Multifunctional silicon carbide crystal ingot shaping all-in-one machine

Abstract

The utility model relates to a multifunctional silicon carbide crystal ingot shaping all-in-one machine which comprises a lathe bed base, a stand column is fixedly installed on one side of the top face of the lathe bed base, a machining station is arranged on the other side of the top face of the lathe bed base, and three pairs of evenly-spaced vertical linear guide rails are fixedly installed on the vertical side wall of the side, facing the machining station, of the stand column. A detection head, a vertical grinding head body and a horizontal grinding head body are fixedly installed on the vertical side walls, facing the side of the machining station, of the three vertical moving plankers correspondingly. According to the utility model, the positions of the detection head, the vertical grinding head body and the horizontal grinding head body are changed by adopting the servo motors in the longitudinal horizontal direction, the transverse horizontal direction and the vertical direction, so as to grind, grind, open a notch groove and the like on the silicon carbide wafer adsorbed on the processing workbench.

Description

Technical Field

[0001] The utility model relates to the field of CNC grinding machines, specifically a multifunctional silicon carbide ingot shaping machine. Background Art

[0002] As the precision requirements for machine tool parts are getting higher and higher, many parts need to be ground by grinders to meet the precision requirements. In addition to investing in machining centers (or milling machines), processing manufacturers will inevitably need to invest in grinders, which will bring greater financial pressure to processing manufacturers and occupy factory space. After a workpiece is processed and qualified on a machining center (or milling machine), it needs to be transferred to a grinder. Before processing, it takes a certain amount of time to clamp the workpiece for the second time. At the same time, no matter how accurate the clamping method or technology is, there will be human errors in the second clamping, which will cause a certain loss of workpiece precision.

[0003] The processing of silicon carbide wafers is particularly demanding, and may even require multiple pick-up and placement measurements to ensure processing accuracy. However, multiple pick-up and placement further reduces processing efficiency and increases human errors. Utility Model Content

[0004] The purpose of the utility model is to provide a multifunctional silicon carbide ingot shaping machine to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a multifunctional silicon carbide ingot shaping machine, comprising: a bed base, a column is fixedly installed on one side of the top surface of the bed base, a processing station is arranged on the other side of the top surface of the bed base, three pairs of evenly spaced vertical linear guides are fixedly installed on the vertical side wall of the column facing the processing station, a vertical ball screw is rotatably installed between each pair of vertical linear guides on the vertical side wall of the column, a vertical servo drive motor is also arranged at the end position of the top of each vertical ball screw on the top of the vertical side wall of the column, the vertical servo drive motor drives the vertical ball screw to rotate, a vertical movable slide is slidably arranged on each pair of vertical linear guides, the screw nuts of the vertical ball screw are respectively fixed on adjacent vertical movable slides, and a detection head, a vertical grinding head body and a horizontal grinding head body are respectively fixedly installed on the vertical side walls of the three vertical movable slides facing the processing station, the processing station comprises a pair of horizontal longitudinal horizontal straight slides fixedly installed on the top surface of the bed base and arranged toward the column The cam is provided with a plurality of guide rails, and a plurality of guide rails are provided on the top surface of the bed base ...

[0006] Preferably, the detection head includes a support frame and a thickness measuring head, one end of the support frame is fixed on one of the vertically movable slides, the other end of the support frame extends above the cross turntable, and the thickness measuring head is fixed on the end of the support frame away from the vertically movable slide.

[0007] Preferably, the vertical grinding head body includes a vertical grinding head body and a grinding wheel rotatably arranged directly below the vertical grinding head body, and the horizontal grinding head body includes a horizontal grinding head body and a groove cutting wheel rotatably arranged on the side of the horizontal grinding head body facing the cross turntable.

[0008] Preferably, the cross turntable includes an X-axis rotating motor and an X-axis bearing seat fixed on the top surface of the cross turntable base, a rotating plate is rotatably arranged between the X-axis rotating motor and the X-axis bearing seat, a Y-axis rotating motor and a Y-axis bearing seat are also fixed on the top surface of the rotating plate, a turntable seat is rotatably arranged between the Y-axis rotating motor and the Y-axis bearing seat, and a turntable is fixedly mounted on the turntable seat.

[0009] Preferably, the turntable includes a vacuum suction cup and a turntable shaft, the turntable shaft is fixedly mounted on the turntable, the vacuum suction cup is fixedly mounted on the top of the turntable shaft, and the turntable shaft drives the vacuum suction cup to rotate.

[0010] Preferably, a hood is fixedly mounted on the outer side of the bed base, and a direction finder is installed in the hood.

[0011] Preferably, there are two orientators, including a notch groove orientator and a surface orientation orientator, wherein the notch groove orientator is arranged near the detection head, and the surface orientation orientator is arranged near the horizontal grinding head body.

[0012] The purpose of the utility model is to overcome the shortcomings of the prior art and design a multifunctional silicon carbide ingot shaping machine. In order to reduce the intensity of manual labor and improve the degree of automation, not only the servo motors in the longitudinal, horizontal and vertical directions are used to change the positions of the detection head, the vertical grinding head body and the horizontal grinding head body, so as to perform grinding, grinding and notch groove opening on the silicon carbide round wafer adsorbed on the processing workbench, but also the notch groove orientator and the surface orientation orientator are used to accurately determine the crystal plane angle, orient and measure the single crystal, and use the cross turntable to realize the turntable swinging in four directions, so as to cooperate with the orientator to complete the orientation and perform surface grinding until the upper end surface is ground flat, thereby further improving the processing automation and processing accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the structure of the utility model;

[0014] Figure 2 It is a structural schematic diagram of the cross turntable of the utility model.

[0015] In the figure: 1. bed base, 2. column, 3. cross turntable, 4. vertical linear guide, 5. vertical ball screw, 6. vertical moving slide, 7. vertical servo drive motor, 8. vertical grinding head body, 9. horizontal grinding head body, 10. longitudinal horizontal linear guide, 11. longitudinal horizontal ball screw, 12. support seat, 13. transverse horizontal linear guide, 14. cross turntable base, 15. transverse horizontal ball screw, 16. longitudinal horizontal servo drive motor, 17. transverse horizontal servo drive motor, 18. support frame, 19. thickness measuring head, 20. X-axis rotation motor, 21. X-axis bearing seat, 22. rotating plate, 23. Y-axis rotation motor, 24. Y-axis bearing seat, 25. turntable seat, 26. vacuum suction cup, 27. rotating table shaft. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the utility model embodiments to clearly and completely describe the technical solutions in the utility model embodiments. Obviously, the described embodiments are only part of the utility model embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0017] See also Figure 1 , Figure 2A multifunctional silicon carbide ingot shaping machine comprises: a bed base 1, a column 2 is fixedly installed on one side of the top surface of the bed base 1, a processing station is arranged on the other side of the top surface of the bed base 1, three pairs of evenly spaced vertical linear guide rails 4 are fixedly installed on the vertical side wall of the column 2 facing the processing station, a vertical ball screw 5 is rotatably installed between each pair of vertical linear guide rails 4 on the vertical side wall of the column 2, a vertical servo drive motor 7 is also arranged at the end position of the top of each vertical ball screw 5 on the top of the vertical side wall of the column 2, and the vertical servo drive motor 7 is arranged at the end position of the top of each vertical ball screw 5. The service drive motor 7 drives the vertical ball screw 5 to rotate, and a vertical movable carriage 6 is slidably arranged on each pair of vertical linear guide rails 4. The screw nuts of the vertical ball screw 5 are respectively fixed on the adjacent vertical movable carriages 6. The vertical side walls of the three vertical movable carriages 6 facing the processing station are respectively fixed with a detection head, a vertical grinding head body 8 and a horizontal grinding head body 9. The processing station includes a pair of horizontal longitudinal horizontal linear guide rails 10 fixedly installed on the top surface of the bed base 1 and arranged toward the column 2. The top surface of the bed base 1 is located on the longitudinal horizontal linear guide rail 1 0 is also rotatably installed with a longitudinal horizontal ball screw 11, and a longitudinal horizontal servo drive motor 16 is also arranged at the end position of the longitudinal horizontal ball screw 11 on the bed base 1, and the longitudinal horizontal servo drive motor 16 drives the longitudinal horizontal ball screw 11 to rotate, and a support seat 12 is slidably arranged on the longitudinal horizontal linear guide 10, and the screw nut of the longitudinal horizontal ball screw is fixed on the bottom surface of the support seat 12, and a pair of horizontal horizontal linear guides 13 that are horizontal and perpendicular to the longitudinal horizontal linear guide 10 are fixedly installed on the top surface of the support seat 12, and the horizontal horizontal linear guides 13 that are horizontal and perpendicular to the longitudinal horizontal linear guide 10 are fixedly installed on the top surface of the support seat 12. A cross turntable base 14 is slidably arranged on the linear guide 13, and a transverse horizontal ball screw 15 is rotatably installed on the top surface of the support seat 12 between the transverse horizontal linear guides 13. A transverse horizontal servo drive motor 17 is also arranged on the top surface of the support seat 12 at the end position of the transverse horizontal ball screw 15. The transverse horizontal servo drive motor 17 drives the transverse horizontal ball screw 15 to rotate. The screw nut of the transverse horizontal ball screw 15 is fixed on the bottom surface of the cross turntable base 14, and a cross turntable 3 is fixedly installed on the top surface of the cross turntable base 14.

[0018] The detection head includes a support frame 18 and a thickness measuring head 19. One end of the support frame 18 is fixed on one of the vertically movable carriages 6. The other end of the support frame 18 extends above the cross turntable 3. The thickness measuring head 19 is fixed on the end of the support frame 18 away from the vertically movable carriage 6.

[0019] The vertical grinding head body includes a vertical grinding head body and a grinding wheel rotatably arranged directly below the vertical grinding head body, and the horizontal grinding head body includes a horizontal grinding head body and a groove cutting wheel rotatably arranged on the side of the horizontal grinding head body facing the cross turntable.

[0020] The cross turntable includes an X-axis rotating motor 20 and an X-axis bearing seat 21 fixed on the top surface of the cross turntable base, a rotating plate 22 is rotatably arranged between the X-axis rotating motor 20 and the X-axis bearing seat 21, a Y-axis rotating motor 23 and a Y-axis bearing seat 24 are also fixed on the top surface of the rotating plate 22, a turntable seat 25 is rotatably arranged between the Y-axis rotating motor 23 and the Y-axis bearing seat 24, and a turntable is fixedly installed on the turntable seat 25.

[0021] The turntable includes a vacuum suction cup 26 and a turntable shaft 27 . The turntable shaft 27 is fixedly mounted on the turntable. The vacuum suction cup 26 is fixedly mounted on the top of the turntable shaft 27 . The turntable shaft 27 drives the vacuum suction cup 26 to rotate.

[0022] A hood is also fixedly mounted on the outside of the bed base 1, and a direction finder is installed in the hood.

[0023] There are two orientators, including a notch groove orientator and a surface orientation orientator. The notch groove orientator is set close to the detection head, and the surface orientation orientator is set close to the horizontal grinding head body.

[0024] In the description of the utility model, it is necessary to understand that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inside", "front", "center", "both ends", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model.

[0025] In the utility model, unless otherwise clearly stipulated and limited, the terms such as "installation", "setting", "connection", "fixation" and "screw-on" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the utility model according to the specific circumstances.

[0026] Although embodiments of the utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A multifunctional silicon carbide ingot shaping machine, comprising: A bed base, a column is fixedly installed on one side of the top surface of the bed base, and a processing station is arranged on the other side of the top surface of the bed base, characterized in that: three pairs of evenly spaced vertical linear guides are fixedly installed on the vertical side wall of the column facing the processing station side, and a vertical ball screw is rotatably installed on the vertical side wall of the column between each pair of vertical linear guides, and a vertical servo drive motor is also arranged on the top of the vertical side wall of the column at the end position of the top of each vertical ball screw, and the vertical servo drive motor drives the vertical ball screw to rotate, and a vertical movable slide is also slidably arranged on each pair of vertical linear guides, and the screw nuts of the vertical ball screws are respectively fixed on adjacent vertical movable slides, and a detection head, a vertical grinding head body and a horizontal grinding head body are respectively fixedly installed on the vertical side walls of the three vertical movable slides facing the processing station side, and the processing station comprises a pair of horizontal longitudinal horizontal linear guides fixedly installed on the top surface of the bed base and arranged towards the column, and the top surface of the bed base is located at a longitudinal horizontal straight The cam is provided with a plurality of camshafts, each of which is provided with a plurality of camshafts, each of which is provided with a plurality of camshafts, each of which is provided with a plurality of camshafts, each of which is provided with a plurality of camshafts.

2. The multifunctional silicon carbide ingot shaping machine according to claim 1, characterized in that: The detection head includes a support frame and a thickness measuring head. One end of the support frame is fixed on one of the vertically movable carriages, and the other end of the support frame extends above the cross turntable. The thickness measuring head is fixed on the end of the support frame away from the vertically movable carriage.

3. The multifunctional silicon carbide ingot shaping machine according to claim 1, characterized in that: The vertical grinding head body includes a vertical grinding head body and a grinding wheel rotatably arranged directly below the vertical grinding head body, and the horizontal grinding head body includes a horizontal grinding head body and a groove cutting wheel rotatably arranged on the side of the horizontal grinding head body facing the cross turntable.

4. The multifunctional silicon carbide ingot shaping machine according to claim 1, characterized in that: The cross turntable includes an X-axis rotating motor and an X-axis bearing seat fixed on the top surface of the cross turntable base, a rotating plate is rotatably arranged between the X-axis rotating motor and the X-axis bearing seat, a Y-axis rotating motor and a Y-axis bearing seat are also fixed on the top surface of the rotating plate, a turntable seat is rotatably arranged between the Y-axis rotating motor and the Y-axis bearing seat, and a turntable is fixedly installed on the turntable seat.

5. The multifunctional silicon carbide ingot shaping machine according to claim 4, characterized in that: The turntable comprises a vacuum suction cup and a turntable shaft. The turntable shaft is fixedly mounted on the turntable, the vacuum suction cup is fixedly mounted on the top of the turntable shaft, and the turntable shaft drives the vacuum suction cup to rotate.

6. The multifunctional silicon carbide ingot shaping machine according to claim 1, characterized in that: A hood is also fixedly mounted on the outer side of the bed base, and a direction finder is mounted in the hood.

7. The multifunctional silicon carbide ingot shaping machine according to claim 6, characterized in that: There are two orientators, including a notch groove orientator and a surface orientation orientator, wherein the notch groove orientator is arranged near the detection head, and the surface orientation orientator is arranged near the horizontal grinding head body.

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