Cathode magnetic steel adjusting device and cathode magnetic steel production line

Abstract

The utility model discloses a cathode magnetic steel adjusting device and a cathode magnetic steel production line, the cathode magnetic steel adjusting device comprises a detection platform, a detection system, a driving member and a display module, and the detection platform is provided with a target tube; the detection system is in sliding connection with the detection platform and is located below the target tube, the detection system comprises a magnetic field measuring instrument, the magnetic field measuring instrument is provided with a first probe, and the first probe is arranged towards the target material; the driving part is used for driving the detection system to axially move along the target tube; the display module is in communication connection with the magnetic field measuring instrument; an operation hole is formed in the side, away from the detection system, of the target tube, and the operation hole penetrates through the side wall of the target tube in the vertical direction. On the premise of simulating a real coating working condition, magnetic field detection and magnetic field adjustment are carried out on the magnetic steel at the same time, the adjustment steps are simplified, the adjustment efficiency is improved, and the accuracy and reliability of a measurement adjustment result are effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of glass coating, in particular to a cathode magnetic steel regulating device and a cathode magnetic steel production line. Background Art

[0002] The glass coating process can form a thin film on the glass surface, improving the optical properties, mechanical properties and chemical resistance of the glass. Magnetron sputtering is a common sputtering coating process on the market. By introducing argon gas into the vacuum and applying a negative voltage to the cathode, a glow discharge is generated in the vacuum chamber. Under the action of the electric field, the electrons are accelerated to the anode and collide with argon atoms to ionize Ar+ and generate secondary electrons. The secondary electrons fly to the anode, and the Ar+ is accelerated to the cathode (sputtering target) under the action of the electric field and bombards the target surface, causing the target material to sputter. The role of the cathode magnet is to bind the secondary electrons and make it move in a cycloidal and helical composite form. The uniformity of the magnet directly affects the uniformity of the film layer.

[0003] At present, the existing method of measuring and adjusting the uniformity of cathode magnets mainly adopts the method of measuring first and then adjusting. It is necessary to first install the magnet on a special measuring tool to measure and record the magnetic field, then take out the magnet and adjust the corresponding adjustment point of the magnet according to the value of the magnetic field strength, and then install the magnet back into the target material for uniformity verification. This adjustment method is not only cumbersome to operate and has a long debugging cycle, which is not conducive to daily production operations, but also requires the magnet to be disassembled and installed many times. There is often a large gap between the pre-measurement and adjustment value and the actual use value, resulting in poor accuracy and reliability of the measurement and adjustment results, affecting the normal setting and use of the magnet. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes a cathode magnetic steel adjustment device, which can synchronize the detection step and the adjustment step, simplify the adjustment step, improve the adjustment efficiency, and improve the accuracy and reliability of the measurement adjustment result.

[0005] The utility model also provides a cathode magnetic steel production line having the cathode magnetic steel regulating device.

[0006] According to a cathode magnetic steel adjustment device of an embodiment of the first aspect of the utility model, the device comprises a detection platform, a detection system, a driving member and a display module, wherein the detection platform is provided with a target tube, and the target tube is used to install the magnetic steel to be adjusted; the detection system is slidably connected to the detection platform along the axial direction of the target tube and is located below the target tube, and the detection system comprises a magnetic field measuring instrument, and the magnetic field measuring instrument is provided with a first probe, and the first probe is arranged toward the target tube; the driving member is installed on the detection platform and connected to the detection system, and the driving member is used to drive the detection system to move along the axial direction of the target tube; the display module is installed on the detection platform and is communicatively connected to the magnetic field measuring instrument; wherein an operation hole is provided on a side of the target tube away from the detection system, and the operation hole passes through the side wall of the target tube in a vertical direction.

[0007] According to a cathode magnetic steel adjustment device of an embodiment of the utility model, at least the following beneficial effects are achieved: after the user installs the magnetic steel to be adjusted to the target tube, a negative voltage is applied to the magnetic steel to be adjusted, so as to simulate the working condition of the magnetic steel during film coating; then, the driving member drives the detection system to reciprocate along the axial direction of the target tube, so that the first probe of the magnetic field measuring instrument can comprehensively and accurately detect the magnetic field strength around the target tube when the magnetic steel is operating normally. As the first probe moves, the display module can display the magnetic field strength at different positions of the target tube detected by the first probe. By setting an operation hole, while the first probe detects the magnetic field strength, the user can judge the abnormal point of the magnetic steel magnetic field strength according to the magnetic field strength information on the display module, and then directly adjust the magnetic block at the abnormal point of the magnetic steel magnetic field strength through the operation hole, so that the magnetic field strength around the target tube is uniform. Under the premise of simulating the actual film coating working condition, the magnetic steel is simultaneously subjected to magnetic field detection and magnetic field adjustment operations, which simplifies the adjustment steps, improves the adjustment efficiency, and effectively improves the accuracy and reliability of the measurement and adjustment results.

[0008] According to some embodiments of the present invention, the detection system includes a second probe, which is located at one side of the first probe and disposed toward the target tube, and the first probe is communicatively connected to the display module to locate the second probe.

[0009] According to some embodiments of the utility model, the detection system also includes a reference seat, the first probe and the second probe are respectively installed on the reference seat, the reference seat is connected to a base, the detection system is slidably connected to the detection platform through the base, the driving member is installed on the base, the detection platform is provided with a rack, the rack is arranged along the axial direction of the target tube, and the output end of the driving member is provided with a gear meshing with the rack.

[0010] According to some embodiments of the utility model, the reference seat includes a reference block, an adjustment plate and a first adjustment block, the reference block is connected to the base, the adjustment plate is connected to the reference block, the adjustment plate is located between the reference block and the target tube and is arranged along the width direction of the detection platform, the adjustment plate is provided with a first guide hole, the adjustment plate is passed through the first guide hole, the first adjustment block is connected to a first screw, the first screw is passed through the first adjustment block and abuts against the adjustment plate.

[0011] According to some embodiments of the utility model, the first probe is slidably connected to the first adjusting block along a vertical direction, the first adjusting block is connected to a second screw, the second screw passes through the first adjusting block and abuts against the first probe.

[0012] According to some embodiments of the utility model, the base is provided with a receiving member, the receiving member is located on one side of the reference block, the receiving member is provided with a receiving groove with an opening facing upward, and the magnetic field measuring instrument is at least partially received in the receiving groove.

[0013] According to some embodiments of the utility model, support plates are symmetrically provided at both ends of the detection platform, and end mounting seats are respectively connected to the two ends of the target tube, the end mounting seats and the support plates are correspondingly connected, and an adjustment member is provided between the end mounting seats and the support plate, and the adjustment member is used to adjust the distance between the end mounting seat and the support plate.

[0014] According to some embodiments of the utility model, the adjusting member includes an adjusting plate and an adjusting screw, the adjusting screw is passed through the adjusting plate and abuts against the supporting plate, the adjusting plate is provided with a threaded hole, the supporting plate is connected with a fixing screw, the fixing screw is passed through the supporting plate and installed in the threaded hole.

[0015] According to some embodiments of the utility model, the detection platform is provided with a placement plate, the placement plate is located on one side of the target tube, and the display module is detachably mounted on the placement plate.

[0016] A cathode magnetic steel production line according to an embodiment of the second aspect of the utility model comprises a cathode magnetic steel adjusting device as described in the above embodiment.

[0017] A cathode magnetic steel production line according to an embodiment of the utility model has at least the following beneficial effects: by providing a target tube with an operating hole, magnetic field detection and magnetic field adjustment operations are performed on the magnetic steel at the same time under the premise of simulating the actual coating working conditions, thereby simplifying the adjustment steps, improving the adjustment efficiency, and effectively improving the accuracy and reliability of the measurement and adjustment results.

[0018] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0020] Figure 1 This is a schematic structural diagram of a cathode magnetic steel adjustment device according to an embodiment of the utility model;

[0021] Figure 2 yes Figure 1 The enlarged view of point A in the middle;

[0022] Figure 3 It is a structural schematic diagram of a detection system of an embodiment of the utility model;

[0023] Figure 4 It is a structural schematic diagram of a detection system of an embodiment of the utility model from another angle.

[0024] Figure numerals: detection platform 100; target tube 110; operating hole 1101; slide rail 120; rack 130; support plate 140; end mounting seat 141; fixing screw 142; adjusting member 150; positioning plate 151; adjusting screw 152; placement plate 160; detection system 200; magnetic field meter 210; first probe 211; second probe 220; reference seat 230; reference block 231; adjusting plate 232; first adjusting block 233; first screw 234; second screw 235; second adjusting block 236; third screw 237; fourth screw 238; base 240; slider 241; accommodating member 242; support rod 250; driving member 300; gear 310; display module 400. DETAILED DESCRIPTION

[0025] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0026] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0027] In the description of the present utility model, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0028] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0029] Reference Figure 1 and Figure 2 As shown, a cathode magnetic steel adjustment device of an embodiment of the utility model comprises a detection platform 100, a detection system 200, a driving member 300 and a display module 400. The detection platform 100 is rectangular. Along the length direction of the detection platform 100, support plates 140 are symmetrically arranged at both ends of the detection platform 100. End mounting seats 141 are respectively connected to the two ends of the target tube 110. The end mounting seats 141 and the support plates 140 are correspondingly connected. An adjustment member 150 is arranged between the end mounting seats 141 and the support plates 140. The adjustment member 150 is used to adjust the distance between the end mounting seats 141 and the support plates 140. A cylindrical target tube 110 is arranged between the two end mounting seats 141, and the target tube 110 is used to install the magnetic steel to be adjusted.

[0030] By setting the adjustment member 150, the user can freely adjust the height of the end mounting seat 141 from the ground, so that the user can accurately adjust the concentricity of the two end fixing seats, improve the installation accuracy of the target tube 110, and make the bottom of the target tube 110 and the detection end of the detection system 200 (i.e., the top of the first probe 211 described later) located in the same vertical plane, thereby ensuring the detection accuracy of the first probe 211. In addition, to ensure the overall equipment accuracy of the adjustment device, after the entire device is welded and assembled, a CNC machining center is used for positioning and punching, reference surface processing, and finally, after all accessories are installed, three-coordinate positioning calibration is performed to ensure the matching accuracy between the target tube 110 and the detection system 200, and achieve high-precision measurement.

[0031] Reference Figure 2As shown, it can be understood that the adjusting member 150 includes a positioning plate 151 and a plurality of adjusting screws 152, the plurality of adjusting screws 152 are arranged at intervals along the circumference of the positioning plate 151 and are arranged around the end mounting seat 141, the adjusting screws 152 are downwardly penetrated through the positioning plate 151 and abut against the support plate 140, the positioning plate 151 is provided with a threaded hole, and the support plate 140 is connected with a plurality of fixing screws 142, the plurality of fixing screws 142 are arranged at intervals along the circumference of the positioning plate 151 and are arranged around the adjusting screws 152, the fixing screws 142 are upwardly penetrated through the support plate 140 and installed in the threaded hole, that is, the end mounting seat 141 and the support plate 140 are bolted together by the fixing screws 142. By adjusting the length of the adjusting screw 152 passing through the positioning plate 151, the distance between the positioning plate 151 and the support plate 140 can be controlled, thereby adjusting the height of the end mounting seat 141 from the ground. By setting the adjusting screw 152 and the fixing screw 142, the structure of the adjusting member 150 can be simplified while ensuring the stable installation of the end mounting seat 141, thereby facilitating user assembly and maintenance.

[0032] Reference Figure 3 As shown, it can be understood that the detection system 200 is slidably connected to the detection platform 100 along the axial direction of the target tube 110 (i.e., the length direction of the detection platform 100) and is located below the target tube 110. The detection system 200 includes a high-precision magnetic field measuring instrument 210, and the magnetic field measuring instrument 210 is provided with a first probe 211, and the first probe 211 is arranged toward the target tube 110; the detection system 200 includes a second probe 220, and the second probe 220 is located on one side of the first probe 211 and is arranged toward the target tube 110. The first probe 211 is communicatively connected to the display module 400 to locate the second probe 220.

[0033] When the detection system 200 is working, the first probe 211 detects the magnetic field strength around the corresponding target tube 110 point above it. As the detection system 200 moves back and forth along the axial direction of the target tube 110, the second probe 220 detects the position of the first probe 211 in real time, thereby generating a two-dimensional image with horizontal and vertical coordinates of the target tube 110 point-magnetic field strength on the display module 400. The software built into the display module 400 can also automatically fit the two-dimensional image into a smooth curve. Obviously, the smoother the curve, that is, the more point data measured by the second probe 220 (for example, the second probe 220 locates the position of the first probe 211 once for every 5mm movement of the detection system 200), the higher the measurement accuracy of the detection system 200; the flatter the curve, the higher the uniformity of the magnetic field strength near the target tube 110, and the better the quality of the coated glass obtained by the magnetron sputtering of the magnetic steel. By setting the first probe 211 and the second probe 220, the detection system 200 can accurately measure the magnetic field strength corresponding to each position of the target tube 110, thereby ensuring the precise measurement accuracy and data completeness of the detection system 200; the first probe 211 and the second probe 220 are respectively communicated with the display module 400, so that the display module 400 can clearly and accurately display the magnetic field around the target tube 110 to the user in the form of an image, thereby effectively improving the user experience.

[0034] The display module 400 can be configured as a smart device such as a notebook or a smart touch screen. Since the overall frame of the adjustment device is connected by welding and positioned and assembled by a CNC machining center, the display module 400 usually cannot be preset in the detection platform 100 during the initial assembly of the adjustment device.

[0035] Reference Figure 1 As shown, it can be understood that the detection platform 100 is provided with a horizontal placement plate 160, the placement plate 160 is formed integrally with the detection platform 100 by welding, the placement plate 160 is located on one side of the target tube 110, and the display module 400 is detachably mounted on the placement plate 160. By providing the placement plate 160, it is convenient for users to place or take the display module 400 without affecting the installation of the target tube 110 and the use of the detection system 200, thereby further improving the user experience.

[0036] Reference Figure 1 and Figure 4As shown, it can be understood that the driving member 300 is installed on the detection platform 100 and connected to the detection system 200, and the driving member 300 is used to drive the detection system 200 to move along the axial direction of the target tube 110; specifically, the detection system 200 also includes a reference seat 230, the first probe 211 and the second probe 220 are respectively installed on the reference seat 230, the reference seat 230 is connected to the base 240, the base 240 is slidably connected to the slide rail 120 on the detection platform 100 through a slider 241 at the bottom, the detection system 200 is slidably connected to the detection platform 100 through the base 240, the driving member 300 is configured as a motor, the motor is installed on the base 240, the detection platform 100 is provided with a rack 130, the rack 130 is arranged along the axial direction of the target tube 110, and the output end of the motor is provided with a gear 310 meshing with the rack 130.

[0037] By setting the slider 241 and the slide rail 120, the slide rail 120 guides the movement of the slider 241, thereby guiding the base 240 and the detection system 200 on the base 240 to move straightly along the axial direction of the target tube 110, thereby effectively improving the movement stability of the detection system 200; by setting the gear 310 and the rack 130, the transmission of the rack 130 and the gear 310 has the advantages of smooth transmission, large torque, and long service life. While simplifying the structure of the driving member 300, it is convenient for the driving member 300 to drive the entire detection system 200, thereby extending the service life of the driving member 300.

[0038] An operation hole 1101 is provided on the side of the target tube 110 away from the detection system 200. The operation hole 1101 passes through the side wall of the target tube 110 in the vertical direction, and along the axial direction of the target tube 110, the length of the operation hole 1101 is greater than the length of the magnetic steel to be adjusted, so that the magnetic steel to be adjusted is exposed to the target tube 110 through the operation hole 1101.

[0039] It is understandable that after the user installs the magnetic steel to be adjusted to the target tube 110, a negative voltage is applied to the magnetic steel to simulate the working condition of the magnetic steel during film coating; then, the driving member 300 drives the detection system 200 to reciprocate along the axial direction of the target tube 110 through the gear 310 and the rack 130 structure, and through the cooperation of the first probe 211 and the second probe 220, the first probe 211 of the magnetic field measuring instrument 210 can fully and accurately detect the magnetic field strength around the target tube 110 when the magnetic steel is working normally. With the movement of the first probe 211 and the second probe 220, the display module 400 can display the magnetic field strength at different positions of the target tube 110 detected by the first probe 211.

[0040] By setting the operation hole 1101, while the first probe 211 detects the magnetic field strength, the user can determine the abnormal point of the magnetic field strength of the magnetic steel according to the magnetic field strength information on the display module 400, and then directly adjust the magnetic block at the abnormal point of the magnetic field strength of the magnetic steel through the operation hole 1101, so that the magnetic field strength around the target tube 110 is uniform. By setting the detection system 200 and the operation hole 1101, the magnetic field detection and magnetic field adjustment operations are performed on the magnetic steel at the same time under the premise of simulating the actual coating working conditions, simplifying the adjustment steps, improving the adjustment efficiency, and effectively improving the accuracy and reliability of the measurement and adjustment results.

[0041] Reference Figure 3 As shown, it can be understood that the reference seat 230 includes a reference block 231, an adjustment plate 232 and a first adjustment block 233. The reference block 231 is connected to the base 240, and the adjustment plate 232 is connected to the reference block 231. The adjustment plate 232 is located between the reference block 231 and the target tube 110 and extends along the width direction of the detection platform 100. The adjustment plate 232 is provided with a first guide hole, and the adjustment plate 232 is penetrated in the first guide hole, so that the first adjustment block 233 is slidably connected to the adjustment plate 232 along the width direction of the detection platform 100. The first adjustment block 233 is connected to a first screw 234, and the first screw 234 is penetrated in the first adjustment block 233 and abuts against the adjustment plate 232.

[0042] By setting the reference block 231, the reference block 231 can provide a positioning reference for the subsequent assembly and debugging of other components of the detection system 200, thereby ensuring the installation accuracy of the detection system 200; by setting the adjustment plate 232 and the first screw 234, the user can loosen the first screw 234 to adjust the position of the first adjustment block 233 along the width direction of the detection platform 100, and the user can tighten the first screw 234 to fix the first adjustment block 233; the user adjusts the position of the first adjustment block 233, thereby adjusting the lateral position of the first probe 211 and the second probe 220 relative to the target tube 110, thereby facilitating the user to align the detection system 200 and the target tube 110, thereby improving the ease of use of the detection system 200.

[0043] Furthermore, the base 240 is provided with a container 242, which is a frame container formed by a plurality of plate members, and the container 242 is located on one side of the reference block 231. The container 242 is provided with a container groove with an opening facing upward, and the magnetic field measuring instrument 210 is at least partially accommodated in the container groove. By providing the container 242, the container groove of the container 242 can be used by the user to store and place the magnetic field measuring instrument 210, thereby preventing the magnetic field measuring instrument 210 from being lost, and further improving the user's experience.

[0044] Continue to refer to Figure 3As shown, it can be understood that the first probe 211 is slidably connected with the first adjustment block 233 in the vertical direction, the second probe 220 is installed at the top of the first adjustment member 150, and the first adjustment block 233 is connected with the second screw 235, and the second screw 235 is passed through the first adjustment block 233 and abuts against the first probe 211. By setting the second screw 235, the user can adjust the height of the first probe 211 in the vertical direction by loosening the second screw 235, and the user can fix the first probe 211 by tightening the second screw 235; the user adjusts the height of the first probe 211 and then adjusts the distance between the first probe 211 and the target tube 110, thereby adapting to target tubes 110 with different outer diameters and expanding the use range of the detection system 200.

[0045] Continue to refer to Figure 3 and Figure 4 As shown, it can be understood that a second adjustment block 236 is provided between the reference block 231 and the adjustment plate 232. Specifically, the reference block 231 is connected to a support rod 250, the support rod 250 is extended upward, the second adjustment block 236 is slidably connected to the support rod 250 in the vertical direction, the adjustment plate 232 is slidably connected to the second adjustment block 236 in the width direction of the detection platform 100, the second adjustment block 236 is connected to a third screw 237 that abuts against the support rod 250 to fix the second adjustment block 236, and the second adjustment block 236 is also connected to a fourth screw 238 that abuts against the adjustment plate 232 to fix the adjustment plate 232. The specific connection of the third screw 237 and the fourth screw 238 can refer to the above description of the first screw 234 and the second screw 235, and no further details are given here.

[0046] By setting the second adjustment block 236, the user can preliminarily adjust the position of the first adjustment block 233 before accurately adjusting the position of the first probe 211. The second adjustment block 236 cooperates with the first adjustment block 233 to allow the user to perform a secondary adjustment on the first probe 211, further improving the adjustment accuracy of the first probe 211.

[0047] A cathode magnetic steel production line according to an embodiment of the utility model comprises a cathode magnetic steel regulating device according to the above embodiment.

[0048] Since the cathode magnetic steel production line adopts all the technical solutions of the cathode magnetic steel adjusting device of the above embodiment, it has at least all the beneficial effects brought by the technical solutions of the above embodiment, which will not be repeated here.

[0049] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A cathode magnetic steel adjustment device, characterized in that: include: The detection platform is provided with a target tube, and the target tube is used to install the magnetic steel to be adjusted; A detection system is slidably connected to the detection platform along the axial direction of the target tube and is located below the target tube, wherein the detection system comprises a magnetic field measuring instrument, wherein the magnetic field measuring instrument is provided with a first probe, and the first probe is arranged toward the target tube; A driving member, mounted on the detection platform and connected to the detection system, the driving member being used to drive the detection system to move along the axial direction of the target tube; A display module, installed on the detection platform and communicatively connected to the magnetic field measuring instrument; Wherein, an operation hole is provided on a side of the target tube away from the detection system, and the operation hole passes through the side wall of the target tube in a vertical direction.

2. A cathode magnetic steel adjustment device according to claim 1, characterized in that: The detection system includes a second probe, which is located at one side of the first probe and disposed toward the target tube. The first probe is communicatively connected to the display module to locate the second probe.

3. A cathode magnetic steel adjustment device according to claim 2, characterized in that: The detection system also includes a reference seat, the first probe and the second probe are respectively installed on the reference seat, the reference seat is connected to a base, the detection system is slidably connected to the detection platform through the base, the driving member is installed on the base, the detection platform is provided with a rack, the rack is arranged along the axial direction of the target tube, and the output end of the driving member is provided with a gear meshing with the rack.

4. A cathode magnetic steel adjustment device according to claim 3, characterized in that: The reference seat includes a reference block, an adjustment plate and a first adjustment block, the reference block is connected to the base, the adjustment plate is connected to the reference block, the adjustment plate is located between the reference block and the target tube and is arranged along the width direction of the detection platform, the adjustment plate is provided with a first guide hole, the adjustment plate is passed through the first guide hole, the first adjustment block is connected to a first screw, the first screw is passed through the first adjustment block and abuts against the adjustment plate.

5. The cathode magnetic steel adjustment device according to claim 4, characterized in that: The first probe is slidably connected to the first adjusting block along a vertical direction. The first adjusting block is connected to a second screw. The second screw passes through the first adjusting block and abuts against the first probe.

6. The cathode magnetic steel adjustment device according to claim 4, characterized in that: The base is provided with a receiving member, the receiving member is located at one side of the reference block, the receiving member is provided with a receiving groove with an opening facing upward, and the magnetic field measuring instrument is at least partially received in the receiving groove.

7. The cathode magnetic steel adjustment device according to claim 1, characterized in that: Support plates are symmetrically provided at both ends of the detection platform, and end mounting seats are respectively connected to the two ends of the target tube. The end mounting seats and the support plates are correspondingly connected, and an adjustment member is provided between the end mounting seats and the support plates, and the adjustment member is used to adjust the distance between the end mounting seats and the support plates.

8. The cathode magnetic steel adjustment device according to claim 7, characterized in that: The adjusting member comprises an adjusting plate and an adjusting screw, wherein the adjusting screw is passed through the adjusting plate and abuts against the supporting plate, the adjusting plate is provided with a threaded hole, the supporting plate is connected with a fixing screw, and the fixing screw is passed through the supporting plate and installed in the threaded hole.

9. The cathode magnetic steel adjustment device according to claim 1, characterized in that: The detection platform is provided with a placement plate, the placement plate is located at one side of the target tube, and the display module is detachably mounted on the placement plate.

10. A cathode magnetic steel production line, characterized in that: A cathode magnetic steel adjusting device comprising any one of claims 1 to 9.

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