Any-angle inclined sample table for scanning electron microscope

Abstract

The utility model relates to an arbitrary-angle inclined sample table for a scanning electron microscope. The arbitrary-angle inclined sample table comprises a base, a fixing frame, an angle gauge, a pointer plate, a fixing bolt and a sample placing table, the fixing frame is vertically and fixedly connected to the middle of the upper surface of the base. The middle of one side of the sample placing table is connected with the middle of the fixing frame through a fixing bolt; the angle gauge is correspondingly arranged on one side of the sample placing table; the pointer plate is arranged on one side of the upper surface of the base and corresponds to the angle gauge. The sample preparation device is simple in structure principle, high in feasibility, simple and convenient to operate and rapid in sample preparation, can realize observation of a series of samples at any angle of the scanning electron microscope, accurately controls the observation inclination angle, and remarkably improves the detection efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of detection and analysis, in particular to an arbitrary-angle tilting sample stage for a scanning electron microscope. Background Art

[0002] Scanning electron microscopy is one of the main means of micro-area morphology analysis. It is mainly used to observe and analyze the microscopic surface morphology and composition of materials. Sample preparation is very important. Excellent sample preparation is the prerequisite for obtaining high-quality image observation results. The sample preparation process includes four steps: cleaning, fixation, drying and metal spraying. Fixing the sample is the top priority. Different sample stages must be equipped. The sample stages in the laboratory are mainly T-stages and fixture stages. The applicable observation surfaces are the surface and cross-section of the sample. There is no standard sample stage for tilted morphology observation at any angle of the sample. Some samples often require all-round and multi-angle observation.

[0003] At present, most laboratories use two methods for sample preparation: one method is to use the R-axis rotation of the electron microscope for observation. Although the R-axis rotation angle can be set, the orientation of the R-axis rotation is uncertain. Multiple samples are often confused due to the rotation of the sample stage, and the tilt of the sample stage will hit the pole of the electron microscope, causing damage to the electron microscope. This method has a low utilization rate; the other method is to prepare a conductive module with an inclined angle, and stick the sample on its surface with conductive glue for observation. This method can only measure the observation mode of a few set angles and cannot achieve any angle. The advantage is that several samples can be placed at the same time for testing. The above two methods have certain defects and shortcomings and cannot meet the needs of rapid sample testing. Summary of the invention

[0004] In view of the above problems, the purpose of the utility model is to provide a scanning electron microscope with an arbitrary angle tilting sample stage, which can tilt the sample at any angle and realize observation of the sample at any angle. At the same time, several samples can be bonded to the tilting sample stage to achieve the purpose of simultaneous detection of multiple samples, thereby greatly improving the detection efficiency.

[0005] The technical solution adopted by the utility model is as follows:

[0006] The utility model provides a scanning electron microscope with an arbitrary angle tilting sample stage, comprising a base, a fixing frame, an inclinometer, a pointer plate, fixing bolts and a sample placement table; the fixing frame is vertically fixed to the middle part of the upper surface of the base; the middle part of one side of the sample placement table is connected to the middle part of the fixing frame by a fixing bolt; the inclinometer is correspondingly arranged on one side of the sample placement table; the pointer plate is arranged on one side of the upper surface of the base and corresponds to the inclinometer.

[0007] Furthermore, one side of the lower end surface of the sample placement table is set as an arc-shaped protrusion structure, and corresponding nut holes are opened at the center of the circle and in the middle of the fixing frame; the fixing bolts pass through the nut holes on the sample placement table and the fixing frame in turn; the inclinometer is fixed correspondingly to the front side of the arc-shaped protrusion structure on the lower end surface of the sample placement table.

[0008] Furthermore, the pointer plate is composed of a trapezoidal plate and a pointer; the trapezoidal plate is arranged correspondingly on the front side of the arc-shaped protruding structure on the lower end surface of the sample placement table; the bottom of the trapezoidal plate is fixedly connected to the upper surface of the base, and the side is fixedly connected to the fixing frame; the side of the trapezoidal plate corresponding to the arc-shaped protruding structure on the lower end surface of the sample placement table is arranged to be a concave arc, and the arc corresponds to the arc of the arc-shaped protruding structure on the lower end surface of the sample placement table; the pointer is arranged at the top of the arc-shaped edge of the trapezoidal plate and corresponds to the inclinometer.

[0009] Furthermore, the upper end surface of the sample placement table is a rectangular adhesive plate.

[0010] Furthermore, the fixing frame is a tripod.

[0011] Furthermore, the base is a rectangular solid aluminum structure; and the tripod is made of aluminum.

[0012] Furthermore, the inclinometer is an arc-shaped aluminum foil with a scale, and the scale range is 0 to 90°.

[0013] Furthermore, the fixing bolt is a screw rod with a nut.

[0014] Compared with the prior art, the utility model has the following beneficial effects:

[0015] The utility model has a simple structural principle, strong feasibility, easy operation, and fast sample preparation. At the same time, it can realize the observation of a series of samples at any angle of the scanning electron microscope, accurately control the observation tilt angle, and significantly improve the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0017] Figure 2 It is a schematic diagram of the top structure of the utility model.

[0018] Among them, the figure numbers are: 1-base; 2-fixing frame; 3-incline meter; 4-pointer plate; 5-fixing bolt; 6-sample placement table. DETAILED DESCRIPTION

[0019] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] It should be noted that, in the description of the present invention, the terms "upper", "lower", "top", "bottom", "one side", "the other side", "left", "right", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not mean that the device or element must have a specific orientation, be constructed and operated in a specific orientation.

[0021] See attached Figure 1-2 The utility model provides a scanning electron microscope with an arbitrary angle tilting sample stage, which comprises a base 1, a fixing frame 2, an angle meter 3, a pointer plate 4, a fixing bolt 5 and a sample placement table 6.

[0022] In this embodiment, the base 1 is a rectangular solid aluminum structure of 100mm×80mm×15mm to enhance its supporting stability; the fixed frame 2 is an aluminum tripod with a bottom length of 80mm, a height of 60mm, and a φ8mm nut hole in the center, which is vertically welded and fixed to the middle of the upper surface of the base 1.

[0023] The lower end surface of the sample placement table 6 is irregular in shape, with an arc groove structure on the front side and an arc convex structure on the rear side. The arc groove structure and the arc convex structure have a smooth transition, and a nut hole corresponding to the nut hole in the middle of the fixing frame 2 is opened at the center of the arc convex structure. The upper end surface of the sample placement table 6 is a rectangular adhesive plate of 98 mm × 60 mm, and the connection is an arc-shaped concave structure.

[0024] The fixing bolt 5 is a screw rod with a nut, which passes through the nut holes on the sample placement table 6 and the fixing frame 2 in sequence and is locked by the nut, and a gasket is arranged between the nut and the sample placement table 6 .

[0025] The inclinometer 3 is an arc-shaped aluminum foil with a scale, and the scale range is 0-90°. The inclinometer 3 is fixed to the front side of the arc-shaped protruding structure on the rear side of the lower end surface of the sample placement table 6 by screws.

[0026] The pointer plate 4 is composed of a trapezoidal plate and a pointer; the trapezoidal plate is 30 mm high and 3 mm thick, and is arranged correspondingly on the front side of the arc-shaped raised structure on the rear side of the lower end surface of the sample placement table 6; the bottom of the trapezoidal plate is fixed to the upper surface of the base 1 by bolts, and the side is welded to the fixing frame 2 to enhance its stability; one side of the trapezoidal plate corresponding to the arc-shaped raised structure on the rear side of the lower end surface of the sample placement table 6 is arranged to be a concave arc, and the arc corresponds to the arc of the arc-shaped raised structure on the rear side of the lower end surface of the sample placement table 6; the pointer is fixed on the top of the arc-shaped edge of the trapezoidal plate and corresponds to the inclinometer 3.

[0027] The utility model can ensure that the sample stuck on the inclined sample table presents any angle through the mutual cooperation of the base 1, the fixing frame 2, the pointer plate 4, the incline meter 3 and the sample placement table 6, and the operation is simple and convenient, which fully meets the needs of material sample angle testing.

[0028] During actual use: clean the surface of the sample placement table 6 with alcohol, stick a strip of carbon double-sided conductive glue, then stick the sample on the conductive glue with the observation side facing up, loosen the nut of the fixing bolt 5, adjust the angle of the pointer on the inclinometer 3 according to the test needs and tighten the nut, use an ear bulb to blow the sample surface to ensure that the sample does not fall off, and follow the same steps to stick several observation samples at the same time. After the operation is completed, move it to the gold spraying instrument for surface evaporation for 30 seconds, let it stand, take it out, put it in the scanning electron microscope sample chamber, evacuate it and apply high voltage for observation.

[0029] Matters not described in detail in this utility model are known technologies.

[0030] The embodiments described above are merely descriptions of preferred implementation modes of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should fall within the protection scope determined by the claims of the present invention.

Claims

1. A scanning electron microscope with a sample stage tilted at any angle, characterized in that: The sample stage includes a base, a fixing frame, an inclinometer, a pointer plate, fixing bolts and a sample placement table; the fixing frame is vertically fixed to the middle of the upper surface of the base; the middle of one side of the sample placement table is connected to the middle of the fixing frame by a fixing bolt; the inclinometer is correspondingly arranged on one side of the sample placement table; the pointer plate is arranged on one side of the upper surface of the base and corresponds to the inclinometer.

2. The sample stage for tilting a scanning electron microscope at any angle according to claim 1, characterized in that: One side of the lower end surface of the sample placement table is set as an arc-shaped protrusion structure, and corresponding nut holes are opened at the center of the circle and in the middle of the fixing frame; the fixing bolts pass through the nut holes on the sample placement table and the fixing frame in turn; the inclinometer is fixed correspondingly to the front side of the arc-shaped protrusion structure on the lower end surface of the sample placement table.

3. The sample stage for tilting at any angle for a scanning electron microscope according to claim 2, characterized in that: The pointer plate is composed of a trapezoidal plate and a pointer; the trapezoidal plate is arranged correspondingly on the front side of the arc-shaped protruding structure on the lower end surface of the sample placement table; the bottom of the trapezoidal plate is fixedly connected to the upper surface of the base, and the side is fixedly connected to the fixing frame; the side of the trapezoidal plate corresponding to the arc-shaped protruding structure on the lower end surface of the sample placement table is arranged as a concave arc, and the arc corresponds to the arc of the arc-shaped protruding structure on the lower end surface of the sample placement table; the pointer is arranged on the top of the arc-shaped edge of the trapezoidal plate and corresponds to the inclinometer.

4. The sample stage for tilting at any angle for a scanning electron microscope according to claim 2, characterized in that: The upper end surface of the sample placement table is a rectangular bonding plate.

5. The sample stage for tilting a scanning electron microscope at any angle according to claim 1, characterized in that: The fixing frame is a tripod.

6. The sample stage for tilting at any angle for a scanning electron microscope according to claim 1, characterized in that: The base is a rectangular solid aluminum structure; the fixing frame is made of aluminum.

7. The sample stage for tilting at any angle for a scanning electron microscope according to claim 1, characterized in that: The inclinometer is an arc-shaped aluminum foil with a scale, and the scale range is 0 to 90 degrees.

8. The sample stage for tilting at any angle for a scanning electron microscope according to claim 1, characterized in that: The fixing bolt is a screw rod with a nut.

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