Motion platform and laser lift-off equipment

Abstract

The utility model discloses a motion platform and a laser lift-off device, and relates to the technical field of laser lift-off, the motion platform comprises a base, an X-direction moving table, a Y-direction moving table and an air floating support, the X-direction moving table is arranged on the base and can move relative to the base along the X-axis direction; the Y-direction moving table is arranged on the X-direction moving table and can move relative to the X-direction moving table in the Y-axis direction; the air floatation supports are used for being communicated with an air source and comprise the first air floatation support arranged on the X-direction moving table and the second air floatation support arranged on the Y-direction moving table, and the first air floatation support can form an air film between the X-direction moving table and the base after ventilation; the second air floatation support can form an air film between the Y-direction moving table and the base and / or the X-direction moving table after ventilation. According to the technical scheme, the first air floatation support is arranged on the X-direction moving table, and the second air floatation support is arranged on the Y-direction moving table, so that the positioning precision of the moving platform is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of laser stripping, in particular to a motion platform and laser stripping equipment. Background Art

[0002] LED substrate laser stripping technology uses ultraviolet laser to irradiate the substrate, melt the buffer layer, and realize the stripping of the gemstone substrate. The motion platform of existing laser stripping equipment has a short stroke and can only meet the laser stripping of small-sized LED substrate materials; and the accuracy of some large-sized motion platforms is difficult to guarantee. Utility Model Content

[0003] The main purpose of the utility model is to provide a motion platform and a laser peeling device, aiming at improving the positioning accuracy of the motion platform.

[0004] In order to achieve the above-mentioned purpose, the motion platform proposed by the utility model comprises:

[0005] Pedestal;

[0006] An X-axis moving platform is disposed on the base and is movable relative to the base along the X-axis direction;

[0007] A Y-axis moving stage, disposed on the X-axis moving stage and capable of moving relative to the X-axis moving stage along the Y-axis direction; and

[0008] An air-floating support is used to connect to an air source, and includes a first air-floating support provided on the X-axis moving stage and a second air-floating support provided on the Y-axis moving stage. The first air-floating support can form an air film between the X-axis moving stage and the base after ventilation; the second air-floating support can form an air film between the Y-axis moving stage and the base and / or the X-axis moving stage after ventilation.

[0009] In one embodiment, the first air floating support includes a first vertical support and a first lateral support, the extension direction of the air film formed between the first vertical support and the base is parallel to the XY plane, and the extension direction of the air film formed between the first lateral support and the base is parallel to the XZ plane.

[0010] In one embodiment, the base includes a substrate and a mounting boss protruding from the substrate, the mounting boss extends along the X-axis direction, the air film of the first vertical support acts on the upper surface of the substrate or the upper surface of the mounting boss, and the air film of the first lateral support acts on the side of the mounting boss.

[0011] In one embodiment, the base includes two mounting bosses arranged at intervals along the Y-axis direction on the substrate, an X-guide groove is formed between the two mounting bosses, and at least two first lateral supports are provided. At least two of the first lateral supports are arranged at opposite ends of the X-direction movable platform and respectively correspond to the two opposite groove side walls of the X-guide groove.

[0012] In one embodiment, a plurality of the first vertical supports are provided, and the plurality of the first vertical supports are spaced apart along the extension direction of the X-direction moving platform.

[0013] In one embodiment, the second air-floating support includes a second vertical support and a second lateral support, the extension direction of the air film formed between the second vertical support and the base and / or the X-axis moving stage is parallel to the XY plane, and the extension direction of the air film formed between the second lateral support and the base or the X-axis moving stage is parallel to the XZ plane.

[0014] In one embodiment, the X-axis moving table includes an X-axis table body, the upper surface of the X-axis table body is provided with a Y-guide groove, the air film of the second lateral support acts on the groove side of the Y-guide groove; the air film of the second vertical support acts on the groove bottom surface of the Y-guide groove, or the air film of the second vertical support acts on the upper surface of the base.

[0015] In one embodiment, the X-axis moving stage includes an X-axis stage body, the air film of the second lateral support acts on the outer side surface of the X-axis stage body; and the air film of the second vertical support acts on the upper surface of the base.

[0016] In one embodiment, the X-axis moving stage includes an X-axis stage body, two first driving members and two X-axis position sensors, the X-axis position sensor is electrically connected to the first driving member, the two first driving members are respectively driven and connected to the opposite ends of the X-axis stage body, the two X-axis position sensors respectively correspond to the opposite ends of the X-axis stage body, and are used to detect the position of the end of the X-axis stage body in the X-axis direction.

[0017] In one embodiment, the Y-axis moving stage includes a Y-axis stage body, two second driving members and two Y-axis position sensors, the Y-axis position sensor is electrically connected to the second driving member, the two second driving members are respectively driven and connected to the opposite ends of the Y-axis stage body, the two Y-axis position sensors respectively correspond to the opposite ends of the Y-axis stage body, and are used to detect the position of the end of the Y-axis stage body in the Y-axis direction.

[0018] In one embodiment, the air floating support includes a support body, the support body is provided with an air inlet, an air outlet and a connecting cavity connecting the air inlet and the air outlet, the air inlet is used to connect to the air source, and the outer wall surface of the support body where the air outlet is located is provided with a plurality of grooves connecting the air outlet.

[0019] In one embodiment, the motion platform also includes an X-direction guide rail assembly, which includes a first guide rail extending along the X-axis direction and a first slider slidably arranged on the first guide rail, the first guide rail is arranged on the base, and the first slider is arranged on the X-direction moving platform.

[0020] In one embodiment, the motion platform also includes a Y-direction guide rail assembly, which includes a second guide rail extending along the Y-axis direction, and a second slider slidably arranged on the second guide rail, the second guide rail is arranged on the base, and the second slider is arranged on the Y-direction moving platform.

[0021] In one embodiment, the motion platform also includes a rotating assembly and a Z-axis moving platform, the rotating assembly includes a rotating platform and a third driving member, the rotating platform is drivingly connected to the third driving member, and can rotate relative to the Y-axis moving platform; the Z-axis moving platform is arranged on the rotating platform, the Z-axis moving platform includes a stage and a fourth driving member, the stage is drivingly connected to the fourth driving member, and can move relative to the rotating platform along the Z-axis direction.

[0022] In one embodiment, the Z-axis moving platform also includes a screw nut pair, a guide slider, a first wedge block and a second wedge block, the guide slider is movably arranged on the rotating platform and connected to the worktable, so that the worktable is fixed relative to the rotating platform in the circumferential direction; the first wedge block is arranged on the worktable and is slidably connected to the second wedge block, the second wedge block is arranged on the nut seat of the screw nut pair, and the screw drive of the screw nut pair is connected to the fourth driving member to drive the second wedge block to move along the XY plane and prompt the first wedge block to move along the Z-axis direction.

[0023] The utility model also provides a laser peeling device, comprising the aforementioned motion platform.

[0024] The technical solution of the utility model realizes near-zero friction between the X-axis moving platform and the base and near-zero friction between the X-axis moving platform and the Y-axis moving platform by arranging a first air-floating support on the X-axis moving platform and a second air-floating support on the Y-axis moving platform, thereby improving the positioning accuracy of the motion platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0026] Figure 1 A schematic structural diagram of an embodiment of a motion platform provided by the utility model;

[0027] Figure 2 for Figure 1 Schematic diagram of the structure of the middle base;

[0028] Figure 3 for Figure 1 Schematic diagram of the structure of the X-axis mobile station;

[0029] Figure 4 for Figure 3 Side view of the X-axis moving platform;

[0030] Figure 5 for Figure 1 The schematic diagram of the structure of the Y-axis moving platform;

[0031] Figure 6 for Figure 5 Side view of the Y-axis moving platform;

[0032] Figure 7 for Figure 1 Schematic diagram of the structure of the Z-axis moving stage and the rotating assembly;

[0033] Figure 8 for Figure 7 A top view of the Z-axis translation stage and the rotating assembly;

[0034] Fig. 9 for Figure 7 A cross-sectional view of the Z-axis translation stage and the rotation assembly;

[0035] Fig.10 A schematic structural diagram of an embodiment of an air-floating support body provided by the utility model;

[0036] Fig.11 for Fig.10 Bottom view of the air-floating support body;

[0037] Fig.12 A schematic structural diagram of another embodiment of the motion platform provided by the utility model;

[0038] Fig.13 A schematic structural diagram of another embodiment of the motion platform provided by the utility model;

[0039] Fig.14 This is a structural schematic diagram of another embodiment of the motion platform provided by the utility model.

[0040] Description of Figure Numbers:

[0041] 10. Motion platform; 100. Base; 200. X-axis moving stage; 300. Y-axis moving stage; 400. Rotating assembly; 500. Z-axis moving stage; 600. Air-floating support body; 700. X-axis guide rail assembly; 800. Y-axis guide rail assembly; 101. Base plate; 102. Mounting boss; 201. X-axis stage body; 202. First vertical support; 203. First horizontal support; 204. First driving member; 205. X-axis position sensor; 301. Y-axis stage body; 302 , second vertical support; 303, second lateral support; 304, second drive member; 305, Y-axis position sensor; 401, mounting seat; 402, rotating bearing; 403, rotating platform; 404, third drive member; 405, arc position sensor; 501, stage; 502, fourth drive member; 503, transmission shaft assembly; 504, screw nut pair; 505, guide slider; 506, first wedge block; 507, second wedge block; 601, air outlet; 602, groove.

[0042] The purpose, features and advantages of the present invention will be further described in conjunction with the embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0044] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0045] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0046] The utility model provides a motion platform 10 .

[0047] See also Figure 1 In one embodiment of the utility model, the motion platform 10 includes a base 100, an X-axis moving table 200, a Y-axis moving table 300 and an air-floating support. The X-axis moving table 200 is arranged on the base 100 and can move relative to the base 100 along the X-axis direction; the Y-axis moving table 300 is arranged on the X-axis moving table 200 and can move relative to the X-axis moving table 200 along the Y-axis direction; the air-floating support is used to connect the gas source, and includes a first air-floating support arranged on the X-axis moving table 200 and a second air-floating support arranged on the Y-axis moving table 300. The first air-floating support can form an air film between the X-axis moving table 200 and the base 100 after ventilation; the second air-floating support can form an air film between the Y-axis moving table 300 and the base 100 and / or the X-axis moving table 200 after ventilation.

[0048] Specifically, the motion platform 10 is installed on the laser stripping equipment, and the laser stripping equipment is used for laser stripping of LED substrates. The motion platform 10 includes a base 100, an X-axis moving table 200, a Y-axis moving table 300 and an air-floating support. The X-axis moving table 200 is installed on the base 100, and the Y-axis moving table 300 is installed on the X-axis moving table 200. When the X-axis moving table 200 moves relative to the base 100 along the X-axis direction, it can drive the Y-axis moving table 300 to move relative to the base 100 along the X-axis direction. The Y-axis moving table 300 can move relative to the X-axis moving table 200 along the Y-axis direction, so that the workpiece on the motion platform 10 can be moved in the X-axis direction and the Y-axis direction to realize the movement of the LED substrate 101 during the laser scanning stripping process.

[0049] The air-floating support includes a first air-floating support and a second air-floating support. The first air-floating support is arranged on the X-axis moving stage 200. When the X-axis moving stage 200 moves, the first air-floating support is connected to the air source, so that the first air-floating support can form an air film with the base 100, and a gap is formed between the X-axis moving stage 200 and the base 100, thereby achieving near-zero friction between the X-axis moving stage 200 and the base 100, thereby improving the positioning accuracy of the motion platform 10 in the X-axis direction to the micron level.

[0050] The second air floating support is arranged on the Y-axis moving stage 300. When the Y-axis moving stage 300 moves, the second air floating support is connected to the air source, so that the second air floating support can form an air film with the base 100, or the second air floating support can form an air film with the X-axis moving stage 200, and a gap is formed between the Y-axis moving stage 300 and the X-axis moving stage 200, thereby achieving near-zero friction between the Y-axis moving stage 300 and the X-axis moving stage 200, thereby improving the positioning accuracy of the motion platform 10 in the Y-axis direction to the micron level.

[0051] For the movement in the X-axis direction and the Y-axis direction with high scanning requirements, the technical solution of the utility model realizes near-zero friction between the X-axis moving stage 200 and the base 100 and near-zero friction between the X-axis moving stage 200 and the Y-axis moving stage 300 by setting a first air-floating support on the X-axis moving stage 200 and a second air-floating support on the Y-axis moving stage 300, thereby improving the positioning accuracy of the motion platform 10.

[0052] In one embodiment, the first air floating support includes a first vertical support 202 and a first lateral support 203, the extension direction of the air film formed between the first vertical support 202 and the base 100 is parallel to the XY plane, and the extension direction of the air film formed between the first lateral support 203 and the base 100 is parallel to the XZ plane.

[0053] See also Figures 3 to 6 , the extension direction of the air film formed between the first vertical support 202 and the base 100 is parallel to the XY plane, which helps to provide uniform support force for the X-axis moving stage 200 in the vertical direction, so that there is near-zero friction in the vertical direction between the X-axis moving stage 200 and the base 100. At the same time, the extension direction of the air film formed between the first lateral support 203 and the base 100 is parallel to the XZ plane, which helps to provide uniform support force in the horizontal direction, ensure the balance of the X-axis moving stage 200 in the horizontal direction, and ensure near-zero friction in the horizontal direction between the X-axis moving stage 200 and the base 100.

[0054] In one embodiment, the base 100 includes a substrate 101 and a mounting boss 102 protruding from the substrate 101, the mounting boss 102 extends along the X-axis direction, the air film of the first vertical support 202 acts on the upper surface of the substrate 101 or the upper surface of the mounting boss 102, and the air film of the first lateral support 203 acts on the side of the mounting boss 102.

[0055] See also Figure 1 and Figure 2 , the base 100 is used to provide a stable support platform to support the normal operation and function realization of the motion platform 10. The air film of the first vertical support 202 can act on the upper surface of the substrate 101, and can also act on the upper surface of the mounting boss 102, so as to provide uniform support force in the vertical direction to ensure near-zero friction between the X-axis moving table 200 and the base 100 in the vertical direction. At the same time, the air film of the first lateral support 203 acts on the side of the mounting boss 102, which helps to provide uniform support force in the horizontal direction, ensure the balance of the X-axis moving table 200 in the horizontal direction, and ensure near-zero friction between the X-axis moving table 200 and the base 100 in the horizontal direction.

[0056] In one embodiment, the base 100 includes two mounting bosses 102 arranged at intervals along the Y-axis direction on the substrate 101, and an X-guide groove is formed at intervals between the two mounting bosses 102. At least two first lateral supports 203 are provided, and at least two first lateral supports 203 are arranged at opposite ends of the X-axis movable platform 200, and are respectively arranged corresponding to the opposite two groove side walls of the X-guide groove.

[0057] See also Figure 1 By setting two mounting bosses 102, the balance, stability and reliability of the X-axis moving stage 200 can be effectively ensured. The first lateral support 203 can move smoothly along the X-axis guide groove, and can form an air film parallel to the XZ plane with the groove sidewall of the X-axis guide groove, thereby providing uniform support force in the horizontal direction to ensure near-zero friction between the X-axis moving stage 200 and the base 100 in the horizontal direction.

[0058] In one embodiment, see Fig.12 The mounting boss 102 includes a first platform portion, an air film of a first lateral support 203 acts on an outer side wall and / or an inner side wall of the first platform portion, and an air film of a first vertical support 202 acts on an upper surface of the substrate 101 .

[0059] In yet another embodiment, see Figure 1The mounting boss 102 includes a first platform portion and a second platform portion connected to each other, wherein the second platform portion is located outside the first platform portion and is higher than the first platform portion, so that the upper surface of the first platform portion forms a step surface. The air film of the first vertical support 202 acts on the upper surface of the first platform portion, and the air film of the first horizontal support 203 acts on the inner side wall of the second platform portion.

[0060] In yet another embodiment, see Figure 1 The base 100 includes three mounting bosses 102 arranged at intervals along the Y-axis direction on the substrate 101, and the two mounting bosses 102 located on the outer side include a first platform portion and a second platform portion connected to each other; the mounting boss 102 located in the middle includes a first platform portion, and the X-axis moving table 200 is provided with a first vertical support 202 corresponding to the mounting boss 102 in the middle, and the air film of the first vertical support 202 acts on the upper surface of the first platform portion.

[0061] In one implementation, a plurality of first vertical supports 202 are provided, and the plurality of first vertical supports 202 are spaced apart along the extension direction of the X-axis moving platform 200 .

[0062] See also Figure 3 , through the arrangement of multiple first vertical supports 202, a more uniform and stable vertical support force can be provided, thereby effectively supporting the X-axis moving platform 200 and maintaining the stability of the X-axis moving platform 200. The interval arrangement of multiple first vertical supports 202 also helps to balance the structure of the motion platform 10, ensuring that the X-axis moving platform 200 remains stable and is not prone to tilt or deformation during operation.

[0063] In one embodiment, the second air-floating support includes a second vertical support 302 and a second lateral support 303, and the extension direction of the air film formed between the second vertical support 302 and the base 100 and / or the X-axis moving table 200 is parallel to the XY plane, and the extension direction of the air film formed between the second lateral support 303 and the base 100 or the X-axis moving table 200 is parallel to the XZ plane.

[0064] See also Figure 1 , Figure 5 and Figure 6The second vertical support 302 can form an air film with the base 100, and can also form an air film with the X-axis moving table 200. The extension direction of the air film is parallel to the XY plane, which helps to provide uniform support force for the Y-axis moving table 300 in the vertical direction, so that the Y-axis moving table 300 and the X-axis moving table 200 have nearly zero friction in the vertical direction. At the same time, the extension direction of the air film formed between the second lateral support 303 and the X-axis moving table 200 is parallel to the XZ plane, which helps to provide uniform support force in the horizontal direction, ensure the balance of the Y-axis moving table 300 in the horizontal direction, and ensure nearly zero friction between the X-axis moving table 200 and the Y-axis moving table 300 in the horizontal direction.

[0065] In one embodiment, the X-axis moving table 200 includes an X-axis table body 201, the upper surface of the X-axis table body 201 is provided with a Y-guide groove, and the air film of the second lateral support 303 acts on the groove side of the Y-guide groove; the air film of the second vertical support 302 acts on the groove bottom surface of the Y-guide groove, or the air film of the second vertical support 302 acts on the upper surface of the base 100.

[0066] See also Figure 3 and Figure 5 By providing a Y-guide groove on the upper surface of the X-axis stage body 201, the second lateral support 303 can move smoothly along the Y-guide groove, and can form an air film parallel to the XZ plane with the groove sidewall of the Y-guide groove, thereby providing uniform support force in the horizontal direction to ensure near-zero friction in the horizontal direction between the X-axis moving stage 200 and the base 100. At the same time, the second vertical support 302 can form an air film parallel to the XY plane with the groove bottom surface of the Y-guide groove, which helps to provide uniform support force for the Y-axis moving stage 300 in the vertical direction, thereby achieving near-zero friction in the vertical direction between the Y-axis moving stage 300 and the X-axis moving stage 200. In addition, the second vertical support 302 can also form an air film parallel to the XZ plane with the base 100 to provide vertical support force for the Y-axis moving stage 300.

[0067] In one embodiment, the X-axis moving stage 200 includes an X-axis stage body 201 , and the air film of the second lateral support 303 acts on the outer side of the X-axis stage body 201 ; the air film of the second vertical support 302 acts on the upper surface of the base 100 .

[0068] See also Fig.13The second lateral support 303 and the second vertical support 302 are both located on the outer side of the X-axis stage body 201, and the air film of the second lateral support 303 acts on the outer side of the X-axis stage body 201 to ensure near-zero friction between the Y-axis moving stage 300 and the X-axis moving stage 200 in the vertical direction. The air film of the second vertical support 302 acts on the upper surface of the base 100, and while ensuring that the second vertical support 302 provides support force to the Y-axis moving stage 300, the reaction force of the second vertical support 302 on the X-axis moving stage 200 is avoided, so as to reduce the risk of near-zero friction failure between the X-axis moving stage 200 and the base 100.

[0069] In one embodiment, the X-axis moving table 200 includes an X-axis table body 201, two first driving members 204 and two X-axis position sensors 205. The X-axis position sensors 205 are electrically connected to the first driving members 204. The two first driving members 204 are respectively driven and connected to the opposite ends of the X-axis table body 201. The two X-axis position sensors 205 respectively correspond to the opposite ends of the X-axis table body 201 and are used to detect the position of the end of the X-axis table body 201 in the X-axis direction.

[0070] See also Figure 3 The X-axis moving stage 200 includes an X-axis stage body 201, two first driving members 204 and two X-axis position sensors 205. The first driving member 204 can be configured as a linear motor, a cylinder, etc. The first driving member 204 is disposed on two mounting bosses 102, and the two first driving members 204 are respectively connected to the opposite ends of the X-axis stage body 201, and drive the X-axis stage body 201 to move along the X-axis direction. The X-axis stage body 201 can be evenly stressed at both ends to ensure the balance and stability of the X-axis stage body 201 during movement. At the same time, the two X-axis position sensors 205 correspond to the opposite ends of the X-axis stage body 201, and are used to detect the position of the end of the X-axis stage body 201 in the X-axis direction. The two X-axis position sensors 205 are electrically connected to the first drive member 204, and can monitor the position of the X-axis stage body 201 in real time, and control the movement of the first drive member 204 through feedback signals, ensuring that the system can accurately control and position the X-axis stage body 201, and realize accurate adjustment and control of the position of the X-axis stage body 201. The X-axis position sensor 205 can be configured as a grating ruler or a laser interferometer.

[0071] In one embodiment, the Y-axis moving stage 300 includes a Y-axis stage body 301, two second driving members 304 and two Y-axis position sensors 305. The Y-axis position sensors 305 are electrically connected to the second driving members 304. The two second driving members 304 are respectively driven and connected to the opposite ends of the Y-axis stage body 301. The two Y-axis position sensors 305 respectively correspond to the opposite ends of the Y-axis stage body 301 and are used to detect the position of the end of the Y-axis stage body 301 in the Y-axis direction.

[0072] See also Figure 5 The Y-axis moving stage 300 includes a Y-axis stage body 301, two second driving members 304 and two Y-axis position sensors 305. The second driving member 304 can be configured as a linear motor, a cylinder, etc. The second driving members 304 are arranged on two opposite sides of the X-axis stage body 201 and extend along the Y-axis direction. The two second driving members 304 are respectively connected to the opposite ends of the Y-axis stage body 301 and drive the Y-axis stage body 301 to move along the Y-axis direction. The Y-axis stage body 301 can be evenly stressed at both ends to ensure the balance and stability of the Y-axis stage body 301 during movement. At the same time, two Y-axis position sensors 305 correspond to the opposite ends of the Y-axis stage body 301, and are used to detect the position of the end of the Y-axis stage body 301 in the Y-axis direction. The two Y-axis position sensors 305 are electrically connected to the second drive member 304, and can monitor the position of the Y-axis stage body 301 in real time, and control the movement of the second drive member 304 through feedback signals, ensuring that the system can accurately control and position the Y-axis stage body 301, and realize accurate adjustment and control of the position of the Y-axis stage body 301. The Y-axis position sensor 305 can be configured as a grating ruler or a laser interferometer.

[0073] For the dual-drive linear motors of the X-axis moving table 200 and the Y-axis moving table 300, the speeds of the X-axis table body 201 and the Y-axis table body 301 are detected by a grating ruler and transmitted to the controller. The speed deviation coupling control method is used to realize synchronous control of the dual-drive linear motors, reduce the speed fluctuation rate, realize dual closed-loop control of the position and speed of the X-axis table body 201 and the Y-axis table body 301, and improve the positioning accuracy of the motion platform 10.

[0074] In one embodiment, the air floating support includes a support body, which is provided with an air inlet, an air outlet 601 and a connecting cavity connecting the air inlet and the air outlet 601. The air inlet is used to connect to the air source, and the outer wall surface of the support body where the air outlet 601 is located is provided with a plurality of grooves 602 connecting the air outlet 601.

[0075] See also Fig.10 and Fig.11The outer wall surface of the support body where the air outlet 601 is located is provided with a plurality of grooves 602, which help the gas to be evenly distributed and effectively released, thereby ensuring the stability and reliability of the air-floating support. Without loss of generality, the air inlet is located on the side wall surface of the support body, and the air outlet 601 and the plurality of grooves 602 are located on the lower bottom surface of the support body. The gas source enters the connecting cavity from the air inlet, flows out from the air outlet 601, and flows to each groove 602, so that a high-pressure gas film is formed between the lower bottom surface of the support body and the working surface (the base and the X-axis table body 201), thereby forming an air-floating support effect, reducing the contact area between the X-axis moving table 200 and the base 100 and reducing the contact area between the Y-axis moving table 300 and the X-axis moving table 200, reducing friction, and improving the positioning accuracy of the motion platform 10.

[0076] In one embodiment, the motion platform 10 further includes an X-guide rail assembly 700 , which includes a first guide rail extending along the X-axis direction and a first slider slidably arranged on the first guide rail. The first guide rail is arranged on the base 100 , and the first slider is arranged on the X-axis moving platform 200 .

[0077] See also Fig.14 The first guide rail can be arranged on the mounting boss 102 or on the substrate 101; the first slider is arranged on the X-axis stage body 201, and the first slider is slidably matched with the first guide rail. By arranging the X-axis guide rail assembly 700, the stability of the support guide in the X-axis direction can be improved, and the yaw and pitch of the X-axis stage body 201 can be reduced.

[0078] In one embodiment, the motion platform 10 also includes a Y-direction guide rail assembly 800 , which includes a second guide rail extending along the Y-axis direction and a second slider slidably arranged on the second guide rail. The second guide rail is arranged on the base 100 , and the second slider is arranged on the Y-direction moving platform 300 .

[0079] See also Fig.14 The second guide rail is arranged on the X-axis stage body 201; the second slider is arranged on the Y-axis stage body 301, and the second slider is slidably matched with the second guide rail. By arranging the Y-axis guide rail assembly 800, the stability of the support guide in the Y-axis direction can be improved, and the yaw and pitch of the Y-axis stage body 301 can be reduced.

[0080] In one embodiment, the motion platform 10 also includes a rotating component 400 and a Z-axis moving table 500, the rotating component 400 includes a rotating platform 403 and a third driving member 404, the rotating platform 403 is driven and connected to the third driving member 404, and can rotate relative to the Y-axis moving table 300; the Z-axis moving table 500 is arranged on the rotating platform 403, the Z-axis moving table 500 includes a worktable 501 and a fourth driving member 502, the worktable 501 is driven and connected to the fourth driving member 502, and can move relative to the rotating platform 403 along the Z-axis direction.

[0081] See also Figure 1 , Figures 7 to 9 , the rotating assembly 400 is mounted on the Y-axis stage body 301, the Z-axis moving stage 500 is arranged on the rotating platform 403, and the third driving member 404 can drive the rotating platform 403 to rotate, thereby realizing the rotation of the Z-axis moving stage 500, and then realizing the rotation of the workpiece on the stage 501. The rotating assembly 400 also includes a mounting seat 401, an arc grating ruler and a rotating bearing 402, the mounting seat 401 is arranged on the Y-axis stage body 301, the third driving member 404, the arc grating ruler and the rotating bearing 402 are arranged on the mounting seat 401, the rotating platform 403 is sleeved on the outer periphery of the rotating bearing 402, and the third driving member 404 is configured as an arc motor. The rotating assembly 400 is provided with an arc grating ruler, and the arc grating ruler is electrically connected to the third driving member 404. The arc grating ruler is used to detect the position and speed of the rotating platform 403, so as to realize the position and speed double closed-loop control, and improve the positioning accuracy of the motion platform 10.

[0082] The fourth driving member 502 is disposed on the rotating platform 403 and is connected to the stage 501, which is used to place the workpiece to be peeled. The fourth driving member 502 can drive the stage 501 to move relative to the rotating platform 403 along the Z-axis direction, thereby realizing the movement of the workpiece to be peeled in the Z-axis direction.

[0083] See also Figure 1 The technical solution of the utility model is as follows: an X-axis moving table 200 is arranged on the base 100, and the X-axis moving table 200 can move relative to the base 100 along the X-axis direction; a Y-axis moving table 300 is arranged on the X-axis table body 201, and the Y-axis moving table 300 can move relative to the X-axis moving table 200 along the Y-axis direction; a rotating component 400 is arranged on the Y-axis table body 301, and the rotating component 400 can rotate relative to the Y-axis moving table 300; a Z-axis moving table 500 is arranged on the rotating platform 403, and the stage 501 can move relative to the rotating platform 403 along the Z-axis direction, thereby realizing the movement of the motion platform 10 in four degrees of freedom in the X-axis direction, the Y-axis direction, the Z-axis direction and the θ-axis direction (the rotation direction of the rotating platform 403), so as to complete the laser scanning peeling of the large-size and high-precision LED substrate 101.

[0084] In one embodiment, see Figure 1 , an X-axis moving stage 200, a Y-axis moving stage 300, a rotating assembly 400 and a Z-axis moving stage 500 are sequentially arranged from bottom to top as a group of motion components. At least two groups of motion components are arranged at intervals in the X-axis direction of the base 100, and the laser lift-off efficiency can be improved by arranging at least two groups of motion components.

[0085] In one embodiment, the Z-axis moving platform 500 also includes a screw nut pair 504, a guide slider 505, a first wedge block 506 and a second wedge block 507. The guide slider 505 is movably arranged on the rotating platform 403 and is connected to the worktable 501, so that the worktable 501 is fixed relative to the rotating platform 403 in the circumferential direction; the first wedge block 506 is arranged on the worktable 501 and is slidably connected to the second wedge block 507. The second wedge block 507 is arranged on the nut seat of the screw nut pair 504. The screw drive of the screw nut pair 504 is connected to the fourth driving member 502 to drive the second wedge block 507 to move along the XY plane and prompt the first wedge block 506 to move along the Z-axis direction.

[0086] See also Figure 7 and Figure 8 The guide slider 505 is movably arranged on the rotating platform 403 and can move relative to the rotating platform 403 along the Z-axis direction. Since the guide slider 505 is restricted by the rotating platform 403 on the XY plane, the position of the guide slider 505 on the XY plane is fixed. The guide slider 505 is connected to the stage 501, so that the stage 501 is fixed relative to the rotating platform 403 in the circumferential direction, that is, the position of the stage 501 on the XY plane is fixed. Under the drive of the third driving member 404, the guide slider 505 and the stage 501 can move relative to the rotating platform 403 along the Z-axis direction together. At the same time, the guide slider 505 is slidably connected to the column on the rotating platform 403, so that the guide slider 505 can play a guiding role.

[0087] The first wedge block 506 is arranged on the stage 501, so that the position of the first wedge block 506 is also fixed on the XY plane. When the fourth driving member 502 drives the screw nut pair 504 to move, the second wedge block 507 connected to the nut seat of the screw nut pair 504 can move along the XY plane, so that the first wedge block 506 and the second wedge block 507 are slidably matched. Since the position of the first wedge block 506 is fixed on the XY plane, the first wedge block 506 moves along the Z axis direction, and drives the stage 501 and the guide slider 505 to move along the Z axis direction.

[0088] In one embodiment, see Figure 7 and Figure 8 The Z-axis moving platform 500 further includes two transmission shaft assemblies 503, which are disposed on both sides of the fourth driving member 502 and are drivingly connected to the fourth driving member 502. Two screw nut pairs 504 are disposed opposite to each other on the rotating platform 403, and each transmission shaft assembly 503 is drivingly connected to a screw nut pair 504.

[0089] The Z-axis moving platform 500 is provided with four guide sliders 505, which are arranged diagonally to ensure the stability and balance of the installation of the stage 501. The Z-axis moving platform 500 is provided with two screw nut pairs 504, which are arranged opposite to each other, and each screw nut pair 504 is correspondingly connected with a plurality of first wedge blocks 506 and a plurality of second wedge blocks 507, so that the stage 501 is subjected to more uniform and stable force. The Z-axis moving platform 500 also includes two transmission shaft assemblies 503, which are correspondingly connected to the two screw nut pairs 504 in a one-to-one manner, and a fourth driving member 502 is simultaneously driven and connected to the two transmission shaft assemblies 503, so that the movement of the two screw nut pairs 504 is synchronous, so that the stage 501 has better stability and balance during the movement along the Z-axis direction.

[0090] The utility model also proposes a laser stripping device, which includes a motion platform 10. The specific structure of the motion platform 10 refers to the above embodiment. Since the laser stripping device adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be repeated here one by one.

[0091] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A sports platform, characterized in that: include: Pedestal; An X-axis moving platform is disposed on the base and is movable relative to the base along the X-axis direction; A Y-axis moving stage, disposed on the X-axis moving stage and capable of moving relative to the X-axis moving stage along the Y-axis direction; as well as An air floating support, used to connect to an air source, and comprising a first air floating support provided on the X-axis moving stage and a second air floating support provided on the Y-axis moving stage, wherein the first air floating support can form an air film between the X-axis moving stage and the base after ventilation; The second air-floating support can form an air film between the Y-axis moving stage and the base and / or the X-axis moving stage after ventilation.

2. The motion platform according to claim 1, characterized in that: The first air-floating support includes a first vertical support and a first lateral support. The extension direction of the air film formed between the first vertical support and the base is parallel to the XY plane. The extension direction of the air film formed between the first lateral support and the base is parallel to the XZ plane.

3. The motion platform according to claim 2, characterized in that: The base includes a substrate and a mounting boss protruding from the substrate, the mounting boss extends along the X-axis direction, the air film of the first vertical support acts on the upper surface of the substrate or the upper surface of the mounting boss, and the air film of the first horizontal support acts on the side of the mounting boss.

4. The motion platform according to claim 3, characterized in that: The base comprises two mounting bosses arranged at intervals along the Y-axis direction on the substrate, an X-direction guide groove is formed at intervals between the two mounting bosses, at least two first transverse supports are provided, and at least two first transverse supports are respectively provided at opposite ends of the X-direction movable stage and are respectively provided corresponding to two opposite groove side walls of the X-direction guide groove; And / or, a plurality of the first vertical supports are provided, and the plurality of the first vertical supports are arranged at intervals along the extension direction of the X-axis moving platform.

5. The motion platform according to claim 1, characterized in that: The second air-floating support includes a second vertical support and a second lateral support, the extension direction of the air film formed between the second vertical support and the base and / or the X-axis moving table is parallel to the XY plane, and the extension direction of the air film formed between the second lateral support and the base or the X-axis moving table is parallel to the XZ plane.

6. The motion platform according to claim 5, characterized in that: The X-axis moving stage comprises an X-axis stage body, an upper surface of the X-axis stage body is provided with a Y-direction guide groove, the air film of the second transverse support acts on the groove side of the Y-direction guide groove; the air film of the second vertical support acts on the groove bottom surface of the Y-direction guide groove, or the air film of the second vertical support acts on the upper surface of the base; Alternatively, the X-axis moving stage comprises an X-axis stage body, the air film of the second lateral support acts on the outer side surface of the X-axis stage body; and the air film of the second vertical support acts on the upper surface of the base.

7. The motion platform according to any one of claims 1 to 6, characterized in that: The X-axis moving stage comprises an X-axis stage body, two first driving members and two X-axis position sensors, wherein the X-axis position sensor is electrically connected to the first driving member, and the two first driving members are respectively driven and connected to opposite ends of the X-axis stage body, and the two X-axis position sensors respectively correspond to opposite ends of the X-axis stage body and are used to detect the position of the end of the X-axis stage body in the X-axis direction; And / or, the Y-axis moving stage comprises a Y-axis stage body, two second driving members and two Y-axis position sensors, the Y-axis position sensor is electrically connected to the second driving member, the two second driving members are respectively driven and connected to opposite ends of the Y-axis stage body, the two Y-axis position sensors respectively correspond to opposite ends of the Y-axis stage body, and are used to detect the position of the end of the Y-axis stage body in the Y-axis direction; And / or, the air floating support comprises a support body, the support body is provided with an air inlet, an air outlet and a connecting cavity connecting the air inlet and the air outlet, the air inlet is used to connect with the air source, and the outer wall surface of the support body where the air outlet is located is provided with a plurality of grooves connecting with the air outlet; And / or, the motion platform further comprises an X-direction guide rail assembly, the X-direction guide rail assembly comprises a first guide rail extending along the X-axis direction, and a first slider slidably arranged on the first guide rail, the first guide rail is arranged on the base, and the first slider is arranged on the X-direction moving platform; And / or, the motion platform also includes a Y-direction guide rail assembly, the Y-direction guide rail assembly includes a second guide rail extending along the Y-axis direction, and a second slider slidably arranged on the second guide rail, the second guide rail is arranged on the base, and the second slider is arranged on the Y-direction moving platform.

8. The motion platform according to claim 1, characterized in that: The motion platform further comprises a rotating assembly and a Z-direction moving platform, the rotating assembly comprises a rotating platform and a third driving member, the rotating platform is drivingly connected to the third driving member and can rotate relative to the Y-direction moving platform; The Z-direction moving platform is arranged on the rotating platform, and the Z-direction moving platform comprises a loading platform and a fourth driving member. The loading platform is drivingly connected to the fourth driving member and can move relative to the rotating platform along the Z-axis direction.

9. The motion platform according to claim 8, characterized in that: The Z-axis moving platform also includes a screw nut pair, a guide slider, a first wedge block and a second wedge block. The guide slider is movably arranged on the rotating platform and connected to the worktable so that the worktable is fixed relative to the rotating platform in the circumferential direction; the first wedge block is arranged on the worktable and is slidably connected to the second wedge block, the second wedge block is arranged on the nut seat of the screw nut pair, and the screw drive of the screw nut pair is connected to the fourth driving member to drive the second wedge block to move along the XY plane and prompt the first wedge block to move along the Z-axis direction.

10. A laser lift-off device, characterized in that: Comprising the motion platform as claimed in any one of claims 1 to 9.

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