Glass substrate carrying frame

Abstract

The utility model discloses a glass substrate carrying frame, which belongs to the technical field of vacuum coating, and comprises a frame, a plurality of bearing frames are assembled in the frame, a plurality of tightening devices are arranged on opposite sides of the bearing frames, every two tightening devices are oppositely grouped, the tightening devices are embedded in outer frames of the bearing frames, and bearing lines are arranged among the tightening devices in each group. Two ends of the bearing line penetrate through the inner frame of the bearing frame and are connected with the tightening device; the tightening device comprises a threaded column, the threaded column is movably embedded in an outer frame of the bearing frame, a bearing line penetrates through an inner frame of the bearing frame and is connected with one end of the threaded column, and the threaded column is sleeved with an adjusting nut; according to the utility model, the specially designed tightening device and the bearing line are matched with the bearing frame to support the substrate to be coated, and a large-area hollow area can be reserved on the premise of ensuring stable support, so that the large-area coating requirement of the substrate in a high-temperature environment is met.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating, in particular to a glass substrate carrier frame. Background Art

[0002] The current backlight display technology is increasingly pursuing thinner, higher-definition, and larger display modules. The demand for Mini LED screens in TVs, car displays, tablet computers, and other application fields is increasing. The carrying and transmission of ultra-thin large-area substrates in the PVD coating process is one of the more critical components on the coating production line. At present, the carrier frames of the PVD coating continuous line are mostly made of carbon fiber + graphite plate or metal plate hollowing + profile assembly.

[0003] The carbon fiber carrier frame is made of multiple carbon fiber rectangular strips to form a horizontal and vertical cross-ribbed bottom frame, a hollow graphite plate is placed on the bottom frame, and the substrate is placed in the hollow step groove of the graphite plate. The area of ​​the hollow groove of the graphite plate cannot be too large, and the margin cannot be too narrow, otherwise it is easy to break. The metal carrier frame is assembled by hollowing out metal plates + profiles. The carrier frame is also limited to the middle margin of the metal hollow plate. It cannot be too narrow, and the hollow area cannot be too large, otherwise it is easy to deform due to heat. If the hollow area is too small, there will be more obstruction during coating, which will affect the coating area of ​​the substrate. Utility Model Content

[0004] The purpose of the utility model is to provide a glass substrate carrier frame to solve at least one aspect of the problems and defects raised in the above-mentioned background technology.

[0005] A glass substrate carrier frame, comprising a frame, a plurality of bearing frames are assembled in the frame, a plurality of tensioning devices are arranged on opposite sides of the bearing frames, the tensioning devices are embedded in the outer frame of the bearing frame, a bearing wire is arranged between each group of tensioning devices, both ends of the bearing wire pass through the inner frame of the bearing frame and are connected to the tensioning devices;

[0006] The tightening device comprises a threaded column, which is movably embedded in the outer frame of the load-bearing frame. The load-bearing wire passes through the inner frame of the load-bearing frame and is connected to one end of the threaded column. An adjusting nut is mounted on the threaded column.

[0007] Furthermore, a positioning pad is provided between the adjusting nut and the inner frame of the bearing frame, the positioning pad is fixed on the inner frame of the bearing frame, a round hole is opened on the positioning pad, and the threaded column terminal passes through the round hole.

[0008] Furthermore, an elastic gasket is provided between the adjusting nut and the positioning gasket.

[0009] Furthermore, a plurality of threaded positioning holes are provided on the outer frame of the load-bearing frame, and the threaded positioning holes are all provided beside the tensioning device;

[0010] A plurality of support blocks are fixed on the frame, the support blocks correspond to the threaded positioning holes one by one, and threaded holes are opened on the support blocks and are symmetrical with the threaded positioning holes;

[0011] A conical screw rod is movably threaded in the positioning hole, and the conical screw rod passes through the threaded positioning hole and the threaded small hole on the supporting block.

[0012] Furthermore, a plurality of positioning bosses are provided on the inner frame of the carrying frame.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] A bearing wire and a tensioning support device for the bearing wire are arranged in the bearing frame of the substrate to be coated. The substrate to be coated is supported by the tensioned bearing wire in cooperation with the bearing frame. The special tensioning device design ensures that the bearing wire always remains tensioned in a high temperature environment and is not easily deformed. A large hollow area can be retained while ensuring stable support, thereby meeting the needs of large-area coating of the substrate in a high temperature environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to facilitate understanding by those skilled in the art, the present invention is further described below in conjunction with the accompanying drawings.

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0017] Figure 2 It is a front view structural schematic diagram of the load-bearing frame in the utility model;

[0018] Figure 3 Based Figure 2 The structural diagram of A in the figure;

[0019] Figure 4 It is a cross-sectional view of the threaded positioning hole and the positioning block in the utility model;

[0020] Figure 5 This is a cross-sectional view of the overlapped frame and the bearing frame in the utility model.

[0021] In the figure: 1. frame; 101. shielding part; 2. bearing frame; 201. positioning boss; 202. conical screw; 203. support block; 204. threaded positioning hole; 3. tensioning device; 301. bearing line; 302. threaded column; 303. adjusting nut; 304. elastic gasket; 305. positioning pad. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model, that is, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. The components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of the utility model provided in the accompanying drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents selected embodiments of the utility model. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.

[0024] See also Figure 1-5 As shown, in an embodiment of the utility model, a glass substrate carrier frame includes a frame 1, in which a plurality of supporting frames 2 are assembled. The frame structure can be simply modified according to the required number of supporting frames to match the assembly requirements of different numbers of supporting frames; a plurality of tensioning devices 3 that are grouped in pairs are provided on the opposite sides of the supporting frames 2, and the tensioning devices 3 are embedded in the outer frame of the supporting frame 2. A supporting line 301 is provided between each group of tensioning devices 3, and both ends of the supporting line 301 pass through the inner frame of the supporting frame 2 and are connected to the tensioning device 3. The substrate to be coated is carried by cooperating with the supporting frame 2 through the supporting line 301, and the number and position of the supporting line 301 can be adjusted according to the coating requirements of the coated substrate.

[0025] In one embodiment, see Figure 3 As shown, the tensioning device 3 includes a threaded column 302, which is embedded in the outer frame of the supporting frame 2. The supporting wire 301 passes through the inner frame of the supporting frame 2 and is connected to one end of the threaded column 302. Two adjusting nuts 303 are mounted on the threaded column 302. The threads of the two nuts are opposite. The adjusting nut 303 close to the inner frame is rotated toward the inner frame to press against the inner frame to tighten the supporting wire 301. After adjusting the tension of the supporting wire 301 by rotating the nut, another nut is rotated to press against the first nut to lock it and prevent the nut from loosening. This allows the crosshairs to always remain in a tightened state. In conjunction with the supporting frame, the flatness of a single substrate can be <0.1 mm, ensuring a small change in the target-substrate distance and improving the uniformity of the coating.

[0026] A positioning pad 305 is fixed on the inner frame of the supporting frame 2. The positioning pad 305 is arranged between the adjusting nut 303 and the inner frame of the supporting frame 2. An eccentric hole is opened on the positioning pad 305. The terminal of the threaded column 302 passes through the eccentric hole. The height position of the supporting line 301 can be adjusted by machining the position of the eccentric hole. The positioning pad 305 is tightened by screwing in the adjusting nut 303, thereby tightening the inner frame of the supporting frame 2.

[0027] An elastic gasket 304 is disposed between the adjusting nut 303 and the positioning pad 305 . The elastic gasket 304 can eliminate the difference in dimensional deformation between the load-bearing wire 301 and the load-bearing frame 2 after being heated, so that the load-bearing wire 301 can always remain in a taut state.

[0028] In one embodiment, see Figure 3 , Figure 4 As shown, a plurality of threaded positioning holes 204 are formed on the outer frame of the supporting frame 2, and the threaded positioning holes 204 are all arranged beside the tensioning device 3; a support block 203 is fixed on the frame 1, and a threaded hole is formed on the support block 203, and the threaded hole is concentric with the threaded positioning hole 204, and a conical screw 202 is movably screwed in the threaded positioning hole 204, and the conical screw 202 passes through the threaded positioning hole 204 and the threaded hole on the support block 203, fixing the frame 1 and the supporting frame 2, thereby ensuring the force strength of the edge of the supporting frame 2, and preventing the edge of the supporting frame 2 from being deformed after being pulled by the load line 301.

[0029] In one embodiment, see Figure 2 As shown, a plurality of positioning bosses 201 are provided on the inner frame of the carrier frame 2. When the substrate to be coated is placed in the carrier frame 2, the positioning bosses 201 cooperate with the bearing wires 301 to provide better bearing capacity, which can support large-area ultra-thin substrates (650X600X0.05mm) and meet the coating requirements.

[0030] In one embodiment, see Figure 1 As shown, the four corners of the frame 1 are processed with guide angles, which can reduce the setbacks during transmission and make the transmission smoother; the surface of the frame 1 is sprayed with quartz sand, which is easy to clean the accumulated film.

[0031] In one embodiment, see Figure 1 As shown, the frame 1 is provided with a shielding portion 101, which can avoid the phenomenon of circumferential plating during sputtering, and ensure that the sputtered film material will not vertically pass through the frame 1 and sputter to other positions of the bottom plate of the process chamber to pollute the chamber.

[0032] In one embodiment, see Figure 5 As shown, the frame 1 and the bearing frame 2 have the same thickness, and steps of half the thickness of the plate are processed to overlap each other in a staggered manner. After overlapping, the frame 1 and the bearing frame 2 are in the same plane.

[0033] The above contents are merely examples and explanations of the structure of the utility model. The technicians in this technical field may make various modifications or additions to the specific embodiments described or replace them in a similar manner. As long as they do not deviate from the structure of the utility model or exceed the scope defined in the claims, they should all fall within the protection scope of the utility model.

Claims

1. A glass substrate carrier frame, comprising a frame (1), characterized in that: The frame (1) is equipped with a plurality of supporting frames (2), and a plurality of tensioning devices (3) are arranged in pairs on opposite sides of the supporting frames (2). The tensioning devices (3) are embedded in the outer frame of the supporting frame (2), and a supporting wire (301) is arranged between each group of tensioning devices (3). Both ends of the supporting wire (301) pass through the inner frame of the supporting frame (2) and are connected to the tensioning devices (3); The tensioning device (3) comprises a threaded column (302), the threaded column (302) being movably embedded in the outer frame of the bearing frame (2), the bearing wire (301) passing through the inner frame of the bearing frame (2) and connected to one end of the threaded column (302), and an adjusting nut (303) being mounted on the threaded column (302).

2. A glass substrate carrier frame according to claim 1, characterized in that: A positioning pad (305) is provided between the adjusting nut (303) and the inner frame of the carrying frame (2). The positioning pad (305) is fixed on the inner frame of the carrying frame (2). A round hole is opened on the positioning pad (305), and the connection terminal of the threaded column (302) passes through the round hole.

3. A glass substrate carrier frame according to claim 2, characterized in that: An elastic gasket (304) is provided between the adjusting nut (303) and the positioning cushion block (305).

4. A glass substrate carrier frame according to claim 1, characterized in that: The outer frame of the carrier frame (2) is provided with a plurality of threaded positioning holes (204) extending therethrough, and the threaded positioning holes (204) are all arranged beside the tensioning device (3); A plurality of support blocks (203) are fixed on the frame (1), the support blocks (203) correspond to the threaded positioning holes (204) one by one, and threaded holes are formed on the support blocks (203) and are concentric with the threaded positioning holes (204); A conical screw rod (202) is movably threaded in the threaded positioning hole (204), and the conical screw rod (202) passes through the threaded positioning hole (204) and the threaded small hole on the support block (203).

5. A glass substrate carrier frame according to claim 1, characterized in that: A plurality of positioning bosses (201) are provided on the inner frame of the carrying frame (2).

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