Lofting device for online sheet resistance tester

Abstract

The utility model relates to a lofting device for an online sheet resistance tester, and relates to the field of sheet resistance testing technology, the lofting device comprises a rack, the rack comprises an objective table, a probe is arranged on the rack in a lifting manner, the probe is erected above the objective table, and an objective plate is arranged on the objective table; the signal input end of the driving part is in signal connection with the signal output ends of the control panel, the signal processing module and the timing module. According to the invention, the probe insertion pressure of the square resistance tester can be accurately controlled, and the situation that the probe punctures a material to be tested in the probe insertion process can be effectively reduced.

Description

Technical Field

[0001] The present application relates to the field of square resistance testing technology, and in particular to a layout device for an online square resistance tester. Background Art

[0002] Square resistance refers to the resistance in a circuit caused by the resistance of the conductor's current-carrying medium to the current. It is usually expressed in terms of resistance per unit length, in ohms per meter (Ω / m).

[0003] In the production process of semiconductor materials such as single crystal silicon, polycrystalline silicon, single crystal germanium, and conductive films, the resistivity or square resistance of these materials is an extremely important parameter. Relevant manufacturers or demand units need these parameter results to evaluate the quality of these materials. The quality of these basic materials directly affects the performance of products in the entire downstream production chain.

[0004] In the prior art, a four-probe resistivity tester is often used to perform square resistance test on materials, wherein the four-probe resistivity tester mainly includes a power box and a detection mechanism, the detection mechanism is electrically connected to the power box, and the operator can input relevant parameters through the control line, and the detection mechanism is composed of a stage, an adjustment mechanism and a probe, wherein the probe is installed on the adjustment mechanism, and the probe is mounted above the stage, and four probes are installed at the bottom of the probe, and the bottom of the probe is detachably fixedly connected with a protective cover for protecting the four probes.

[0005] During the test, the operator can place the material to be tested on the stage, and then control the probe to descend through the adjustment mechanism until the four probes are in close contact with the material to be tested. Through the computer connected to the test mechanism, the square resistance of the material can be measured through the four probes, and the operator can read the test data through the computer connected to the test mechanism signal.

[0006] However, the method of adjusting the probe by the operator is rather cumbersome, and it is difficult for the operator to accurately control the needle insertion, which may puncture the material to be tested during the detection process, affecting the measurement effect and causing sample waste. There is room for improvement. Utility Model Content

[0007] In order to accurately control the needle insertion pressure and reduce the occurrence of the probe piercing the material to be tested during the needle insertion process, the present application provides a sample placement device for an online square resistance tester.

[0008] The present application provides a sample placement device for an online square resistance tester using the following technical solution:

[0009] A sample placing device for an online square resistance tester comprises a frame, the frame comprises a loading platform, a probe is arranged on the frame for lifting, the probe is arranged above the loading platform, a loading plate is arranged on the loading platform; and:

[0010] A control panel, fixedly connected to the loading platform, for inputting a start signal;

[0011] A driving member, fixedly connected to the frame, with a driving end detachably fixedly connected to the probe, for receiving the start signal and driving the probe to move toward the direction close to the carrier plate;

[0012] A thin film pressure sensor, located between the stage and the carrier plate, and directly below the probe, for sensing the contact pressure between the probe of the probe and the material to be tested and outputting a needle pressure signal;

[0013] A signal processing module, connected to the signal output terminal of the film pressure sensor, for receiving and comparing the needle insertion pressure signal, and outputting a first control signal when the needle insertion pressure is greater than or equal to a set pressure value;

[0014] A timing module, connected to the signal output terminal of the signal processing module, for calculating the duration of the needle insertion pressure being greater than or equal to the set pressure value, and outputting a second control signal when the duration reaches the set value;

[0015] The signal input end of the driving element is also connected to the signal output ends of the signal processing module and the timing module. The driving element receives the first control signal and stops driving the probe to descend. The driving element receives the second control signal and drives the probe to rise and reset.

[0016] By adopting the above technical solution, when the operator performs a square resistance test on the material to be tested, the material to be tested can be placed on the carrier plate and a start signal can be input through the control panel on the frame. After receiving the start signal, the driving member drives the probe to move in the direction close to the carrier plate. During the contact between the probe on the probe and the carrier plate, the contact pressure between the probe and the material to be tested is transmitted to the film pressure sensor through the carrier plate. The film pressure sensor detects the needle insertion pressure and outputs the needle insertion pressure signal. The signal processing module compares the needle insertion pressure value. When the needle insertion pressure reaches the set pressure value (that is, to ensure that the four probes are fully in contact with the sample to be tested without being too close to the sample), the pressure sensor outputs the signal. The pressure value of piercing the material to be tested can be preset), the signal processing module outputs a first control signal to control the driving part to stop driving, so that the probe on the probe is in the current state; the timing module calculates the duration of the square resistance detection, and automatically controls the driving part to return to the initial position when the square resistance detection duration reaches the actual required duration, to ensure that the probe is automatically controlled to return when the experiment is fully completed. After the operator observes that the probe returns to the initial position, the material to be tested can be adjusted or removed, which can facilitate the operator to accurately grasp the test process and reduce the occurrence of operator misoperation when the test is not fully completed. Through the mutual coordination and use of the driving part, the thin film pressure sensor and the signal processing module, the technical effect of automatically sensing the needle insertion pressure and automatically controlling the driving part to stop the needle insertion when the needle insertion pressure reaches the set pressure value can be achieved, eliminating the operator from manually adjusting the probe position. While improving the convenience of the operator in measuring the square resistance, the needle insertion action is accurate and the needle insertion pressure is constant, which can reduce the occurrence of the probe piercing the sample to be tested during the measurement process.

[0017] Preferably, the driving member comprises a cylinder, a cylinder body of the cylinder is fixedly connected to the frame, and a cylinder shaft of the cylinder is detachably fixedly connected to the probe.

[0018] By adopting the above technical solution, the cylinder can extend or retract the cylinder shaft to drive the probe and the probe on the probe to move towards or away from the material to be tested on the carrier.

[0019] Preferably, the loading platform is provided with an engaging groove adapted to the loading plate, a plurality of guide rods are fixedly connected to the bottom of the loading plate, and a plurality of through holes for the guide rods to pass through are provided at the bottom of the engaging groove;

[0020] A plurality of the guide rods are coaxially sleeved with springs, and the two ends of the springs are fixedly connected to the loading plate and the bottom of the fitting groove, respectively, and the plurality of the springs are pressed tightly between the loading platform and the bottom of the fitting groove;

[0021] A sensing protrusion is fixedly connected to the bottom of the embedding groove, and the film pressure sensor is fixedly connected to the top of the sensing protrusion.

[0022] By adopting the above technical solution, during the needle insertion process, the cylinder extends the cylinder shaft to drive the probe at the bottom of the probe to press against the loading plate, and the spring is compressed to provide the loading plate and the probe with an elastic force opposite to the needle insertion pressure, which can provide a buffer for the probe and improve the stability of the probe insertion action; after the detection is completed, the spring can drive the loading plate to rebound. During the lifting and moving of the loading plate, the guide rod lifts and slides in the through hole at the bottom of the interlocking groove, which can ensure that the loading plate moves in the vertical direction and reduce the shaking and position displacement of the loading plate during the lifting and lowering process. The interlocking groove on the loading platform can make the overall structure of the layout device more compact while preventing the spring, mounting rod and thin film pressure sensor from being exposed to the air.

[0023] Preferably, a limiting sleeve is fixedly connected to the bottom of the carrier plate, and the limiting sleeve is coaxially sleeved on the outer side of the sensing protrusion;

[0024] The bottom of the limiting sleeve extends inwardly and is integrally formed with a limiting inner ring, the limiting inner ring is embedded in the outer side wall of the sensing protrusion, and a limiting outer ring is integrally formed on the outer side wall of the sensing protrusion, and the limiting outer ring is located above the limiting inner ring.

[0025] By adopting the above technical solution, the inner limiting ring on the limiting sleeve slides along the outer side wall of the sensing protrusion, which can further ensure that the carrier plate can be lifted and moved in the vertical direction. The inner limiting ring is combined with the outer limiting ring to reduce the occurrence of the carrier plate being separated from the engaging groove.

[0026] Preferably, the ends of the plurality of guide rods passing through the through holes are fixedly connected with anti-drop blocks.

[0027] By adopting the above technical solution, the anti-slip block can reduce the occurrence of the guide rod being detached from the through hole.

[0028] Preferably, a plurality of first protective sleeves are fixedly connected to the bottom of the carrier plate, a plurality of second protective sleeves are fixedly connected to the bottom of the engaging groove, the first protective sleeves are opposite to the second protective sleeves one by one, and the first protective sleeves and the second protective sleeves are sleeved on the outer sides of both ends of the spring.

[0029] By adopting the above technical solution, the first protective sleeve and the second protective sleeve are sleeved on the outer sides of the two ends of the spring, which can reduce the occurrence of irreversible deformation of the spring during the expansion and contraction process and provide a good protection effect for the spring.

[0030] Preferably, the signal processing module includes a comparator chip, the signal input end of the comparator chip is connected to the signal of the film pressure sensor, the comparator chip receives the needle insertion pressure signal and outputs a high-level signal as the first control signal when the needle insertion pressure is greater than or equal to a set pressure value.

[0031] By adopting the above-mentioned technical scheme, the comparator chip can compare the vertical needle insertion pressure with the set pressure value, and output a high-level signal as the first control signal when the needle insertion pressure is greater than or equal to the set pressure value. The driving member receives the first control signal (high-level signal) and can stop driving the probe to descend, thereby achieving the technical effect of automatically sensing the pressure and automatically stopping the needle insertion when the needle insertion pressure reaches the set pressure value.

[0032] Preferably, the timing module includes a single chip microcomputer.

[0033] By adopting the above technical solution, the duration of the high-level signal output by the comparator chip can be calculated by the single-chip microcomputer, and the high-level duration can be compared with the set value. When the high-level duration (effective detection duration) reaches the set duration, the drive component is automatically controlled to return to the initial position.

[0034] In summary, the present invention provides a layout device for an online square resistance tester, which has at least one of the following beneficial technical effects:

[0035] 1. Through the mutual coordination and use of the cylinder, the thin film pressure sensor and the comparator chip, the technical effect of automatically sensing the needle insertion pressure and automatically controlling the driving part to stop the needle insertion when the needle insertion pressure reaches the set pressure value can be achieved, which saves the operator from manually adjusting the probe position, improves the convenience of the operator in measuring the square resistance, and the needle insertion action is accurate and the needle insertion pressure is constant, which can reduce the occurrence of the probe piercing the sample to be measured during the measurement process;

[0036] 2. Through the coordination and use of the comparator chip, the single-chip microcomputer and the cylinder, the square resistance test duration can be automatically detected, and when the square resistance test duration reaches the required test duration, the cylinder is automatically controlled to drive the probe back to the initial position, which can reduce the occurrence of operator misoperation when the test is not fully completed;

[0037] 3. The spring at the bottom of the carrier plate can provide a buffer for the needle insertion action of the sample placement device, improve the stability of the needle insertion, and when the test is completed, the spring can drive the carrier plate to rebound. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 It is a schematic diagram of an embodiment of the present application for illustrating the overall structure of a lofting device.

[0039] Figure 2 It is a schematic diagram of an embodiment of the present application for showing the internal structure of the loading platform.

[0040] Figure 3 It is a schematic diagram of an embodiment of the present application for demonstrating the internal signal transmission of a stocking device.

[0041] Explanation of the reference numerals: 1. Frame; 11. Control panel; 2. Loading table; 21. Fitting groove; 22. Through hole; 23. Sensing bump; 231. Limit outer ring; 24. Second protective sleeve; 4. Loading plate; 41. Guide rod; 42. Limit sleeve; 421. Limit inner ring; 43. Anti-slip block; 44. First protective sleeve; 5. Thin film pressure sensor; 6. Cylinder; 7. Spring; 8. Probe. DETAILED DESCRIPTION

[0042] The following is combined with Figure 1-3 This application is described in further detail.

[0043] Example

[0044] The present application embodiment discloses a sample placement device for an online square resistance tester. Figure 1 , Figure 2 as well as Figure 3 It mainly includes a frame 1, the frame 1 includes a stage 2, a probe 8 is arranged on the frame 1 for lifting, the probe 8 is set above the stage 2, and a loading plate 4 is arranged on the stage 2.

[0045] And: a control panel 11, fixedly connected to the stage 2, for inputting a start signal; a driving member, fixedly connected to the frame 1, and having a driving end detachably fixedly connected to the probe 8, for receiving a start signal and driving the probe 8 to move in a direction close to the carrier plate 4; a thin film pressure sensor 5, located between the stage 2 and the carrier plate 4, directly below the probe 8, for sensing the contact pressure between the probe of the probe 8 and the material to be tested and outputting a needle insertion pressure signal; a signal processing module, connected to the signal output end of the thin film pressure sensor 5, for receiving and comparing the needle insertion pressure signal, and outputting a first control signal when the needle insertion pressure is greater than or equal to a set pressure value; a timing module, connected to the signal output end of the signal processing module, for calculating the duration of time that the needle insertion pressure is greater than or equal to the set pressure value, and outputting a second control signal when the duration reaches the set value.

[0046] The signal input end of the driving element is also connected to the signal output end of the signal processing module and the timing module. The driving element receives the first control signal and stops driving the probe 8 to descend. The driving element receives the second control signal and drives the probe 8 to rise and reset.

[0047] When the operator performs a square resistance test on the material to be tested, the material to be tested can be placed on the carrier plate 4 and a start signal can be input through the control panel 11 on the frame 1 . After receiving the start signal, the driving member drives the probe 8 to move toward the direction close to the carrier plate 4 .

[0048] During the contact between the probe on the probe 8 and the carrier plate 4, the contact pressure between the probe and the material to be tested is transmitted to the thin film pressure sensor 5 through the carrier plate 4. The thin film pressure sensor 5 detects the needle insertion pressure and outputs a needle insertion pressure signal. The signal processing module compares the needle insertion pressure value. When the needle insertion pressure reaches the set pressure value (that is, the pressure value that ensures that the four probes are in full contact with the sample to be tested without piercing the material to be tested, which can be set in advance), the signal processing module outputs a first control signal to control the drive member to stop driving, so that the probe on the probe 8 is in the current state; the timing module calculates the duration of the square resistance detection, and automatically controls the drive member to return to the initial position when the square resistance detection duration reaches the actual required duration, to ensure that the probe is automatically controlled to return when the experiment is fully completed. After the operator observes that the probe has returned to the initial position, the material to be tested can be adjusted or removed, which can facilitate the operator to accurately grasp the test process and reduce the occurrence of operator errors when the test is not fully completed.

[0049] Through the coordination and use of the driving component, the thin film pressure sensor 5 and the signal processing module, the technical effect of automatically sensing the needle insertion pressure and automatically controlling the driving component to stop the needle insertion when the needle insertion pressure reaches the set pressure value can be achieved, eliminating the operator's need to manually adjust the position of the probe 8, and improving the operator's convenience in measuring the square resistance. At the same time, the needle insertion action is accurate and the needle insertion pressure is constant, which can reduce the occurrence of the probe piercing the sample to be measured during the measurement process.

[0050] In the embodiment of the present application, the driving member is a cylinder 6, the cylinder body of the cylinder 6 is fixedly connected to the frame 1, and the cylinder 6 axis of the cylinder 6 is detachably fixedly connected to the probe 8 by screws. The cylinder 6 extends or retracts the cylinder 6 axis, which can drive the probe 8 and the probe on the probe 8 to move toward or away from the material to be tested on the carrier plate 4.

[0051] Reference Figure 1 and Figure 2 A mating groove 21 matched with the loading plate 4 is provided on the loading platform 2, a plurality of guide rods 41 are fixedly connected to the bottom of the loading plate 4, and a plurality of through holes 22 for the guide rods 41 to pass through are provided at the bottom of the mating groove 21; springs 7 are coaxially sleeved on the plurality of guide rods 41, and the two ends of the spring 7 are respectively fixedly connected to the loading plate 4 and the bottom of the mating groove 21, and the plurality of springs 7 are pressed tightly between the loading platform 2 and the bottom of the mating groove 21; a sensing protrusion 23 is fixedly connected to the bottom of the mating groove 21, and a thin film pressure sensor 5 is fixedly connected to the top of the sensing protrusion 23.

[0052] During the needle insertion process, the cylinder 6 extends the cylinder 6 axis to drive the probe at the bottom of the probe 8 to press against the carrier plate 4. The spring 7 is compressed to provide the carrier plate 4 and the probe with an elastic force opposite to the needle insertion pressure, which can provide a buffer for the probe and improve the stability of the probe needle insertion action. After the detection is completed, the spring 7 can drive the carrier plate 4 to rebound. During the lifting and moving of the carrier plate 4, the guide rod 41 lifts and slides in the through hole 22 at the bottom of the fitting groove 21, which can ensure that the carrier plate 4 moves in the vertical direction and reduce the shaking and position displacement of the carrier plate 4 during the lifting and moving process.

[0053] The engaging groove 21 on the stage 2 can make the overall structure of the sample placing device more compact, and prevent the spring 7, the mounting rod and the film pressure sensor 5 from being exposed to the air.

[0054] Reference Figure 2 The bottom of the loading plate 4 is fixedly connected to a limiting sleeve 42, which is coaxially sleeved on the outside of the sensing protrusion 23; the bottom of the limiting sleeve 42 extends inward and is integrally formed with a limiting inner ring 421, which is embedded in the outer wall of the sensing protrusion 23 and is integrally formed with a limiting outer ring 231, which is located above the limiting inner ring 421.

[0055] The inner limiting ring 421 on the limiting sleeve 42 slides along the outer wall of the sensing protrusion 23 to further ensure that the carrier plate can move up and down in the vertical direction. The inner limiting ring 421 cooperates with the outer limiting ring 231 to reduce the occurrence of the carrier plate 4 being separated from the engaging groove 21.

[0056] Preferably, the ends of the plurality of guide rods 41 passing through the through holes 22 are fixedly connected with anti-slip blocks 43. The anti-slip blocks 43 can reduce the occurrence of the guide rods 41 being detached from the through holes 22.

[0057] Reference Figure 2 A plurality of first protective sleeves 44 are fixedly connected to the bottom of the loading plate 4, and a plurality of second protective sleeves 24 are fixedly connected to the bottom of the engaging groove 21. The first protective sleeves 44 are opposite to the second protective sleeves 24 one by one, and the first protective sleeves 44 and the second protective sleeves 24 are sleeved on the outer sides of both ends of the spring 7.

[0058] The first protective sleeve 44 and the second protective sleeve 24 are sleeved on the outer sides of both ends of the spring 7 , which can reduce the occurrence of irreversible deformation of the spring 7 during the expansion and contraction process, and provide good protection for the spring 7 .

[0059] Reference Figure 3 The signal processing module includes a comparator chip, a signal input end of the comparator chip is connected to the signal of the film pressure sensor 5, the comparator chip receives the needle insertion pressure signal and outputs a high level signal as the first control signal when the needle insertion pressure is greater than or equal to the set pressure value.

[0060] The comparator chip can compare the vertical needle insertion pressure with the set pressure value, and output a high-level signal as the first control signal when the needle insertion pressure is greater than or equal to the set pressure value. The driving member receives the first control signal (high-level signal) and can stop driving the probe 8 to descend, thereby achieving the technical effect of automatically sensing the pressure and automatically stopping the needle insertion when the needle insertion pressure reaches the set pressure value.

[0061] In the embodiment of the present application, the timing module adopts a single chip microcomputer. The single chip microcomputer can calculate the duration of the high level signal output by the comparator chip, compare the high level duration with the set value, and automatically control the driving member to return to the initial position when the high level duration (effective detection duration) reaches the set duration.

[0062] It should be noted that in this embodiment, the single chip microcomputer is pre-loaded with a program for calculating the duration of the high-level signal. This is a prior art and will not be described in detail here.

[0063] The implementation principle of the sample placement device for an online square resistance tester in the embodiment of the present application is as follows: through the mutual coordination and use of the cylinder 6, the thin film pressure sensor 5 and the comparator chip, it can achieve the technical effect of automatically sensing the needle insertion pressure and automatically controlling the drive member to stop the needle insertion when the needle insertion pressure reaches the set pressure value, thereby eliminating the need for the operator to manually adjust the position of the probe 8, improving the convenience of the operator in measuring the square resistance, and the needle insertion action is accurate, the needle insertion pressure is constant, and the occurrence of the probe piercing the sample to be tested during the measurement process can be reduced.

[0064] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A sample placing device for an online square resistance tester, characterized in that: The invention comprises a frame (1), the frame (1) comprising a loading platform (2), a probe (8) being arranged on the frame (1) in a lifting manner, the probe (8) being arranged above the loading platform (2), and a loading plate (4) being arranged on the loading platform (2); as well as: A control panel (11) fixedly connected to the loading platform (2) and used for inputting a start signal; A driving member, fixedly connected to the frame (1), with a driving end detachably fixedly connected to the probe (8), and used for receiving the start signal and driving the probe (8) to move in a direction close to the carrier plate (4); A thin film pressure sensor (5), located between the loading platform (2) and the loading plate (4), and directly below the probe (8), for sensing the contact pressure between the probe of the probe (8) and the material to be tested and outputting a needle pressure signal; A signal processing module, connected to the signal output terminal of the film pressure sensor (5), for receiving and comparing the needle insertion pressure signal, and outputting a first control signal when the needle insertion pressure is greater than or equal to a set pressure value; A timing module, connected to the signal output terminal of the signal processing module, for calculating the duration of the needle insertion pressure being greater than or equal to the set pressure value, and outputting a second control signal when the duration reaches the set value; The signal input end of the driving element is also connected to the signal output ends of the signal processing module and the timing module. The driving element receives the first control signal and stops driving the probe (8) to descend. The driving element receives the second control signal and drives the probe (8) to ascend and reset.

2. The sample placing device for an online square resistance tester according to claim 1, characterized in that: The driving member comprises a cylinder (6), a cylinder body of the cylinder (6) is fixedly connected to the frame (1), and a cylinder (6) axis of the cylinder (6) is detachably fixedly connected to the probe (8).

3. The sample placing device for an online square resistance tester according to claim 2, characterized in that: The loading platform (2) is provided with an engaging groove (21) adapted to the loading plate (4); a plurality of guide rods (41) are fixedly connected to the bottom of the loading plate (4); a plurality of through holes (22) for the guide rods (41) to pass through are provided at the bottom of the engaging groove (21); A plurality of the guide rods (41) are coaxially sleeved with springs (7), the two ends of the springs (7) are respectively fixedly connected to the loading plate (4) and the bottom of the fitting groove (21), and the plurality of the springs (7) are pressed tightly between the loading platform (2) and the bottom of the fitting groove (21); A sensing protrusion (23) is fixedly connected to the bottom of the embedding groove (21), and the thin film pressure sensor (5) is fixedly connected to the top of the sensing protrusion (23).

4. The sample placement device for an online square resistance tester according to claim 3, characterized in that: The bottom of the object carrier plate (4) is fixedly connected to a limiting sleeve (42), and the limiting sleeve (42) is coaxially sleeved on the outer side of the sensing protrusion (23); The bottom of the limiting sleeve (42) extends inwardly and is integrally formed with a limiting inner ring (421), the limiting inner ring (421) being embedded in the outer wall of the sensing protrusion (23) and integrally formed with a limiting outer ring (231), the limiting outer ring (231) being located above the limiting inner ring (421).

5. The sample placement device for an online square resistance tester according to claim 3, characterized in that: The ends of the plurality of guide rods (41) passing through the through holes (22) are fixedly connected with anti-slip blocks (43).

6. The sample placement device for an online square resistance tester according to claim 3, characterized in that: A plurality of first protective sleeves (44) are fixedly connected to the bottom of the loading plate (4), and a plurality of second protective sleeves (24) are fixedly connected to the bottom of the engaging groove (21). The first protective sleeves (44) and the second protective sleeves (24) are opposite to each other one by one, and the first protective sleeves (44) and the second protective sleeves (24) are sleeved on the outer sides of both ends of the spring (7).

7. The layout device for an online square resistance tester according to claim 1, characterized in that: The signal processing module comprises a comparator chip, the signal input end of the comparator chip is connected to the signal of the thin film pressure sensor (5), the comparator chip receives the needle insertion pressure signal and outputs a high level signal as the first control signal when the needle insertion pressure is greater than or equal to a set pressure value.

8. The layout device for an online square resistance tester according to claim 7, characterized in that: The timing module includes a single chip microcomputer.

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