Film forming device
By designing a film-forming device that includes a stage, a film-forming component, a transmission component and a cleaning component, the problem of the overlap between the film layer boundary and the substrate boundary and the contamination of the backside of the substrate in the wet film-forming process is solved, and the film formation process is achieved. Uniform layer thickness and improved substrate utilization.
Patent Information
- Application Number
- CN202420613016.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-27
- Publication Date
- 2025-01-21
- Estimated Expiration
- 2034-03-27
AI Technical Summary
In the existing wet film formation process, it is difficult to control the overlap between the film layer boundary and the substrate boundary, and the back of the substrate is easily contaminated, resulting in low substrate utilization.
Design a film-forming device, including a carrier stage, a film-forming component, a transfer component and a cleaning component. The transfer component transfers the excess coating liquid on the substrate to the cleaning component through rollers or conveyor belts, and the cleaning component cleans and blows dry the liquid.
It effectively solves the problem of overlap between the film layer boundary and the substrate boundary, avoids contamination on the back of the substrate, improves substrate utilization, and achieves uniform film thickness.
Smart Images
Figure CN222369497U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of film forming technology, and in particular to a film forming device. Background Art
[0002] The wet film-forming process has a wide range of applications. Take slit coating, which is widely used in the wet film-forming process, as an example. With its application in the field of functional film layer formation, some application limitations of slit coating are also revealed. For example, it is difficult to control the boundary of the film layer. Without the use of a mask, it is difficult to effectively align with the required edge of the substrate; or, the overlap between the film layer and the substrate is ensured by shortening the coating width or increasing the substrate width and subsequently shearing the substrate. Both methods have certain defects. In the former, the mask needs to be removed and the coating liquid on it needs to be cleaned, which adds an extra process; in the latter, after the substrate is sheared, the utilization rate is reduced, resulting in an overall increase in production costs. Utility Model Content
[0003] The purpose of the embodiments of the present application is to provide a film forming device that can effectively solve the problem of overlap between the film layer boundary and the substrate boundary, and can also avoid contamination of the back side of the substrate and the need to shear the substrate.
[0004] In one aspect of an embodiment of the present application, a film-forming device is provided, comprising: a carrier for carrying a substrate, a film-forming component is arranged on one side of the carrier, the film-forming component and the substrate are located on the same side of the carrier, and the film-forming component is used to output a coating liquid to the surface of the substrate on the carrier to form a film layer on the surface of the substrate; a transmission transfer component and a cleaning component are arranged on the other side of the carrier, the transmission transfer component is used to transfer excess coating liquid on the substrate to the cleaning component, and the cleaning component cleans the coating liquid on the transmission transfer component.
[0005] Optionally, the transmission transfer component includes a roller, which is rotatably arranged on the other side of the carrier, and the coating liquid is transferred by the rotation of the roller.
[0006] Optionally, the cleaning component includes a cleaning chamber, which is provided with an opening so that the bottom of the roller can extend into the cleaning chamber through the opening; a cleaning nozzle and a drying nozzle are also provided in the cleaning chamber to clean and dry the coating liquid on the surface of the roller.
[0007] Optionally, the transmission transfer component includes a plurality of pulleys and a transmission belt disposed between the plurality of pulleys, and the transmission belt is sequentially transmitted along the direction of the carrier and the cleaning component, and the coating liquid is transferred through the transmission of the transmission belt.
[0008] Optionally, the cleaning component includes a cleaning chamber, which has an inlet and an outlet along the transmission direction of the conveyor belt, so that the conveyor belt can be transmitted through the cleaning chamber through the inlet and the outlet; the cleaning chamber is also provided with two groups of cleaning nozzles and blow-dry nozzles located on both sides of the conveyor belt to clean and blow-dry the surface coating liquid of the conveyor belt inserted therein.
[0009] Optionally, the substrate and the carrier move synchronously along an output direction perpendicular to the film forming component, and the deviation between the linear speed of the transmission transfer component and the moving speed of the substrate is within ±20%.
[0010] Optionally, in the output direction of the film forming component, the height deviation between the highest point of the transmission transfer component and the highest point of the substrate is within ±300um.
[0011] Optionally, in the film forming direction, the film forming width of the film forming component is greater than the substrate width of the substrate, and the film forming width is ≤ (substrate width + 2×width of the transmission transfer component); the film forming direction, output direction and moving direction of the substrate are perpendicular to each other.
[0012] Optionally, there are two corresponding groups of transmission and transfer components and cleaning components, which are respectively arranged on both sides of the moving direction of the substrate.
[0013] Optionally, a distance between an inner side of the transport transfer component close to the substrate and an edge of the substrate is less than 15 um.
[0014] The film forming device provided by the embodiment of the present application has a transmission and transfer component arranged below the carrier, and a cleaning component arranged below the transmission and transfer component. The transmission and transfer component can transfer the excess coating liquid on the substrate to the cleaning component, and the cleaning component cleans the coating liquid on the transmission and transfer component. In this way, the excess coating liquid on the substrate can be transferred away, so that the coating liquid on the substrate maintains a suitable capacity, so that a film layer of a preset thickness can be formed on the substrate, and the excess coating liquid is transferred away by the transmission and transfer component, and will not cause the above-mentioned impact on the substrate; the coating liquid on the transmission and transfer component is then cleaned by the cleaning component, and the transmission and transfer component after cleaning returns to the bottom of the substrate, and in this way, the coating liquid is transferred and the transmission and transfer component is cleaned. In this way, since the excess coating liquid on the substrate is transferred away in time and will not accumulate on the substrate, a film layer of uniform thickness can be formed on the substrate, solving the problem of overlap between the boundary of the film layer and the boundary of the substrate in the prior art, and at the same time, it can also avoid the problem that the back of the substrate is contaminated by the excess coating liquid and the substrate is sheared due to the contamination, resulting in low substrate utilization. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.
[0016] Figure 1 This is one of the structural schematic diagrams of the first embodiment of the film forming device provided in this embodiment;
[0017] Figure 2 This is the second structural schematic diagram of the first embodiment of the film forming device provided in this embodiment;
[0018] Figure 3 This is one of the structural schematic diagrams of the second embodiment of the film forming device provided in this embodiment;
[0019] Figure 4 This is the second structural schematic diagram of the second embodiment of the film forming device provided in this embodiment;
[0020] Figure 5 It is a selection diagram of the film forming device provided in this embodiment under different process conditions.
[0021] Icons: 10-carrier; 11-film forming assembly; 120-roller; 121-transmission belt; 122-pulley; 13-cleaning chamber; 14-drying nozzle; 15-cleaning nozzle; 20-substrate; 21-film layer; F1-moving direction; F2-output direction; F3-film forming direction; F4-transmission direction; R-rotation direction. DETAILED DESCRIPTION
[0022] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application.
[0023] In the description of this application, it should be noted that the terms "inside", "outside", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the application is usually placed when in use, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.
[0024] It should also be noted that, unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0025] Please refer to Figure 1 As shown, an embodiment of the present application provides a film-forming device, which can be applied not only to a slit coating process, but also to a surface treatment process before the coating process, a pre-coating process and a film layer treatment after the coating process (wind knife drying, annealing and solvent treatment, etc.), which includes: a carrier 10 for carrying a substrate 20, a film-forming component 11 is provided on one side of the carrier 10 where the substrate 20 is provided, in other words, the film-forming component 11 and the substrate 20 are located on the same side of the carrier 10, the film-forming component 11 is used to output a coating liquid to the surface of the substrate 20 on the carrier 10 to form a film layer 21 on the surface of the substrate 20; a transmission transfer component and a cleaning component are provided on the other side of the carrier 10, the transmission transfer component is used to transfer excess coating liquid on the substrate 20 to the cleaning component, and the cleaning component cleans the coating liquid on the transmission transfer component.
[0026] The carrier 10 is used to carry the substrate 20. Under the action of the negative pressure or static electricity generated by the carrier 10, a binding relationship is formed between the substrate 20 and the carrier 10. The two can move together without relative movement. When the film forming or film layer 21 treatment process is in progress, the substrate 20 and the carrier 10 can be regarded as a whole. After the process is completed, the substrate 20 and the carrier 10 can be untied, and the substrate 20 is transferred to the remaining process; or the substrate 20 and the carrier 10 can be moved as a whole to other stations for process operations, and untied for shipment after all processes are completed.
[0027] The substrate 20 and the carrier 10 are formed as a whole, and are driven by a screw, a conveyor belt 121 or a motor to move to the bottom of the film-forming component 11; the film-forming component 11 outputs the coating liquid toward the substrate 20 on the carrier 10 by spraying or other means, so that a film layer 21 can be formed on the surface of the substrate 20.
[0028] However, if the film forming assembly 11 outputs too much coating liquid, the excess coating liquid will accumulate on the substrate 20, causing the boundary of the film layer 21 and the boundary of the substrate 20 to overlap, and causing problems such as contamination of the substrate 20.
[0029] In order to solve the above-mentioned problems, the present application provides a film-forming device in an embodiment of the present application, wherein a transmission and transfer component is arranged below the carrier 10, and a cleaning component is arranged below the transmission and transfer component. The transmission and transfer component can transfer excess coating liquid on the substrate 20 to the cleaning component, and the cleaning component cleans the coating liquid on the transmission and transfer component, and in this way, excess coating liquid on the substrate 20 can be transferred away to keep the coating liquid on the substrate 20 at an appropriate capacity, so that a film layer 21 of a preset thickness can be formed on the substrate 20, and excess coating liquid is transferred away through the transmission and transfer component, and will not cause the above-mentioned impact on the substrate 20; the coating liquid on the transmission and transfer component is then cleaned by the cleaning component, and the cleaned transmission and transfer component returns to the bottom of the substrate 20, and in this way, the coating liquid is transferred and the transmission and transfer component is cleaned. In this way, since the excess coating liquid on the substrate 20 is transferred away in time and will not accumulate on the substrate 20, a film layer 21 with uniform thickness can be formed on the substrate 20, solving the problem of overlap between the boundary of the film layer 21 and the boundary of the substrate 20 in the prior art. At the same time, it can also avoid the back side of the substrate 20 being contaminated by excess coating liquid and the substrate 20 being sheared due to contamination, resulting in low utilization rate of the substrate 20.
[0030] Specifically, in one embodiment of the present application, Figure 1 , Figure 2 As shown, the transmission transfer assembly includes a roller 120 , which is rotatably disposed on the other side of the carrier 10 , and the coating liquid is transferred by the rotation of the roller 120 .
[0031] The roller 120 is located below the carrier 10 and is used to accompany the film and extend the width of the substrate 20. The roller rotates along the rotation direction R, and the excess coating liquid on the substrate 20 flows to the surface of the roller 120. The roller 120 rotates to rotate the surface with the coating liquid downward and is cleaned by the cleaning component. The cleaned surface of the roller 120 is then rotated back to a position close to the substrate 20, and the excess coating liquid is transferred in this reciprocating manner.
[0032] The cleaning component includes a cleaning chamber 13, which is provided with an opening so that the bottom of the roller 120 can extend into the cleaning chamber 13 through the opening; a cleaning nozzle 15 and a drying nozzle 14 are also provided in the cleaning chamber 13 to clean and dry the coating liquid on the surface of the roller 120 that extends into the cleaning chamber 13.
[0033] Figure 1In the figure, an opening is formed at the upper end of the cleaning chamber 13, and the cleaning chamber 13 forms a semi-closed chamber. The bottom of the roller 120 extends into the cleaning chamber 13 through the opening, and the cleaning chamber 13 serves to isolate the cleaning solvent and the gas; the cleaning nozzle 15 in the cleaning chamber 13 sprays the solvent or the second fluid to the roller 120, so as to clean the roller 120; after the cleaning is completed, the solvent remaining on the surface of the roller 120 is blown dry and cleaned by the blow-dry nozzle 14, so as to speed up the cleaning speed of the roller 120.
[0034] Furthermore, the substrate 20 and the stage 10 move synchronously along the output direction F2 perpendicular to the film forming assembly 11, and the deviation between the linear speed of the output assembly and the moving speed of the substrate 20 is within ±20%. Figure 1 The intermediate film forming assembly 11 sprays the coating liquid downward, and the substrate 20 and the stage 10 move in the right direction.
[0035] In this embodiment, the roller 120 is fixed and only rotates. During the film forming process, the linear speed of the roller 120 and the moving speed of the substrate 20 and the stage 10 are kept within ±20%, and the height deviation between the highest point of the roller 120 and the highest point of the substrate 20 is within ±300um.
[0036] There are two groups of transmission and transfer components, which are respectively arranged on both sides of the moving direction F1 of the substrate 20. Correspondingly, there are also two groups of cleaning components, which correspond to the transmission and transfer components one by one. When the two groups of rollers 120 are symmetrically arranged on both sides of the substrate 20, the distance between the inner side of the roller 120 close to the substrate 20 and the edge of the substrate 20 is less than 15um.
[0037] In addition, in order to fully cover the substrate 20 with the film layer 21, in the film forming direction F3, the film forming width of the film forming assembly 11 is larger than the width of the substrate 20, and the excess coating liquid will be transferred to the surface of the roller 120. The amount of coating liquid transferred to the roller 120 depends on the film forming width of the film forming assembly 11 and the size of the substrate 20. The film forming direction F3, the output direction F2, and the moving direction F1 of the substrate 20 are perpendicular to each other. Figure 1 and Figure 2 The moving direction F1 of the substrate 20, the output direction F2 of the film forming assembly 11, and the film forming direction F3 are shown in FIG. 1 , wherein the film forming width, the width of the substrate 20, and the width of the transmission assembly all refer to Figure 2 The respective vertical dimensions in the film-forming direction F3.
[0038] In this embodiment, the film forming width of the film forming assembly 11 is ≤ (width of the substrate 20 + 2×width of the transmission and transfer assembly). The width of the transmission and transfer assembly refers to the width of a single roller 120 distributed on one side of the substrate 20 .
[0039] The coating liquid transferred to the surface of the roller 120 will enter the semi-enclosed cleaning chamber 13 as the roller 120 rotates. The cleaning chamber 13 contains a cleaning nozzle 15 for spraying a cleaning solvent and a blow-drying nozzle 14. The cleaning nozzle 15 can spray a solvent or a two-fluid containing a solvent to dissolve and remove the coating liquid on the roller 120, and the blow-drying nozzle 14 can blow away the residual solvent and coating liquid mixture on the roller 120 and perform simple drying at the same time. In addition, a waste liquid collection and exhaust device (not shown in the figure) is also provided in the cleaning chamber 13 to meet environmental protection requirements.
[0040] As the roller 120 rotates, the cleaned surface of the roller 120 rotates under the film forming assembly 11 to continue to carry excess coating liquid. In this case, the entire width of the substrate 20 is covered by the coating liquid, achieving a 100% utilization effect of the substrate 20. Excess coating liquid is transferred to the cleaning chamber 13 as the roller 120 rotates and is removed.
[0041] Similarly, in another embodiment of the present application, the transmission transfer component is presented in the form of a transmission belt 121; specifically, please refer to Figure 3 , Figure 4 As shown, the transmission transfer component includes multiple pulleys 122 and a transmission belt 121 arranged between the multiple pulleys 122. The transmission belt 121 transmits along the direction of the carrier 10 and the cleaning component in sequence. The transmission belt 121 transmits along the transmission direction F4, and the coating liquid is transferred through the transmission of the transmission belt 121.
[0042] For example, the present application sets three pulleys 122 to form a triangular arrangement, and the three pulleys 122 are connected by a transmission belt 121, wherein two pulleys 122 are horizontally located below the substrate 20, so that the transmission belt 121 between the two horizontal pulleys 122 is horizontally arranged to receive excess coating liquid on the substrate 20; the excess coating liquid is transferred by the transmission of the transmission belt 121.
[0043] In this embodiment, the cleaning component includes a cleaning chamber 13, and the cleaning chamber 13 is respectively provided with an inlet and an outlet along the transmission direction F4 of the conveyor belt 121, so that the conveyor belt 121 can be transmitted through the cleaning chamber 13 through the inlet and the outlet; the cleaning chamber 13 is also respectively provided with two groups of cleaning nozzles 15 and drying nozzles 14 located on both sides of the conveyor belt 121 to clean and dry the coating liquid on the surface of the conveyor belt 121 inserted therein.
[0044] The conveyor belt 121 passes through the cleaning chamber and is transmitted between the three pulleys 122. After the conveyor belt 121 receives the excess coating liquid under the substrate 20, when it is transmitted to the cleaning chamber, the two groups of cleaning nozzles 15 and drying nozzles 14 in the cleaning chamber clean and dry the conveyor belt 121, and then the clean conveyor belt 121 continues to be transmitted to the bottom of the substrate 20 to receive the excess coating liquid.
[0045] In this embodiment, except that the transmission belt 121 and the pulley 122 are used to replace the roller 120 and the structure of the cleaning component is slightly different, the remaining settings can refer to the settings of the aforementioned roller 120 and will not be repeated here.
[0046] In addition to transferring the coating liquid in the film forming assembly 11 onto the substrate 20 to form a film layer 21 on the substrate 20 (which may be referred to as process one), another situation is that the film layer 21 is formed again after the existing film layer 21 or the substrate 20 is processed by the film forming assembly 11 (which may be referred to as process two). In this case, taking the roller 120 as an example, the diameter of the roller 120 in process two is ≥ the diameter of the roller 120 in process one, so as to meet the process requirements of the film forming assembly 11. The rest of the settings of process two are the same as process one.
[0047] Under process two conditions, the film forming width of the film forming assembly 11 is larger than the width of the substrate 20, in order to ensure the processing effect of the film layer 21 process, such as the uniformity of the entire film layer 21, and the rest is the same as process one.
[0048] Because the film layer 21 process can be divided into two accompanying film action modes according to whether there is liquid transferred to the substrate 20 to be processed or the surface of the film layer 21 to be processed. For process one, in the two embodiments of the roller 120 and the conveyor belt 121, the roller 120 and the conveyor belt 121 may not rotate, or even be replaced by a stationary structural block. In process two, the action of the two embodiments of the roller 120 and the conveyor belt 121 is the same as that of process one, and the description is the same, so it will not be described in detail here.
[0049] Among them, the film-forming component 11 under process one conditions includes a slit coating head, a scraper, a spray and other mechanisms; the film-forming component 11 under process two conditions includes a UV surface treatment component, a Plasma surface treatment component, an air knife drying component, a spray component and the like.
[0050] Figure 5 A schematic diagram of selecting different processes is shown, and the selection can be made according to the type of film-forming component 11.
[0051] In summary, the film-forming device provided in the embodiment of the present application solves the problems of difficulty in controlling the overlap of the boundary of the film layer 21 of the substrate 20 with the boundary of the substrate 20 in the wet film-forming process, contamination of the substrate 20, low utilization rate of the substrate 20 caused by the shearing operation of the substrate 20, etc. by means of the roller 120 and the conveyor belt 121 accompanying film, and realizes the online cleaning of the residual coating liquid. It is suitable for the surface treatment process & pre-coating process of the substrate 20, and the boundary problem of the film layer 21 in the process before film formation; and the drying & annealing & solvent treatment of the film layer 21, such as the boundary problem of the film layer 21 in the treatment process of the film layer 21 after film formation; in addition, the roller 120 and the conveyor belt 121 can be recycled without adding other accompanying films or mask cleaning and placing steps; they can also be applied separately or simultaneously to the process before film formation (process one) and the process after film formation (process two), so that the film-forming device provided in the embodiment of the present application has a wide range of applications and high practicality.
[0052] The above description is only an embodiment of the present application and is not intended to limit the protection scope of the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims
1. A film forming device, characterized in that: include: A carrier for carrying a substrate, a film-forming component is arranged on one side of the carrier, the film-forming component and the substrate are located on the same side of the carrier, the film-forming component is used to output a coating liquid to the surface of the substrate on the carrier to form a film layer on the surface of the substrate; a transmission and transfer component and a cleaning component are arranged on the other side of the carrier, the transmission and transfer component is used to transfer excess coating liquid on the substrate to the cleaning component, and the cleaning component cleans the coating liquid on the transmission and transfer component.
2. The film forming device according to claim 1, characterized in that: The transmission and transfer component includes a roller, which is rotatably arranged on the other side of the carrier, and the coating liquid is transferred by the rotation of the roller.
3. The film forming device according to claim 2, characterized in that: The cleaning component includes a cleaning chamber, which is provided with an opening so that the bottom of the roller can extend into the cleaning chamber through the opening; a cleaning nozzle and a drying nozzle are also provided in the cleaning chamber to clean and dry the coating liquid on the surface of the roller.
4. The film forming device according to claim 1, characterized in that: The transmission transfer component includes a plurality of pulleys and a transmission belt arranged between the plurality of pulleys. The transmission belt is sequentially transmitted along the direction of the carrier and the cleaning component, and the coating liquid is transferred through the transmission of the transmission belt.
5. The film forming device according to claim 4, characterized in that: The cleaning component includes a cleaning chamber, which is provided with an inlet and an outlet along the transmission direction of the conveyor belt, so that the conveyor belt can be transmitted through the inlet and the outlet through the cleaning chamber; the cleaning chamber is also provided with two groups of cleaning nozzles and drying nozzles located on both sides of the conveyor belt, so as to clean and dry the coating liquid on the surface of the conveyor belt inserted therein.
6. The film forming device according to any one of claims 1 to 5, characterized in that: The substrate and the carrier move synchronously along an output direction perpendicular to the film forming component, and the deviation between the linear speed of the transmission and transfer component during movement and the moving speed of the substrate is within ±20%.
7. The film forming device according to claim 6, characterized in that: In the output direction of the film forming component, the height deviation between the highest point of the transmission transfer component and the highest point of the substrate is within ±300um.
8. The film forming device according to claim 6, characterized in that: In the film forming direction, the film forming width of the film forming component is larger than the substrate width of the substrate, and the film forming width is ≤ (the substrate width + 2×the width of the transmission and transfer component); the film forming direction, the output direction and the moving direction of the substrate are perpendicular to each other.
9. The film forming device according to claim 8, characterized in that: The transmission and transfer components and the cleaning components have two corresponding groups, which are respectively arranged on both sides of the moving direction of the substrate.
10. The film forming device according to claim 9, characterized in that: The distance between the inner side of the transmission transfer component close to the substrate and the edge of the substrate is less than 15 um.