Electronic-grade hydrogen peroxide purification device

Abstract

The utility model provides an electronic-grade hydrogen peroxide purification device which comprises an oil separation tank, at least one adsorption tower connected to the outlet end of the oil separation tank, and a product tank and a sewage tank which are communicated with the adsorption tower. The adsorption tower comprises a tower body, a liquid inlet formed in the bottom of the tower body, a liquid outlet formed in the top of the tower body and a collecting opening; the plurality of collecting ports are communicated with the product tank through first communicating pipes, and each first communicating pipe is provided with a first stop valve. A pump body is arranged between the adsorption tower and the oil separation tank, an outlet of the pump body is communicated with each liquid inlet through a second communicating pipe, and each second communicating pipe is provided with a second stop valve. And the liquid outlet of the previous adsorption tower is communicated with the liquid outlet of the next adsorption tower through a third communicating pipe. An adsorption material for adsorbing impurities is arranged at the bottom of the tower body; and the stirring part is driven to rotate along the center of the cavity to stir the bottom of the cavity. According to the utility model, colloidal solids are effectively prevented from being statically blocked in gaps among adsorption materials, and the condition of serious blockage caused by adsorption of resin is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of hydrogen peroxide purification, in particular to an electronic-grade hydrogen peroxide purification device. Background Art

[0002] The preparation methods for electronic grade hydrogen peroxide purification include electrolysis, secondary alcohol oxidation and alkyl anthraquinone. The anthraquinone method is the main method for producing hydrogen peroxide in industry. The process is to configure alkyl anthraquinone and organic solvent into a working solution. H2 is introduced under the conditions of pressure 0.3MPA, temperature 55-65℃ and the presence of a catalyst to achieve hydrogenation reduction. Then, a hydrogen peroxide aqueous solution with a mass fraction of 20%-30% is obtained through extraction, regeneration, refining and concentration.

[0003] The organic carbon in hydrogen peroxide can seriously affect the quality of the product. For example, in the production of caprolactam, the ketone-oxime process route is mainly used for production. In the oximation and Beckmann rearrangement reactions of the transmission, cyclohexanone, ammonia, and hydrogen peroxide are placed in the same reactor to synthesize cyclohexanone oxime in one step. Therefore, hydrogen peroxide is the main raw material for synthesizing caprolactam. The reaction requires that the organic carbon concentration in hydrogen peroxide be reduced to below 50ppm, otherwise it will affect the quality of the finished product. The methods for purifying hydrogen peroxide that are commonly used in the industry include distillation and ion exchange resin purification. The ion exchange resin purification method is that the hydrogen peroxide raw material is pumped into an adsorption column for organic carbon adsorption, and then the feed liquid is fed into an anion and cation exchange resin for ion exchange, and then the feed liquid is filtered to remove particulate impurities to obtain an ultra-pure hydrogen peroxide product.

[0004] In summary, the ion exchange resin purification method can not only remove organic carbon, but also remove some metal ion impurities such as Fe, Al, Sn, etc. However, in practical applications, the resin is easy to decompose, the strength is reduced, and a colloidal solid is generated, which leads to problems such as resin blockage, high processing costs, poor separation effect, and purity that does not meet requirements. Utility Model Content

[0005] In view of this, the utility model aims to provide an electronic-grade hydrogen peroxide purification device to improve the purification effect of hydrogen peroxide and reduce the serious blockage caused by resin adsorption.

[0006] In order to achieve the above object, the technical solution of the utility model is implemented as follows:

[0007] An electronic grade hydrogen peroxide purification device comprises a grease trap, at least one adsorption tower connected to the outlet end of the grease trap, and a product tank and a sewage tank connected to the adsorption tower;

[0008] The adsorption tower comprises a tower body, a liquid inlet provided at the bottom of the tower body, a liquid outlet provided at the top of the tower body, and a collecting port provided at the side of the tower body near the liquid outlet; a plurality of the collecting ports are connected to the product tank through a first connecting pipe, and each of the first connecting pipes is provided with a first stop valve;

[0009] A pump body is provided between the adsorption tower and the oil separator, the pump body outlet is connected to each of the liquid inlets through a second connecting pipe, and each of the second connecting pipes is provided with a second stop valve;

[0010] Between two adjacent adsorption towers, the liquid outlet of the previous adsorption tower is connected to the liquid outlet of the next adsorption tower through a third connecting pipe, and each of the third connecting pipes is provided with a third stop valve; the liquid outlet of the adsorption tower at the rear end is connected to the sewage tank;

[0011] The tower body has a cavity therein, an adsorption material for adsorbing impurities is disposed at the bottom of the cavity, a stirring portion driven to rotate is disposed in the cavity, and the stirring portion is driven to rotate along the center of the cavity to stir the bottom of the cavity.

[0012] Furthermore, the tower body is also provided with a solid sewage outlet connected to the external tank body, and the solid sewage outlet is arranged higher than the top surface of the adsorption material;

[0013] A filter part is connected to the tower body at the sewage outlet, the pores of the filter part are smaller than the adsorption material particles, and the pressure of the external tank body is lower than the pressure of the cavity of the adsorption tower.

[0014] Furthermore, a driving part is also provided at the lower part of the tower body, and a power output end of the driving part is connected to the stirring part.

[0015] Further, the stirring part includes a sleeve connected to the power output end of the driving part, a base frame connected to the sleeve, and a plurality of stirring rods extending vertically upward on the base frame;

[0016] The bottom frame is a conical frame structure, and its shape is matched with the bottom of the cavity. A plurality of stirring rods are evenly distributed on the bottom frame.

[0017] Furthermore, the base frame includes connecting ribs evenly distributed around the circumference and connected to the shaft sleeve, each connecting rib is provided with a large connecting ring at one end away from the shaft sleeve, and the connecting rib has a folded angle portion, and the folded angle portion is provided with a small connecting ring connecting each connecting rib;

[0018] Each stirring rod is respectively arranged on the large connecting ring and the small connecting ring.

[0019] Furthermore, the base frame and / or the stirring rod are provided with water-permeable holes.

[0020] Furthermore, the external tank is connected to the vacuum equipment, and the filter part adopts a filter screen connected to the sewage outlet.

[0021] Furthermore, a nozzle is provided at one end of the second connecting pipe close to the liquid inlet, and a receiving cavity for accommodating the nozzle is provided in the shaft sleeve, and a water spraying end of the nozzle faces the adsorption material.

[0022] Furthermore, a temperature regulating device is provided on the connecting pipeline between the oil trap and the pump body, a temperature sensor for detecting the temperature is provided in the cavity, and a detector for detecting organic carbon is provided at the liquid outlet;

[0023] The electronic-grade hydrogen peroxide purification device also includes a control system, and the detector, the temperature sensor and the temperature regulating device are connected to the control system with electrical signals.

[0024] Furthermore, a first connection port is provided at the top of the tower body, and a second connection port is provided at the bottom of the tower body. On-off valves for opening and closing are provided on the first connection port and the second connection port, respectively.

[0025] Compared with the prior art, the utility model has the following advantages:

[0026] The electronic-grade hydrogen peroxide purification device of the utility model is provided with a collection port in the adsorption tower, which is connected to the product tank through a first connecting pipe to collect qualified hydrogen peroxide, and the first stop valve provided on the first connecting pipe and the third connecting pipe connected between two adjacent adsorption towers can select the number of adsorption times of hydrogen peroxide to achieve the purification effect of hydrogen peroxide. A stirring part driven to rotate is also provided, which can fully stir the hydrogen peroxide raw material with the adsorption material when it enters the bottom of the cavity, effectively avoiding the static blockage of colloidal solids in the gap between the adsorption materials, and reducing the serious blockage caused by the adsorption of resin.

[0027] In addition, by setting a solid discharge port on the tower body and setting the pores of the filter part smaller than the particles of the adsorption material, most of the colloidal solids can be discharged from the adsorption tower, further reducing the blockage of the gaps in the adsorption material by the colloidal solids. Also, because the pressure of the external tank body is set to be lower than the pressure in the cavity of the adsorption tower, the pressure difference facilitates the deformation of the colloidal solids and allows them to pass through the filter part, thereby improving the discharge effect.

[0028] In addition, by configuring the stirring part as a base frame and a stirring rod, the squeezing force of the stirring part on the adsorption material during the rotation process can be reduced, thereby preventing the adsorption material from being damaged and discharged from the sewage outlet. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the accompanying drawings:

[0030] Figure 1 A simplified structural diagram of the electronic-grade hydrogen peroxide purification device described in an embodiment of the utility model;

[0031] Figure 2 This is a schematic diagram of the structure of the adsorption tower described in the embodiment of the utility model;

[0032] Figure 3 A top view of the stirring portion and the shaft sleeve according to an embodiment of the utility model;

[0033] Figure 4 for Figure 3 Schematic cross-sectional view at AA in the middle.

[0034] Description of reference numerals:

[0035] 1. Grease trap; 2. Adsorption tower; 3. Product tank; 4. Sewage tank; 5. First connecting pipe; 6. First stop valve; 7. Pump body; 8. Second connecting pipe; 9. Second stop valve; 10. Third connecting pipe; 11. Third stop valve; 12. Adsorption material; 13. Stirring part; 14. External tank; 15. Driving part; 16. Nozzle; 17. On-off valve; 18. Temperature control device; 19. Purified liquid filtering device;

[0036] 201, tower body; 202, liquid inlet; 203, liquid outlet; 204, collection port; 205, solid sewage outlet; 206, filter part; 207, first connection port; 208, second connection port; 209, feed port;

[0037] 1301, shaft sleeve; 1302, bottom frame; 1303, stirring rod; 1304, water permeable hole;

[0038] 13011, accommodating chamber;

[0039] 13021. Connecting ribs; 13022. Large connecting ring; 13023. Angle portion; 13024. Small connecting ring. DETAILED DESCRIPTION

[0040] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0041] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "back" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0042] In addition, in the description of the present invention, unless otherwise clearly defined, the terms "installation", "connection", "connection", and "connector" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood in combination with specific circumstances.

[0043] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0044] The present embodiment relates to an electronic-grade hydrogen peroxide purification device, which includes a grease trap 1, at least one adsorption tower 2 connected to the outlet end of the grease trap 1, and a product tank 3 and a sewage tank 4 connected to the adsorption tower 2. The adsorption tower 2 includes a tower body 201, a liquid inlet 202 arranged at the bottom of the tower body 201, a liquid outlet 203 arranged at the top of the tower body 201, and a collecting port 204 arranged on the side of the tower body 201 near the liquid outlet 203; multiple collecting ports 204 are connected to the product tank 3 through a first connecting pipe 5, and each first connecting pipe 5 is provided with a first stop valve 6. In addition, a pump body 7 is provided between the adsorption tower 2 and the grease trap 1, and the outlet of the pump body 7 is connected to each liquid inlet 202 through a second connecting pipe 8, and each second connecting pipe 8 is provided with a second stop valve 9. Between two adjacent adsorption towers 2, the liquid outlet 203 of the previous adsorption tower 2 is connected to the liquid outlet 203 of the next adsorption tower 2 through the third connecting pipe 10, and each third connecting pipe 10 is provided with a third stop valve 11; the liquid outlet 203 of the adsorption tower 2 at the rear end is connected to the sewage tank 4. The tower body 201 has a cavity inside, and an adsorption material 12 for adsorbing impurities is provided at the bottom of the cavity, and a stirring part 13 driven to rotate is provided in the cavity, and the stirring part 13 is driven to rotate along the center of the cavity to stir the bottom of the cavity.

[0045] The electronic-grade hydrogen peroxide purification device of this embodiment is provided with a collection port 204 in the adsorption tower 2, and the collection port 204 is connected to the product tank 3 through the first connecting pipe 5 to collect qualified hydrogen peroxide, and the first stop valve 6 provided on the first connecting pipe 5 and the third connecting pipe 10 connected between two adjacent adsorption towers 2 can select the number of adsorption times of hydrogen peroxide to achieve the purification effect of hydrogen peroxide. In addition, a driven rotating stirring part 13 is provided, which can fully stir the hydrogen peroxide raw material with the adsorption material 12 when it enters the bottom of the cavity, effectively avoiding the static blockage of the colloidal solid in the gap between the adsorption materials 12, and reducing the serious blockage caused by the adsorption of the resin.

[0046] Based on the above overall introduction, an exemplary structure of the electronic grade hydrogen peroxide purification device of this embodiment is as follows: Figure 1 and Figure 2 As shown, the electronic grade hydrogen peroxide purification of this embodiment adopts the currently commonly used ion exchange resin purification method to selectively adsorb the organic carbon in the hydrogen peroxide and enrich it in the adsorption material 12, and the organic carbon content of the adsorbed water will be significantly reduced. After adsorption saturation, the adsorption material 12 needs to be desorbed so that the adsorption material 12 can be regenerated and continue to adsorb, and the cycle of adsorption and regeneration is continuously performed to achieve the work of purifying hydrogen peroxide.

[0047] like Figure 1 In the embodiment shown, a low-density grease trap 1 is provided to remove most of the organic solvents in the hydrogen peroxide solution, such as aromatic hydrocarbons. A filter is provided at the outlet of the grease trap 1 in the embodiment, through which suspended matter and fine particles can be filtered out to prevent impurities from entering the adsorption material 12 and affecting the adsorption performance.

[0048] Still Figure 1 As shown, in this embodiment, four adsorption towers 2 are connected in sequence. Such an arrangement can not only ensure the number of adsorptions of hydrogen peroxide and improve the purification effect, but also cut off the adsorption tower 2 when the adsorption tower 2 fails or the TOC in the hydrogen peroxide at the liquid outlet 203 exceeds a predetermined content, thereby ensuring the continuation of the hydrogen peroxide purification work. In order to facilitate the loading of the adsorption material 12 into the tower body 201, a feed port 209 is also provided at the top of the tower body 201 of this embodiment.

[0049] As a preferred implementation mode, Figure 1 and Figure 2 As shown, the tower body 201 is also provided with a solid sewage outlet 205 connected to the external tank body 14, and the solid sewage outlet 205 is arranged higher than the top surface of the adsorption material 12. The tower body 201 is connected to a filter 206 at the sewage outlet, and the pores of the filter 206 are smaller than the particles of the adsorption material 12, and the pressure of the external tank body 14 is lower than the pressure of the cavity of the adsorption tower 2.

[0050] In this embodiment, a solid sewage outlet 205 is provided on the tower body 201, and the pores of the filter part 206 are provided to be smaller than the particles of the adsorption material 12, so that most of the colloidal solids can be discharged from the adsorption tower 2, and the blockage of the gaps of the adsorption material 12 by the colloidal solids is further reduced. In addition, because the pressure of the external tank body 14 is provided to be lower than the pressure in the cavity of the adsorption tower 2, the colloidal solids are deformed by the pressure difference and pass through the filter part 206, thereby improving the sewage discharge effect.

[0051] In addition, Figure 1 and Figure 2 As shown, the cavity of the tower body 201 is provided with a purified liquid filter device 18 and a temperature regulating device 19 which block the cross section of the cavity in a radial direction at the middle position. The purified liquid filter device 18 and the temperature regulating device 19 adopt the existing technology. The purified liquid filter device 18 and the temperature regulating device 19 divide the cavity into two upper and lower cavities. The hydrogen peroxide adsorbed by the adsorption material 12 passes through the purified liquid filter to remove a part of mechanical impurities, and then is collected into the product tank 3 through the collecting port 204. If it is necessary to pass through the multi-stage adsorption tower 2 for adsorption, when passing through the previous adsorption tower 2, the first stop valve 6 needs to be closed to allow the hydrogen peroxide liquid to be output through the liquid outlet 203, and the third stop valve 11 at the liquid outlet 203 of the next adsorption tower 2 is opened and the second stop valve 9 at the liquid inlet 202 of the adsorption tower 2 is closed, so that the hydrogen peroxide liquid can pass through the third connecting pipe 10 for multi-stage adsorption and purification.

[0052] Preferably, if Figure 2 As shown, a driving unit 15 is further provided at the lower part of the tower body 201, and a power output end of the driving unit 15 is connected to the stirring unit 13. In this embodiment, the driving unit 15 adopts a shaftless motor, and a bracket (not shown in the figure) is provided at the lower end of the tower body 201 in this embodiment to support it and fix it to the ground, and the driving unit 15 is fixed on the bracket and is located directly below the stirring unit 13.

[0053] Furthermore, if Figures 2 to 4 As shown, the stirring part 13 includes a sleeve 1301 connected to the power output end of the driving part 15, a bottom frame 1302 connected to the sleeve 1301, and a plurality of stirring rods 1303 extending vertically upward on the bottom frame 1302. The bottom frame 1302 is a conical frame structure, and its shape is adapted to the bottom of the cavity. The plurality of stirring rods 1303 are evenly distributed on the bottom frame 1302 around the circumference.

[0054] In order to reduce the damage of the stirring part 13 to the adsorption material 12 during the rotation process, this embodiment adopts a softer nylon material or plastic product. Such a setting also makes the surface of the stirring part 13 smooth, reducing the friction between the stirring part 13 and the adsorption material 12.

[0055] Furthermore, if Figures 2 to 4As shown, the base frame 1302 includes connecting ribs 13021 evenly distributed on the circumference and connected to the shaft sleeve 1301, and each connecting rib 13021 is provided with a large connecting ring 13022 at one end away from the shaft sleeve 1301. The connecting rib 13021 has a corner portion 13023, and the corner portion 13023 is provided with a small connecting ring 13024 connected to each connecting rib 13021. Each stirring rod 1303 is respectively arranged on the large connecting ring 13022 and the small connecting ring 13024. The connecting rib 13021 in this embodiment is in the shape of a long strip, and the small connecting ring 13024 and the large connecting ring 13022 adopt a circular ring structure. The base frame 1302 in this embodiment can be formed by injection molding, or by hot-melt connection after mechanical processing.

[0056] Of course, the base frame 1302 and the stirring rod of this embodiment can also be formed by welding metal plates, and then a layer of rubber layer is wrapped on the base frame 1302 and the stirring rod to prevent the adsorption material 12 from being damaged.

[0057] As a specific implementation method, Figure 3 As shown, the bottom frame 1302 and the stirring rod 1303 of this embodiment are provided with water holes 1304. The water holes 1304 on the stirring rod 1303 are arranged in an array along the height direction thereof, and are transverse circular holes that penetrate the stirring rod 1303 in the transverse direction. A plurality of water holes 1304 on the bottom frame 1302 are arranged to penetrate in the transverse direction and in the longitudinal direction, respectively. By providing the water holes 1304 on the stirring part 13, hydrogen peroxide can enter the adsorption material 12 from the liquid inlet 202, and a transverse water ring can be generated when the stirring part 13 rotates, thereby increasing the flow cross force of hydrogen peroxide in the longitudinal and transverse directions, increasing the mixing effect of hydrogen peroxide and the adsorption material 12, and improving the purification quality.

[0058] Preferably, the outer tank 14 of this embodiment is connected to the vacuum device, and the filter unit 206 uses a filter screen connected to the sewage outlet. The pressure in the outer tank 14 is reduced, which facilitates the discharge of colloidal solids. The mesh size of the filter screen can be adaptively adjusted according to the selection of the adsorbent material 12, and is not limited here.

[0059] In addition, if Figures 1 to 4 As shown, a nozzle 16 is provided at one end of the second connecting pipe 8 near the liquid inlet 202, and a housing cavity 13011 for placing the nozzle 16 is provided in the shaft sleeve 1301, and the water spraying end of the nozzle 16 faces the adsorbent material 12. The structure of the nozzle 16 can refer to the prior art. The nozzle 16 is arranged in the housing cavity 13011 of the shaft sleeve 1301, which is convenient for placement, and the nozzle 16 can be arranged in the middle of the empty cavity, combined with the rotation of the stirring part 13, so that the hydrogen peroxide can quickly fill the adsorbent material 12.

[0060] In order to increase the automation setting of the electronic-grade hydrogen peroxide purification device of this embodiment, a temperature regulating device is provided on the connecting pipeline between the oil trap 1 and the pump body 7, and a temperature sensor for detecting the temperature is provided in the cavity; and a detector for detecting organic carbon is provided at the liquid outlet 203. The electronic-grade hydrogen peroxide purification device of this embodiment also includes a control system, and the detector, the temperature sensor and the temperature regulating device are connected to the control system by electrical signals.

[0061] The control system of this embodiment adopts a control system such as a PLC, and specifics can refer to the prior art. The temperature control device can be connected to an external heater or condenser. Through the detection of the temperature sensor, the control system transmits an electrical signal to control the temperature control device to ensure the temperature during adsorption and avoid the reaction of the adsorption material 12.

[0062] In addition, the first stop valve 6, the second stop valve 9 and the third stop valve 11 can also be electrically controlled stop valves, and connected to the control system by electrical signals, and the number of adsorption times is determined by the purification requirements and the concentration of TOC organic carbon detected by the detector at the liquid outlet 203. Most existing TOC mass concentrations are required to be less than 50 mg / L.

[0063] Furthermore, in order to facilitate the regeneration process in the adsorption tower 2, in this embodiment, a first connection port 207 is further provided at the top of the tower body 201, and a second connection port 208 is further provided at the bottom of the tower body 201. The first connection port 207 and the second connection port 208 are respectively provided with an on-off valve 17 for on-off. The first connection port 207 and the second connection port 208 are used to connect to an external pure water source to implement the water washing step of the resin. Specifically, the first connection port 207 can be used as the water inlet of the pure water source, and the second connection port 208 can be used as the water outlet, so that pure water is sprayed from the top of the tower to the bottom of the tower, and the agitation of the agitating part 13 is combined to improve the water washing effect.

[0064] In the regeneration step, the second connection port 208 can be set as the inlet of methanol, and the first connection port 207 can be set as the outlet of methanol, so that methanol flows from the bottom of the tower to the top of the tower and is discharged through the liquid outlet 203.

[0065] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An electronic grade hydrogen peroxide purification device, characterized in that: It comprises a grease trap (1), at least one adsorption tower (2) connected to the outlet end of the grease trap (1), and a product tank (3) and a sewage tank (4) connected to the adsorption tower (2); The adsorption tower (2) comprises a tower body (201), a liquid inlet (202) arranged at the bottom of the tower body (201), a liquid outlet (203) arranged at the top of the tower body (201), and a collecting port (204) arranged at the side of the tower body (201) close to the liquid outlet (203); a plurality of the collecting ports (204) are connected to the product tank (3) via a first connecting pipe (5), and each of the first connecting pipes (5) is provided with a first stop valve (6); A pump body (7) is provided between the adsorption tower (2) and the oil separator (1); the outlet of the pump body (7) is connected to each of the liquid inlets (202) via a second connecting pipe (8); and each of the second connecting pipes (8) is provided with a second stop valve (9); Between two adjacent adsorption towers (2), the liquid outlet (203) of the previous adsorption tower (2) is connected to the liquid outlet (203) of the next adsorption tower (2) via a third connecting pipe (10), and each of the third connecting pipes (10) is provided with a third stop valve (11); the liquid outlet (203) of the adsorption tower (2) at the rear end is connected to the sewage tank (4); The tower body (201) has a cavity in it, and an adsorption material (12) for adsorbing impurities is provided at the bottom of the cavity. A stirring portion (13) driven to rotate is provided in the cavity, and the stirring portion (13) is driven to rotate along the center of the cavity to stir the bottom of the cavity.

2. The electronic grade hydrogen peroxide purification device according to claim 1, characterized in that: The tower body (201) is also provided with a solid sewage outlet (205) connected to the external tank body (14), and the solid sewage outlet (205) is arranged higher than the top surface of the adsorption material (12); A filter unit (206) is connected to the tower body (201) at the sewage outlet, the pores of the filter unit (206) are smaller than the particles of the adsorption material (12), and the pressure of the external tank body (14) is lower than the pressure of the cavity of the adsorption tower (2).

3. The electronic grade hydrogen peroxide purification device according to claim 1, characterized in that: A driving part (15) is also provided at the lower part of the tower body (201), and a power output end of the driving part (15) is connected to the stirring part (13).

4. The electronic grade hydrogen peroxide purification device according to claim 3, characterized in that: The stirring part (13) comprises a shaft sleeve (1301) connected to the power output end of the driving part (15), a base frame (1302) connected to the shaft sleeve (1301), and a plurality of stirring rods (1303) extending vertically upward from the base frame (1302); The base frame (1302) is a conical frame structure, and its shape is adapted to the bottom of the cavity. A plurality of stirring rods (1303) are evenly distributed on the base frame (1302) around the circumference.

5. The electronic grade hydrogen peroxide purification device according to claim 4, characterized in that: The base frame (1302) comprises connecting ribs (13021) evenly distributed around the circumference and connected to the shaft sleeve (1301); a large connecting ring (13022) is provided at one end of each connecting rib (13021) away from the shaft sleeve (1301); the connecting rib (13021) has a folded angle portion (13023); and the folded angle portion (13023) is provided with a small connecting ring (13024) connecting each connecting rib (13021); Each stirring rod (1303) is respectively arranged on the large connecting ring (13022) and the small connecting ring (13024).

6. The electronic grade hydrogen peroxide purification device according to claim 5, characterized in that: The bottom frame (1302) and / or the stirring rod (1303) are provided with a water-permeable hole (1304).

7. The electronic grade hydrogen peroxide purification device according to claim 2, characterized in that: The external tank (14) is in communication with the vacuum equipment, and the filter unit (206) is a filter screen connected to the sewage outlet.

8. The electronic grade hydrogen peroxide purification device according to claim 4, characterized in that: A nozzle (16) is provided at one end of the second connecting pipe (8) close to the liquid inlet (202), and a receiving cavity (13011) for accommodating the nozzle (16) is provided in the shaft sleeve (1301), and a water spraying end of the nozzle (16) faces the adsorption material (12).

9. The electronic grade hydrogen peroxide purification device according to claim 1, characterized in that: A temperature regulating device is provided on the connecting pipeline between the oil trap (1) and the pump body (7); a temperature sensor for detecting the temperature is provided in the cavity; and a detector for detecting organic carbon is provided at the liquid outlet (203); The electronic-grade hydrogen peroxide purification device also includes a control system, and the detector, the temperature sensor and the temperature regulating device are connected to the control system with electrical signals.

10. The electronic grade hydrogen peroxide purification device according to claim 1, characterized in that: The top of the tower body (201) is also provided with a first connection port (207), and the bottom of the tower body (201) is also provided with a second connection port (208), and the first connection port (207) and the second connection port (208) are respectively provided with on-off valves (17) for on-off.

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