Liquid supply system
By designing a liquid supply system for liquid storage and buffer pumps, the problem of difficult traditional liquid supply systems to achieve rapid and continuous liquid supply of high viscosity coating liquids is solved, stable supply and efficient coating are achieved, and product quality and production efficiency are improved.
Patent Information
- Application Number
- CN202421018090.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-11
- Publication Date
- 2025-01-14
- Estimated Expiration
- 2034-05-11
AI Technical Summary
It is difficult for traditional liquid supply systems to achieve rapid, continuous and stable liquid supply of high-viscosity coating liquids in the high-tech field, resulting in unstable coating operation and reduced product quality, and it is easy to produce bubbles that affect uniformity and quality.
A liquid supply system including liquid storage device, buffer pump, precision pump, coating device, valve and filter device is designed. Through the dual liquid replenishment mechanism of inert gas pushing and buffer pump, ensuring the stable supply of coated liquid and gas treatment of coated liquid. , reduce bubble generation.
The stable and continuous supply of high-viscosity coating liquid is achieved, production efficiency and coating quality are improved, uniformity and stability of coating operations are ensured, and bubble risk is reduced.
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Figure CN222343311U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of coating slurry supply devices, in particular to a liquid supply system. Background Art
[0002] In high-tech fields such as flat panel displays, chip packaging, and lithium-ion batteries, slit coating technology is widely used in the coating of high-viscosity materials to prepare the required thin films. These high-viscosity coating materials need to undergo strict degassing and filtration treatments before coating to ensure their quality and stability. However, in the actual production process, due to the influence of various factors such as pipeline length and coating liquid viscosity, the process of pressing the coating liquid into the precision injection pump through an inert gas is often slow, and it is difficult to meet the needs of fast, continuous and stable liquid supply, which directly affects the stability and uniformity of the coating operation process and the quality of the final product. Especially when continuous production is required, the liquid supply efficiency of the traditional liquid supply system is limited, which greatly affects the production efficiency.
[0003] In addition, the traditional liquid supply system is usually unable to directly extract the coating liquid through a precision pump, which increases the risk of bubbles in the coating liquid during the transmission process. The presence of bubbles will not only affect the uniformity and stability of the coating, but may also have a serious impact on the quality of the final film and reduce the qualified rate of the product.
[0004] In order to solve at least one of the above problems, the utility model provides a liquid supply system. Utility Model Content
[0005] The utility model aims to provide a liquid supply system for stably and continuously supplying coating liquid.
[0006] The purpose of the utility model is achieved by the following technical solutions:
[0007] The utility model provides a liquid supply system, comprising:
[0008] A liquid storage device, the liquid storage device is used to store the degassed coating liquid, and the air inlet of the liquid storage device is used to connect to an external air supply device;
[0009] A buffer pump, the input end of which is connected to the output end of the liquid storage device and is used for buffering the coating liquid;
[0010] A precision pump, the input end of which is connected to the output end of the buffer pump, for receiving and discharging the coating liquid;
[0011] A coating device, wherein the liquid inlet of the coating device is connected to the output end of the precision pump, and the precision pump is used to supply the coating liquid to the coating device;
[0012] A pipeline connects the liquid storage device, the buffer pump, the precision pump and the coating device in series.
[0013] Furthermore, the liquid supply system further comprises:
[0014] A collecting device for receiving excess coating liquid;
[0015] a first valve, the first valve being disposed on a pipeline between an air inlet of the liquid storage device and an air outlet of the air supply device;
[0016] a second valve, the second valve being arranged on a pipeline between the liquid storage device and the cache pump;
[0017] A third valve is arranged on the pipeline between the exhaust port of the cache pump and the collecting device.
[0018] Furthermore, the liquid supply system further comprises:
[0019] a fourth valve, the fourth valve being arranged on a pipeline between an output end of the cache pump and an input end of the precision pump;
[0020] A fifth valve, wherein the fifth valve is arranged on the pipeline between the exhaust port of the precision pump and the collecting device.
[0021] Furthermore, the liquid supply system further comprises:
[0022] a sixth valve, the sixth valve being arranged on a pipeline between an output end of the precision pump and a liquid inlet of the coating device;
[0023] A seventh valve is arranged on the pipeline between the exhaust port of the coating device and the collecting device.
[0024] Furthermore, the liquid supply system further comprises:
[0025] A filter device is arranged on the pipeline between the output end of the liquid storage device and the second valve.
[0026] Furthermore, the liquid supply system further comprises:
[0027] A degassing device, wherein the recovery port of the degassing device is connected to the output end of the collecting device, and the output end of the degassing device is connected to the input end of the liquid storage device; or
[0028] The collecting device is reused for degassing, and the output end of the collecting device is connected to the input end of the liquid storage device.
[0029] Further, the viscosity of the coating liquid after degassing is: 100cps-30000cps; and / or,
[0030] The solid content of the defoamed coating liquid is 5-70 wt %.
[0031] Furthermore, the gas supply device is used to supply inert gas.
[0032] Further, the coating device comprises a slit coating head, and the slit coating opening of the slit coating head is used to flow out the coating liquid;
[0033] The liquid supply system further comprises a blocking device, and the blocking device is movably connected to the slit coating port.
[0034] Furthermore, the blocking device comprises:
[0035] A blocking plate, one end of the peripheral portion of the blocking plate is hinged to one side of the slit coating port, one side of the blocking plate is provided with a blocking plug, and the size of the blocking plug matches the size of the slit coating port;
[0036] A driving mechanism drives the other side of the sealing plate to insert or detach the sealing plug from the slit coating port.
[0037] Compared with the prior art, the beneficial effects of the present invention include at least:
[0038] The liquid supply system of the utility model realizes the stable and continuous supply of high-viscosity coating liquid, and can effectively handle the gas and excess coating liquid in the liquid supply system, which can ensure that the coating operation can be carried out efficiently and the stability of the coating quality can be guaranteed.
[0039] The precision pump and the buffer pump of the utility model have the same volume. When the precision pump is supplying or replenishing liquid, the buffer pump can complete the replenishment at the same time, ensuring that there is enough coating liquid in the buffer pump for the precision pump to replenish liquid. In addition, when the precision pump needs to replenish liquid after cooperating with the coating device for a period of coating operation, the buffer pump can quickly pump the coating liquid into the precision pump, greatly shortening the replenishment time of the precision pump, so that the liquid supply system can realize the rapid and continuous supply of coating liquid, thereby improving the overall production efficiency.
[0040] Furthermore, by setting up a buffer pump, the coating liquid is buffered and debubbled before entering the precision pump, and bubbles are not easily generated during the liquid replenishment process of the precision pump, which can reduce the risk of bubbles in the coating liquid during the coating operation, making the coating operation more uniform and stable, thereby improving the coating quality of the final product. BRIEF DESCRIPTION OF THE DRAWINGS
[0041] Figure 1 It is a structural schematic diagram of a liquid supply system according to an embodiment of the utility model.
[0042] In the figure: 1. liquid storage device; 2. buffer pump; 3. precision pump; 4. coating device; 5. collecting device; 6. degassing device; 7. air supply device; 81. first valve; 82. second valve; 83. third valve; 84. fourth valve; 85. fifth valve; 86. sixth valve; 87. seventh valve; 88. eighth valve; 9. filtering device. DETAILED DESCRIPTION
[0043] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete and to fully convey the concepts of example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their repeated description will be omitted.
[0044] The words expressing positions and directions described in the present utility model are all explained by taking the drawings as examples, but they can be changed as needed, and all the changes are included in the protection scope of the present utility model.
[0045] refer to Figure 1 The liquid supply system of the utility model includes: a liquid storage device 1, a buffer pump 2, a precision pump 3, a coating device 4, and a pipeline. Further, it can also include: a collecting device 5, a first valve 81, a second valve 82, a third valve 83, a fourth valve 84, a fifth valve 85, a sixth valve 86, and a seventh valve 87. Further, it can also include: an eighth valve 88. Further, it can also include: a filtering device 9, a degassing device 6, and a blocking device.
[0046] Among them, the liquid storage device 1 is used to store the coating liquid (coating slurry) that has been degassed. The degassed treatment is to ensure that the coating effect and quality will not be affected by the large number of bubbles in the coating liquid during the coating operation. When used, the viscosity of the coating liquid after degassed is: 100cps-30000cps; the solid content is: 5-70wt%. In actual application, the liquid storage device 1 can be a liquid storage tank. The air inlet of the liquid storage device 1 is connected to the external air supply device 7, and the air supply device 7 can be a gas storage tank. Further, the first valve 81 is set on the pipeline between the air inlet of the liquid storage device 1 and the air outlet of the air supply device 7. When the coating liquid in the liquid storage device 1 needs to be input into the cache pump 2, the first valve 81 is opened, and the air supply device 7 is used to inject an inert gas, such as nitrogen or argon, into the liquid storage device 1, which can not only maintain the specific state of the liquid or prevent its oxidation, but also pressurize the liquid storage device 1 to push the high-viscosity coating liquid in the liquid storage device 1 into the cache pump 2.
[0047] The input end pipeline of the cache pump 2 is connected to the output end of the liquid storage device 1, which is used to cache the coating liquid. Furthermore, a second valve 82 is provided on the pipeline between the liquid storage device 1 and the cache pump 2. When the cache pump 2 needs to be vented, stored, or replenished, the second valve 82 and the first valve 81 can be opened, and the inert gas in the gas supply device 7 can be used to pressurize the liquid storage device 1, so as to push the high-viscosity coating liquid in the liquid storage device 1 into the cache pump 2, thereby achieving the venting, storage, and replenishment of the cache pump 2, and the coating liquid is cached in the cache pump 2. Preferably, the filter device 9 is provided on the pipeline between the output end of the liquid storage device 1 and the second valve 82, so as to further filter impurities in the coating liquid and ensure the purity of the coating liquid cached in the cache pump 2. In some preferred embodiments, the third valve 83 is provided on the pipeline between the exhaust port of the cache pump 2 and the collecting device 5. In the process of the coating liquid filling the cavity of the cache pump 2, the bubbles in the cavity of the cache pump 2 are discharged. By opening the third valve 83, the excess coating liquid and the discharged bubbles in the cache pump 2 enter the collecting device 5 through the third valve 83, and finally return to the degassing device 6 for degassing treatment. The output end of the degassing device 6 is connected to the input end of the liquid storage device 1 so that the recovered coating liquid can be reused. When in use, a ninth valve (not shown) is provided between the collecting device 5 and the degassing device 6. When it is necessary to degas the coating liquid in the collecting device 5, the ninth valve is opened to allow the coating liquid in the collecting device 5 to enter the degassing device 6. When the content of the coating liquid in the degassing device 6 reaches a first preset value or the content of the coating liquid in the collecting device 5 is lower than a second preset value, the ninth valve is closed. In actual application, the degassing device 6 can be a degassing tank.
[0048] The input end of the precision pump 3 is connected to the output end of the cache pump 2 for receiving and discharging the coating liquid. When in use, the precision pump 3 can accurately control the flow and pressure of the coating liquid. The precision pump 3 is, for example, a precision metering pump to ensure the stability and uniformity of the coating operation. Furthermore, the fourth valve 84 is arranged on the pipeline between the output end of the cache pump 2 and the input end of the precision pump 3. When it is necessary to vent, store liquid or replenish liquid for the precision pump 3, the coating liquid in the cache pump 2 can be transported to the precision pump 3 by opening the fourth valve 84, thereby achieving the venting, storage or replenishment of the precision pump 3, and having enough coating liquid in the precision pump 3 to supply liquid to the coating device 4. Preferably, the fifth valve 85 is arranged on the pipeline between the exhaust port of the precision pump 3 and the collecting device 5. In the process of the coating liquid filling the cavity of the precision pump 3, the bubbles in the cavity of the precision pump 3 are discharged, and by opening the fifth valve 85, the excess coating liquid and the discharged bubbles in the precision pump 3 enter the collecting device 5 through the fifth valve 85, and finally return to the degassing device 6 for degassing treatment, so that the recovered coating liquid can be reused.
[0049] The liquid inlet of the coating device 4 is connected to the output end of the precision pump 3, and is used to receive the coating liquid in the precision pump 3 and evenly coat the coating liquid on the target object, such as a pre-coating roller or a substrate to be coated. When used, the coating device 4 can achieve a high-quality coating effect by accurately controlling the flow rate and pressure of the coating liquid output by the precision pump 3. In actual application, the coating device 4 includes a slit coating head, and the slit coating port of the slit coating head is used to flow out the coating liquid.
[0050] A blocking device is provided to movably connect the slit coating port. Furthermore, the blocking device includes a blocking plate (not shown) and a driving mechanism (not shown). Among them, one end of the periphery of the blocking plate is hinged to one side of the slit coating port, and a blocking plug is provided on one side of the blocking plate, and the size of the blocking plug matches the size of the slit coating port. In addition, the driving mechanism drives the other side of the blocking plate to insert or detach from the slit coating port. When the coating operation is not required, in order to prevent the coating liquid from leaking or being contaminated by the outside, or when the slit coating port needs to be blocked in other cases, the driving mechanism is started to drive the blocking plate to move toward the slit coating port, and the blocking plug is inserted into the slit coating port, thereby blocking the slit coating port; when the coating operation is required, or when the slit coating port does not need to be blocked in other cases, the driving mechanism is started to drive the blocking plate to move back to the slit coating port, and the blocking plug is detached from the slit coating port.
[0051] In some preferred embodiments, the sixth valve 86 is arranged on the pipeline between the output end of the precision pump 3 and the liquid inlet of the coating device 4. When the coating device 4 needs to be vented and liquid stored, the coating liquid in the precision pump 3 can be transported to the coating device 4 by opening the sixth valve 86, thereby achieving the venting and liquid storage of the coating device 4. Further, the seventh valve 87 is arranged on the pipeline between the exhaust port of the coating device 4 and the collecting device 5. In the process of the coating liquid filling the coating head of the coating device 4, the bubbles in the coating head are discharged, and by opening the seventh valve 87 and sealing the coating port with a blocking device, the excess coating liquid and the discharged bubbles in the coating head enter the collecting device 5 through the seventh valve 87, and finally return to the degassing device 6 for degassing treatment, so that the recovered coating liquid can be reused. However, when performing the coating operation, the sixth valve 86 is opened, and the blocking device that seals the coating port is removed, so that the precision pump 3 continues to supply liquid to the coating device 4. Preferably, when the coating operation is performed, the seventh valve 87 is opened at the same time, so that the excess coating liquid enters the collecting device 5 through the seventh valve 87, thereby making the coating operation process more stable.
[0052] In some preferred embodiments, the eighth valve 88 is arranged on the pipeline between the output end of the degassing device 6 and the input end of the liquid storage device 1. Figure 1 . When the degassing device 6 needs to be degassed, the eighth valve 88 is closed. After the degassing is completed, the eighth valve 88 is opened to transport the coating liquid of the degassing device 6 to the liquid storage device 1. When the coating liquid in the liquid storage device 1 is sufficient or the coating liquid in the degassing device 6 is transported, the eighth valve 88 is closed. In application, when the eighth valve 88 is in a closed state, degassing, exhaust, liquid storage and liquid replenishment of the buffer pump 2, exhaust, liquid storage and liquid replenishment of the precision pump 3, exhaust and liquid storage of the coating device 4, and coating operations can be performed simultaneously, which greatly reduces the process time. Furthermore, when multiple groups of liquid supply systems need to be set up, each liquid supply system can share a degassing device 6, and the supply of coating liquid to each group of liquid supply systems can be achieved through multiple eighth valves 88.
[0053] In some embodiments, the degassing device 6 is not provided, and the collecting device is reused for degassing, and the output end of the collecting device 5 is connected to the input end of the liquid storage device 1. Further, in some embodiments, neither the degassing device 6 nor the collecting device 5 is provided, and a vacuum pump (not shown) is provided on the liquid storage device 1, and the vacuum pump is used to reduce the gas solubility in the coating liquid, so that the bubbles are separated from the coating liquid and discharged from the liquid storage device 1.
[0054] The precision pump 3 of the utility model has the same volume as the cache pump 2. During the process of the precision pump 3 supplying or replenishing liquid, the cache pump 2 can complete the replenishment at the same time, ensuring that there is enough coating liquid in the cache pump 2 for the precision pump 3 to replenish liquid. In addition, when the precision pump 3 cooperates with the coating device 4 to perform a coating operation for a period of time and needs to be replenished, the cache pump 2 can quickly pump the coating liquid into the precision pump 3, greatly shortening the replenishment time of the precision pump 3, so that the liquid supply system can realize the rapid and continuous supply of coating liquid, thereby improving the overall production efficiency.
[0055] Furthermore, by providing a buffer pump 2, the coating liquid is buffered and debubbled before entering the precision pump 3, and bubbles are not easily generated during the liquid replenishment process of the precision pump 3, which can reduce the risk of bubbles in the coating liquid during the coating operation, making the coating operation more uniform and stable, thereby improving the coating quality of the final product.
[0056] The liquid supply system of the present invention realizes liquid supply based on the following liquid supply method to ensure the stable supply of high-viscosity coating liquid and the efficient coating process. The working process of the liquid supply system of the present invention is described in detail below.
[0057] (i) When the liquid supply system is operated for the first time, the buffer pump 2, the precision pump 3 and the coating device 4 need to be vented and liquid stored in sequence.
[0058] (1) Exhaust and liquid storage of the cache pump 2: By opening the first valve 81, the second valve 82 and the third valve 83, the gas supply device 7 uses inert gas to pressurize the liquid storage device 1, pushing the high-viscosity coating liquid in the liquid storage device 1 into the cache pump 2. In the process of the coating liquid filling the cavity of the cache pump 2, the bubbles in the cavity of the cache pump 2 are discharged, and the excess coating liquid and the discharged bubbles in the cache pump 2 enter the collection device 5 through the third valve 83, and finally return to the degassing device 6 for degassing treatment, so that the recovered coating liquid can be reused.
[0059] After completing the above-mentioned exhaust and liquid storage steps of the cache pump 2 , the third valve 83 , the second valve 82 , and the first valve 81 are closed in sequence to ensure that the coating liquid is stably stored in the cache pump 2 .
[0060] (2) Exhaust and liquid storage of precision pump 3: Open the fourth valve 84 and the fifth valve 85 to transfer the coating liquid in the buffer pump 2 to the precision pump 3. In the process of the coating liquid filling the cavity of the precision pump 3, the bubbles in the cavity of the precision pump 3 are discharged, and the excess coating liquid and the discharged bubbles in the precision pump 3 enter the collecting device 5 through the fifth valve 85, and finally return to the degassing device 6 for degassing treatment, so that the recovered coating liquid can be reused.
[0061] After completing the above-mentioned exhaust and liquid storage steps of the precision pump 3, the fifth valve 85 and the fourth valve 84 are closed. At this time, the preparation work of the liquid supply system before the coating operation is completed.
[0062] (3) Exhaust and liquid storage of coating device 4: Open the sixth valve 86 and the seventh valve 87, and seal the coating port with a blocking device to allow the coating liquid in the precision pump 3 to be transported to the coating device 4. In the process of the coating liquid filling the slit coating head of the coating device 4, the excess coating liquid and the exhausted bubbles in the slit coating head enter the collecting device 5 through the seventh valve 87, and finally return to the degassing device 6 for degassing treatment, so that the recovered coating liquid can be reused.
[0063] After the above-mentioned exhaust and liquid storage steps of the coating device 4 are completed, the sixth valve 86 and the seventh valve 87 are closed. At this time, the preparation work is completed and the subsequent coating operation can be carried out. At this time, the fourth valve 84 and the fifth valve 85 can also be opened, and the buffer pump 2 can be used to replenish the precision pump 3 with liquid to ensure the continuity of the liquid supply during the coating operation.
[0064] (ii) During formal production, the liquid supply system of the utility model can be used to perform steps such as coating operation, liquid replenishment by the precision pump 3, and liquid replenishment by the buffer pump 2.
[0065] (1) Coating operation: Open the sixth valve 86 and the seventh valve 87, and remove the blocking device that seals the coating port, so that the precision pump 3 continues to supply liquid to the coating device 4 to complete the coating operation. After each coating operation is completed, close the sixth valve 86 to stop supplying liquid.
[0066] (2) Refilling the precision pump 3: In order to maintain the continuity of the coating process, when the precision pump 3 needs to be refilled, the fourth valve 84 and the fifth valve 85 are opened to allow the coating liquid of the buffer pump 2 to enter the precision pump 3, thereby refilling the precision pump 3. After the precision pump 3 is refilled, the fifth valve 85 and the fourth valve 84 are closed, and the sixth valve 86 is opened again to continue the coating operation.
[0067] (3) Replenishment of the cache pump 2: When performing the above-mentioned coating operation and / or the step of refilling the precision pump 3, the first valve 81, the second valve 82, and the third valve 83 can be opened to allow the gas supply device 7 to use the inert gas to pressurize the liquid storage device 1, and push the high-viscosity coating liquid in the liquid storage device 1 into the cache pump 2, so as to replenish the cache pump 2 and ensure that the cache pump 2 always has enough coating liquid for supply. In summary, the liquid supply system of the utility model realizes a stable and continuous supply of high-viscosity coating liquid, and can effectively handle the gas and excess coating liquid in the liquid supply system, which can ensure that the coating operation can be carried out efficiently and the stability of the coating quality can be guaranteed.
[0068] Although the embodiments of the utility model have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the utility model. Ordinary technicians in the field can change, modify, replace and modify the above embodiments within the scope of the utility model without departing from the principles and purpose of the utility model. All of these changes should fall within the scope of protection of the claims of the utility model.
Claims
1. A liquid supply system, characterized in that: include: A liquid storage device (1), the liquid storage device (1) being used to store the degassed coating liquid, and the air inlet of the liquid storage device (1) being used to connect to an external air supply device (7); A buffer pump (2), the input end of the buffer pump (2) being connected to the output end of the liquid storage device (1) and being used for buffering the coating liquid; A precision pump (3), the input end of the precision pump (3) being connected to the output end of the buffer pump (2) for receiving and discharging the coating liquid; A coating device (4), wherein the liquid inlet of the coating device (4) is connected to the output end of the precision pump (3), and the precision pump (3) is used to supply the coating liquid to the coating device (4); A pipeline connects the liquid storage device (1), the buffer pump (2), the precision pump (3) and the coating device (4) in series.
2. The liquid supply system according to claim 1, characterized in that: Also includes: A collecting device (5) for receiving excess coating liquid; A first valve (81), the first valve (81) being arranged on a pipeline between an air inlet of the liquid storage device (1) and an air outlet of the air supply device (7); a second valve (82), the second valve (82) being arranged on the pipeline between the liquid storage device (1) and the cache pump (2); A third valve (83), wherein the third valve (83) is arranged on the pipeline between the exhaust port of the cache pump (2) and the collecting device (5).
3. The liquid supply system according to claim 2, characterized in that: Also includes: a fourth valve (84), the fourth valve (84) being arranged on a pipeline between an output end of the cache pump (2) and an input end of the precision pump (3); A fifth valve (85), wherein the fifth valve (85) is arranged on the pipeline between the exhaust port of the precision pump (3) and the collecting device (5).
4. The liquid supply system according to claim 2, characterized in that: Also includes: a sixth valve (86), the sixth valve (86) being arranged on the pipeline between the output end of the precision pump (3) and the liquid inlet of the coating device (4); A seventh valve (87), wherein the seventh valve (87) is arranged on the pipeline between the exhaust port of the coating device (4) and the collecting device (5).
5. The liquid supply system according to claim 2, characterized in that: Also includes: A filter device (9), wherein the filter device (9) is arranged on a pipeline between an output end of the liquid storage device (1) and the second valve (82).
6. The liquid supply system according to claim 2, characterized in that: Also includes: a degassing device (6), wherein the recovery port of the degassing device (6) is connected to the output end of the collecting device (5), and the output end of the degassing device (6) is connected to the input end of the liquid storage device (1); or The collecting device (5) is reused for degassing, and the output end of the collecting device (5) is connected to the input end of the liquid storage device (1).
7. The liquid supply system according to claim 1, characterized in that: The viscosity of the coating liquid after degassing is: 100cps-30000cps; and / or, The solid content of the defoamed coating liquid is 5-70 wt %.
8. The liquid supply system according to claim 1, characterized in that: The gas supply device (7) is used to supply inert gas.
9. The liquid supply system according to claim 1, characterized in that: The coating device (4) comprises a slit coating head, wherein the slit coating opening of the slit coating head is used to discharge the coating liquid; The liquid supply system further comprises a blocking device, and the blocking device is movably connected to the slit coating port.
10. The liquid supply system according to claim 9, characterized in that: The blocking device comprises: A blocking plate, one end of the peripheral portion of the blocking plate is hinged to one side of the slit coating port, one side of the blocking plate is provided with a blocking plug, and the size of the blocking plug matches the size of the slit coating port; A driving mechanism drives the other side of the sealing plate to insert or detach the sealing plug from the slit coating port.