Novel single crystal furnace thermal field felt fixing bottom felt structure

Abstract

The utility model discloses a novel single crystal furnace thermal field solid felt bottom felt structure, and particularly relates to the technical field of solid felts, the novel single crystal furnace thermal field solid felt bottom felt structure comprises a solid felt body, the surface of the solid felt body is provided with exhaust holes, the bottom of the solid felt body is provided with a heat insulation barrel, the bottom of the solid felt body is provided with a butt joint groove, and the bottom of the solid felt body is provided with a clamping assembly. The butt-joint groove is formed in the bottom of the fixed felt, the butt-joint clamping groove is formed in the surface of the inner wall of the butt-joint groove, the butt-joint clamping groove and the clamping block are connected in a matched and clamped mode, then the clamping block is connected with the butt-joint clamping groove all the time under the action of the spring baffle, and the clamping block cannot be separated from the butt-joint clamping groove without being clamped by external force. Therefore, the connecting strength of the heat preservation barrel and the butt joint groove is improved, and the overall stability of the device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of felt solidification, and more specifically to a novel felt solidification bottom structure of a single crystal furnace thermal field. Background Art

[0002] In recent years, the output of monocrystalline silicon wafers has increased significantly and steadily. Monocrystalline silicon rods are the raw materials for producing monocrystalline silicon wafers. With the rapid increase in the demand for monocrystalline silicon wafers, the market demand for monocrystalline silicon rods has also shown a rapid growth trend.

[0003] The utility model patent with patent publication number CN202121895662.1 discloses a furnace bottom solid felt for single crystal thermal field centering, which is arranged on the furnace bottom of the single crystal furnace, and mainly includes a solid felt body, the upper surface of the solid felt body is provided with a fixing groove, and the solid felt body is also provided with exhaust holes, electrode through holes and support rod through holes that penetrate the solid felt body. There are positioning blocks around the solid felt body, and the positioning blocks are evenly distributed in the circumferential direction of the solid felt body. The solid felt body is clamped on the furnace bottom of the single crystal furnace through the positioning blocks. The solid felt has a simple structure and is easy to use. It can effectively solve the problem of thermal field installation deviation, improve the thermal field installation efficiency, and reduce rework.

[0004] However, when this structure is actually used, since the bottom of the device is directly connected to the lower insulation bucket by means of groove-limited docking, the connection is relatively weak, which makes it easier for the insulation bucket to fall off during disassembly, resulting in damage. Utility Model Content

[0005] In order to overcome the above defects of the prior art, the utility model provides a novel single crystal furnace thermal field solid felt bottom felt structure to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a new type of single crystal furnace thermal field solid felt bottom felt structure, including a solid felt body, the surface of the solid felt body is provided with exhaust holes, the bottom of the solid felt body is provided with an insulation barrel, the bottom of the solid felt body is provided with a docking groove, and the bottom of the solid felt body is provided with a locking assembly.

[0007] Preferably, the locking assembly includes a spring baffle, which is arranged inside the docking groove. The inner wall surface of the docking groove is provided with a docking slot, and the number of the docking slots is set to be multiple. A locking block is provided on the outside of the insulation barrel, and the locking block is adapted to be engaged with the docking slot.

[0008] Through the above scheme, it can be seen that by setting up a locking assembly, a docking groove is opened on the bottom surface of the solid felt body, and the locking block on the outside of the insulation barrel is adapted to the docking slot by rotating the locking block, and then the locking block is tightly fitted with the docking slot under the action of the spring baffle, thereby ensuring the stability of the insulation barrel. At the same time, in the process of locking the insulation barrel with the docking slot, the operator only needs to put one end of the locking block into the docking slot, and then rotate the insulation barrel to complete the connection between the locking block and the docking slot, thereby improving the stability of the device.

[0009] Preferably, a slide groove is provided on the top surface of the solid felt body, and a fixed plug hole is provided on the surface of the slide groove, and the number of the fixed plug hole and the slide groove is set to be multiple.

[0010] Through the above scheme, it can be seen that by opening a sliding groove on the surface of the solid felt body, the sliding limit block can slide inside the sliding groove, and the fixed plug rod is passed through the sliding limit block and connected with it through the fixed socket, thereby completing the orientation fixation of the sliding limit block and improving the practicality of the device.

[0011] Preferably, a sliding limit block is provided inside the slide groove, the sliding limit block is slidably connected to the slide groove, and the cross-sectional shape of the sliding limit block is set to be L-shaped.

[0012] Through the above scheme, it can be seen that the cross-sectional shape of the sliding limit block is set to an L shape, so that the protruding part of the sliding limit block is used to limit the single crystal furnace, and by adjusting the position of the sliding limit block inside the slide groove, the solid felt body can be suitable for various types of single crystal furnaces, thereby improving the overall practicality of the device.

[0013] Preferably, an adapting hole is provided on the surface of the sliding limit block, and the adapting hole passes through the sliding limit block and overlaps with the fixed hole.

[0014] Through the above scheme, it can be seen that by overlapping the position of the adapter hole with the position of the fixed hole, the fixed plug rod can be used to penetrate the adapter hole until the bottom end of the fixed plug rod is connected to the fixed hole, thereby fixing the sliding limit block and improving the practicality of the device.

[0015] Preferably, a fixed plug rod is provided inside the adapter socket, an inner buckle handle is provided on the top surface of the fixed plug rod, and the number of the fixed plug rod and the adapter socket are both set to be multiple.

[0016] Through the above scheme, it can be seen that by providing an inward-locking handle on the top surface of the fixed rod, the top surface of the fixed rod is flush with the top surface of the sliding limit block, so that when the single crystal furnace is placed on the top of the solid felt body, there will be no shaking, thereby improving the stability of the device.

[0017] Technical effects and advantages of the utility model:

[0018] 1. By setting a snap-fit ​​assembly, compared with the prior art, a docking groove is provided on the bottom surface of the solid felt body, and the snap-fit ​​block on the outside of the heat preservation barrel is adapted to the docking groove by rotating and engaging, and then the snap-fit ​​block is tightly fitted with the docking groove under the action of the spring baffle, thereby ensuring the stability of the heat preservation barrel. At the same time, in the process of engaging the heat preservation barrel with the docking groove, the operator only needs to put one end of the snap-fit ​​block into the docking groove, and then rotate the heat preservation barrel to complete the connection between the snap-fit ​​block and the docking groove, thereby improving the stability of the device;

[0019] 2. By setting a sliding limit block, compared with the prior art, a sliding groove is opened on the surface of the solid felt body, and then the sliding groove is slidably connected with the sliding limit block, so that the solid felt body can be suitable for various types of single crystal furnaces by adjusting the position of the sliding limit block. Before use, the operator only needs to connect the fixed plug rod inside the sliding limit block with the matching socket on the surface of the solid felt body after adjusting the position of the sliding limit block, and then the fixed plug rod can be taken out through the inner buckle handle opened on the top surface of the matching plug rod, which improves the stability and convenience of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0021] Figure 2 It is a schematic diagram of the bottom structure of the utility model.

[0022] Figure 3 It is a schematic diagram of the structure of the solid felt body of the utility model.

[0023] Figure 4 It is a schematic diagram of the structure of the sliding limit block of the utility model.

[0024] The accompanying drawings are marked as follows: 1. felt body; 2. exhaust hole; 3. insulation barrel; 4. docking groove; 5. spring baffle; 6. docking slot; 7. card block; 8. slide groove; 9. fixed socket; 10. sliding limit block; 11. adapter socket; 12. fixed plug rod; 13. inner buckle handle. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] As attached Figure 1-4 A new type of single crystal furnace thermal field solid felt bottom felt structure shown includes a solid felt body 1, the surface of the solid felt body 1 is provided with an exhaust hole 2, the bottom of the solid felt body 1 is provided with an insulation barrel 3, the bottom of the solid felt body 1 is provided with a docking groove 4, and the bottom of the solid felt body 1 is provided with a snap-fit ​​assembly.

[0027] As attached Figure 2-3 As shown, the locking assembly includes a spring baffle 5, which is arranged inside the docking slot 4. The inner wall surface of the docking slot 4 is provided with a docking slot 6, and the number of the docking slots 6 is set to be multiple. The outer side of the heat preservation barrel 3 is provided with a clamping block 7, and the clamping block 7 is adapted to be clamped with the docking slot 6, so that the docking slot 6 is opened on the inner wall surface of the docking slot 4, so that the docking slot 6 and the clamping block 7 are adapted to be clamped, and then the clamping block 7 is always connected to the docking slot 6 under the action of the spring baffle 5, and the clamping block 7 cannot be separated from the docking slot 6 without the support of external force, thereby improving the connection strength between the heat preservation barrel 3 and the docking slot 4, and improving the overall stability of the device.

[0028] As attached Figure 1-2 As shown, a slide groove 8 is provided on the top surface of the solid felt body 1, and a fixed socket 9 is provided on the surface of the slide groove 8. The number of the fixed sockets 9 and the slide groove 8 is set to be multiple, so that the sliding limit block 10 can be installed on the top surface of the solid felt body 1 by utilizing multiple slide grooves 8, and the multiple fixed sockets 9 can overlap with the position of the adapter socket 11 on the top surface of the sliding limit block 10, thereby fixing the sliding limit block 10 and improving the stability and convenience of the device.

[0029] Working principle of the utility model: when the device is in use, the staff first needs to hold the insulation barrel 3, and then put one end of the clamping block 7 on the outside of the insulation barrel 3 into the docking slot 6, and then the staff rotates the insulation barrel 3 to achieve the adapter clamping of the clamping block 7 on the outside of the insulation barrel 3 and the docking slot 6. After the installation is completed, one end of the clamping block 7 will contact the surface of one side of the spring baffle 5, so that the spring baffle 5 limits the clamping block 7 to improve the stability of the device. After the insulation barrel 3 is installed, the operator adjusts the position of the sliding limit block 10 according to the model of the single crystal furnace, and then connects the fixed plug rod 12 with the adapter socket 11 on the surface of the sliding limit block 10 after adjustment, and the bottom of one end of the fixed plug rod 12 is connected to the fixed socket 9 on the top surface of the solid felt body 1, thereby realizing the position fixation of the sliding limit block 10 and improving the practicality of the device.

[0030] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A novel single crystal furnace thermal field felt bottom felt structure, comprising a felt body (1), characterized in that: The surface of the solid felt body (1) is provided with an exhaust hole (2), the bottom of the solid felt body (1) is provided with a heat preservation bucket (3), the bottom of the solid felt body (1) is provided with a docking groove (4), and the bottom of the solid felt body (1) is provided with a snap-fit ​​assembly.

2. A novel single crystal furnace thermal field solid felt bottom felt structure according to claim 1, characterized in that: The clamping assembly comprises a spring baffle (5), the spring baffle (5) being arranged inside the docking groove (4), the inner wall surface of the docking groove (4) being provided with a docking clamping groove (6), the number of the docking clamping grooves (6) being set to be multiple, and a clamping block (7) being provided on the outer side of the heat preservation barrel (3), the clamping block (7) being adapted to be clamped with the docking clamping groove (6).

3. The novel single crystal furnace thermal field solid felt bottom felt structure according to claim 1, characterized in that: A slide groove (8) is provided on the top surface of the solid felt body (1), and a fixed insertion hole (9) is provided on the surface of the slide groove (8). The number of the fixed insertion hole (9) and the slide groove (8) are both set to be multiple.

4. The novel single crystal furnace thermal field solid felt bottom felt structure according to claim 3, characterized in that: A sliding limit block (10) is provided inside the slide groove (8), the sliding limit block (10) is slidably connected to the slide groove (8), and the cross-sectional shape of the sliding limit block (10) is set to be L-shaped.

5. The novel single crystal furnace thermal field solid felt bottom felt structure according to claim 4, characterized in that: An adapting plug hole (11) is provided on the surface of the sliding limit block (10), and the adapting plug hole (11) passes through the sliding limit block (10) and overlaps with the fixed plug hole (9).

6. The novel single crystal furnace thermal field solid felt bottom felt structure according to claim 5, characterized in that: A fixed plug rod (12) is provided inside the adapter socket (11), and an inner buckle handle (13) is provided on the top surface of the fixed plug rod (12). The number of the fixed plug rod (12) and the adapter socket (11) are both set to be multiple.

Images