Multipurpose movable sample table and vacuum equipment

Abstract

The utility model discloses a multipurpose movable sample table and vacuum equipment, which relates to the technical field of vacuum equipment and comprises a power component, a transmission component and a sample table component. The power assembly is located outside the vacuum chamber. The transmission assembly comprises a rotating rod and a first conical transmission gear. One motor is connected with the first conical transmission gear and used for driving the first conical transmission gear to move in the axial direction of the rotating rod, and the other motor is connected with the rotating rod and used for driving the first conical transmission gear to rotate in the circumferential direction of the rotating rod. According to the multipurpose movable sample table provided by the embodiment of the utility model, one motor drives the whole sample table assembly to do linear motion, and the other motor drives the sample support in the sample table assembly to do rotary motion, so that the linear motion and the rotary motion of the sample support are completed on the premise that a vacuum motor is not used; and a plurality of different coating processes are carried out under the condition of not breaking vacuum.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum equipment, in particular to a multi-purpose movable sample table and vacuum equipment. Background Art

[0002] In the production and processing of various high-precision devices such as semiconductor chips and semiconductor epitaxial wafers, they are all required to be completed in a vacuum environment. The vacuum environment requires high cleanliness, isolation of oxygen and moisture, and high-precision operation. In the process of processing samples in a vacuum environment, it is inevitable to transfer, move or return the samples, which requires a relatively complex transmission mechanical structure to be set up in the vacuum chamber that maintains the vacuum environment.

[0003] Therefore, it is urgent to design a mechanical structure that can perform both linear motion and rotation and is driven by an ordinary motor outside the vacuum chamber to achieve linear movement and rotational motion of the sample stage. Utility Model Content

[0004] The embodiments of the utility model provide a multi-purpose movable sample stage and a vacuum device to at least solve the problem of achieving linear movement and rotation of the sample stage without using a vacuum motor;

[0005] In order to achieve the above object, the embodiment of the utility model adopts the following technical solution:

[0006] In the first aspect, the utility model proposes a multi-purpose movable sample stage, which is applied to vacuum equipment, the vacuum equipment includes a vacuum chamber, and the multi-purpose movable sample stage includes a power assembly, a transmission assembly and a sample stage assembly; the power assembly is located outside the vacuum chamber and includes at least two motors; the transmission assembly is located in the vacuum chamber and includes a rotating rod and a first conical transmission gear; the sample stage assembly includes a sample holder, and the sample holder is used to carry a substrate; wherein, one motor is connected to the first conical transmission gear and is used to drive the first conical transmission gear to move axially along the rotating rod, and the other motor is connected to the rotating rod and is used to drive the first conical transmission gear to rotate circumferentially along the rotating rod, and the sample holder is meshed with the first conical transmission gear and moves or rotates synchronously with the first conical transmission gear.

[0007] The multi-purpose movable sample stage provided by the embodiment of the utility model has two motors arranged outside the vacuum chamber through flexible and ingenious design. One motor drives the overall linear motion of the sample stage assembly, and the other motor drives the rotational motion of the sample holder in the sample stage assembly, thereby achieving the linear motion and rotational motion of the sample holder without using a vacuum motor, better matching the process of coating multi-layer composite films, operating the vacuum once, and performing a variety of different coating processes without breaking the vacuum.

[0008] In some possible designs, a linear moving assembly is also included, which includes a concave frame, a screw rod passing through the concave frame, and a sliding sleeve moving along the length direction of the screw rod, the sliding sleeve is threadedly connected to the rotating rod, and a first bevel driven gear rotating synchronously with the screw rod is arranged at one end of the screw rod; the power assembly also includes a first bevel driving gear installed at the driving end of one of the motors, and the first bevel driving gear is meshed and connected with the first bevel driven gear; wherein, a motor drives the screw rod to rotate through the first bevel driving gear-first bevel driven gear combination, and the sliding sleeve moves along the length direction of the rotating rod. With such a configuration, the linear movement of the sliding sleeve along the length direction of the screw rod is achieved through the screw structure, thereby achieving the linear movement of the sample holder.

[0009] Furthermore, the linear motion assembly further comprises at least one optical axis, the optical axis is arranged in parallel with the lead screw, and the sliding sleeve is slidably connected with the optical axis, thereby improving the stability of the sliding sleeve during movement and preventing the sliding sleeve from rotating.

[0010] In some possible designs, the transmission assembly further includes an L-shaped plate and a shaft sleeve, wherein the vertical portion of the L-shaped plate is sleeved on the outer wall of the rotating rod, and the side wall of the L-shaped plate is connected to the sliding sleeve; the shaft sleeve is sleeved on the outer wall of the rotating rod and is key-connected to the rotating rod, and one end of the shaft sleeve is connected to the vertical portion of the L-shaped plate, and the other end is connected to the first bevel transmission gear. In this way, the synchronous linear motion of the first bevel transmission gear and the sliding sleeve is achieved.

[0011] In some possible designs, the power assembly also includes a second bevel drive gear, which is installed on the driving end of another motor; the transmission assembly also includes a transmission rod, a cylinder, a second bevel transmission gear and a first external gear, the transmission rod is vertically placed along the height direction of the vacuum chamber, and the transmission rod has two ends; the cylinder is sleeved on the outer wall of the transmission rod and connected to the horizontal part of the L-shaped plate; the second bevel transmission gear is synchronously rotated and connected to one end of the transmission rod, and the second bevel transmission gear is meshed and connected with the first bevel transmission gear; the first external gear is synchronously rotated and connected to the other end of the transmission rod; the sample stage assembly also includes a turntable and a second external gear, the turntable is connected to the sample holder hook lock; the inner peripheral wall of the second external gear is fixedly connected to the outer peripheral wall of the turntable; wherein the first external gear is meshed and connected with the second external gear, the second bevel drive gear drives the rotating rod to rotate through the second bevel driven gear, the rotating rod drives the second bevel transmission gear to rotate through the first bevel transmission gear, the second bevel transmission gear drives the first external gear to rotate through the transmission rod, the first external gear drives the turntable to rotate through the second external gear, and the turntable drives the sample holder to rotate in the horizontal direction. Based on the above mechanical design, the sample holder can achieve both linear motion and rotational motion.

[0012] In some possible designs, the sample stage assembly also includes a base plate, a support, a rotating cylinder and a bearing. The base plate is fixedly connected to the sliding sleeve; the support is arranged in a direction perpendicular to the base plate; the rotating cylinder is sleeved on the outside of the support, and the rotating cylinder is fixedly connected to the turntable; the inner ring of the bearing is connected to the outer peripheral wall of the support by interference fit, and the outer ring of the bearing is connected to the inner peripheral wall of the rotating cylinder by interference fit. The purpose is to better cooperate with the rotation of the sample holder.

[0013] Furthermore, the sample stage assembly also includes a heater and a heat shield, the heater is arranged inside the pillar, and the heating section of the heater extends into the turntable to heat the sample holder; the heat shield has a heat insulation space, the heater is located in the heat insulation space, the heat insulation space has an opening, and the opening faces the sample holder, and the heat shield is fixedly connected to the pillar. Such a partition arrangement prevents the components in the upper half of the sample stage assembly from being damaged by high temperature.

[0014] Furthermore, the sample stage assembly also includes hook locks and lock grooves, at least two hook locks are arranged on the outer peripheral wall of the turntable; at least two lock grooves are opened on the outer wall of the sample holder; the hook locks and the lock grooves are detachably connected.

[0015] In some possible designs, the transmission assembly also includes a protective cover and a connecting rod. The protective cover has a accommodating space and is sleeved on the outside of the first external gear and the second external gear. One end of the connecting rod is connected to the protective cover, and the other end is connected to the support plate.

[0016] In the second aspect, the utility model also provides a vacuum device, including a multi-purpose movable sample stage as any of the above technical solutions, and also including a vacuum chamber, a flange cover, a baffle and a driving cylinder, the vacuum chamber has at least three workstations in the extension direction, and the sample holder is switched between the three workstations; the flange cover is connected to the opening of the vacuum chamber in a sealed manner; at least three baffles are arranged in the coating section of the workstation; the driving cylinder is arranged on the outer wall of the flange cover away from the vacuum chamber, the driving end of the driving cylinder extends into the vacuum chamber and is connected to the baffle, and the driving baffle rotates in the horizontal direction to shield the sample holder or separate from the sample holder in the vertical direction.

[0017] The vacuum equipment provided by the embodiment of the utility model integrates multiple processes. Under the condition of not breaking the vacuum, multiple different coating processes can be performed without affecting each other, thereby realizing the process of coating a multi-layer composite film. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a first-view stereoscopic image of the multi-purpose movable sample stage according to an embodiment of the utility model;

[0019] Figure 2 This is a three-dimensional diagram of a linear moving assembly according to an embodiment of the utility model;

[0020] Figure 3This is a three-dimensional diagram of the transmission assembly of the embodiment of the utility model;

[0021] Figure 4 This is a cross-sectional view of a sample stage assembly according to an embodiment of the utility model;

[0022] Figure 5 This is a second perspective stereoscopic image of the multi-purpose movable sample stage according to an embodiment of the utility model;

[0023] In the figure:

[0024] 1. Flange cover;

[0025] 2. Sample stage assembly, 21. Base plate, 22. Pillar, 23. Rotating cylinder, 24. Turntable, 25. Second outer gear, 26. Hook lock, 27. Sample holder, 28. Lock slot, 29. Heater, 300. First heat shield, 301. Second heat shield, 302. Third heat shield;

[0026] 3. Linear moving assembly, 31. First cone driven gear, 32. Lead screw, 33. Sliding sleeve, 34. First optical axis, 35. Second optical axis, 36. Nut, 37. First frame, 38. Second frame;

[0027] 4. Transmission assembly, 41. second bevel driven gear, 42. first bevel transmission gear, 43. bushing, 44. L-shaped plate, 45. rotating rod, 46. supporting plate, 47. cylinder, 48. transmission rod, 49. second bevel transmission gear, 410. first external gear, 411. connecting rod, 412. protective cover;

[0028] 5. Power assembly, 51. First motor, 52. First bevel drive gear, 53. Second motor, 54. Second bevel drive gear;

[0029] 6. First driving cylinder, 7. First baffle, 8. Second driving cylinder, 9. Second baffle, 10. Third driving cylinder, 11. Third baffle. DETAILED DESCRIPTION

[0030] The embodiments of the utility model are described in detail below with reference to the accompanying drawings.

[0031] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0032] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "plurality" means two or more.

[0033] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In the present disclosure, unless otherwise specified, directional terms such as "axial", "circumferential", and "radial" are generally defined relative to the rotation axis of the rotor in the drive motor, and "inner" and "outer" refer to the inside and outside of the corresponding component contours. The use of terms such as "first", "second", etc. is intended to distinguish different components and does not have order and importance. In addition, in the following description, when referring to the drawings, unless otherwise explained, the same figure numbers in different drawings represent the same or similar elements.

[0035] In the current production design, multiple devices are integrated into one device, and multiple workstations are set in the vacuum chamber. Sample injection, transfer, single-target sputtering, multi-target sputtering, evaporation, etc. are integrated into one device. The cover is opened once, and the vacuum is operated once. A variety of different coating processes are carried out without breaking the vacuum. In the production process of coating multi-layer composite films, in order to meet the above process requirements, the main means currently used is to arrange a linear motor outside the vacuum chamber to control the linear motion of the sample stage, and arrange a vacuum motor inside the vacuum chamber to realize the rotational motion of the sample stage. However, the cost of the vacuum motor is relatively high, and if the vacuum motor fails during the production process, it will pollute the entire vacuum chamber;

[0036] Based on the above, the multi-purpose movable sample stage provided by the embodiment of the utility model is applied to vacuum equipment, and the vacuum equipment includes a vacuum chamber, see Figure 1The multi-purpose movable sample stage includes a power assembly 5, a transmission assembly 4 and a sample stage assembly 2; the power assembly 5 is located outside the vacuum chamber and includes at least two motors; the transmission assembly 4 is located inside the vacuum chamber and includes a rotating rod 45 and a first conical transmission gear 42; the sample stage assembly 2 includes a sample holder 27, and the sample holder 27 is used to carry a substrate; wherein, one motor is connected to the first conical transmission gear 42 and is used to drive the first conical transmission gear 42 to move axially along the rotating rod 45, and the other motor is connected to the rotating rod 45 and is used to drive the first conical transmission gear 42 to rotate circumferentially along the rotating rod 45, and the sample holder 27 is meshed with the first conical transmission gear 42 and moves or rotates synchronously with the first conical transmission gear 42.

[0037] The multi-purpose movable sample stage provided by the embodiment of the utility model has two motors (the first motor 51 and the second motor 53) arranged outside the vacuum chamber through a flexible and clever design. The first motor 51 drives the overall linear motion of the sample stage assembly 2, and the second motor 53 drives the sample holder 27 in the sample stage assembly 2 to rotate, thereby achieving the linear motion and rotational motion of the sample holder 27 without using a vacuum motor, better matching the process of coating multi-layer composite films, operating a vacuum once, and performing a variety of different coating processes without breaking the vacuum. It should be noted that the first motor 51 and the second motor 53 of the utility model both use ordinary variable frequency motors on the market, which have lower costs than vacuum motors.

[0038] The following is a detailed explanation of the linear motion of the sample stage assembly 2 mentioned above. Figure 2 , exemplarily, it also includes a linear moving component 3, the linear moving component 3 includes a concave frame, a screw rod 32 inserted in the concave frame and a sliding sleeve 33 moving along the length direction of the screw rod 32, the sliding sleeve 33 is threadedly connected to the rotating rod 45, and a first bevel driven gear 31 that rotates synchronously with the screw rod 32 is arranged at one end of the screw rod 32; the power component 5 also includes a first bevel driving gear 52, which is installed at the driving end of one of the motors, and the first bevel driving gear 52 is meshed and connected with the first bevel driven gear 31; wherein the first motor 51 drives the screw rod 32 to rotate through the first bevel driving gear 52-first bevel driven gear 31 combination, and the sliding sleeve 33 moves along the length direction of the rotating rod 45. More specifically, the concave frame is composed of a first frame 37 and a second frame 38, wherein the first frame 37 is an L-shaped frame, and is fixedly connected to the second frame 38 to form the concave frame; a nut 36 is embedded in the inner wall of the sliding sleeve 33, and the nut 36 is threadedly connected to the screw rod 32, so that when the screw rod 32 rotates, the nut 36 performs linear motion under the action of thread engagement;

[0039] The above describes the linear movement of the sliding sleeve 33. In order to improve the stability of the sliding sleeve 33 during movement and prevent itself from rotating, please continue to refer to Figure 2 The linear moving assembly 3 further includes at least one optical axis, which is arranged in parallel with the lead screw 32, and the sliding sleeve 33 is slidably connected with the optical axis. In this embodiment, there are two optical axes, namely, a first optical axis 34 and a second optical axis 35. Two through holes matching the first optical axis 34 and the second optical axis 35 are provided in the length direction of the sliding sleeve 33. The first optical axis 34 and the second optical axis 35 pass through the sliding sleeve 33 through the through holes, further limiting the trajectory of the linear motion of the sliding sleeve 33, avoiding its own rotation during the movement, and further improving the stability during the movement.

[0040] In order to achieve the synchronous linear motion of the first bevel transmission gear 42 and the sliding sleeve 33, please continue to refer to Figure 2 , illustratively, the transmission assembly 4 further includes an L-shaped plate 44 and a shaft sleeve 43, the vertical portion of the L-shaped plate 44 is sleeved on the outer wall of the rotating rod 45, and the side wall of the L-shaped plate 44 is connected to the sliding sleeve 33; the shaft sleeve 43 is sleeved on the outer wall of the rotating rod 45 and key-connected to the rotating rod 45, one end of the shaft sleeve 43 is connected to the vertical portion of the L-shaped plate 44, and the other end is connected to the first bevel transmission gear 42. When the sliding sleeve 33 moves linearly, the sliding sleeve 33 drives the shaft sleeve 43 to slide along the outer wall of the rotating rod 45 through the L-shaped plate 44.

[0041] The linear motion of the sample holder 27 is described above. The rotation of the sample holder 27 is explained below. For example, please continue to refer to Figure 1 The power assembly 5 also includes a second bevel drive gear 54, which is mounted on the driving end of the second motor 53; please continue to refer to Figure 3The transmission assembly 4 also includes a transmission rod 48, a cylinder 47, a second bevel transmission gear 49 and a first external gear 410. The transmission rod 48 is placed vertically along the height direction of the vacuum chamber, and the transmission rod 48 has two ends; the cylinder 47 is sleeved on the outer wall of the transmission rod 48 and is connected to the horizontal part of the L-shaped plate 44; the second bevel transmission gear 49 is synchronously rotated and connected to one end of the transmission rod 48, and the second bevel transmission gear 49 is meshed and connected with the first bevel transmission gear 42; the first external gear 410 is synchronously rotated and connected to the other end of the transmission rod 48; the sample stage assembly 2 also includes a turntable 24 and a second external gear 25, the turntable 24 is hooked and locked with the sample holder 27; the inner peripheral wall of the second outer gear 25 is fixedly connected with the outer peripheral wall of the turntable 24; wherein, the first outer gear 410 is meshedly connected with the second outer gear 25, the second bevel driving gear 54 drives the rotating rod 45 to rotate through the second bevel driven gear 41, the rotating rod 45 drives the second bevel transmission gear 49 to rotate through the first bevel transmission gear 42, the second bevel transmission gear 49 drives the first outer gear 410 to rotate through the transmission rod 48, the first outer gear 410 drives the turntable 24 to rotate through the second outer gear 25, and the turntable 24 drives the sample holder 27 to rotate in the horizontal direction.

[0042] The sample stage assembly 2 is described in detail below. In order to cooperate with the rotation of the sample holder 27, see Figure 4 The sample stage assembly 2 further includes a base plate 21, a support column 22, a rotating cylinder 23 and a bearing. The base plate 21 is fixedly connected to the sliding sleeve 33; the support column 22 is arranged in a direction perpendicular to the base plate 21; the rotating cylinder 23 is sleeved on the outside of the support column 22, and the rotating cylinder 23 is fixedly connected to the rotating disk 24; the inner ring of the bearing is connected to the outer peripheral wall of the support column 22 by interference fit, and the outer ring of the bearing is connected to the inner peripheral wall of the rotating cylinder 23 by interference fit. The second outer gear 25 drives the rotating disk 24 to rotate, and the rotating disk 24 drives the sample holder 27 to rotate in the horizontal direction. At the same time, the rotating disk 24 drives the rotating cylinder 23 to rotate.

[0043] To prevent the upper part of the sample stage assembly 2 from being damaged by high temperature, see Figure 4 , illustratively, the sample stage assembly 2 further includes a heater 29 and a heat shield, the heater 29 is arranged inside the pillar 22, and the heating section of the heater 29 extends into the turntable 24 to heat the sample holder 27; the heat shield has a heat insulation space, the heater 29 is located in the heat insulation space, the heat insulation space has an opening, and the opening faces the sample holder 27, and the heat shield is fixedly connected to the pillar 22. In this embodiment, the heat shield is arranged in three layers, with a spacing between them, and the three layers of heat shields are respectively a first heat shield 300, a second heat shield 301 and a third heat shield 302, and the heat generated by the heater 29 is transferred to the sample holder 27 to heat the substrate.

[0044] After production is completed, the sample holder 27 is usually disassembled to separate the substrate. In this embodiment, the substrate is bonded to the lower surface of the sample holder 27 by high temperature glue. Figure 4 The sample stage assembly 2 further includes hook locks 26 and lock slots 28. At least two hook locks 26 are arranged on the outer peripheral wall of the turntable 24. At least two lock slots 28 are provided on the outer wall of the sample holder 27. The hook locks 26 and the lock slots 28 are detachably connected. In this embodiment, the number of hook locks 26 and the lock slots 28 are both two, and they are symmetrically arranged.

[0045] In order to prevent the first outer gear 410 and the second outer gear 25 from rotating and causing the materials to contaminate the coating quality of the substrate, please continue to refer to Figure 1 The transmission assembly 4 also includes a protective cover 412 and a connecting rod 411. The protective cover 412 has a accommodating space and is sleeved on the outside of the first external gear 410 and the second external gear 25; one end of the connecting rod 411 is connected to the protective cover 412, and the other end is connected to the support plate 46.

[0046] See also Figure 5 The embodiment of the utility model also provides a vacuum device, including a multi-purpose movable sample stage as any of the above technical solutions, and also includes a vacuum chamber, a flange cover 1, a baffle and a driving cylinder. The vacuum chamber has at least three workstations in the extension direction, and the sample holder 27 switches positions in the three workstations; the flange cover 1 is connected to the opening of the vacuum chamber in a sealed manner; at least three baffles are set up in the coating section of the workstation; the driving cylinder is set on the outer wall of the flange cover 1 away from the vacuum chamber, and the driving end of the driving cylinder extends into the vacuum chamber and is connected to the baffle, and the driving baffle rotates in the horizontal direction to shield the sample holder 27 or separate from the sample holder 27 in the vertical direction. In this embodiment, there are three workstations, three driving cylinders, namely the first driving cylinder 6, the second driving cylinder 8 and the third driving cylinder 10, and three baffles, namely the first baffle 7, the second baffle 9 and the third baffle 11. The first driving cylinder 6 drives the first baffle 7 to rotate to shield the sample holder 27 or separate from the sample holder 27 in a vertical direction. The second driving cylinder 8 drives the second baffle 9 to rotate to shield the sample holder 27 or separate from the sample holder 27 in a vertical direction. The third driving cylinder 10 drives the third baffle 11 to rotate to shield the sample holder 27 or separate from the sample holder 27 in a vertical direction. The purpose is to prevent the substrate from being contaminated in the pre-coating stage, thereby ensuring the quality of the coating.

[0047] The vacuum equipment provided by the embodiment of the utility model integrates multiple processes. Under the condition of not breaking the vacuum, multiple different coating processes can be performed without affecting each other, thereby realizing the process of coating a multi-layer composite film.

[0048] In the description of this specification, specific features, structures, materials or characteristics may be combined in an appropriate manner in any one or more embodiments or examples.

[0049] The above are only specific implementations of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A multi-purpose movable sample stage, applied to a vacuum device, wherein the vacuum device comprises a vacuum chamber, characterized in that: The multi-purpose movable sample stage comprises: A power assembly, located outside the vacuum chamber, comprising at least two motors; A transmission assembly, located in the vacuum chamber, comprising a rotating rod and a first conical transmission gear; A sample stage assembly, including a sample holder, for carrying a substrate; Among them, one of the motors is connected to the first conical transmission gear and is used to drive the first conical transmission gear to move axially along the rotating rod, and the other motor is connected to the rotating rod and is used to drive the first conical transmission gear to rotate circumferentially along the rotating rod. The sample holder is meshed with the first conical transmission gear and moves or rotates synchronously with the first conical transmission gear.

2. The multi-purpose movable sample stage according to claim 1, characterized in that: It also includes a linear moving assembly, which includes a concave frame, a screw rod passing through the concave frame, and a sliding sleeve moving along the length direction of the screw rod, wherein the sliding sleeve is threadedly connected to the rotating rod, and a first cone driven gear rotating synchronously with the screw rod is provided at one end of the screw rod; The power assembly further comprises a first bevel drive gear mounted on a driving end of one of the motors, the first bevel drive gear being meshedly connected with the first bevel driven gear; Wherein, one of the motors drives the screw to rotate through a first bevel driving gear-first bevel driven gear combination, and the sliding sleeve moves along the length direction of the rotating rod.

3. The multi-purpose movable sample stage according to claim 2, characterized in that: The linear motion assembly further comprises at least one optical axis, the optical axis is arranged in parallel with the lead screw, and the sliding sleeve is slidably connected with the optical axis.

4. The multi-purpose movable sample stage according to claim 3, characterized in that: The transmission assembly also includes: An L-shaped plate, wherein the vertical portion of the L-shaped plate is sleeved on the outer wall of the rotating rod, and the side wall of the L-shaped plate is connected to the sliding sleeve; A shaft sleeve is sleeved on the outer wall of the rotating rod and is key-connected to the rotating rod. One end of the shaft sleeve is connected to the vertical portion of the L-shaped plate, and the other end is connected to the first bevel transmission gear.

5. The multi-purpose movable sample stage according to claim 4, characterized in that: The power assembly also includes: a second tapered drive gear mounted on the drive end of the other motor; The transmission assembly also includes: A transmission rod is placed vertically along the height direction of the vacuum chamber, and the transmission rod has two ends; A cylinder, sleeved on the outer wall of the transmission rod and connected to the horizontal part of the L-shaped plate; A second bevel transmission gear is synchronously rotatably connected to one end of the transmission rod, and the second bevel transmission gear is meshingly connected with the first bevel transmission gear; a first external gear, synchronously rotatably connected to the other end of the transmission rod; The sample stage assembly also includes: A turntable, the turntable is connected to the sample support hook lock; a second external gear, wherein the inner peripheral wall of the second external gear is fixedly connected to the outer peripheral wall of the rotating disk; The first external gear is meshed with the second external gear, the second bevel driving gear drives the rotating rod to rotate through the second bevel driven gear, the rotating rod drives the second bevel transmission gear to rotate through the first bevel transmission gear, the second bevel transmission gear drives the first external gear to rotate through the transmission rod, the first external gear drives the turntable to rotate through the second external gear, and the turntable drives the sample holder to rotate in the horizontal direction.

6. The multi-purpose movable sample stage according to claim 5, characterized in that: The sample stage assembly also includes: A base plate, wherein the base plate is fixedly connected to the sliding sleeve; A support column is arranged in a direction perpendicular to the substrate; A rotating cylinder is sleeved on the outside of the pillar and is fixedly connected to the rotating disk; A bearing, wherein the inner ring of the bearing is connected to the outer peripheral wall of the support by interference fit, and the outer ring of the bearing is connected to the inner peripheral wall of the rotating cylinder by interference fit.

7. The multi-purpose movable sample stage according to claim 6, characterized in that: The sample stage assembly also includes: A heater is disposed inside the pillar, and a heating section of the heater extends into the turntable to heat the sample holder; The heat insulation screen has a heat insulation space, the heater is located in the heat insulation space, the heat insulation space has an opening, and the opening faces the sample holder, and the heat insulation screen is fixedly connected to the support.

8. The multi-purpose movable sample stage according to claim 7, characterized in that: The sample stage assembly also includes: Hook locks, at least two hook locks are arranged on the outer peripheral wall of the rotating disk; Locking grooves, at least two locking grooves are provided on the outer wall of the sample holder; The hook lock is detachably connected to the lock slot.

9. The multi-purpose movable sample stage according to claim 8, characterized in that: The transmission assembly also includes: A protective cover having a containing space and sleeved on the outer sides of the first external gear and the second external gear; A connecting rod, one end of which is connected to the protective cover, and the other end of which is connected to the support plate.

10. A vacuum device, comprising the multi-purpose movable sample stage according to any one of claims 1 to 9, characterized in that: Also includes, A vacuum chamber, wherein the vacuum chamber has at least three working positions in the extension direction, and the sample holder switches positions at the three working positions; A flange cover, the flange cover is connected to the opening of the vacuum chamber in a sealing manner; Baffles, at least three baffles are set up in the coating section of the workstation; The driving cylinder is arranged on the outer wall of the flange cover away from the vacuum chamber, and the driving end of the driving cylinder extends into the vacuum chamber and is connected to the baffle plate, driving the baffle plate to rotate in the horizontal direction to shield the sample holder or separate from the sample holder in the vertical direction.

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