Silicon wafer receiving device

Abstract

The utility model discloses a silicon wafer receiving device which comprises a main conveying line, a first wafer feeding mechanism, a basket receiving mechanism, a basket carrying mechanism and a basket transferring mechanism, the main conveying line is configured to convey silicon wafers, and a first discharging station is arranged on the main conveying line; the first wafer feeding mechanism is arranged corresponding to the first blanking station, and a basket for receiving silicon wafers is carried on the basket receiving mechanism; the first wafer feeding mechanism is configured to insert silicon wafers conveyed to the first discharging station into flower baskets of the flower basket receiving mechanism, and the flower basket carrying mechanism is configured to pick up the flower baskets full of the silicon wafers on the flower basket receiving mechanism and carry the flower baskets to the flower basket transferring mechanism. And the flower basket transfer mechanism is configured to receive the flower basket full of the silicon wafers and transfer the flower basket to a silicon wafer processing station of a subsequent channel. According to the silicon wafer receiving device, the basket full of silicon wafers is automatically transferred, manual operation is not needed in the whole process, the receiving efficiency of the silicon wafers is improved, and manpower is saved.

Description

Technical Field

[0001] The present application relates to the field of silicon wafer production equipment manufacturing, and in particular to a silicon wafer receiving device. Background Art

[0002] In the production process of silicon wafers, the process of receiving silicon wafers is usually as follows: first, the silicon wafers are transported to the unloading station by the conveyor line, and then the silicon wafers at the unloading station are inserted into the basket at the receiving position on the side of the conveyor line by the wafer feeding mechanism. After the basket is full of silicon wafers, the basket full of silicon wafers is taken away manually. Obviously, the efficiency of manually taking away the basket full of silicon wafers is low, the labor intensity is high, and it is difficult to meet the needs of batch receiving and automated production. Utility Model Content

[0003] The purpose of the present application is to provide a silicon wafer receiving device to solve the problems of low work efficiency and high labor intensity in the prior art silicon wafer receiving device which uses manual removal of flower baskets.

[0004] To achieve this goal, this application adopts the following technical solutions:

[0005] The present application proposes a silicon wafer receiving device, which includes a main conveying line, a first wafer feeding mechanism, a flower basket receiving mechanism, a flower basket conveying mechanism and a flower basket transfer mechanism, wherein:

[0006] The main conveyor line is configured to convey silicon wafers, and a first unloading station is provided on the conveying path of the main conveyor line;

[0007] The first wafer feeding mechanism is arranged corresponding to the first unloading station, and the basket receiving mechanism carries a basket for receiving silicon wafers;

[0008] The first wafer feeding mechanism is configured to insert the silicon wafers transported to the first unloading station into the flower basket of the flower basket receiving mechanism, the flower basket conveying mechanism is configured to pick up the flower basket full of silicon wafers on the flower basket receiving mechanism and convey it to the flower basket transfer mechanism, and the flower basket transfer mechanism is configured to receive the flower basket full of silicon wafers and transfer it to the subsequent silicon wafer processing station.

[0009] Through the cooperation of the main conveyor line, the first wafer feeding mechanism, the flower basket receiving mechanism, the flower basket transporting mechanism and the flower basket transfer mechanism, the flower basket full of silicon wafers can be automatically taken away and moved to the flower basket transfer mechanism, and then the flower basket transfer mechanism will automatically transfer the flower basket full of silicon wafers to the silicon wafer processing station or other stations. The whole process does not require manual operation, which improves the efficiency of silicon wafer receiving, saves manpower, and reduces production costs to a certain extent.

[0010] Optionally, the flower basket transfer mechanism is further configured to transfer the empty flower basket to the flower basket handling mechanism, and the flower basket handling mechanism is further configured to pick up the empty flower basket returned by the flower basket transfer mechanism and transport it to the flower basket receiving mechanism.

[0011] Through the cooperation of the flower basket transfer mechanism, the flower basket handling mechanism and the flower basket receiving mechanism, the automatic circulation of the empty flower basket is realized, further improving the silicon wafer receiving efficiency.

[0012] Optionally, the first wafer feeding mechanism includes a first adsorption and transfer component, an adsorption conveyor line and a telescopic conveyor line. The first adsorption and transfer component is arranged above the first unloading station, and the adsorption conveyor line is located on the side of the first unloading station. The first adsorption and transfer component is configured to pick up the silicon wafer conveyed to the first unloading station and release the picked up silicon wafer to the adsorption conveyor line. The adsorption conveyor line includes an adsorption component, and the adsorption surface of the adsorption component is lower than the conveying surface of the adsorption conveyor line. The adsorption component is configured to adsorb the silicon wafer non-contactly and adsorb the silicon wafer on the conveying surface of the adsorption conveyor line. The telescopic conveyor line is connected to the adsorption conveyor line to receive the silicon wafer. The output end of the telescopic conveyor line is retractable. The telescopic conveyor line is configured to insert the silicon wafer into the flower basket of the flower basket receiving mechanism.

[0013] Through the cooperation of the first adsorption and transfer component, the adsorption conveyor line and the telescopic conveyor line, it is possible to pick up silicon wafers at the first unloading station and automatically insert the picked-up silicon wafers into the flower basket of the flower basket receiving mechanism. The adsorption component can prevent the silicon wafers from shifting when releasing them onto the adsorption conveyor line, so as to ensure that the silicon wafers can be smoothly inserted into the flower basket of the flower basket receiving mechanism. The telescopic conveyor line's conveying end is extended and retracted to complete the action of inserting the silicon wafers at the output end into the flower basket of the flower basket receiving mechanism.

[0014] Optionally, the first adsorption and transfer assembly includes a first driving member, a first transverse member, a rotating driving member and a first suction cup, the driving end of the first driving member is connected to the first transverse member, the fixed end of the rotating driving member is installed on the first transverse member, the driving end of the rotating driving member is connected to the first suction cup, the first suction cup is configured to adsorb and convey the silicon wafer to the first unloading station, the rotating driving member is configured to drive the first suction cup to rotate, and the first driving member drives the first transverse member to move transversely to drive the silicon wafer to move to the top of the adsorption conveyor line and then release it to the adsorption conveyor line.

[0015] Through the cooperation of the first driving member, the first transverse member and the first suction cup, the silicon wafer at the first unloading station is automatically moved to the adsorption conveyor line; through the cooperation of the rotating driving member and the first suction cup, the direction of the silicon wafer can be changed as needed.

[0016] Optionally, the flower basket collecting mechanism includes a lifting drive member, a carrier member and a positioning assembly, the driving end of the lifting drive member is connected to the carrier member, the lifting drive member is configured to drive the carrier member to lift and lower, the carrier member is configured to carry a vertically arranged flower basket, and the positioning assembly is configured to fix the flower basket on the carrier member on the carrier member, and the lifting drive member drives the flower basket on the carrier member to lift a preset height each time, so that the empty slot of the flower basket is flush with the telescopic conveyor line, so that the silicon wafer at the output end of the telescopic conveyor line can be inserted into the empty slot corresponding to the flower basket.

[0017] Through the cooperation of the lifting drive member, the bearing member and the telescopic conveyor line, the silicon wafers can be automatically collected into the flower basket of the flower basket collecting mechanism, providing a flower basket collecting mechanism with simple structure, low cost and stable and reliable operation.

[0018] Optionally, the flower basket transport mechanism includes a second driving member and at least one set of clamping assemblies, the second driving member drives the clamping assemblies to move alternately to the flower basket receiving mechanism or the flower basket transfer mechanism, each set of clamping assemblies includes a third driving member and two clamping members, the third driving member is configured to drive the two clamping members to move closer to or away from each other to clamp or release the flower basket.

[0019] Through the cooperation of the second driving member and at least one set of clamping components, the flower basket is automatically clamped and the clamped flower basket is automatically transferred between the flower basket receiving mechanism and the flower basket transfer mechanism.

[0020] Optionally, the flower basket transporting mechanism also includes a connecting member and a rotating driving member, the fixed end of the rotating driving member is installed on the second driving member, the driving end of the rotating driving member is connected to the connecting member, two clamping members are installed on the connecting member, and the rotating driving member drives the connecting member to rotate to control the opening direction of the flower basket clamped by the clamping assembly.

[0021] Through the cooperation of the connecting member and the rotating driving member, the opening direction of the flower basket can be changed as required, so that the opening of the flower basket faces the silicon wafer to be received.

[0022] Optionally, support members extending inward are correspondingly arranged on the inner side walls of the two clamping members, and the two side edges of the top plate of the flower basket clamped by the clamping assembly are overlapped on the two support members. The flower basket transport mechanism also includes a clamping drive member and a clamping member. The fixed end of the clamping drive member is installed on the connecting member, and the driving end of the clamping drive member is connected to the clamping member. The clamping drive member drives the clamping member to rise and fall, and the clamping drive member drives the clamping member to descend and abut against the top plate of the flower basket clamped by the clamping assembly to clamp the flower basket clamped by the clamping assembly and fix it on the two support members.

[0023] By cooperating among the pressing driving member, the pressing member and the two supporting members, the flower basket is pressed and fixed between the two clamping members, thereby preventing the flower basket from accidentally falling out of the clamping assembly during transportation, and improving the safety of the flower basket transportation mechanism.

[0024] Optionally, the flower basket transfer mechanism includes a flower basket buffer line and a first transfer mechanism, wherein:

[0025] The flower basket buffer line is configured to receive and buffer the flower basket full of silicon wafers transported by the flower basket transport mechanism, the first transfer mechanism is connected to the flower basket buffer line, and the first transfer mechanism is configured to receive the flower basket full of silicon wafers output by the flower basket buffer line for transfer of the received flower basket full of silicon wafers;

[0026] The first transfer mechanism is further configured to transfer the empty flower baskets to the flower basket cache line, and the flower basket cache line is further configured to receive and cache the empty flower baskets returned by the first transfer mechanism.

[0027] Through the cooperation of the flower basket cache line and the first transfer mechanism, the flower basket full of silicon wafers can be cached, which can alleviate the transfer frequency of the first transfer mechanism, and thus better coordinate the collection efficiency of the flower basket and the transfer efficiency of the first transfer mechanism; at the same time, empty flower baskets can also be cached, providing the flower basket collection mechanism with sufficient empty flower baskets, which is conducive to improving the collection efficiency of the flower basket.

[0028] Optionally, the flower basket cache line includes a liftable transfer conveyor platform and two layers of cache conveyor lines docked with the transfer conveyor platform, one layer of cache conveyor lines is configured to convey flower baskets full of silicon wafers, and the other layer of cache conveyor lines is configured to convey empty flower baskets, the first transfer mechanism docks with the two layers of cache conveyor lines to transfer the flower baskets, and the flower basket handling mechanism docks with the transfer conveyor platform to transfer the flower baskets.

[0029] Through the cooperation of the transfer conveyor table and the two-layer buffer conveyor line, the layered buffering and transfer of empty flower baskets and flower baskets full of silicon wafers are realized, which greatly facilitates the circulation of flower baskets and is conducive to improving the efficiency of silicon wafer collection. At the same time, the overall structure is compact and occupies little space.

[0030] Optionally, the basket is configured to receive qualified silicon wafers, a second unloading station is further provided on the main conveyor line, and the silicon wafer receiving device further includes a second adsorption and transfer component, a material box receiving component, a material box handling component, a material box conveyor line and a second transfer mechanism, wherein:

[0031] The second adsorption and transfer assembly is arranged corresponding to the second unloading station, the material box receiving assembly is arranged at the side of the second unloading station, the material box receiving assembly includes a material box for carrying and receiving unqualified silicon wafers, and the second adsorption and transfer assembly is configured to pick up the unqualified silicon wafers conveyed to the second unloading station and collect the picked up unqualified silicon wafers into the material box of the material box receiving assembly;

[0032] The material box conveying component is configured to pick up the material box full of unqualified silicon wafers on the material box receiving component, and convey the picked-up material box full of unqualified silicon wafers to the material box conveying line;

[0033] The material box conveying line is configured to convey the received material box full of unqualified silicon wafers to the second transfer mechanism; the second transfer mechanism is configured to transfer the received material box full of unqualified silicon wafers;

[0034] The second transfer mechanism is also configured to transfer the empty material box to the material box conveying line, and the material box handling component is also configured to pick up the empty material box on the material box conveying line and transport it to the empty position of the material box receiving component.

[0035] Through the cooperation of the second adsorption and transfer component, the material box receiving component, the material box handling component, the material box conveyor line and the second transfer mechanism, it is possible to automatically remove the material box full of unqualified silicon wafers and transport it to the material box conveyor line, and then the material box conveyor line will transport the material box full of unqualified silicon wafers to the second transfer mechanism for automatic transfer, and also realize the automatic circulation of empty material boxes. The whole process does not require manual operation, which further improves the efficiency of silicon wafer receiving and saves manpower. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a schematic diagram of the three-dimensional structure of a silicon wafer receiving device provided in an embodiment of the present application;

[0037] Figure 2 is a schematic diagram of the three-dimensional structure of the first adsorption and transfer assembly provided in an embodiment of the present application;

[0038] Figure 3 It is a schematic diagram of the three-dimensional structure of the adsorption conveyor line and the telescopic conveyor line provided in the embodiment of the present application;

[0039] Figure 4 It is a schematic diagram of the three-dimensional structure of the flower basket receiving mechanism provided in an embodiment of the present application;

[0040] Figure 5 It is a three-dimensional structural schematic diagram of a flower basket transporting mechanism provided in an embodiment of the present application;

[0041] Figure 6 is a schematic diagram of the three-dimensional structure of the clamping assembly provided in an embodiment of the present application;

[0042] Figure 7 It is a schematic diagram of the three-dimensional structure of a clamping flower basket of a clamping assembly provided in an embodiment of the present application;

[0043] Figure 8 It is a schematic diagram of the three-dimensional structure of the transfer conveyor platform provided in an embodiment of the present application.

[0044] Figures 1 to 8 The following reference numerals are included:

[0045] Main conveyor line 10, flower basket 11;

[0046] The first sheet feeding mechanism 20, the first adsorption transfer assembly 21, the first driving member 210, the first transverse member 211, the first rotation driving member 212, the first suction cup 213, the adsorption conveying line 22, the adsorption assembly 220, the telescopic conveying line 23;

[0047] Flower basket receiving mechanism 30, lifting driving member 300, bearing member 301, positioning driving member 302, positioning member 303, mounting plate 304;

[0048] Flower basket transport mechanism 40, X-axis linear module 400, Y-axis linear module 401, clamping assembly 402, third driving member 4020, vertical plate 4021, support member 4022, clamping block 4023, slot 4024, connecting member 403, second rotating driving member 404, pressing driving member 405, pressing member 406;

[0049] Flower basket transfer mechanism 50, transfer conveyor platform 500, vertical frame 5000, lifting frame 5001, lifting drive assembly 5002, transfer conveyor line 5003, blocking member 5004, buffer conveyor line 501;

[0050] A second adsorption and transfer assembly 60;

[0051] Material box receiving component 70;

[0052] Material box handling assembly 80;

[0053] Material box conveyor line 90. DETAILED DESCRIPTION

[0054] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0055] During the production process of silicon wafers, it is usually necessary to test the silicon wafers. According to the test results, the silicon wafers are divided into qualified wafers and unqualified wafers. Then, according to the type of silicon wafers, the qualified wafers and unqualified wafers are collected into different baskets and boxes.

[0056] At present, the process of receiving qualified silicon wafers is as follows: first, the qualified silicon wafers are transported to the unloading station by the conveyor line, and then the qualified silicon wafers at the unloading station are inserted into the basket at the receiving position on the side of the conveyor line by the wafer feeding mechanism. After the basket is full of qualified silicon wafers, the basket full of qualified silicon wafers is taken away manually. Obviously, the efficiency of manually taking away the basket full of qualified silicon wafers is low, the labor intensity is high, and it is difficult to meet the needs of batch receiving and automated production.

[0057] Therefore, this application proposes a silicon wafer receiving device, see Figure 1As shown, the silicon wafer receiving device proposed in the embodiment of the present application includes a main conveying line 10, a first wafer feeding mechanism 20, a flower basket receiving mechanism 30, a flower basket conveying mechanism 40 and a flower basket transfer mechanism 50, wherein:

[0058] The main conveyor line 10 is configured to convey silicon wafers, and a first unloading station is provided on the conveying path of the main conveyor line 10;

[0059] The first wafer feeding mechanism 20 is arranged corresponding to the first unloading station, and the basket receiving mechanism 30 carries a basket 11 for receiving silicon wafers;

[0060] The first wafer feeding mechanism 20 is configured to insert the silicon wafers transported to the first unloading station into the flower basket 11 of the flower basket receiving mechanism 30, and the flower basket conveying mechanism 40 is configured to pick up the flower basket 11 full of silicon wafers on the flower basket receiving mechanism 30 and convey it to the flower basket transfer mechanism 50, and the flower basket transfer mechanism 50 is configured to receive the flower basket 11 full of silicon wafers and transfer it to the subsequent silicon wafer processing station.

[0061] Through the cooperation of the main conveyor line 10, the first wafer feeding mechanism 20, the flower basket receiving mechanism 30, the flower basket transporting mechanism 40 and the flower basket transfer mechanism 50, the flower basket 11 full of silicon wafers can be automatically taken away and moved to the flower basket transfer mechanism 50, and then the flower basket transfer mechanism 50 can automatically transfer the flower basket 11 full of silicon wafers to the silicon wafer processing station or other stations. The whole process does not require manual operation, which improves the efficiency of silicon wafer receiving, saves manpower, and reduces production costs to a certain extent.

[0062] As an embodiment, the flower basket transfer mechanism 50 is also configured to transfer the empty flower basket to the flower basket handling mechanism 40 , and the flower basket handling mechanism 40 is also configured to pick up the empty flower basket returned by the flower basket transfer mechanism 50 and transport it to the flower basket receiving mechanism 30 .

[0063] Through the cooperation of the flower basket transfer mechanism 50, the flower basket conveying mechanism 40 and the flower basket receiving mechanism 30, the automatic circulation of the empty flower baskets is realized, and the efficiency of receiving the silicon wafers is further improved.

[0064] See also Figures 1 to 3As shown, as an embodiment, the first film feeding mechanism 20 includes a first adsorption and transfer component 21, an adsorption conveyor line 22 and a telescopic conveyor line 23. The first adsorption and transfer component 21 is arranged above the first unloading station, and the adsorption conveyor line 22 is located on the side of the first unloading station. The first adsorption and transfer component 21 is configured to pick up the silicon wafers conveyed to the first unloading station and release the picked-up silicon wafers to the adsorption conveyor line 22. The adsorption conveyor line 22 includes an adsorption component 220. The adsorption surface of the adsorption component 220 is lower than the conveying surface of the adsorption conveyor line 22. The adsorption component 220 is configured to non-contactly adsorb the silicon wafers and adsorb the silicon wafers on the conveying surface of the adsorption conveyor line 22. The telescopic conveyor line 23 is docked with the adsorption conveyor line 22 to receive the silicon wafers. The output end of the telescopic conveyor line 23 is retractable. The telescopic conveyor line 23 is configured to insert the silicon wafers into the flower basket of the flower basket receiving mechanism 30. The adsorption component 300 can be a Bernoulli suction cup, and the adsorption surface of the Bernoulli suction cup is lower than the conveying surface of the adsorption conveying line 22; or the adsorption component 300 is a strip adsorption block based on the Bernoulli principle, and the strip adsorption block is provided with an air cavity that can form a Bernoulli negative pressure inside, and the adsorption surface of the strip adsorption block is lower than the conveying surface of the adsorption conveying line 22, and the air cavity of the strip adsorption block or the Bernoulli suction cup is connected to the air source through a pipeline.

[0065] By cooperating with the first adsorption and transfer component 21, the adsorption conveyor line 22 and the telescopic conveyor line 23, it is possible to pick up silicon wafers at the first unloading station and automatically insert the picked silicon wafers into the flower basket of the flower basket receiving mechanism 30. By using the adsorption component 220, it is possible to prevent the silicon wafers from being offset when being released onto the adsorption conveyor line 22, so as to ensure that the silicon wafers can be smoothly inserted into the flower basket of the flower basket receiving mechanism 30. By extending and retracting the conveying end of the telescopic conveyor line 23, the action of inserting the silicon wafers at the output end into the flower basket of the flower basket receiving mechanism 30 is completed.

[0066] As an embodiment, the first adsorption and transfer assembly 21 includes a first driving member 210, a first transverse member 211, a first rotating driving member 212 and a first suction cup 213. The driving end of the first driving member 210 is connected to the first transverse member 211, the fixed end of the first rotating driving member 212 is installed on the first transverse member 211, the driving end of the first rotating driving member 212 is connected to the first suction cup 213, the first suction cup 213 is configured to adsorb and convey the silicon wafer to the first unloading station, the first rotating driving member 212 is configured to drive the first suction cup 213 to rotate, and the first driving member 210 drives the first transverse member 211 to move transversely to drive the silicon wafer to move to the top of the adsorption conveying line 22 and then release it to the adsorption conveying line 22.

[0067] Specifically, the first driving member 210 is a horizontally arranged first linear module, the first transverse member 211 is a mounting seat, the mounting seat is connected to the slide of the first linear module, the first suction cup 213 and the first rotating driving member 212 are arranged on the mounting seat, and the slide of the first linear module moves, which can drive the first suction cup 213 and the first rotating driving member 212 to move between the first unloading station and the adsorption conveyor line 22. The first rotating driving member 212 is a first motor, and the first suction cup 213 is driven to rotate by the first motor.

[0068] Through the cooperation of the first driving member 210, the first transverse member 211 and the first suction cup 213, the silicon wafer at the first unloading station is automatically moved to the adsorption conveyor line 22; through the cooperation of the first rotating driving member 212 and the first suction cup 213, the orientation of the silicon wafer can be changed as needed.

[0069] See also Figure 3 and Figure 4 As shown, as an embodiment, the flower basket receiving mechanism 30 includes a lifting drive member 300, a carrier member 301 and a positioning assembly. The driving end of the lifting drive member 300 is connected to the carrier member 301. The lifting drive member 300 is configured to drive the carrier member 301 to lift and lower. The carrier member 301 is configured to carry a vertically arranged flower basket 11. The positioning assembly is configured to fix the flower basket 11 on the carrier member 301 on the carrier member 301. The lifting drive member 300 drives the flower basket 11 on the carrier member 301 to rise to a preset height each time, so that the empty slot of the flower basket 11 is flush with the telescopic conveyor line 23, so that the silicon wafer at the output end of the telescopic conveyor line 23 can be inserted into the empty slot corresponding to the flower basket 11.

[0070] Specifically, the positioning assembly includes a positioning drive member 302 and a positioning member 303. A mounting plate 304 is vertically arranged on the carrier 301. The positioning drive member 302 and the positioning member 303 are located directly above the flower basket 11 on the carrier 301. The positioning drive member 302 is a first cylinder, and the positioning member 303 is a flat plate. The cylinder body of the first cylinder is installed on the mounting plate 304. The piston rod of the first cylinder is arranged downward and vertically connected to the flat plate. The first cylinder is used to drive the flat plate to descend and press against the top plate of the flower basket 11 on the carrier 301 to fix the flower basket on the carrier 301 on the carrier 301.

[0071] Through the cooperation of the lifting drive member 300, the bearing member 301 and the telescopic conveyor line 23, the silicon wafers are automatically collected into the flower basket of the flower basket collecting mechanism 30, providing a flower basket collecting mechanism 30 with a simple structure, convenient material collection and stable and reliable operation.

[0072] See also Figure 1 , Figures 5 to 7As shown, as an embodiment, the flower basket transport mechanism 40 includes a second driving member and at least one set of clamping assemblies 402. The second driving member drives the clamping assemblies 402 to move alternately to the flower basket receiving mechanism 30 or the flower basket transfer mechanism 50. Each set of clamping assemblies 402 includes a third driving member 4020 and two clamping members. The third driving member 4020 is configured to drive the two clamping members to move closer to or away from each other to clamp or release the flower basket 11.

[0073] Specifically, the second driving member includes an X-direction linear module 400 and a Y-direction linear module 401. The X-direction linear module 400 is used to drive the Y-direction linear module 401 to move along the X-direction, and the Y-direction linear module 401 is used to drive the clamping assembly 402 to move along the Y-direction. The flower basket transport mechanism 40 includes two sets of clamping assemblies 402, so that two flower baskets 11 can be transported each time, thereby improving the material collection efficiency. The number of Y-direction linear modules 401 is the same as the number of clamping assemblies 402. Each set of clamping assemblies 402 is driven by the corresponding Y-direction linear module 401 to achieve Y-direction movement, and all Y-direction linear modules 401 are driven by the same X-direction linear module 400 to achieve X-direction movement.

[0074] Through the cooperation of the second driving member and at least one set of clamping components 402 , the flower basket 11 is automatically clamped and the clamped flower basket 11 is automatically transferred between the flower basket receiving mechanism 30 and the flower basket transfer mechanism 50 .

[0075] As an embodiment, the flower basket transport mechanism 40 also includes a connecting member 403 and a second rotating driving member 404, the fixed end of the second rotating driving member 404 is installed on the second driving member, the driving end of the second rotating driving member 404 is connected to the connecting member 403, two clamping members are installed on the connecting member 403, and the second rotating driving member 404 drives the connecting member 403 to rotate to control the opening direction of the flower basket 11 clamped by the clamping assembly 402.

[0076] Specifically, the second rotary drive member 404 is a second motor, which is fixed to the slide of the Y-axis linear module 401 through a bracket. The connecting member 403 is a horizontal plate, and the output shaft of the second motor is vertically connected to the horizontal plate to drive the horizontal plate to rotate horizontally.

[0077] Each set of clamping components 402 is equipped with a connecting member 403 and a second rotating driving member 404, so that the opening direction of the flower basket 11 can be changed as needed, so that the opening of the flower basket 11 faces the silicon wafer to be received.

[0078] As an embodiment, support members 4022 extending inward are correspondingly arranged on the inner side walls of the two clamping members, and the two side edges of the top plate of the flower basket 11 clamped by the clamping assembly 402 are overlapped on the two support members 4022. The flower basket transport mechanism 40 also includes a clamping drive member 405 and a clamping member 406. The fixed end of the clamping drive member 405 is installed on the connecting member 403, and the driving end of the clamping drive member 405 is connected to the clamping member 406. The clamping drive member 405 drives the clamping member 406 to rise and fall. The clamping drive member 405 drives the clamping member 406 to descend and abut against the top plate of the flower basket 11 clamped by the clamping assembly 402, so as to clamp and fix the flower basket 11 clamped by the clamping assembly 402 on the two support members 4022.

[0079] Specifically, the clamping member includes a vertical plate 4021 and a clamping block 4023 fixed to the lower end of the vertical plate 4021, and a plurality of arc-shaped grooves 4024 are respectively provided on the opposite inner side surfaces of the two clamping blocks 4023. The third driving member 4020 includes two second cylinders, the piston rods of the second cylinders are horizontally arranged, the cylinder bodies of the second cylinders are fixed to the lower plate surface of the connecting member 403, the piston rod ends of the second cylinders are vertically connected to the corresponding vertical plates 4021, and the two second cylinders drive the two vertical plates 4021 to move closer or farther away, so as to drive the clamping blocks 4023 to clamp or release the flower basket 11. When clamping the flower basket 11, the clamping blocks 4023 of the two clamping members are used to clamp the flower basket 11, and the columns on both sides of the flower basket 11 are clamped in the clamping grooves 4024 of the clamping blocks 4023. The inner groove surface of the clamping groove 4024 is matched with the outer peripheral surface of the column of the flower basket 11, ensuring that the clamping blocks 4023 can reliably clamp the flower basket 11.

[0080] The support member 4022 includes a vertical base plate and a protrusion disposed on the inner side of the base plate. The base plate is used to be fixedly connected to the vertical plate 4021 , and the protrusion is used to support the top plate of the flower basket 11 .

[0081] The clamping driving member 405 is a third cylinder, and the clamping member 406 is a pressure plate. The cylinder body of the third cylinder is fixed to the lower plate surface of the connecting member 403, and the piston rod of the third cylinder is arranged downward. The end of the piston rod of the third cylinder is vertically connected to the plate surface of the pressure plate. The third cylinder drives the pressure plate to rise and fall to press the top plate of the flower basket 11.

[0082] By the cooperation of the pressing driving member 405, the pressing member 406 and the two supporting members 4022, the flower basket 11 is pressed and fixed between the two clamping members, thereby preventing the flower basket 11 from accidentally falling out of the clamping assembly 402 during transportation, thereby improving the safety of the flower basket transportation mechanism 40.

[0083] See also Figure 1 and Figure 8 As shown, as an embodiment, the flower basket transfer mechanism 50 includes a flower basket buffer line and a first transfer mechanism (not shown in the figure), wherein:

[0084] The flower basket buffer line is configured to receive and buffer the flower basket 11 full of silicon wafers transported by the flower basket transport mechanism 40. The first transfer mechanism is connected to the flower basket buffer line. The first transfer mechanism is configured to receive the flower basket 11 full of silicon wafers output by the flower basket buffer line for transfer of the received flower basket 11 full of silicon wafers.

[0085] The first transfer mechanism is further configured to transfer the empty flower baskets to the flower basket cache line, and the flower basket cache line is further configured to receive and cache the empty flower baskets returned by the first transfer mechanism.

[0086] Specifically, the first transfer mechanism may be an AGV vehicle or other forms of rail-mounted transfer vehicles.

[0087] Through the cooperation of the flower basket cache line and the first transfer mechanism, the flower basket 11 full of silicon wafers can be cached, which can alleviate the transfer frequency of the first transfer mechanism, and thus better coordinate the material collection efficiency of the flower basket 11 and the transfer efficiency of the first transfer mechanism; at the same time, the empty flower baskets can also be cached, providing the flower basket collection mechanism 30 with sufficient empty flower baskets, which is beneficial to improving the material collection efficiency of the flower basket 11.

[0088] As an embodiment, the flower basket cache line includes a liftable transfer conveyor platform 500 and two layers of cache conveyor lines 501 docked with the transfer conveyor platform 500, wherein one layer of cache conveyor lines 501 is configured to convey flower baskets 11 full of silicon wafers, and the other layer of cache conveyor lines 501 is configured to convey empty flower baskets 11, the first transfer mechanism docks with the two layers of cache conveyor lines 501 to transfer the flower baskets 11, and the flower basket handling mechanism 40 docks with the transfer conveyor platform 500 to transfer the flower baskets 11.

[0089] Specifically, the transfer conveyor platform 500 includes a vertical frame 5000, a lifting frame 5001 and a lifting drive assembly 5002. The lifting frame 5001 can be installed on the vertical frame 5000 in a liftable manner. The fixed end of the lifting drive assembly 5002 is installed on the vertical frame 5000, and the driving end of the lifting drive assembly 5002 is connected to the lifting frame 5001. The lifting frame 5001 is provided with a transfer conveyor line 5003 for docking two layers of cache conveyor lines 501. The lifting drive assembly 5002 drives the lifting frame 5001 to rise and fall to the first height or the second height so that the transfer conveyor line 5003 can dock with the upper cache conveyor line 501 or the lower cache conveyor line 501.

[0090] Specifically, the lifting drive assembly 5002 includes a driving motor and a synchronous belt transmission assembly, and the driving motor drives the lifting frame 5001 to rise and fall through the synchronous belt transmission assembly.

[0091] Specifically, blocking members 5004 are correspondingly provided on both sides of the lifting frame 5001 in the conveying direction of the transfer conveyor line 5003 to limit the flower baskets 11 on the transfer conveyor line 5003 to prevent the flower baskets from tipping over during the conveying process.

[0092] Specifically, the buffer conveyor line 501 on each layer includes two buffer conveyor lines 501 arranged in parallel, and two transfer conveyor lines 5003 are also arranged in parallel on the lifting frame 5001 to improve the transfer efficiency.

[0093] Through the cooperation of the transfer conveyor platform 500 and the two-layer buffer conveyor line 501, the layered buffering and transfer of empty flower baskets and flower baskets 11 full of silicon wafers are realized, which greatly facilitates the circulation of the flower baskets 11 and is beneficial to improving the efficiency of silicon wafer collection. At the same time, the overall structure is compact and occupies little space.

[0094] See also Figure 1 As shown, as an embodiment, the basket 11 is configured to receive qualified silicon wafers, the main conveyor line 10 is also provided with a second unloading station, and the silicon wafer receiving device further includes a second adsorption transfer component 60, a material box receiving component 70, a material box handling component 80, a material box conveying line 90 and a second transfer mechanism, wherein:

[0095] The second adsorption transfer assembly 60 is arranged corresponding to the second unloading station, and the material box receiving assembly 70 is arranged at the side of the second unloading station. The material box receiving assembly 70 includes a material box for carrying and receiving unqualified silicon wafers. The second adsorption transfer assembly 60 is configured to pick up unqualified silicon wafers conveyed to the second unloading station and collect the picked unqualified silicon wafers into the material box of the material box receiving assembly 70;

[0096] The material box conveying assembly 80 is configured to pick up the material box full of unqualified silicon wafers on the material box receiving assembly 70, and convey the picked-up material box full of unqualified silicon wafers to the material box conveying line 90;

[0097] The material box conveying line 90 is configured to convey the received material box full of unqualified silicon wafers to the second transfer mechanism; the second transfer mechanism is configured to transfer the received material box full of unqualified silicon wafers;

[0098] The second transfer mechanism is further configured to transfer the empty material box to the material box conveying line 90 , and the material box handling assembly 80 is further configured to pick up the empty material box on the material box conveying line 90 and transport it to the empty position of the material box receiving assembly 70 .

[0099] Specifically, the second adsorption and transfer assembly 60 includes an adsorption member and a conveyor belt. The adsorption member can adopt the same structure as the adsorption assembly 300. The adsorption surface of the adsorption member is higher than the conveying surface of the conveyor belt, so that the adsorption member can absorb the silicon wafers on the second unloading station and adsorb them on the conveyor belt, and use the conveyor belt to transfer the silicon wafers to the material box of the material box receiving assembly 70. The material box receiving assembly 70 includes a material box carrier and a carrier driving member that drives the material box carrier to move between the first station and the second station. The carrier driving member can be a cylinder, etc., which can control the material box carrier to move between the first station and the second station. The material box carrier is used to carry the material box. The first station is the station for receiving the silicon wafer from the second adsorption and transfer assembly 60, and the second station is the station for the material box handling assembly 80 and the material box receiving assembly 70 to dock and transfer the material box. The material box handling assembly 80 is a manipulator that can carry the material box. The second transfer mechanism can also be an AGV trolley or other forms of rail transfer vehicles.

[0100] The second unloading station is arranged before the first unloading station, that is, unqualified silicon wafers are firstly received into the material box, and then qualified silicon wafers are received into the flower basket 11 .

[0101] Through the cooperation of the second adsorption and transfer component 60, the material box receiving component 70, the material box transporting component 80, the material box conveyor line 90 and the second transfer mechanism, it is possible to automatically remove the material box full of unqualified silicon wafers and transport it to the material box conveyor line 90, and then the material box conveyor line 90 will transport the material box full of unqualified silicon wafers to the second transfer mechanism for automatic transportation. At the same time, the automatic circulation of empty material boxes is also realized. The whole process does not require manual operation, which further improves the efficiency of silicon wafer receiving and saves manpower.

[0102] The silicon wafer receiving device proposed in this embodiment has the following advantages compared with the prior art:

[0103] 1) It can realize the automatic circulation of full baskets and empty baskets, improve the efficiency of silicon wafer collection, save manpower and reduce production costs.

[0104] 2) It can realize the automatic circulation of full material boxes and empty material boxes, further improving the efficiency of silicon wafer collection and saving manpower.

[0105] 3) The first wafer feeding mechanism adopts an adsorption conveying method to prevent the silicon wafer from shifting during the conveying process. At the same time, the silicon wafer is inserted into the corresponding flower basket through the telescopic conveyor line, which is convenient for silicon wafer collection and further improves the collection efficiency.

[0106] 4) The flower basket transporting mechanism can clamp the flower basket and hold it in the clamping assembly, so the flower basket will not accidentally fall during transport, which is highly safe.

[0107] 5) The flower basket buffer line can buffer and transport full flower baskets and empty flower baskets, thereby coordinating the transfer efficiency of the flower baskets and improving the collection efficiency of the flower baskets.

[0108] It should be noted that the main conveyor line 10 can be divided into a second unloading area and a first unloading area along its conveying direction. The first unloading area is used to collect qualified silicon wafers. The first unloading area can be arranged with multiple first unloading stations in the first direction (the conveying direction of the silicon wafers) at intervals according to actual needs. A set of first wafer feeding mechanisms 20 and a set of flower basket collecting mechanisms 30 are correspondingly arranged on both sides of each first unloading station. The flower basket collecting mechanisms 30 located on the same side share a set of flower basket transporting mechanisms 40. Each set of flower basket transporting mechanisms 40 is connected to a set of flower basket transfer mechanisms 50 to improve the collection efficiency of qualified silicon wafers.

[0109] The second unloading area is used to collect unqualified silicon wafers. The second unloading area can set up multiple second unloading stations at intervals in the first direction (the conveying direction of the silicon wafers) according to actual needs. A set of material box receiving components 70 are correspondingly arranged on both sides of each second unloading station. The material box receiving components 70 located on the same side share a set of material box conveying components 80. Each set of material box conveying components 80 is connected to a set of material box conveying lines 90 to improve the collection efficiency of unqualified silicon wafers.

[0110] The above embodiments are only to illustrate the basic principles and characteristics of the present application. The present application is not limited by the above examples. Without departing from the spirit and scope of the present application, the present application may be subject to various changes and modifications, which are within the scope of the present application to be protected. The scope of protection claimed in the present application is defined by the attached claims and their equivalents.

Claims

1. A silicon wafer receiving device, characterized in that: The silicon wafer receiving device comprises a main conveying line, a first wafer feeding mechanism, a basket receiving mechanism, a basket conveying mechanism and a basket transfer mechanism, wherein: The main conveyor line is configured to convey silicon wafers, and a first unloading station is provided on the conveying path of the main conveyor line; The first wafer feeding mechanism is arranged corresponding to the first material unloading station, and the basket receiving mechanism carries a basket for receiving the silicon wafers; The first wafer feeding mechanism is configured to insert the silicon wafers delivered to the first unloading station into the flower basket of the flower basket receiving mechanism, the flower basket conveying mechanism is configured to pick up the flower basket full of silicon wafers on the flower basket receiving mechanism and convey it to the flower basket transfer mechanism, and the flower basket transfer mechanism is configured to receive the flower basket full of silicon wafers and transfer it to the subsequent silicon wafer processing station.

2. The silicon wafer receiving device according to claim 1, characterized in that: The flower basket transfer mechanism is also configured to transfer the empty flower basket to the flower basket handling mechanism, and the flower basket handling mechanism is also configured to pick up the empty flower basket returned by the flower basket transfer mechanism and transport it to the flower basket receiving mechanism.

3. The silicon wafer receiving device according to claim 1, characterized in that: The first wafer feeding mechanism includes a first adsorption and transfer component, an adsorption conveyor line and a telescopic conveyor line. The first adsorption and transfer component is arranged above the first unloading station, and the adsorption conveyor line is located at the side of the first unloading station. The first adsorption and transfer component is configured to pick up the silicon wafers conveyed to the first unloading station and release the picked-up silicon wafers to the adsorption conveyor line. The adsorption conveyor line includes an adsorption component, and the adsorption surface of the adsorption component is lower than the conveying surface of the adsorption conveyor line. The adsorption component is configured to adsorb the silicon wafers non-contactly and adsorb the silicon wafers on the conveying surface of the adsorption conveyor line. The telescopic conveyor line is docked with the adsorption conveyor line to receive the silicon wafers. The output end of the telescopic conveyor line is telescopic. The telescopic conveyor line is configured to insert the silicon wafers into the flower basket of the flower basket receiving mechanism.

4. The silicon wafer receiving device according to claim 3, characterized in that: The first adsorption and transfer assembly includes a first driving member, a first transverse member, a rotating driving member and a first suction cup, the driving end of the first driving member is connected to the first transverse member, the fixed end of the rotating driving member is installed on the first transverse member, the driving end of the rotating driving member is connected to the first suction cup, the first suction cup is configured to adsorb and convey the silicon wafer to the first unloading station, the rotating driving member is configured to drive the first suction cup to rotate, and the first driving member drives the first transverse member to move transversely to drive the silicon wafer to move to the top of the adsorption conveying line and then release it to the adsorption conveying line.

5. The silicon wafer receiving device according to claim 3, characterized in that: The flower basket receiving mechanism includes a lifting drive member, a carrier and a positioning assembly, the driving end of the lifting drive member is connected to the carrier, the lifting drive member is configured to drive the carrier to lift and lower, the carrier is configured to carry a vertically arranged flower basket, and the positioning assembly is configured to fix the flower basket on the carrier on the carrier, and the lifting drive member drives the flower basket on the carrier to rise to a preset height each time, so that the empty slot of the flower basket is flush with the telescopic conveyor line, so that the silicon wafer at the output end of the telescopic conveyor line can be inserted into the empty slot corresponding to the flower basket.

6. The silicon wafer receiving device according to claim 2, characterized in that: The flower basket transport mechanism includes a second driving member and at least one set of clamping assemblies. The second driving member drives the clamping assemblies to move alternately to the flower basket receiving mechanism or the flower basket transfer mechanism. Each set of the clamping assemblies includes a third driving member and two clamping members. The third driving member is configured to drive the two clamping members to move closer to or away from each other to clamp or release the flower basket.

7. The silicon wafer receiving device according to claim 6, characterized in that: The flower basket transport mechanism also includes a connecting member and a rotating driving member, the fixed end of the rotating driving member is installed on the second driving member, the driving end of the rotating driving member is connected to the connecting member, the two clamping members are installed on the connecting member, and the rotating driving member drives the connecting member to rotate to control the opening direction of the flower basket clamped by the clamping assembly.

8. The silicon wafer receiving device according to claim 7, characterized in that: Support members extending inward are correspondingly arranged on the inner side walls of the two clamping members, and the two side edges of the top plate of the flower basket clamped by the clamping assembly are overlapped on the two supporting members. The flower basket transporting mechanism also includes a clamping drive member and a clamping member. The fixed end of the clamping drive member is installed on the connecting member, and the driving end of the clamping drive member is connected to the clamping member. The clamping drive member drives the clamping member to rise and fall, and the clamping drive member drives the clamping member to descend and abut against the top plate of the flower basket clamped by the clamping assembly to clamp and fix the flower basket clamped by the clamping assembly on the two supporting members.

9. The silicon wafer receiving device according to claim 2, characterized in that: The flower basket transfer mechanism includes a flower basket buffer line and a first transfer mechanism, wherein: The flower basket buffer line is configured to receive and buffer the flower basket full of silicon wafers transported by the flower basket transport mechanism, the first transfer mechanism is connected to the flower basket buffer line, and the first transfer mechanism is configured to receive the flower basket full of silicon wafers output by the flower basket buffer line for transfer of the received flower basket full of silicon wafers; The first transfer mechanism is further configured to transfer the empty flower baskets to the flower basket cache line, and the flower basket cache line is further configured to receive and cache the empty flower baskets returned by the first transfer mechanism.

10. The silicon wafer receiving device according to claim 9, characterized in that: The flower basket cache line includes a liftable transfer conveyor platform and two layers of cache conveyor lines docked with the transfer conveyor platform, one layer of cache conveyor lines is configured to convey flower baskets full of silicon wafers, and the other layer of cache conveyor lines is configured to convey empty flower baskets, the first transfer mechanism docks with the two layers of cache conveyor lines to transfer flower baskets, and the flower basket handling mechanism docks with the transfer conveyor platform to transfer flower baskets.

11. The silicon wafer receiving device according to any one of claims 1 to 10, characterized in that: The basket is configured to receive qualified silicon wafers. A second unloading station is also provided on the main conveyor line. The silicon wafer receiving device further includes a second adsorption and transfer component, a material box receiving component, a material box handling component, a material box conveyor line and a second transfer mechanism, wherein: The second adsorption and transfer assembly is arranged corresponding to the second unloading station, the material box receiving assembly is arranged at the side of the second unloading station, the material box receiving assembly includes a material box for carrying and receiving unqualified silicon wafers, and the second adsorption and transfer assembly is configured to pick up unqualified silicon wafers conveyed to the second unloading station and receive the picked up unqualified silicon wafers into the material box of the material box receiving assembly; The material box conveying component is configured to pick up a material box full of unqualified silicon wafers on the material box receiving component, and convey the picked-up material box full of unqualified silicon wafers to the material box conveying line; The material box conveying line is configured to convey the received material box full of unqualified silicon wafers to the second transfer mechanism; the second transfer mechanism is configured to transfer the received material box full of unqualified silicon wafers; The second transfer mechanism is further configured to transfer the empty material box to the material box conveying line, and the material box handling assembly is further configured to pick up the empty material box on the material box conveying line and carry it to an empty position of the material box receiving assembly.

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