature and corrosion-resistant connecting parts and pipelines to extend their service life.
It effectively avoids the accumulation of acidic substances at the docking point, extends the service life of the exhaust pipes and pipelines, reduces equipment losses, and improves maintenance efficiency.
Smart Images
Figure CN222336095U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of solar cell manufacturing equipment, in particular to a diffusion furnace tail row device and a diffusion furnace. Background Art
[0002] The diffusion furnace is used in the diffusion process of the solar cell production process. In the prior art, the pipeline of the tail exhaust device of the diffusion furnace extends into the tail gas pipe of the diffusion furnace, and the tail gas generated by the diffusion furnace enters the tail exhaust device of the diffusion furnace through the end face of the pipeline of the tail exhaust device of the diffusion furnace, thereby exhausting the tail gas. The tail gas is easily accumulated between the inner wall of the tail gas pipe and the outer wall of the pipeline of the tail exhaust device of the diffusion furnace, causing the solution such as metaphosphoric acid to accumulate at the joint between the pipeline of the tail exhaust device of the diffusion furnace and the tail gas pipe, resulting in the corrosion of the tail gas pipe, shortening the service life and increasing the cost consumption. Utility Model Content
[0003] The utility model aims to provide a diffusion furnace tail exhaust device and a diffusion furnace, which are used to solve the technical problem that acid is easily accumulated at the joint between the pipeline of the diffusion furnace tail exhaust device and the tail gas pipe, causing the tail gas pipe to be corroded, so as to increase the service life of the tail gas pipe.
[0004] In order to achieve the above-mentioned purpose, in a first aspect, the utility model provides a diffusion furnace tail exhaust device, comprising a first pipeline, a second pipeline and a collecting assembly, wherein one end of the first pipeline is used to communicate with the tail gas pipe of the diffusion furnace, and the other end is connected to the collecting assembly, and is used to discharge the tail gas discharged from the diffusion furnace to the collecting assembly. One end of the second pipeline is connected to the joint between the first pipeline and the tail gas pipe, and the other end is connected to the collecting assembly, and is used to discharge the acidic substances generated at the joint to the collecting assembly.
[0005] When the above technical solution is adopted, the setting of the second pipeline can discharge the acidic substances generated at the joint between the first pipeline and the tail gas pipe to the collection component in time, thereby avoiding the accumulation of acidic substances at the joint, avoiding the acidic substances from corroding the tail gas pipe and the first pipeline, extending the service life of the tail gas pipe and the first pipeline, and reducing equipment loss.
[0006] In a possible implementation, the collection component includes a cooling unit and a collection unit connected in sequence, the cooling unit is connected to the first pipeline, and is used to receive and cool the exhaust gas discharged from the first pipeline, and discharge the cooled exhaust gas to the collection unit. The collection unit is used to collect the cooled exhaust gas. The other end of the second pipeline is connected to the input end of the cooling unit or the input end of the collection unit, and is used to discharge the acidic substances generated at the docking point to the cooling unit or the collection unit.
[0007] When the above technical solution is adopted, the cooling unit first receives and cools the exhaust gas discharged from the first pipeline, and then discharges the cooled exhaust gas to the collection unit to reduce the temperature of the exhaust gas and prevent the high-temperature exhaust gas from damaging the collection unit. At the same time, the gaseous exhaust gas is converted into liquid exhaust gas, which reduces the space occupied by the exhaust gas and facilitates the collection of the exhaust gas.
[0008] In a possible implementation, the collection component further includes a filtering unit connected between the cooling unit and the collection unit, for filtering the cooled exhaust gas discharged from the cooling unit and then discharging it to the collection unit.
[0009] In one possible implementation, the collection component also includes a power unit, the inlet end of the power unit is connected to the outlet end of the filter unit, for receiving the gaseous exhaust gas filtered by the filter unit, and the outlet end of the power unit is connected to the collection unit, for discharging the gaseous exhaust gas to the collection unit.
[0010] When the above technical solution is adopted, the setting of the power unit can provide power for the gaseous exhaust gas, accelerate the flow and collection of the exhaust gas, and prevent the exhaust gas from gathering in the filter unit or the cooling unit, affecting the emission and collection of the exhaust gas.
[0011] In a possible implementation, the butt joint dimension between one end of the first pipeline and the tail gas pipe of the diffusion furnace is less than 3 cm.
[0012] When the above technical solution is adopted, the axial overlap size of the first pipeline and the tail pipe at the joint is limited, and the accommodation space between the outer wall of the first pipeline and the inner wall of the tail pipe at the joint is reduced, thereby reducing the accumulation of tail gas at the joint, reducing the acidic substances accumulated at the joint, and correspondingly reducing the degree of corrosion of the tail pipe and the first pipeline by the acidic substances, and extending the service life of the tail pipe and the first pipeline. Not only that, compared with the situation in the prior art where the docking size is greater than 10cm, the docking size of the present application is smaller, and the accommodation space between the outer wall of the first pipeline and the inner wall of the tail pipe is smaller, which reduces the accumulation of tail gas at the joint, reduces the acidic substances accumulated at the joint, and reduces the loss of equipment by acidic substances.
[0013] In a possible implementation, the diffusion furnace tail row device also includes a connecting piece, which is arranged at the joint between the first pipeline and the tail gas pipe and is used to connect the first pipeline, the second pipeline and the tail gas pipe.
[0014] In a possible implementation, the connecting piece is made of a high temperature resistant and corrosion resistant material.
[0015] When the above technical solution is adopted, the connecting parts are prevented from being damaged and corroded by high-temperature exhaust gas, the service life of the connecting parts is extended, and consumables are reduced.
[0016] In a possible implementation, the connecting piece is a polytetrafluoroethylene connecting piece.
[0017] In a possible implementation, the first pipeline is made of a material resistant to acid corrosion.
[0018] When the above technical solution is adopted, the first pipeline is prevented from being damaged and corroded by high-temperature exhaust gas, the service life of the first pipeline is extended, and consumables are reduced.
[0019] In the second aspect, the utility model also provides a diffusion furnace, comprising a furnace body, an exhaust pipe and the diffusion furnace tail discharge device described in the first aspect or any possible implementation of the first aspect, wherein the two ends of the exhaust pipe are respectively connected to the furnace body and the diffusion furnace tail discharge device, for discharging the exhaust gas in the furnace body to the diffusion furnace tail discharge device.
[0020] The beneficial effects of the diffusion furnace provided in the second aspect can refer to the beneficial effects of the diffusion furnace tail exhaust device described in the first aspect, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:
[0022] Figure 1 A schematic diagram of a diffusion furnace tail exhaust device and a diffusion furnace provided by an embodiment of the utility model;
[0023] Figure 2 The figure is a schematic diagram of the positional relationship between the tail gas pipe and the first pipeline provided in the prior art.
[0024] Reference numerals:
[0025] 1'-first pipeline, 51'-furnace body, 52'-tail gas pipe,
[0026] 1-first pipeline, 2-second pipeline, 3-collection component, 31-cooling unit, 32-collection unit,
[0027] 33-filter unit, 34-power unit, 4-connecting piece, 5-diffusion furnace, 51-furnace body, 52-exhaust pipe. DETAILED DESCRIPTION
[0028] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.
[0029] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.
[0030] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. The meaning of "several" is one or more, unless otherwise clearly and specifically defined.
[0031] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.
[0032] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0033] See also Figure 1 As shown, the embodiment of the utility model provides a diffusion furnace tail exhaust device, including a first pipeline 1, a second pipeline 2 and a collection assembly 3, one end of the first pipeline 1 is used to communicate with the tail gas pipe 52 of the diffusion furnace 5, and the other end is connected to the collection assembly 3, and is used to discharge the tail gas discharged from the diffusion furnace 5 to the collection assembly 3. One end of the second pipeline 2 is connected to the joint between the first pipeline 1 and the tail gas pipe 52, and the other end is connected to the collection assembly 3, and is used to discharge the acidic substances generated at the joint to the collection assembly 3.
[0034] When the above technical solution is adopted, the setting of the second pipeline 2 can discharge the acidic substances generated at the joint of the first pipeline 1 and the tail gas pipe 52 to the collecting component 3 in time, thereby avoiding the accumulation of acidic substances at the joint, avoiding the acidic substances from corroding the tail gas pipe 52 and the first pipeline 1, extending the service life of the tail gas pipe 52 and the first pipeline 1, and reducing equipment loss.
[0035] In actual situations, the exhaust gas needs to enter the first pipeline 1 from the end face of the first pipeline 1, and further, the exhaust gas is discharged through the first pipeline 1. One end of the first pipeline 1 extends into the exhaust pipe 52, and the first pipeline 1 and the exhaust pipe 52 have an overlapping area in the axial direction, so that the first pipeline 1 and the exhaust pipe 52 are connected, and the exhaust gas enters the first pipeline 1 from one end of the first pipeline 1. In the prior art, see Figure 2 As shown, one end of the first pipeline 1' extends into the tail gas pipe 52' for a long time, and even worse, the first pipeline 1' extends into the furnace body 51', that is, in the prior art, the axial overlap size of the first pipeline 1' and the tail gas pipe 52' is large, and the tail gas needs to enter the first pipeline 1' from the end face of the first pipeline 1', and the tail gas located between the outer wall of the first pipeline 1' and the inner wall of the tail gas pipe 52' is difficult to enter the first pipeline 1' from the end of the first pipeline 1', so that the tail gas accumulated at the docking position of the first pipeline 1' and the tail gas pipe 52' is large, and the tail gas accumulated at the docking position of the first pipeline 1' and the tail gas pipe 52' is easy to accumulate acid and corrode the tail gas pipe 52'. However, the present application limits the axial overlap size of the first pipeline 1 and the tail gas pipe 52 at the docking position, so as to reduce the corrosion degree of the tail gas pipe 52 and extend the service life of the tail gas pipe 52. In addition, since the second pipeline 2 can discharge the acidic substances generated at the joint to the collecting component 3 in time, the maintenance cycle of the tail gas pipe 52 can be extended, and it is convenient for the staff to perform maintenance.
[0036] In addition, it should be noted that the position where the second pipeline 2 is connected to the joint of the first pipeline 1 and the tail gas pipe 52 is located below the joint, so that the acidic substances can be discharged from the joint under the action of gravity.
[0037] In one possible implementation, see Figure 1As shown, the collecting assembly 3 includes a cooling unit 31 and a collecting unit 32 which are connected in sequence. The cooling unit 31 is connected to the first pipeline 1, and is used to receive and cool the tail gas discharged from the first pipeline 1, and discharge the cooled tail gas to the collecting unit 32. The collecting unit 32 is used to collect the cooled tail gas. The other end of the second pipeline 2 is connected to the input end of the cooling unit 31 or the input end of the collecting unit 32, and is used to discharge the acidic substances generated at the docking point to the cooling unit 31 or the collecting unit 32. At this time, the cooling unit 31 first receives and cools the tail gas discharged from the first pipeline 1, and then discharges the cooled tail gas to the collecting unit 32 to reduce the temperature of the tail gas and prevent the high temperature tail gas from damaging the collecting unit 32. At the same time, the gaseous tail gas can be converted into liquid tail gas, which reduces the space occupied by the tail gas and facilitates the collection of the tail gas.
[0038] In some embodiments, the collection component 3 further includes a filtering unit 33 connected between the cooling unit 31 and the collection unit 32 , for filtering the cooled exhaust gas discharged from the cooling unit 31 and discharging it to the collection unit 32 .
[0039] As an optional mode, the collection assembly 3 further includes a power unit 34, the inlet end of the power unit 34 is connected to the outlet end of the filter unit 33, and is used to receive the gaseous exhaust gas filtered by the filter unit 33, and the outlet end of the power unit 34 is connected to the collection unit 32, and is used to discharge the gaseous exhaust gas to the collection unit 32. In this way, the setting of the power unit 34 can provide power for the gaseous exhaust gas, accelerate the flow and collection of the exhaust gas, and prevent the exhaust gas from gathering in the filter unit 33 or the cooling unit 31, which affects the discharge and collection of the exhaust gas.
[0040] In a possible implementation, the docking dimension between one end of the first pipeline 1 and the tail gas pipe 52 of the diffusion furnace 5 is less than 3 cm. That is, the docking dimension between one end of the first pipeline 1 and the tail gas pipe 52 of the diffusion furnace 5 is less than 3 cm, and the docking dimension between one end of the first pipeline 1 and the tail gas pipe 52 of the diffusion furnace 5 is less than a preset value. In this case, the axial overlap dimension between the first pipeline 1 and the tail gas pipe 52 at the docking point is first limited, and the accommodation space between the outer wall of the first pipeline 1 and the inner wall of the tail gas pipe 52 at the docking point is reduced, thereby reducing the accumulation of tail gas at the docking point, so that the acidic substances accumulated at the docking point are reduced, and accordingly, the corrosion degree of the tail gas pipe 52 and the first pipeline 1 is reduced, and the service life of the tail gas pipe 52 and the first pipeline 1 is extended. Moreover, compared with the case where the docking size is greater than 10 cm in the prior art, the docking size of the present application is smaller, and the accommodation space between the outer wall of the first pipeline 1 and the inner wall of the tail gas pipe 52 is smaller, which reduces the amount of tail gas accumulation at the docking point, reduces the acidic substances accumulated at the docking point, and reduces the loss of equipment by acidic substances. Exemplarily, the docking size between one end of the first pipeline 1 and the tail gas pipe 52 of the diffusion furnace 5 can be 2.8 cm, 2.6 cm, 2.5 cm, 2.2 cm, 2 cm, 1.8 cm, 1.6 cm, 1.5 cm, etc. This is just an example and is not a specific limitation, so as to ensure the connection strength between the first pipeline 1 and the tail gas pipe 52 and reduce the amount of acid accumulation at the docking point.
[0041] Exemplarily, the diffusion furnace tail exhaust device provided in the embodiment of the utility model further includes a connecting piece 4, which is arranged at the joint between the first pipeline 1 and the tail gas pipe 52, and is used to connect the first pipeline 1, the second pipeline 2 and the tail gas pipe 52. The connecting piece 4 can be a three-way valve, and the outlet of the three-way valve for communicating with the second pipeline 2 can be arranged downward, so that the acidic substances can be discharged under the action of their own gravity.
[0042] In a specific implementation, the connecting piece 4 is made of a high temperature resistant and corrosion resistant material to prevent the connecting piece 4 from being damaged and corroded by high temperature exhaust gas, extend the service life of the connecting piece 4, and reduce consumables. For example, the connecting piece 4 can be a polytetrafluoroethylene connecting piece 4, but is not limited thereto. Furthermore, the first pipeline 1 is made of an acid corrosion resistant material to prevent the first pipeline 1 from being damaged and corroded by high temperature exhaust gas, extend the service life of the first pipeline 1, and reduce consumables.
[0043] In addition to the above, an embodiment of the utility model also provides a diffusion furnace, including a furnace body 51, an exhaust pipe 52 and the above-mentioned diffusion furnace tail exhaust device, and the two ends of the exhaust pipe 52 are respectively connected to the furnace body 51 and the diffusion furnace tail exhaust device, for discharging the exhaust gas in the furnace body 51 to the diffusion furnace tail exhaust device.
[0044] The beneficial effects of the diffusion furnace provided in the second aspect can refer to the beneficial effects of the above-mentioned diffusion furnace tail exhaust device, which will not be repeated here.
[0045] It should be noted that when the diffusion furnace provided by the embodiment of the utility model is used in actual production, the acid accumulation ratio at the joint between the first pipeline and the tail gas pipe is reduced by 50% compared with the prior art, and the personnel maintenance efficiency is improved by 10%.
[0046] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.
[0047] The above are only specific implementations of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.
Claims
1. A diffusion furnace tail row device, characterized in that: It comprises a first pipeline, a second pipeline and a collecting assembly; one end of the first pipeline is used to communicate with the tail gas pipe of the diffusion furnace, and the other end is connected to the collecting assembly, and is used to discharge the tail gas discharged from the diffusion furnace to the collecting assembly; One end of the second pipeline is connected to the joint between the first pipeline and the tail gas pipe, and the other end is connected to the collection component, so as to discharge the acidic substances generated at the joint to the collection component.
2. The diffusion furnace tail row device according to claim 1, characterized in that: The collecting assembly comprises a cooling unit and a collecting unit which are connected in sequence; The cooling unit is in communication with the first pipeline, and is used to receive and cool the exhaust gas discharged from the first pipeline, and discharge the cooled exhaust gas to the collection unit; The collecting unit is used to collect the cooled tail gas; The other end of the second pipeline is connected to the input end of the cooling unit or the input end of the collecting unit, and is used to discharge the acidic substances generated at the docking point to the cooling unit or the collecting unit.
3. The diffusion furnace tail row device according to claim 2, characterized in that: The collecting assembly further includes a filtering unit connected between the cooling unit and the collecting unit, and configured to filter the cooled exhaust gas discharged from the cooling unit and then discharge the filtered exhaust gas to the collecting unit.
4. The diffusion furnace tail row device according to claim 3, characterized in that: The collecting assembly also includes a power unit, the inlet end of the power unit is connected to the outlet end of the filter unit for receiving the gaseous exhaust gas filtered by the filter unit, and the outlet end of the power unit is connected to the collecting unit for discharging the gaseous exhaust gas to the collecting unit.
5. The diffusion furnace tail row device according to claim 1, characterized in that: The butt joint dimension between one end of the first pipeline and the tail gas pipe of the diffusion furnace is less than 3 cm.
6. The diffusion furnace tail row device according to claim 1, characterized in that: The diffusion furnace tail exhaust device also includes a connecting piece, which is arranged at the joint between the first pipeline and the tail gas pipe and is used to connect the first pipeline, the second pipeline and the tail gas pipe.
7. The diffusion furnace tail row device according to claim 6, characterized in that: The connecting piece is made of a high temperature resistant and corrosion resistant material.
8. The diffusion furnace tail row device according to claim 7, characterized in that: The connecting piece is a polytetrafluoroethylene connecting piece.
9. The diffusion furnace tail row device according to claim 1, characterized in that: The first pipeline is made of acid corrosion resistant material.
10. A diffusion furnace, characterized in that: It comprises a furnace body, an exhaust pipe and the diffusion furnace tail discharge device according to any one of claims 1 to 9, wherein the two ends of the exhaust pipe are respectively connected to the furnace body and the diffusion furnace tail discharge device, and are used to discharge the exhaust gas in the furnace body to the diffusion furnace tail discharge device.