Mixed material fluid pipeline system in semiconductor industry

Abstract

The utility model discloses a mixed material fluid pipeline system in the semiconductor industry. The pipeline system comprises a stirring and mixing system, a main line circulating system, an auxiliary line circulating system, a first cache discharging system and a second cache discharging system. According to the utility model, the screw pump is selected, and the screw pump can convey high-viscosity and high-solid-content materials and has strong adaptability to media; a liquid circulation system is designed, so that mixed liquid is in a flowing state all the time; stirring is added in the tank body to prevent mixed materials from precipitating; quick-wear parts adopt surface special substance coatings, so that the wear resistance of the quick-wear parts is improved, and the service life of the quick-wear parts is prolonged; a liquid metering device and a control valve are additionally arranged according to the required precision, and the problem that the mass of the mixture transferred in different containers needs to be measured through a metering device can be solved.

Description

Technical Field

[0001] The utility model relates to the technical field of mixed material pipelines, in particular to a mixed material fluid pipeline system in the semiconductor industry. Background Art

[0002] Mixed material pipeline technology is widely used in various fields, including oil, gas, chemical industry, water supply, drainage, heating, etc. The following is some relevant information about the background of pipeline technology:

[0003] Materials and design: Pipes can be made of various materials, such as metals (such as steel, copper, aluminum, etc.), plastics (such as polyethylene, polyvinyl chloride, etc.), concrete, etc. The design of the pipeline needs to consider factors such as flow, pressure, temperature, corrosion resistance, etc.

[0004] Installation and connection: The installation and connection methods of pipelines include welding, threaded connection, flange connection, clamp connection, etc. Correct installation and connection are essential to ensure the sealing and safety of the pipeline system.

[0005] Transport media: Pipelines can transport a variety of fluids, including liquids (such as water, oil, chemicals, etc.) and gases (such as natural gas, oxygen, nitrogen, etc.). Different transport media may require specific pipeline materials and designs.

[0006] Pressure and flow control: Pressure and flow often need to be controlled in piping systems to meet process requirements and safety standards. This can be achieved through valves, regulating valves, pressure reducing valves and other equipment.

[0007] Monitoring and maintenance: In order to ensure the normal operation of the pipeline system, monitoring and maintenance work is required. This includes regular inspection of pipelines for leaks, corrosion, damage, etc., and timely repair or replacement.

[0008] Safety and environmental protection: The design and operation of the piping system need to consider safety and environmental protection factors. This includes preventing leakage, preventing fire and explosion, handling waste gas and waste liquid, etc.

[0009] With the continuous development of technology, pipeline technology is also constantly innovating, such as adopting intelligent monitoring and control systems, using new materials and anti-corrosion technologies, etc., to improve the efficiency, reliability and sustainability of pipeline systems.

[0010] In view of the characteristics of mixed liquids, the following problems need to be solved in pipeline design: (1) The viscosity of mixed liquids is high and they tend to stick to the surface of objects during flow; (2) Mixed materials are easy to settle and will settle and stratify in a short period of time if they do not flow; (3) The hardness of suspended particles in mixed materials is high; and (4) The mass of mixed materials that need to be transferred by a meter when transferring them between different containers. Utility Model Content

[0011] The present application provides a mixed material fluid pipeline system for the semiconductor industry to solve the problems existing in the existing mixed material pipeline system, such as high viscosity of the mixed liquid, easy adhesion to the surface of objects during flow, easy precipitation of the mixed material, precipitation and stratification of the mixed material in a short time without flow, high hardness of suspended particles in the mixed material, and the need to measure the transferred mass.

[0012] In an embodiment of the present application, a mixed material fluid pipeline system for the semiconductor industry is provided, wherein the pipeline system includes a stirring and mixing system, a main line circulation system, a secondary line circulation system, a first buffer discharge system and a second buffer discharge system;

[0013] The stirring and mixing system includes a stirring tank V201 and a viscosity detection circulation pipeline. The stirring tank V201 is connected to a liquid feeding system and a powder feeding system. One end of the viscosity detection circulation pipeline is connected to a material outlet at the bottom of the stirring tank V201, and the other end is connected to a circulating material inlet at the top of the stirring tank V201. A manual ball valve V201-3, a screw pump P206, a three-way ball valve SF09, a manual ball valve SF10 and a viscometer D / V are sequentially arranged on the viscosity detection circulation pipeline.

[0014] The main line circulation system includes a main line circulation pipeline, one end of which is connected to the discharge port below the stirring tank V201, and the other end is connected to the circulation material inlet above the stirring tank V201. The main line circulation pipeline is sequentially provided with a manual ball valve V201-2, a three-way ball valve SF07, an electric ball valve S3, a screw pump P202, a three-way ball valve SF12, a manual ball valve SF03, a mass flow meter MF02, a three-way ball valve SF05 and an electric ball valve S12;

[0015] The secondary line circulation system includes a secondary line circulation pipeline, one end of which is connected to a three-way ball valve SF07, and the other end is connected to a three-way ball valve SF05. An electric ball valve S4, a screw pump P203, a three-way ball valve SF13, a manual ball valve SF04 and a mass flow meter MF03 are sequentially arranged on the secondary line circulation pipeline. An electric ball valve S6 is arranged between the main line circulation pipeline and the secondary line circulation pipeline. One end of the electric ball valve S6 is connected to the pipeline between the manual ball valve SF03 and the mass flow meter MF02, and the other end is connected to the pipeline between the manual ball valve SF04 and the mass flow meter MF03;

[0016] The first cache discharging system includes a cache tank V202, a first cache circulation pipeline and a first discharging pipeline. The material inlet above the cache tank V202 is connected to the electric ball valve S5, and the electric ball valve S5 is connected to the pipeline between the electric ball valve S12 and the three-way ball valve SF05. One end of the first cache circulation pipeline is connected to the discharge port below the cache tank V202, and the other end is connected to the circulating material inlet above the cache tank V202. The first cache circulation pipeline is sequentially provided with a manual ball valve V202-2, a screw pump P204, a three-way ball valve SF14, a three-way ball valve SF06, a mass flow meter MF04 and an electric ball valve S8. One end of the first discharging pipeline is connected to the pipeline between the mass flow meter MF04 and the electric ball valve S8, and the other end is connected to the production line. The first discharging pipeline is provided with an electric proportional control valve S9;

[0017] The second cache discharging system includes a cache tank V203, a second cache circulation pipeline and a second discharging pipeline. The material inlet above the cache tank V203 is connected to the electric ball valve S7, and the electric ball valve S7 is connected to the pipeline between the electric ball valve S12 and the three-way ball valve SF05. One end of the second cache circulation pipeline is connected to the discharge port below the cache tank V203, and the other end is connected to the circulating material inlet above the cache tank V203. The second cache circulation pipeline is sequentially provided with a manual ball valve V203-2, a screw pump P205, a three-way ball valve SF08, a three-way ball valve SF15, a mass flow meter MF05 and an electric ball valve S11. One end of the first discharging pipeline is connected to the pipeline between the mass flowmeter MF05 and the electric ball valve S11, and the other end is connected to the production line. The first discharging pipeline is provided with an electric proportional control valve S10.

[0018] Furthermore, the liquid feeding system includes a liquid material box B, a liquid feed pipeline and a cleaning pipeline, one end of the liquid feed pipeline is connected to the discharge port below the liquid material box B, and the other end is connected to the liquid feed port above the stirring tank V201, a liquid material electronic weighing device W02 is arranged below the liquid material box B, a manual ball valve SF01, an electric ball valve S1, a screw pump P201, a mass flow meter MF01 and an electric proportional control valve S2 are arranged in sequence on the liquid feed pipeline, the cleaning pipeline includes a cleaning water feed port A and a manual ball valve SF02, the cleaning water feed port A is connected to the manual ball valve SF02, the manual ball valve SF02 is connected to the pipeline between the manual ball valve SF01 and the electric ball valve S1, a manual ball valve SF11 is connected to the pipeline between the mass flowmeter MF01 and the electric proportional control valve S2, and the manual ball valve SF11 is connected to the cleaning gun.

[0019] Furthermore, the powder feeding system includes a powder temporary storage tank V204, an electric unloading valve M204 and a silo wall vibrator M205. The electric unloading valve M204 is arranged at the discharge port below the powder temporary storage tank V204. The discharge port below the powder temporary storage tank V204 is connected to the powder feed port above the stirring tank V201. The silo wall vibrator M205 is arranged on the side wall of the powder temporary storage tank V204. A powder electronic weighing device W01 is arranged below the powder temporary storage tank V204.

[0020] Furthermore, a stirring motor M201 and a radar level meter L201 are provided above the stirring tank V201.

[0021] Furthermore, a stirring motor M202 and a radar level meter L202 are provided above the cache tank V202.

[0022] Furthermore, a stirring motor M203 and a radar level meter L203 are provided above the cache tank V203.

[0023] Furthermore, a manual ball valve V201 - 1 is connected to the pipeline between the manual ball valve V201 - 2 and the discharge port below the stirring tank V201.

[0024] Furthermore, a manual ball valve V202-1 is connected to the pipeline between the manual ball valve V202-2 and the discharge port below the buffer tank V202.

[0025] Furthermore, a manual ball valve V203 - 1 is connected to the pipeline between the manual ball valve V203 - 2 and the discharge port below the buffer tank V203 .

[0026] Furthermore, the three-way ball valve SF09, the three-way ball valve SF12, the three-way ball valve SF13, the three-way ball valve SF14, the three-way ball valve SF06, the three-way ball valve SF08 and the three-way ball valve SF15 are all connected to the waste liquid discharge pipeline.

[0027] The present application provides a mixed material fluid pipeline system for the semiconductor industry, which has the following advantages: a screw pump is selected, which can convey high viscosity and high solid content and has strong adaptability to the medium; during the material mixing process, the screw pump works to extract the material from the bottom of the tank body and then flow into the tank body from the top of the tank body, so that the material circulates during the stirring process to prevent the material from settling and clogging the pipeline; in the pipeline design, a three-way valve is used for diversion to minimize the dead corners of the pipeline to prevent the material from not flowing in the dead corners during the flow of the mixed material in the pipeline, and the material precipitation and accumulation generated over a long period of time will clog the pipeline; the mixed material is transferred in different containers A mass flow meter is added to the transfer pipeline to measure the mass of the mixed material transferred; a drain port is set at the bottom of the pipeline and connected to the workshop drainage pipeline. When the equipment needs to stop working for a long time, the mixed material in the pipeline must be drained out to prevent the mixed material in the pipeline from settling and clogging the pipeline; in view of the high viscosity and easy precipitation of the material, an automatic cleaning function is added during the pipeline design process. When the equipment stops for a long time or works for a long period of time, the mixing tank and pipeline must be cleaned to prevent the mixed material in the pipeline from settling and clogging the pipeline, and the long-term accumulation in the pipeline affects the accuracy and quality of the ingredients. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A connection principle diagram of a mixed material fluid pipeline system for the semiconductor industry provided by one embodiment of the utility model;

[0029] Figure 2 A partial connection principle diagram of a mixed material fluid pipeline system for the semiconductor industry provided by one embodiment of the utility model;

[0030] Figure 3 A structural diagram of a mixed material fluid pipeline system for the semiconductor industry provided by one embodiment of the utility model;

[0031] Figure 4 Another angle structural diagram of a mixed material fluid pipeline system for the semiconductor industry provided by one embodiment of the utility model;

[0032] Figure 5 A flow chart of liquid (propylene glycol) loading in a mixed material fluid pipeline system in the semiconductor industry provided by one embodiment of the utility model;

[0033] Figure 6 An overall working flow diagram of a mixed material fluid pipeline system for the semiconductor industry provided by one embodiment of the utility model;

[0034] Figure 7 A mixed material transfer workflow diagram of a mixed material fluid pipeline system in the semiconductor industry provided by one embodiment of the utility model;

[0035] Figure 8 A discharge flow chart of a mixed material fluid pipeline system for the semiconductor industry is provided as an embodiment of the utility model. DETAILED DESCRIPTION

[0036] The present invention is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present application to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, and methods. In some cases, some operations related to the present application are not shown or described in the specification, in order to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0037] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0038] The present invention provides a semiconductor industry mixed material fluid pipeline system, such as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the pipeline system includes a stirring and mixing system, a main line circulation system, a secondary line circulation system, a first cache discharging system and a second cache discharging system.

[0039] In this embodiment, the stirring and mixing system includes a stirring tank V201 and a viscosity detection circulation pipeline. The stirring tank V201 is connected to the liquid feeding system and the powder feeding system. One end of the viscosity detection circulation pipeline is connected to the material outlet at the bottom of the stirring tank V201, and the other end is connected to the circulating material inlet at the top of the stirring tank V201. The viscosity detection circulation pipeline is sequentially provided with a manual ball valve V201-3, a screw pump P206, a three-way ball valve SF09, a manual ball valve SF10 and a viscometer D / V. A stirring motor M201 and a radar level meter L201 are provided above the stirring tank V201.

[0040] In this embodiment, the main line circulation system includes a main line circulation pipeline, one end of which is connected to the discharge port below the stirring tank V201, and the other end is connected to the circulation material inlet above the stirring tank V201. The main line circulation pipeline is sequentially provided with a manual ball valve V201-2, a three-way ball valve SF07, an electric ball valve S3, a screw pump P202, a three-way ball valve SF12, a manual ball valve SF03, a mass flow meter MF02, a three-way ball valve SF05 and an electric ball valve S12. A manual ball valve V201-1 is connected to the pipeline between the manual ball valve V201-2 and the discharge port below the stirring tank V201.

[0041] In this embodiment, the secondary line circulation system includes a secondary line circulation pipeline, one end of the secondary line circulation pipeline is connected to the three-way ball valve SF07, and the other end is connected to the three-way ball valve SF05. The secondary line circulation pipeline is sequentially provided with an electric ball valve S4, a screw pump P203, a three-way ball valve SF13, a manual ball valve SF04 and a mass flowmeter MF03. An electric ball valve S6 is provided between the main line circulation pipeline and the secondary line circulation pipeline. One end of the electric ball valve S6 is connected to the pipeline between the manual ball valve SF03 and the mass flowmeter MF02, and the other end is connected to the pipeline between the manual ball valve SF04 and the mass flowmeter MF03.

[0042] In this embodiment, the first cache discharging system includes a cache tank V202, a first cache circulation pipeline and a first discharging pipeline. The material inlet above the cache tank V202 is connected to the electric ball valve S5, and the electric ball valve S5 is connected to the pipeline between the electric ball valve S12 and the three-way ball valve SF05. One end of the first cache circulation pipeline is connected to the discharge port below the cache tank V202, and the other end is connected to the circulating material inlet above the cache tank V202. The first cache circulation pipeline is sequentially provided with a manual ball valve V202-2, a screw pump P204, a three-way ball valve SF14, a three-way ball valve SF06, a mass flow meter MF04 and an electric ball valve S8. One end of the first discharging pipeline is connected to the pipeline between the mass flow meter MF04 and the electric ball valve S8, and the other end is connected to the production line. The first discharging pipeline is provided with an electric proportional control valve S9. A stirring motor M202 and a radar level meter L202 are provided above the cache tank V202. A manual ball valve V202-1 is connected to the pipeline between the manual ball valve V202-2 and the discharge port below the buffer tank V202.

[0043] In this embodiment, the second cache discharging system includes a cache tank V203, a second cache circulation pipeline and a second discharging pipeline. The material inlet above the cache tank V203 is connected to the electric ball valve S7, and the electric ball valve S7 is connected to the pipeline between the electric ball valve S12 and the three-way ball valve SF05. One end of the second cache circulation pipeline is connected to the discharge port below the cache tank V203, and the other end is connected to the circulating material inlet above the cache tank V203. The second cache circulation pipeline is sequentially provided with a manual ball valve V203-2, a screw pump P205, a three-way ball valve SF08, a three-way ball valve SF15, a mass flow meter MF05 and an electric ball valve S11. One end of the first discharging pipeline is connected to the pipeline between the mass flow meter MF05 and the electric ball valve S11, and the other end is connected to the production line. The first discharging pipeline is provided with an electric proportional control valve S10. A stirring motor M203 and a radar level meter L203 are provided above the cache tank V203. A manual ball valve V203-1 is connected to the pipeline between the manual ball valve V203-2 and the discharge port below the buffer tank V203.

[0044] In this embodiment, three-way ball valve SF09, three-way ball valve SF12, three-way ball valve SF13, three-way ball valve SF14, three-way ball valve SF06, three-way ball valve SF08 and three-way ball valve SF15 are all connected to the waste liquid discharge pipeline.

[0045] In this embodiment, the liquid feeding system includes a liquid material box B, a liquid feed pipeline and a cleaning pipeline. One end of the liquid feed pipeline is connected to the discharge port below the liquid material box B, and the other end is connected to the liquid feed port above the stirring tank V201. A liquid material electronic weighing device W02 (W104-107) is arranged below the liquid material box B. A manual ball valve SF01, an electric ball valve S1, a screw pump P201, a mass flow meter MF01 and an electric proportional control valve S2 are arranged in sequence on the liquid feed pipeline. The cleaning pipeline includes a cleaning water feed port A and a manual ball valve SF02. The cleaning water feed port A is connected to the manual ball valve SF02, and the manual ball valve SF02 is connected to the pipeline between the manual ball valve SF01 and the electric ball valve S1. A manual ball valve SF11 is connected to the pipeline between the mass flow meter MF01 and the electric proportional control valve S2, and the manual ball valve SF11 is connected to the cleaning gun G.

[0046] In this embodiment, the powder feeding system includes a powder temporary storage tank V204, an electric discharge valve M204 and a silo wall vibrator M205. The electric discharge valve M204 is arranged at the discharge port below the powder temporary storage tank V204. The discharge port below the powder temporary storage tank V204 is connected to the powder feed port above the stirring tank V201. The silo wall vibrator M205 is arranged on the side wall of the powder temporary storage tank V204. A powder electronic weighing device W01 (W101-W103) is arranged below the powder temporary storage tank V204.

[0047] The present embodiment is a semiconductor industry mixed material fluid pipeline system, and the specific workflow includes the following contents:

[0048] (1) Liquid (propylene glycol) feeding, such as Figure 5 Shown

[0049] The materials are manually transported to the right place, and the valve at the outlet of the liquid (propylene glycol) barrel is opened;

[0050] V201-1 / SF02 / SF11 is closed, SF01 is open, and W02 is measuring normally;

[0051] Click the start button on the MCP cabinet to start the whole system;

[0052] Liquid (propylene glycol) feeding;

[0053] W02 metering (or MF01 metering), automatic metering according to the formula;

[0054] S1 and S2 are turned on, and then P201 is started (according to the formula S2, P201 is automatically adjusted, and W02 and MF01 metering and L201 metering liquid level are used as starting conditions); after the metering is completed, P201 stops, S1 and S2 are closed, and the liquid feeding process ends;

[0055] Data recording: data is displayed and stored locally on HMI (can be accessed), and the data stored includes the current liquid weight (W02 and MF01 measurement) and time division.

[0056] (2) V201 stirring and circulation, such as Figure 6 and Figure 7 Shown

[0057] V201 stirring: Start M201 stirring. During the stirring process, the viscometer, density meter and time values ​​need to be recorded every second to form a curve graph. The mixed liquid transfer process is started based on the stirring time, viscosity and density setting values. The stirring is stopped based on the MF02 and MF03 feed metering or the L201 metering liquid level. The stirring and circulation system stops.

[0058] Viscosity detection cycle: V201-3 is turned on, SF10 is turned on, and SF09 is turned off; turn on the viscometer D / V detection switch to start the D / V detection; turn on P206, cycle to V201, and complete the D / V cycle detection of V201.

[0059] Main / sub-line switching: According to the HMI setting, the main / sub-line switching system with one active and one standby is used to make the main / sub-line switching judgment:

[0060] Main line circulation: S6 remains normally closed, SF03 remains normally open; V201-2 is opened, SF12 waste liquid outlet is closed, SF05 and SF07 are in state A; S3 and S12 are opened, S5 and S7 are closed, and the next step is carried out after they are in place; P202 is started; the material circulates to V201;

[0061] Sub-line circulation: S6 remains normally closed, SF04 remains normally open, V201-2 is opened, SF13 closes the waste liquid outlet, SF05 and SF07 are in state B, S4 and S12 are opened, S5 and S7 are closed, and the next step is carried out after they are in place, P203 is started, and the material circulates to V201.

[0062] During the main line / sub-line circulation, the mixed liquid is transferred to the buffer tank V202 / V203.

[0063] (3) V202 stirring and circulation, such as Figure 6 and Figure 7 Shown

[0064] The mixed liquid under the main line is transferred to V202: S6 is kept normally closed, SF03 is kept normally open; V202-2 and V201-2 are opened, V202-1 and SF12 waste liquid ports are closed, SF05 and SF07 are in state A; S3 and S5 are opened, S7 and S12 are closed, and the next step is carried out after they are in place; P202 is started; MF02 metering or L202 metering liquid level is used as the total amount of mixture transfer metering; whether to start V202 stirring is determined based on the metering;

[0065] The mixed liquid under the secondary line is transferred to V202: S6 is kept normally closed, SF04 is kept normally open; V202-2 and V201-2 are opened, V202-1 and SF13 waste liquid ports are closed, SF05 and SF07 are in state B, S4 and S5 are opened, S7 and S12 are closed, and the next step is carried out after they are in place; P203 is started; MF03 metering or L202 metering liquid level is used to measure the total amount of the mixture transfer; whether to start V202 stirring is determined based on the metering;

[0066] V202 stirring: Start M202 stirring. When the mixed liquid transfer process is completed, S8 is opened, S9 is closed, P204 is started, and the V202 cycle is completed.

[0067] (4) V203 stirring and circulation, such as Figure 6 and Figure 7 Shown

[0068] The mixed liquid under the main line is transferred to V203: S6 is kept in a normally closed state, SF04 is kept in a normally open state, V203-2 and V201-2 are opened, V203-1 and SF13 waste liquid outlets are closed, SF05 and SF07 are in state B; S3 and S7 are opened, S5 and S12 are closed, and the next step is carried out after they are in place; P202 is started; MF02 metering or L203 metering liquid level is used to measure the total amount of the mixture transfer; whether to start V203 stirring is determined based on the metering;

[0069] The mixed liquid under the secondary line is transferred to V203: S6 is kept in a normally closed state, SF04 is kept in a normally open state; V203-2 / V201-2 is opened, V203-1 / SF13 is closed, and SF05 / 07 is in state A; S4 and S7 are opened, S5 and S12 are closed, and the next step is carried out after they are in place; P203 is started; MF03 metering or L203 metering liquid level is used as the total amount of mixture transfer metering; whether to start V203 stirring is determined based on the metering;

[0070] V203 stirring: Start M203 stirring. When the mixed liquid transfer process is completed, S11 is opened, S10 is closed, P205 is started, and the V203 cycle is completed.

[0071] (5) V202 and V204 discharge, such as Figure 8 Shown

[0072] If the buffer tank V202 is to be discharged, the screw pump P204 is closed, and then the electric ball valve S8 is closed, the electric proportional control valve S9 is opened, and then the screw pump P204 is started, and the opening of the electric proportional control valve S9 and the operation of the screw pump P204 are controlled according to the discharge amount and the accuracy set by the system. The material in the buffer tank V202 is discharged through the first discharge pipeline, and at the same time, the remaining amount of the mixture is obtained by measuring the difference between the total amount measured by the mass flow meter MF02 / MF03 and the discharge amount or the measured liquid level of the radar level meter L202;

[0073] If the buffer tank V203 is to be discharged, first close the screw pump P205, then close the electric ball valve S11, open the electric proportional control valve S10, and then start the screw pump P205, and adjust the opening of the electric proportional control valve S10 and the operation of the screw pump P205 according to the discharge volume and the accuracy set by the system. The material in the buffer tank V203 is discharged through the second discharge pipeline. At the same time, the remaining amount of the mixture is displayed according to the difference between the total amount measured by the mass flow meter MF02 / MF03 and the discharge volume or the measured liquid level of the radar level meter L203.

[0074] The present embodiment proposes a mixed material fluid pipeline system for the semiconductor industry, and a pipeline method designed according to material characteristics, which has the following characteristics:

[0075] (1) The suspended particles of the mixed material are hard and viscous. To address this characteristic, the pipeline uses stainless steel (SUS304) with an inner mirror finish. Stainless steel has high wear resistance and can withstand frequent friction and wear, thus extending its service life. The surface of the inner mirror finish stainless steel is very smooth and has excellent finish, which can reduce the accumulation of sticky surfaces of materials and is easy to clean.

[0076] (2) During the material mixing process, the screw pump works to extract the material from the bottom of the tank and then flow it into the tank from the top of the tank, so that the material circulates during the mixing process to prevent the material from settling and clogging the pipeline;

[0077] (3) In pipeline design, a three-way valve is used for diversion to minimize dead corners in the pipeline and prevent the material from not flowing in the dead corners during the flow of the mixed material in the pipeline, resulting in the accumulation of material sedimentation over a long period of time and blocking the pipeline;

[0078] (4) If there are unavoidable dead corners or pipelines where mixed materials are easily accumulated, design branches to eliminate the risk of pipeline blockage through the Venturi effect;

[0079] (5) Add a mass flow meter to the pipeline where the mixed material is transferred between different containers to measure the mass of the mixed material transferred;

[0080] (6) A drain port is set at the bottom of the pipeline and connected to the workshop drainage pipeline. When the equipment needs to stop working for a long time, the mixed material in the pipeline must be drained to prevent the mixed material in the pipeline from settling and clogging the pipeline;

[0081] (7) In view of the high viscosity and easy precipitation of materials, the automatic cleaning function is added in the pipeline design process. After the equipment stops for a long time or works for a long time, the mixing tank and pipeline must be cleaned to prevent the mixed materials in the pipeline from precipitating and blocking the pipeline, and the long-term accumulation of materials in the pipeline affects the accuracy and quality of the ingredients;

[0082] (8) Use a steel hose to connect the tank and the pump to reduce the vibration of the pipeline during the tank stirring process.

[0083] The above specific examples are used to illustrate the present invention, which are only used to help understand the present invention and are not intended to limit the present invention. For those skilled in the art of the present invention, some simple deductions, deformations or substitutions can be made based on the idea of ​​the present invention.

Claims

1. A mixed material fluid pipeline system for the semiconductor industry, characterized in that: The pipeline system includes a stirring and mixing system, a main line circulation system, a secondary line circulation system, a first buffer discharge system and a second buffer discharge system; The stirring and mixing system includes a stirring tank V201 and a viscosity detection circulation pipeline. The stirring tank V201 is connected to a liquid feeding system and a powder feeding system. One end of the viscosity detection circulation pipeline is connected to a material outlet at the bottom of the stirring tank V201, and the other end is connected to a circulating material inlet at the top of the stirring tank V201. A manual ball valve V201-3, a screw pump P206, a three-way ball valve SF09, a manual ball valve SF10 and a viscometer D / V are sequentially arranged on the viscosity detection circulation pipeline. The main line circulation system includes a main line circulation pipeline, one end of which is connected to the discharge port below the stirring tank V201, and the other end is connected to the circulating material electric ball valve S3, screw pump P202, three-way ball valve SF12, manual ball valve SF03, and mass flow meter material inlet above the stirring tank V201. The main line circulation pipeline is sequentially provided with a manual ball valve V201-2, a three-way ball valve SF07, MF02, a three-way ball valve SF05, and an electric ball valve S12; The secondary line circulation system includes a secondary line circulation pipeline, one end of which is connected to a three-way ball valve SF07, and the other end is connected to a three-way ball valve SF05. An electric ball valve S4, a screw pump P203, a three-way ball valve SF13, a manual ball valve SF04 and a mass flow meter MF03 are sequentially arranged on the secondary line circulation pipeline. An electric ball valve S6 is arranged between the main line circulation pipeline and the secondary line circulation pipeline. One end of the electric ball valve S6 is connected to the pipeline between the manual ball valve SF03 and the mass flow meter MF02, and the other end is connected to the pipeline between the manual ball valve SF04 and the mass flow meter MF03; The first cache discharging system includes a cache tank V202, a first cache circulation pipeline and a first discharging pipeline. The material inlet above the cache tank V202 is connected to the electric ball valve S5, and the electric ball valve S5 is connected to the pipeline between the electric ball valve S12 and the three-way ball valve SF05. One end of the first cache circulation pipeline is connected to the discharge port below the cache tank V202, and the other end is connected to the circulating material inlet above the cache tank V202. The first cache circulation pipeline is sequentially provided with a manual ball valve V202-2, a screw pump P204, a three-way ball valve SF14, a three-way ball valve SF06, a mass flow meter MF04 and an electric ball valve S8. One end of the first discharging pipeline is connected to the pipeline between the mass flow meter MF04 and the electric ball valve S8, and the other end is connected to the production line. The first discharging pipeline is provided with an electric proportional control valve S9; The second cache discharging system includes a cache tank V203, a second cache circulation pipeline and a second discharging pipeline. The material inlet above the cache tank V203 is connected to the electric ball valve S7, and the electric ball valve S7 is connected to the pipeline between the electric ball valve S12 and the three-way ball valve SF05. One end of the second cache circulation pipeline is connected to the discharge port below the cache tank V203, and the other end is connected to the circulating material inlet above the cache tank V203. The second cache circulation pipeline is sequentially provided with a manual ball valve V203-2, a screw pump P205, a three-way ball valve SF08, a three-way ball valve SF15, a mass flow meter MF05 and an electric ball valve S11. One end of the first discharging pipeline is connected to the pipeline between the mass flowmeter MF05 and the electric ball valve S11, and the other end is connected to the production line. The first discharging pipeline is provided with an electric proportional control valve S10.

2. A semiconductor industry mixed material fluid pipeline system as claimed in claim 1, characterized in that: The liquid feeding system includes a liquid material box B, a liquid feed pipeline and a cleaning pipeline. One end of the liquid feed pipeline is connected to the discharge port below the liquid material box B, and the other end is connected to the liquid feed port above the stirring tank V201. A liquid material electronic weighing device W02 is arranged below the liquid material box B. A manual ball valve SF01, an electric ball valve S1, a screw pump P201, a mass flow meter MF01 and an electric proportional control valve S2 are arranged in sequence on the liquid feed pipeline. The cleaning pipeline includes a cleaning water feed port A and a manual ball valve SF02. The cleaning water feed port A is connected to the manual ball valve SF02. The manual ball valve SF02 is connected to the pipeline between the manual ball valve SF01 and the electric ball valve S1. A manual ball valve SF11 is connected to the pipeline between the mass flowmeter MF01 and the electric proportional control valve S2. The manual ball valve SF11 is connected to a cleaning gun.

3. A semiconductor industry mixed material fluid pipeline system as claimed in claim 1, characterized in that: The powder feeding system includes a powder temporary storage tank V204, an electric unloading valve M204 and a silo wall vibrator M205. The electric unloading valve M204 is arranged at the discharge port below the powder temporary storage tank V204. The discharge port below the powder temporary storage tank V204 is connected to the powder feed port above the stirring tank V201. The silo wall vibrator M205 is arranged on the side wall of the powder temporary storage tank V204. A powder electronic weighing device W01 is arranged below the powder temporary storage tank V204.

4. A semiconductor industry mixed material fluid pipeline system as claimed in claim 1, characterized in that: A stirring motor M201 and a radar level meter L201 are arranged above the stirring tank V201.

5. A semiconductor industry mixed material fluid pipeline system as claimed in claim 1, characterized in that: A stirring motor M202 and a radar level meter L202 are provided above the buffer tank V202.

6. A semiconductor industry mixed material fluid pipeline system as claimed in claim 1, characterized in that: A stirring motor M203 and a radar level meter L203 are arranged above the buffer tank V203.

7. A semiconductor industry mixed material fluid pipeline system as claimed in claim 1, characterized in that: A manual ball valve V201 - 1 is connected to the pipeline between the manual ball valve V201 - 2 and the discharge port below the stirring tank V201 .

8. A semiconductor industry mixed material fluid pipeline system as claimed in claim 1, characterized in that: A manual ball valve V202-1 is connected to the pipeline between the manual ball valve V202-2 and the discharge port below the buffer tank V202.

9. A semiconductor industry mixed material fluid pipeline system as claimed in claim 1, characterized in that: A manual ball valve V203 - 1 is connected to the pipeline between the manual ball valve V203 - 2 and the discharge port below the buffer tank V203 .

10. A semiconductor industry mixed material fluid pipeline system as claimed in claim 1, characterized in that: The three-way ball valve SF09, three-way ball valve SF12, three-way ball valve SF13, three-way ball valve SF14, three-way ball valve SF06, three-way ball valve SF08 and three-way ball valve SF15 are all connected to the waste liquid discharge pipeline.

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