Spray pyrolysis equipment
Through strict temperature field control in spray pyrolysis equipment, the problem of difficulty in controlling the film growth process in existing equipment is solved, and the preparation of high-quality tin oxide films is achieved.
Patent Information
- Application Number
- CN202323600082.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-27
- Publication Date
- 2025-01-21
- Estimated Expiration
- 2033-12-27
AI Technical Summary
Existing spray pyrolysis equipment is difficult to effectively control the film growth process, resulting in poor quality of coating products and low yield, mainly due to inaccurate temperature field control.
A high-precision spray pyrolysis equipment is designed to strictly control the temperature field in the furnace to ensure that the temperature field unevenness in the furnace is controlled within 0.6% and the atomization unevenness is controlled within 0.4%.
High-quality preparation of fluorine or antimony-doped tin oxide films is achieved, including uniform grain size, good element diffusion, few defects, thick film stability, and resistance stability.
Smart Images
Figure CN222374762U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of spray coating, in particular to a spray pyrolysis device. Background Art
[0002] The existing spray pyrolysis equipment is not precise enough and it is difficult to effectively control the thin film growth process, including the chemical reaction process, grain growth, element diffusion and defect control, resulting in poor quality and low yield of the coating products produced by the related equipment. The root cause of the problem is that the existing related equipment and design are difficult to accurately control the temperature field.
[0003] To this end, in response to the demand for high-quality tin oxide film preparation (including few defects, uniform thickness and grain size distribution, stable resistance, and thick film), this application is based on the spray pyrolysis principle of the furnace body and from the perspective of strict control of the temperature field. A high-precision spray pyrolysis equipment for coating tin oxide film on the outer wall of quartz tubes is designed and manufactured to solve the above problems. Utility Model Content
[0004] In order to solve the problems existing in the above-mentioned prior art, the utility model designs a spray pyrolysis device, which solves the problems of uneven grain size, incomplete element diffusion and segregation, many nanometer or micrometer-level defects, and difficulty in making thick films caused by uneven temperature field when preparing fluorine (or antimony) doped tin oxide thin film grains in the existing coating equipment. The specific technical solution is as follows:
[0005] A spray pyrolysis device comprises a furnace body, the furnace body comprises a symmetrically arranged furnace body frame, the two ends of the two furnace body frames are connected by furnace body side baffles, the outer side of the furnace body frame is provided with a furnace body outer baffle, the furnace body side baffles are fixedly connected to the furnace body inner baffles arranged in parallel, the outer side of the furnace body inner baffle is fixedly connected to the heating plate fixing bracket, the heating plate fixing bracket is fixedly installed with a silicon carbide heating plate, the furnace body baffle is provided with an opening corresponding to the silicon carbide heating plate, the silicon carbide heating plate is provided with a thermocouple, and a fixed An upper closing block of the furnace body is connected to the side baffle of the furnace body, and upper plates of the furnace body fixedly connected to the furnace body frame are arranged on both sides of the upper closing block of the furnace body; a bottom closing block of the furnace body is arranged correspondingly below the upper closing block of the furnace body, and the bottom closing block of the furnace body is fixedly connected to the L-shaped plate, and the bottom closing block of the furnace body is adapted to the U-shaped notch on the side baffle of the furnace body, and lower plates of the furnace body fixedly connected to the furnace body frame are arranged on both sides of the bottom closing block of the furnace body; the L-shaped plate is connected to the U-shaped frame, the bottom of the U-shaped frame is connected to the top starting element, and a spraying device is arranged on the U-shaped frame.
[0006] Preferably, the U-shaped frame is arranged through the top plate, the four corners of the top plate are fixedly connected to the prefabricated frame, the bottom of the prefabricated frame is fixedly connected to the bottom plate, and the bottom plate is provided with an upper starting element connected to the U-shaped frame.
[0007] Preferably, a rectangular opening is provided on the top plate, a U-shaped frame is arranged through the rectangular opening, a tool clamping mechanism for clamping the quartz tube is provided on the top of the U-shaped frame, and the tool clamping mechanism is arranged above the top plate.
[0008] Preferably, sliding rods are vertically provided on both sides of the U-shaped frame, and the sliding rods pass through the top plate and are slidably connected to the stable frame fixedly connected to the bottom plate.
[0009] Preferably, an upper baffle bracket is provided on the top of the prefabricated frame, the upper baffle bracket is fixedly connected to the upper baffle cylinder, the upper baffle cylinder is fixedly connected to the upper baffle used to cover the top opening of the furnace body, and the upper baffle is slidably connected to the upper baffle bracket; a lower baffle bracket is provided on the top plate, the lower baffle bracket is fixedly connected to the lower baffle cylinder, the lower baffle cylinder is fixedly connected to the lower baffle used to cover the bottom opening of the furnace body, and the lower baffle is slidably connected to the upper baffle bracket.
[0010] Preferably, a high temperature resistant and high infrared emitting coating is provided on the surface of the silicon carbide heating plate, and the silicon carbide heating plate comprises compensating heating plates on both sides and a constant temperature heating plate in the middle.
[0011] Preferably, the spacing between the silicon carbide heating plates symmetrically arranged in the furnace body is ≤10 cm.
[0012] Preferably, an S-shaped uniformly coiled resistance wire is provided in the silicon carbide heating plate, the diameter of the spiral ring of the resistance wire is 6.3 cm, and the diameter of the resistance wire is 0.8 mm.
[0013] Preferably, there are multiple upper starting elements, which are arranged in parallel on the bottom plate.
[0014] Preferably, a heat insulation board and heat insulation cotton are further provided inside the furnace body, the heat insulation cotton is arranged between the heat insulation board and the outer baffle of the furnace body, and the heat insulation board is connected to the heating plate fixing bracket.
[0015] Compared with the prior art, the beneficial effects of the utility model are:
[0016] The utility model controls the non-uniformity of the temperature field in the furnace within 0.6% and the non-uniformity of atomization within 0.4% through controllable temperature field design. The equipment is used to prepare fluorine or antimony doped tin oxide thin films on the outer wall of a quartz tube, and the square resistance of the film can be controlled below 7Ω / ㎡, the non-uniformity of the square resistance can be controlled within ±1%, and there are no microscopic defects such as holes and cracks in the film layer. Moreover, the resistance change of the film layer does not exceed 4% when placed in the atmosphere for a long time. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.
[0018] Figure 1 This is a schematic diagram of the overall structure of the utility model Figure 1 .
[0019] Figure 2 This is a schematic diagram of the overall structure of the utility model Figure 2 .
[0020] Figure 3 This is a schematic diagram of the structure of the U-shaped frame of the utility model. Figure 1 .
[0021] Figure 4 This is a schematic diagram of the structure of the U-shaped frame of the utility model. Figure 2 .
[0022] Figure 5 This is a schematic diagram of the structure of the furnace body of the utility model Figure 1 .
[0023] Figure 6 This is a schematic diagram of the structure of the furnace body of the utility model Figure 2 .
[0024] Figure 7 This is a schematic diagram of the structure of the furnace body of the utility model Figure 3 .
[0025] Figure 8 This is a schematic diagram of the structure of the furnace body of the utility model Figure 4 .
[0026] Fig. 9 It is a structural schematic diagram of the main body of the utility model.
[0027] Fig.10 This is a wiring diagram of the internal resistance wire of the heating plate of the utility model.
[0028] In the figure: 1. Furnace body baffle; 2. Furnace body side baffle; 3. Furnace body upper closing block; 4. Furnace body frame; 5. Furnace body baffle; 6. Heating plate fixing bracket; 7. Silicon carbide heating plate; 71. Compensation heating plate; 72. Constant temperature heating plate; 8. Thermocouple; 9. Furnace body bottom closing block; 10. U-shaped frame; 11. Rotating rod; 12. Fixed rod 13. Servo motor; 14. Fixture; 15. Clamping cylinder; 16. Spray gun movement Module; 17, upper cylinder; 18, spray gun; 19, upper starting element; 20, top plate; 21, bottom plate; 22, prefabricated frame; 23, upper rod; 24, exhaust port; 25, upper baffle cylinder; 26, upper baffle; 27, rectangular opening; 28, lower baffle bracket; 29, lower baffle cylinder; 30, lower baffle; 31, stabilizing frame; 32, upper baffle bracket; 33, furnace body upper plate; 34, L-shaped plate; 35, U-shaped notch. DETAILED DESCRIPTION
[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.
[0030] See also Figures 1 to 10 , an embodiment provided by the utility model is as follows:
[0031] A spray pyrolysis device comprises a furnace body, the furnace body comprises a symmetrically arranged furnace body frame 4, the two ends of the two furnace body frames 4 are connected by a furnace body side baffle 2, a furnace body outer baffle 1 is arranged on the outside of the furnace body frame 4, the furnace body side baffles 2 are fixedly connected to the furnace body inner baffles 5 arranged in parallel, the outside of the furnace body inner baffle 5 is fixedly connected to the heating plate fixing bracket 6, the heating plate fixing bracket 6 is fixedly installed with a silicon carbide heating plate 7, the furnace body inner baffle 5 is provided with an opening corresponding to the silicon carbide heating plate 7, the silicon carbide heating plate 7 is provided with a thermocouple 8, an upper furnace body closing block fixedly connected to the furnace body side baffle 2 is arranged between the furnace body baffles 5, and both sides of the furnace body upper closing block 3 are provided with a furnace body fixedly connected to the furnace body frame 4 The upper plate 33, the baffle plate 5 in the furnace body are fitted with the furnace body frame 4, so that the two furnace body frames 4 are arranged in a mirror image, and an internal space is formed by the furnace body upper closing block 3 and the furnace body bottom closing block 9; the furnace body bottom closing block 9 is correspondingly arranged below the furnace body upper closing block 3, the furnace body bottom closing block 9 is fixedly connected to the L-shaped plate 34, and the furnace body bottom closing block 9 is adapted to the U-shaped notch 35 on the furnace body side baffle 2 to ensure that the temperature of the internal space is lost too quickly and reduce the internal temperature difference. The two sides of the furnace body bottom closing block 9 are provided with a furnace body lower plate fixedly connected to the furnace body frame 4; the L-shaped plate 34 is connected to the U-shaped frame 10, the bottom of the U-shaped frame 10 is connected to the top starting element 19, and the U-shaped frame 10 is provided with a spraying device.
[0032] Preferably, the U-shaped frame 10 is arranged through the top plate 20, the four corners of the top plate 20 are fixedly connected to the prefabricated frame 22, the bottom of the prefabricated frame 22 is fixedly connected to the bottom plate 21, and the bottom plate 21 is provided with an upper starting element 19 connected to the U-shaped frame 10.
[0033] Preferably, a rectangular opening 27 is provided on the top plate 20 , and the U-shaped frame 10 is arranged through the rectangular opening 27 . A tool clamping mechanism for clamping the quartz tube is provided on the top of the U-shaped frame 10 , and the tool clamping mechanism is arranged above the top plate 20 .
[0034] Preferably, sliding rods are vertically provided on both sides of the U-shaped frame 10 , and the sliding rods pass through the top plate and are slidably connected to the stable frame fixedly connected to the bottom plate 21 .
[0035] Preferably, an upper baffle bracket 32 is provided on the top of the prefabricated frame 22, and the upper baffle bracket 32 is fixedly connected to the upper baffle cylinder 25, and the upper baffle cylinder 25 is fixedly connected to the upper baffle 26 for covering the top opening of the furnace body, and the upper baffle 26 is slidably connected to the upper baffle bracket 32; a lower baffle bracket 28 is provided on the top plate 20, and the lower baffle bracket 28 is fixedly connected to the lower baffle cylinder 29, and the lower baffle cylinder 29 is fixedly connected to the lower baffle 30 for covering the bottom opening of the furnace body, and the lower baffle 30 is slidably connected to the upper baffle bracket 32.
[0036] Preferably, a high temperature resistant and high infrared emitting coating is provided on the surface of the silicon carbide heating plate 7 , and the silicon carbide heating plate 7 comprises compensation heating plates 71 on both sides and a constant temperature heating plate 72 in the middle.
[0037] Preferably, the spacing between the silicon carbide heating plates 7 symmetrically arranged in the furnace body is ≤10 cm.
[0038] Preferably, an S-shaped uniformly coiled resistance wire is provided in the silicon carbide heating plate 7, the diameter of the spiral ring of the resistance wire is 6.3 cm, and the diameter of the resistance wire is 0.8 mm.
[0039] Preferably, there are multiple upper starting elements, which are arranged in parallel on the bottom plate.
[0040] Preferably, a heat insulation board and thermal insulation cotton are further provided inside the furnace body, a heat insulation board is provided inside the thermal insulation cotton, the heat insulation board placed behind the silicon carbide heating plate 7 is used to isolate the temperature transfer of the heating plate, thermal insulation cotton is placed behind the heat insulation board to insulate the furnace body and reduce heat dissipation, the thermal insulation cotton is arranged between the heat insulation board and the outer baffle 1 of the furnace body, the heat insulation board is connected to the heating plate fixing bracket 6, one side of the silicon carbide heating plate 7 is in contact with the external air, and the other side is in contact with the heat insulation board, the heat insulation board is fixed on the heating plate fixing bracket 6, each heating plate has a through hole in the middle for temperature control, and the heating plate fixing bracket 6 is positioned and fixed with the fixing hole of the baffle 5 in the furnace body by screws.
[0041] Directions:
[0042] The upper starting element 19 drives the U-shaped frame 10 to move vertically, and the workpiece is sent into the furnace body. When the workpiece is heated, the furnace is closed all around, the temperature of the workpiece reaches the spray temperature, the upper and lower baffles of the furnace are opened, and the spray gun 18 is driven by the upper cylinder 17 to enter the furnace vertically upward, and the distance from the spray gun head to the outer wall of the workpiece is controlled to be 13-15cm. The spray and exhaust device are turned on to perform rotary spraying on the outer wall of the workpiece. After the spray gun 18 moves from one end to the other end at a uniform speed of 21mm / s, it is driven by the upper cylinder 17 to leave the furnace, and the upper and lower baffles of the furnace are closed, and the workpiece is continuously heated to the spray temperature for secondary spraying. This process is repeated, and when the film thickness reaches 600nm, the coating is completed and the workpiece is unloaded. In this way, coating in a high-precision spray pyrolysis furnace with controllable uniformity of temperature field and fog field can control the film growth process and ensure the uniformity of the spray and the consistency of the coating performance of the quartz tube surface.
[0043] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-restrictive, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.
Claims
1. A spray pyrolysis device, characterized in that: The invention comprises a furnace body, wherein the furnace body comprises a symmetrically arranged furnace body frame (4), the two ends of the two furnace body frames (4) are connected by a furnace body side baffle (2), a furnace body outer baffle (1) is arranged on the outer side of the furnace body frame (4), a furnace body inner baffle (5) arranged in parallel is fixedly connected between the furnace body side baffles (2), a heating plate fixing bracket (6) is fixedly connected to the outer side of the furnace body inner baffle (5), a silicon carbide heating plate (7) is fixedly installed in the heating plate fixing bracket (6), an opening corresponding to the silicon carbide heating plate (7) is arranged on the furnace body inner baffle (5), a thermocouple (8) is arranged on the silicon carbide heating plate (7), and a thermocouple (8) is fixedly connected to the furnace body side baffle (2) between the furnace body inner baffles (5). A furnace body upper closing block (3) is provided, and furnace body upper plates (33) fixedly connected to the furnace body frame (4) are provided on both sides of the furnace body upper closing block (3); a furnace body bottom closing block (9) is correspondingly provided below the furnace body upper closing block (3), and the furnace body bottom closing block (9) is fixedly connected to an L-shaped plate (34), and the furnace body bottom closing block (9) is adapted to a U-shaped notch (35) on the furnace body side baffle (2), and furnace body lower plates fixedly connected to the furnace body frame (4) are provided on both sides of the furnace body bottom closing block (9); the L-shaped plate (34) is connected to a U-shaped frame (10), and the bottom of the U-shaped frame (10) is connected to an upper starting element (19), and a spraying device is provided on the U-shaped frame (10).
2. A spray pyrolysis device according to claim 1, characterized in that: The U-shaped frame (10) is arranged through a top plate (20); the four corners of the top plate (20) are fixedly connected to a prefabricated frame (22); the bottom of the prefabricated frame (22) is fixedly connected to a bottom plate (21); and a top starting element (19) connected to the U-shaped frame (10) is provided on the bottom plate (21).
3. A spray pyrolysis device according to claim 2, characterized in that: The top plate (20) is provided with a rectangular opening (27), the U-shaped frame (10) is arranged through the rectangular opening (27), and the top of the U-shaped frame (10) is provided with a tool clamping mechanism for clamping a quartz tube, and the tool clamping mechanism is arranged above the top plate (20).
4. A spray pyrolysis device according to claim 1, characterized in that: Sliding rods (23) are vertically arranged on both sides of the U-shaped frame (10), and the sliding rods (23) pass through the top plate (20) and are slidably connected to a stabilizing frame (31) fixedly connected to the bottom plate (21).
5. A spray pyrolysis device according to claim 2, characterized in that: An upper baffle support (32) is provided on the top of the prefabricated frame (22), the upper baffle support (32) is fixedly connected to the upper baffle cylinder (25), the upper baffle cylinder (25) is fixedly connected to an upper baffle (26) for covering the top opening of the furnace body, and the upper baffle (26) is slidably connected to the upper baffle support (32); a lower baffle support (28) is provided on the top plate (20), the lower baffle support (28) is fixedly connected to the lower baffle cylinder (29), the lower baffle cylinder (29) is fixedly connected to the lower baffle (30) for covering the bottom opening of the furnace body, and the lower baffle (30) is slidably connected to the upper baffle support (32).
6. A spray pyrolysis device according to claim 1, characterized in that: The surface of the silicon carbide heating plate (7) is provided with a high temperature resistant high infrared emission coating, and the silicon carbide heating plate (7) comprises compensation heating plates (71) on both sides and a constant temperature heating plate (72) in the middle.
7. The spray pyrolysis equipment according to claim 1, characterized in that: The spacing between the silicon carbide heating plates (7) symmetrically arranged in the furnace body is ≤10 cm.
8. The spray pyrolysis equipment according to claim 1, characterized in that: The silicon carbide heating plate (7) is provided with an S-shaped uniformly coiled resistance wire, the diameter of the spiral ring of the resistance wire is 6.3 cm, and the diameter of the resistance wire is 0.8 mm.
9. The spray pyrolysis equipment according to claim 4, characterized in that: The upper push-up starting elements (19) are provided in plurality and are arranged in parallel on the bottom plate (21).
10. The spray pyrolysis equipment according to claim 1, characterized in that: A heat insulation board and heat insulation cotton are also provided inside the furnace body. The heat insulation cotton is arranged between the heat insulation board and the outer baffle plate (1) of the furnace body. The heat insulation board is connected to the heating plate fixing bracket (6).