Modularized combined type coating equipment

Abstract

The utility model discloses modularized combined type coating equipment, and belongs to the technical field of coating process equipment. Comprising a plurality of A-surface coating chambers, a plurality of B-surface coating chambers and a transition cabin. The A surface coating chamber is used for coating the A surface of the film; the B surface coating chamber is used for coating the B surface of the film; the transition cabin is detachably connected with the A-side coating chambers and the B-side coating chambers in a sealed manner and is used for communicating any two A-side coating chambers, communicating any two B-side coating chambers between the A-side coating chambers and the B-side coating chambers and communicating any two B-side coating chambers; and at least two conveying channels are arranged in each of the A-side coating chamber and the B-side coating chamber, and are used for communicating with an unwinding chamber of coating equipment or communicating with a transition cabin or communicating with a winding chamber of the coating equipment. According to the utility model, any combination and splicing can be realized, and single-sided coating, double-sided coating, three-layer coating or more than three-layer coating can be realized, so that the purpose of flexibly changing the process according to requirements is realized, and the production cost is reduced.

Description

Technical Field

[0001] The utility model relates to a modular combined film coating device, belonging to the technical field of film coating process equipment. Background Art

[0002] The coating process is a process of applying a thin film or coating to the surface of an object to change its appearance, performance or other characteristics. This process is widely used in various industries, including manufacturing, electronics, optics, automobiles and packaging. Generally, coating equipment is required in the coating process to complete the coating process. Among them, the coating equipment is provided with an unwinding chamber, multiple chambers, multiple targeting rollers, and a winding chamber. The main function of the unwinding chamber is to drive each transfer roller to convey the film into the chamber through a motor. Coating sources are provided in multiple chambers for coating the film. The winding chamber is mainly used to wind up the film that has been coated. According to the number of coating layers and the number of coating times, the coating equipment can be divided into single-sided coating equipment, double-sided coating equipment, and multi-sided coating equipment.

[0003] At present, in double-sided coating equipment, especially double-sided winding vacuum coating equipment, whether it is magnetron sputtering coating or evaporation coating, it is basically based on the process of a single coating roller and a single coating source, which cannot meet the scenarios and fields where two or more multi-layer films need to be prepared on one side of the substrate. In addition, once the coating process of the current coating equipment is determined, it is difficult to improve the coating equipment according to changes in demand. For example: the coating source coating equipment is difficult to prepare three or more layers of coating films at a time (referring to multiple coatings on one side of the film), so it is necessary to break the vacuum, change the coating source, and change the structure of the coating equipment to perform secondary or more coatings. Therefore, a device that can flexibly change the process according to demand is needed. Utility Model Content

[0004] The technical problem to be solved by the utility model is to provide a modular combined coating equipment that can be arbitrarily combined and spliced ​​to achieve single-sided coating, double-sided coating, three-layer coating or more than three-layer coating without breaking the vacuum, changing the coating source, or changing the structure of the coating equipment, thereby achieving the purpose of flexibly changing the process according to demand and reducing production costs.

[0005] The technical problem to be solved by the utility model is achieved by adopting the following technical solutions:

[0006] The modular combined coating equipment includes: A-side coating chambers, a number of which are used to coat the A-side of the film;

[0007] B-side coating chambers, several, for coating the B-side of the film;

[0008] The transition chamber is detachably and hermetically connected to the A-side coating chamber and the B-side coating chamber, and is used to connect any two A-side coating chambers, between the A-side coating chamber and the B-side coating chamber, and any two B-side coating chambers;

[0009] The A-side coating chamber and the B-side coating chamber are each provided with at least two conveying channels for connecting to the unwinding chamber of the coating equipment or the transition cabin or the winding chamber of the coating equipment.

[0010] Preferably, one conveying channel of any one of the A-side coating chamber or the B-side coating chamber is connected to the unwinding chamber, and the other conveying channel is connected to the winding chamber, so that single-sided coating can be performed.

[0011] When coating is performed on either side A or side B of the film, a single-side coating process is achieved by selecting an A-side coating chamber that is effectively connected to the unwinding chamber and the winding chamber.

[0012] Preferably, any one of the A-side coating chambers has two conveying channels, one of which is connected to the unwinding chamber, and the other is connected to the transition chamber;

[0013] Any one of the B-side coating chambers has two conveying channels, one of which is connected to the transition chamber, and the other is connected to the winding chamber, so that double-sided coating can be performed.

[0014] When both the A side and the B side of the film need to be coated, a transition chamber is used to effectively connect an A side coating chamber with a B side coating chamber, thereby realizing the coating process for the A side and the B side.

[0015] Preferably, there are two A-side coating chambers and two B-side coating chambers, and three transition chambers, which are connected in sequence in the following order:

[0016] Unwinding room—A side coating room—transition cabin—B side coating room—transition cabin—B side coating room—transition cabin—winding room, which can coat the A side of the film twice and the B side of the film twice.

[0017] Preferably, there are three A-side coating chambers and three B-side coating chambers, and five transition chambers, which are connected in sequence in the following order:

[0018] Unwinding room—A side coating room—transition cabin—B side coating room—transition cabin—B side coating room—transition cabin—A side coating room—transition cabin—A side coating room—transition cabin—B side coating room—winding room, which can coat the A side and B side of the film three times.

[0019] Preferably, there are four A-side coating chambers and four B-side coating chambers, and seven transition chambers, which are connected in sequence in the following order:

[0020] Unwinding room—A side coating room—transition cabin—B side coating room—transition cabin—B side coating room—transition cabin—A side coating room—transition cabin—A side coating room—transition cabin—B side coating room—transition cabin—B side coating room—transition cabin—A side coating room—winding room, can coat both the A side and the B side of the film four times.

[0021] Preferably, a coating roller is provided at the center of the A-side coating chamber and the B-side coating chamber, and a coating source is provided below the coating roller, and the coating source can coat the thin film.

[0022] Preferably, a heating evaporation source is provided below the coating source.

[0023] The heated evaporation source can quickly evaporate the moisture in the coating material, so that the coating material can be quickly coated on the film and quickly formed, thereby preventing the coating material from falling off the film due to moisture.

[0024] Preferably, the A-side coating chamber, B-side coating chamber, unwinding chamber and winding chamber are all provided with a roller group consisting of a plurality of guide rollers arranged at different height positions in the direction of film input or output, for guiding the movement of the film.

[0025] Preferably, one of the guide rollers of the A-side coating chamber and the B-side coating chamber in the film input or output direction is a tension roller. By adjusting the position of the tension roller relative to the A-side coating chamber or the B-side coating chamber, the tension of the film on the guide roller can be adjusted, so that films of different thicknesses and tensions can be adapted, and at the same time, the film can be prevented from being broken during the transmission process.

[0026] The beneficial effects of the utility model are:

[0027] (1) Through the utility model, by utilizing different combinations of the A-side coating chamber, the B-side coating chamber, the transition chamber, the unwinding chamber, and the winding chamber, it is possible to achieve single-sided coating, double-sided coating, three-layer coating or more coating of the film. The assembly and disassembly are convenient, and each unit is interchangeable. There is no need to break the vacuum, replace the coating source, or change the structure of the coating equipment, thereby achieving the purpose of flexibly changing the process according to demand and reducing production costs.

[0028] (2) Through the utility model, a heating evaporation source is fixed below the coating source, which can quickly evaporate the moisture in the coating material, so that the coating material can be quickly coated on the film and quickly formed, thereby preventing the coating material from falling off the film due to moisture. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a structural schematic diagram of single-sided coating of the modular combined coating equipment of the utility model.

[0030] Figure 2It is a structural schematic diagram of double-sided coating of the modular combined coating equipment of the utility model.

[0031] Figure 3 This is a schematic diagram of the structure in which the utility model coats both sides of the film twice.

[0032] Figure 4 This is a schematic diagram of the structure in which the utility model performs three-time coating on both sides of the film.

[0033] Figure 5 This is a schematic diagram of the structure of the utility model in which the two sides of the film are coated four times.

[0034] Figure 6 It is a schematic structural diagram of an embodiment of the modular combined coating equipment of the utility model.

[0035] In the figure: 1. unwinding chamber, 2. unwinding system, 3. film, 4. guide roller, 5. gate valve, 6. A-side coating chamber No. 1, 7. tension roller, 8. coating roller, 9. coating source, 10. transition cabin, 11. B-side coating chamber No. 1, 12. B-side coating chamber No. 2, 13. winding chamber, 14. winding system, 15. A-side coating chamber No. 2, 16. A-side coating chamber No. 3, 17. A-side coating chamber No. 4, 18. B-side coating chamber No. 3, 19. B-side coating chamber No. 4. DETAILED DESCRIPTION

[0036] In order to make the technical means, creative features, objectives and effects of the present invention easier to understand, the present invention is further described below in conjunction with specific embodiments.

[0037] Example

[0038] like Figure 1As shown, a multi-roller multi-target modular combined coating equipment includes: an unwinding chamber 1 equipped with an unwinding system 2 for outputting a film 3, a plurality of rotatable guide rollers 4 are installed in the unwinding chamber 1, and the film 3 is mounted on the plurality of guide rollers 4. The unwinding chamber 1 is connected to a conveying channel of the A-side coating chamber No. 1 6 through a gate valve 5, and a sealing rubber ring is provided at the connection point for sealing, and the gate valve 5 can be disassembled by bolts. A rotatable coating roller 8 is installed at the center position of the A-side coating chamber No. 1 6, and a coating source 9 is fixedly installed below the coating roller 8 along the arc of the coating roller 8. The coating source 9 can be one of resistance heating evaporation, electron beam evaporation and arc heating evaporation, or a combination of two or three of them, which can meet the coating of multiple materials and reflect the flexibility of the coating process. A roller group consisting of a plurality of guide rollers 4 at different heights is provided in the A-side coating chamber No. 1 6 in the direction of input and output of the film 3, which is used to guide the movement of the film 3. Another conveying channel of the coating chamber 1 6 on the A side is connected to a winding chamber 13 with a winding system 14 having a winding function through a gate valve 5. A roller group consisting of a plurality of guide rollers 4 is arranged in the winding chamber 13 in the direction of the film 3 moving.

[0039] In this embodiment, the film 3 is output from the unwinding system 2 of the unwinding chamber 1, passes through the guide roller 4 of the unwinding chamber 1 and the guide roller 4 of the A-side coating chamber No. 1 6 to reach the coating roller 8. At this time, the B-side of the film 3 is close to the coating roller 8 and rotates with the coating roller 8. The A-side of the film 3 faces the coating source 9, and the A-side is coated. After the coating is completed, the film 3 passes through multiple guide rollers 4 and finally reaches the winding chamber 13, thereby realizing the single-sided coating process for the A-side of the film 3. Among them, when the conveying channel of any A-side coating chamber or B-side coating chamber is not in use, a sealing plug can be added to the conveying channel to play a sealing role.

[0040] like Figure 2 As shown, in Figure 1 On the basis of the above, the connection between the coating chamber No. 1 6 on the A side and the winding chamber 13 is replaced by a conveying channel of the coating chamber No. 1 6 on the A side being connected to the coating chamber No. 1 11 on the B side through the transition cabin 10, and then the other end of the coating chamber No. 1 11 on the B side is connected to the winding chamber 13 through the gate valve 5. The coating roller 8 of the coating chamber No. 1 11 on the B side and the coating chamber No. 1 6 on the A side are provided with a plurality of guide rollers 4 of different heights at both ends of the coating roller 8 in the coating chamber No. 1 11 on the B side, respectively, for guiding the film 3. There is also a coating source 9 structure under the coating roller 8 in the coating chamber No. 1 11 on the B side, and the coating source 9 can be a magnetron sputtering source, a resistance heating evaporation source, an electron beam evaporation source, an arc heating evaporation source, or a combination of two or three of them, so as to meet the coating of various materials and reflect the flexibility of the coating process. Among them, the target material of the magnetron sputtering process is arranged around the coating roller 8, and the target material is a plurality of target materials.

[0041] In this embodiment, the film 3 is output from the unwinding system 2 of the unwinding chamber 1, passes through the guide roller 4 of the unwinding chamber 1 and the guide roller 4 of the A-side coating chamber No. 1 6 to reach the coating roller 8. At this time, the B-side of the film 3 is in close contact with the coating roller 8 and rotates with the coating roller 8. The A-side of the film 3 faces the coating source 9, and the A-side is coated. After the coating of the A-side of the film 3 is completed, the film 3 passes through the multiple guide rollers 4 of the B-side coating chamber No. 1 11, so that the A-side of the film 3 is in close contact with the coating roller 8, and the B-side of the film 3 faces the coating source 9 of the B-side coating chamber No. 1 11, and the B-side of the film 3 is coated. After the coating of the B-side of the film 3 is completed, the film 3 passes through the multiple guide rollers 4 to reach the winding chamber 13, realizing the double-sided coating process of the film 3.

[0042] In this embodiment, both ends of the transition cabin 10 have a flange structure or a snap-in groove structure, and are detachably connected by means of bolts or snap-in grooves, wherein sealing rubber rings are provided at the connection points to play a sealing role.

[0043] like Figure 3 As shown, in Figure 2 On the basis of the invention, the connection module is changed, that is, the unwinding chamber 1 is connected with a conveying channel of the A-side coating chamber No. 1 6 through the gate valve 5, and the other conveying channel of the A-side coating chamber No. 1 6 is connected with the B-side coating chamber No. 11 through the transition cabin 10, and the B-side coating chamber No. 11 is connected with the B-side coating chamber No. 2 12 through a transition cabin 10, and the B-side coating chamber No. 2 12 is connected with the A-side coating chamber No. 2 15 through the transition cabin 10, and the A-side coating chamber No. 2 15 is connected with the winding chamber 13 through the gate valve 5. A plurality of guide rollers 4 capable of guiding the direction of the film 3 are arranged in the A-side coating chamber No. 1 6, the A-side coating chamber No. 2 15, the B-side coating chamber No. 11, and the B-side coating chamber No. 2 12, wherein the guide rollers 4 also play a role in turning over the coating of the film 3.

[0044] In this embodiment, through the above-mentioned splicing structure, the A surface and the B surface of the film 3 can be coated twice.

[0045] like Figure 4 As shown, in Figure 3 On this basis, the number of A-side coating chambers and B-side coating chambers is increased, that is, an A-side coating chamber No. 3 16 and a B-side coating chamber No. 3 18 are added, and the film 3 passes through the guide rollers 4 in each chamber, that is, the film 3 passes through the unwinding chamber 1—A-side coating chamber No. 1 6—transition cabin 10—B-side coating chamber No. 1 11—transition cabin 10—B-side coating chamber No. 2 12—transition cabin 10—A-side coating chamber No. 2 15—transition cabin 10—A-side coating chamber No. 3 16—transition cabin 10—B-side coating chamber No. 3 18—winding chamber 13, and both the A-side and B-side of the film 3 can be coated three times.

[0046] like Figure 5 As shown, in Figure 4 On this basis, the number of A-side coating chambers and B-side coating chambers is increased again, that is, an A-side coating chamber No. 4 17 and a B-side coating chamber No. 4 19 are added, and the film 3 passes through the guide rollers 4 in each chamber, that is, the film 3 passes through the unwinding chamber 1—A-side coating chamber No. 1 6—transition cabin 10—B-side coating chamber No. 1 11—transition cabin 10—B-side coating chamber No. 2 12—transition cabin 10—A-side coating chamber No. 2 15—transition cabin 10—A-side coating chamber No. 3 16—transition cabin 10—B-side coating chamber No. 3 18—transition cabin 10—B-side coating chamber No. 4 19—transition cabin 10—A-side coating chamber No. 4 17—winding chamber 13, and both the A-side and B-side of the film 3 can be coated four times.

[0047] In some embodiments, a heating evaporation source is provided below the coating source 9. The heating evaporation source can quickly evaporate the moisture in the coating material, so that the coating material can be quickly coated on the film 3 and quickly formed, and the coating material is prevented from falling off the film 3 due to moisture.

[0048] In some embodiments, reference Figure 6 , the guide roller in one of the A-side coating chamber and the B-side coating chamber toward the input or output direction of the film 3 is the tension roller 7. By adjusting the position of the tension roller 7 relative to the A-side coating chamber or the B-side coating chamber, the tension of the film 3 on the guide roller 4 can be adjusted, so that films 3 of different thicknesses and tensions can be adapted, and at the same time, the film 3 can be prevented from being broken during the transmission process. Among them, an arc-shaped sliding groove is preset on the film chamber, and the linear axis of the tension roller 7 is placed in the sliding groove. The linear axis is fixed by a pin structure to its relative position with the sliding groove, and the roller body of the tension roller 7 rotates on the linear axis. When the position of the tension roller 7 needs to be adjusted, the position of the linear axis relative to the sliding groove can be adjusted by pulling out and inserting the pin.

[0049] In some embodiments, according to the selection of the coating source 9, the coating process can be full magnetron coating, full evaporation coating, or magnetron evaporation alternating coating. In the full evaporation coating process, it can be one of resistance heating evaporation, electron beam evaporation, and arc heating evaporation, or it can be a combination of two or three of them. This can meet the coating of a variety of materials and reflects the flexibility of the coating process.

[0050] The utility model does not limit the number of the A-side coating chamber, the B-side coating chamber, and the transition chamber. The number of the A-side coating chamber and the B-side coating chamber can be 6, 8, or even more.

[0051] The above shows and describes the basic principles, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited to the above embodiments. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of protection claimed by the utility model. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. Modular combined coating equipment, characterized in that: include: A-side coating chambers, several, for coating the A-side of the film; B-side coating chambers, several, for coating the B-side of the film; The transition chamber is detachably and hermetically connected to the A-side coating chamber and the B-side coating chamber, and is used to connect any two A-side coating chambers, between the A-side coating chamber and the B-side coating chamber, and any two B-side coating chambers; The A-side coating chamber and the B-side coating chamber are each provided with at least two conveying channels for connecting to the unwinding chamber of the coating equipment or the transition cabin or the winding chamber of the coating equipment.

2. The modular combined coating equipment according to claim 1, characterized in that: One conveying channel of any one of the A-side coating chamber or the B-side coating chamber is connected to the unwinding chamber, and the other conveying channel is connected to the winding chamber.

3. The modular combined coating equipment according to claim 1, characterized in that: Any one of the A-side coating chambers has two conveying channels, one of which is connected to the unwinding chamber, and the other is connected to the transition chamber; Any one of the B-side coating chambers has two conveying channels, one of which is connected to the transition chamber, and the other is connected to the winding chamber.

4. The modular combined coating equipment according to claim 3, characterized in that: There are two A-side coating chambers and two B-side coating chambers, and three transition chambers, which are connected in sequence as follows: Unwinding room—A side coating room—transition cabin—B side coating room—transition cabin—B side coating room—transition cabin—winding room.

5. The modular combined coating equipment according to claim 3, characterized in that: There are three A-side coating chambers and three B-side coating chambers, and five transition chambers, which are connected in the following order: Unwinding room—A side coating room—transition cabin—B side coating room—transition cabin—B side coating room—transition cabin—A side coating room—transition cabin—A side coating room—transition cabin—B side coating room—winding room.

6. The modular combined coating equipment according to claim 3, characterized in that: There are four A-side coating chambers and four B-side coating chambers, and seven transition chambers, which are connected in the following order: Unwinding room—A side coating room—transition cabin—B side coating room—transition cabin—B side coating room—transition cabin—A side coating room—transition cabin—A side coating room—transition cabin—B side coating room—transition cabin—B side coating room—transition cabin—A side coating room—winding room.

7. The modular combined coating equipment according to claim 1, characterized in that: A coating roller is disposed at the center of the A-side coating chamber and the B-side coating chamber, and a coating source is disposed below the coating roller.

8. The modular combined coating equipment according to claim 7, characterized in that: A heating evaporation source is arranged below the coating source.

9. The modular combined coating equipment according to claim 1, characterized in that: The A-side coating chamber, the B-side coating chamber, the unwinding chamber and the winding chamber are all provided with a roller group consisting of a plurality of guide rollers arranged at different height positions in the direction of film input or output, for guiding the movement of the film.

10. The modular combined coating equipment according to claim 9, characterized in that: One of the guide rollers of the A-side coating chamber and the B-side coating chamber toward the film input or output direction is a tension roller.

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