Power box cooling device with adjustable cooling capacity

Abstract

The utility model relates to the technical field of power box cooling devices, in particular to a power box cooling device with adjustable cooling capacity, which is characterized by comprising an equipment shell, a to-be-cooled element, an air inlet hole, an exhaust hole, a speed-adjustable fan and a water cooling structure, the element to be cooled is arranged in the equipment shell; the air inlet hole and the exhaust hole are formed in the equipment shell and are used for enabling air to enter and leave the cooling device; the water cooling structure comprises a cooling water inlet, a cooling water outlet and a water cooling plate; the water cooling plate is arranged in the equipment shell; cooling water enters the water cooling plate through the cooling water inlet, flows in the water cooling plate and leaves the water cooling plate through the cooling water outlet. And a speed-adjustable fan is directly or indirectly arranged on the water cooling plate.

Description

Technical Field

[0001] The present application relates to the technical field of power supply box cooling devices, and in particular to a power supply box cooling device with adjustable cooling capacity. Background Art

[0002] The light source of the lithography machine is an important equipment in the semiconductor production line, and the power supply is one of the important structures of the light source. Since there are many electronic components in the power supply and there are many original parts that continuously generate heat, such as thyristor rectifiers, diodes, etc., if the temperature in the power supply box continues to rise, it will cause damage to the internal electronic components and affect the life of the power supply. Therefore, the heat dissipation problem of the power supply has always been a focus of attention in the power supply structure.

[0003] There are two existing solutions to the heat dissipation problem of power boxes: water cooling and air cooling.

[0004] For water-cooled structures, heat is exchanged through cooling water. However, since the cooling water comes from the plant system, the flow rate cannot be adjusted, so the cooling effect is greatly affected by the plant system, and when the equipment is in standby mode, the cooling water is still circulated, resulting in a waste of resources.

[0005] For the air cooling structure, the fan brings the air outside the power supply into the power supply, and then discharges the heat inside the power supply to the outside of the power supply box through the exhaust hole, so as to achieve heat exchange between the inside and outside of the power supply. This method is more common, but the cooling capacity is low, and the cooling effect cannot meet the use requirements for components with large heat generation inside. Utility Model Content

[0006] The present application is designed to improve upon the shortcomings of the prior art, and aims to solve the problems of complex processing of cooling pipes of water-cooled plates, small cooling range, poor cooling capacity of fans in air-cooled systems, and inability to adjust the cooling effect inside power boxes.

[0007] In order to solve the above technical problems, the present application provides a cooling device for a power box with adjustable cooling capacity, comprising a device housing, a component to be cooled, an air inlet, an exhaust hole, an adjustable speed fan and a water cooling structure;

[0008] The element to be cooled is arranged in the device housing;

[0009] The air inlet and the air outlet are arranged on the device housing to allow air to enter and leave the cooling device;

[0010] The water cooling structure includes a cooling water inlet, a cooling water outlet, and a water cooling plate;

[0011] The water cooling plate is arranged in the equipment housing;

[0012] Cooling water enters the water-cooled plate through the cooling water inlet and flows in the water-cooled plate, and leaves the water-cooled plate through the cooling water outlet;

[0013] The water cooling plate is directly or indirectly provided with an adjustable speed fan;

[0014] The adjustable speed fan drives the air to pass through the water cooling structure and cools it, and transfers the cooled air to the component area to be cooled, thereby reducing the temperature of this area, and then discharges the gas after heat exchange through the exhaust hole on the device shell.

[0015] Furthermore, a heat dissipation component is also included;

[0016] The heat dissipation component is arranged on the water cooling plate to increase the cooling water temperature transfer speed and temperature diffusion effect;

[0017] The speed-adjustable fan is directly or indirectly arranged on a side of the heat dissipation component away from the water cooling plate.

[0018] Further, the heat dissipation assembly includes a heat dissipation copper plate and an aluminum heat sink;

[0019] The heat dissipation copper plate is fixedly connected to the water cooling plate;

[0020] The aluminum radiator is fixedly arranged on a side of the heat dissipation copper plate away from the water cooling plate.

[0021] Further, a fan bracket is also included;

[0022] The fan bracket is directly or indirectly arranged on the water cooling plate;

[0023] The speed-adjustable fan is arranged in the fan bracket.

[0024] Further, the water cooling plate includes a water cooling base plate and a copper tube;

[0025] The water-cooling base plate is made of stainless steel and is provided with a trough for accommodating the copper tube.

[0026] Furthermore, the slot body includes a receiving portion and a locking portion;

[0027] The inner diameter of the receiving portion is the same as the outer diameter of the copper tube;

[0028] The height of the clamping portion is smaller than the outer diameter of the copper tube;

[0029] The copper tube is arranged in the slot body, and the portion of the copper tube exposed outside the slot body is flattened to facilitate installation of other components.

[0030] Furthermore, the air inlet and the air outlet are of the same size and total number, so that the air intake volume is the same as the air outlet volume, avoiding positive pressure or negative pressure.

[0031] Furthermore, a first temperature sensor is provided on the water cooling plate for real-time monitoring of the temperature of the water cooling plate;

[0032] A second temperature sensor is provided between the adjustable speed fan and the exhaust hole, for real-time monitoring of the temperature inside the device housing;

[0033] Furthermore, a flow regulating needle valve is provided on the cooling water inlet or the cooling water outlet to regulate the flow of cooling water.

[0034] Furthermore, the element to be cooled is arranged on a side of the water cooling plate away from the speed-adjustable fan or in a region between the speed-adjustable fan and the exhaust hole.

[0035] By adopting the above technical solution, the present application has the following beneficial effects:

[0036] (1) A combination of water cooling and fan cooling is adopted, which significantly improves the cooling efficiency, enables the power box to operate stably, and extends the service life of the equipment.

[0037] (2) The device is designed with a heat dissipation component, including a heat dissipation copper plate and an aluminum radiator, which effectively increases the cooling water temperature transfer speed and temperature diffusion effect, further improving the cooling efficiency. At the same time, the setting of the heat dissipation component also enhances the stability and reliability of the cooling system.

[0038] (3) The water cooling plate in the device is made of stainless steel and copper tube, which has good corrosion resistance and thermal conductivity, ensuring the durability and stability of the cooling effect. In addition, the special design of the copper tube in the tank body not only facilitates the installation of other components, but also ensures the maximum cooling effect.

[0039] (4) The device is also provided with air inlet and exhaust holes, so that the gas can smoothly enter and leave the cooling device, achieving a good heat exchange effect. At the same time, the size and total number of the air inlet and exhaust holes are the same, avoiding the generation of positive or negative pressure and ensuring the normal operation of the cooling system.

[0040] (5) The device is also equipped with a temperature sensor and a flow regulating needle valve. The adjustable speed fan can also be adjusted. It can monitor the temperature of the cooling system in real time and adjust it according to needs, realizing the adjustability of cooling capacity, which not only meets the different requirements for cooling capacity in different working environments but also avoids waste and reduces operating costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0042] Figure 1 It is an assembly diagram of a water cooling plate in the prior art;

[0043] Figure 2 This is a disassembly diagram of a water cooling plate in the prior art;

[0044] Figure 3 This is a top view of a prior art water cooling plate with the upper cover removed;

[0045] Figure 4 It is a schematic diagram of the three-dimensional structure of a water cooling device in the prior art;

[0046] Figure 5 It is a schematic diagram of the three-dimensional structure of the air cooling device in the prior art;

[0047] Figure 6 This is a schematic diagram of the three-dimensional structure inside a power box cooling device with adjustable cooling capacity according to the present application;

[0048] Figure 7 This is a schematic diagram of the three-dimensional structure of a power box cooling device with adjustable cooling capacity in the present application;

[0049] Figure 8 The assembly diagram of the water cooling plate for this application;

[0050] Fig. 9 This is a disassembly diagram of the water cooling plate for this application;

[0051] Fig.10 This is a side cross-sectional schematic diagram of the water cooling plate tank and copper tube of the present application;

[0052] Fig.11 An exploded diagram of a core component of a power box cooling device with adjustable cooling capacity for this application;

[0053] Fig.12 A schematic diagram of an air flow path of a cooling device for a power box with adjustable cooling capacity according to the present application;

[0054] Fig.13 This is a schematic top view of the structure of a single-cylinder cooling device according to the second embodiment of the present application;

[0055] Fig.14 This is a schematic top view of the structure of a multi-cylinder cooling device according to the third embodiment of the present application;

[0056] Fig.15 This is a schematic diagram of the three-dimensional structure of a single multi-tube cooling device according to the third embodiment of the present application;

[0057] Fig.16 This is a three-dimensional structural schematic diagram of a first combination mode of a plurality of multi-tube cooling devices according to the third embodiment of the present application;

[0058] Fig.17 This is a schematic diagram of the three-dimensional structure of the second combination of multiple multi-tube cooling devices in the third embodiment of the present application.

[0059] Reference numerals:

[0060] 1- Equipment housing; 2- Adjustable speed fan; 3- Fan bracket; 4- Aluminum radiator; 5- Heat dissipation copper plate; 6- Water cooling plate; 7- First temperature sensor; 8- Flow regulating needle valve; 9- Cooling water inlet; 10- Cooling water outlet; 11- Exhaust hole; 12- Air inlet; 13- Copper tube; 14- Water cooling base plate; 15- Trough body; 16- Accommodation part; 17- Clamping part; 18- Upper cover plate; 19- Water channel; 20- Inner cover plate; 21- Component to be cooled. DETAILED DESCRIPTION

[0061] The technical solution of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0062] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0063] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0064] like Figure 1-5 The figure shows the solution to the heat dissipation problem of the power box in the prior art, which is divided into water cooling and air cooling.

[0065] like Figure 1-3 The water-cooled plate 6 used in the prior art is shown, in which a water channel 19 is formed by grooving in the plate, an internal cover plate 20 is welded thereon to ensure sealing, and finally an upper cover plate 18 is welded to form the water-cooled plate 6. The component 21 to be cooled is installed on the water-cooled plate 6, and the heat generated by the component 21 to be cooled is taken away by the cooling water inside the water-cooled plate 6. This cooling method has a simple structure, but the grooving process in the plate is more complicated, and the welding requirements after processing are higher. It is necessary to ensure that there is no leakage in the pipeline, and the leak detection work after processing is not easy to operate. In addition, the cooling area is small. If there are many components 21 to be cooled inside the power supply, multiple water-cooled plates 6 are required to meet the cooling requirements.

[0066] like Figure 4 Another prior art water cooling device is shown, the principle of which is to cool the cooling element 21 by winding one or more circles of cooling pipes around the outside of the cooling element 21. This cooling method is simple to process, but has great limitations. The cooling element 21 must have a relatively regular shell, or the shell must be processed separately before the external coil can be made, otherwise the element cannot be disassembled.

[0067] Both of the above water-cooling structures use cooling water for heat exchange. However, since the cooling water comes from the plant system and the flow rate cannot be adjusted, the cooling effect is greatly affected by the plant system. In addition, when the equipment is in standby mode, the cooling water is still circulated, resulting in a waste of resources.

[0068] like Figure 5 The figure shows the air cooling method used in the prior art, which uses a fan to bring air from the outside of the power supply into the inside of the power supply, and then discharges the heat inside the power supply to the outside of the power supply box through the exhaust hole 11, thereby realizing the heat exchange between the inside and outside of the power supply. This method is relatively common, but the cooling capacity is low, and the cooling effect cannot meet the use requirements for components with large heat generation inside.

[0069] The present application is further explained below in conjunction with specific implementation methods.

[0070] Example 1

[0071] like Figure 6As shown, the present embodiment provides a cooling device for a power supply box with adjustable cooling capacity, comprising a device housing in the shape of a rectangular parallelepiped, on which an air inlet 12 and an air outlet 11 are provided for allowing gas to enter and leave the cooling device. The component 21 to be cooled is arranged in the device housing. An adjustable speed fan 2 and a water cooling structure are sequentially arranged in the device housing along the axial direction of the device housing. The adjustable speed fan 2 is used to drive air through the water cooling structure and cool it, and then transfer the cooled air to the area of ​​the component 21 to be cooled, reduce the temperature of this area, and then discharge the gas after heat exchange from the device through the exhaust hole 11 on the device housing.

[0072] like Figure 6-10 As shown, the water cooling structure is a water cooling plate 6; the water cooling plate 6 is arranged in the device housing; the water cooling plate 6 includes a water cooling bottom plate 14 and a copper tube 13, the copper tube 13 is a coiled tube body, and its two ends are respectively a cooling water inlet 9 and a cooling water outlet 10, the cooling water inlet 9 and the cooling water outlet 10 extend from the opening on the side wall of the device housing to communicate with the outside. The cooling water enters the copper tube 13 through the cooling water inlet 9 and flows in the copper tube 13 so that the water cooling plate 6 has cooling capacity, and finally leaves the water cooling plate 6 through the cooling water outlet 10. The water cooling bottom plate 14 is made of stainless steel, and a tank 15 is arranged on it for accommodating the copper tube 13. Fig.10 This is a side cross-sectional schematic diagram of the tank body 15 and the copper tube 13 of the water-cooling plate 6 of the present application. The tank body 15 includes a receiving portion 16 and a clamping portion 17. The receiving portion 16 has the same shape as the copper tube 13, and its inner diameter is the same as the outer diameter of the copper tube 13. The clamping portion 17 is arranged on the outer side of the receiving portion 16, and its height is slightly smaller than the outer diameter of the copper tube 13, so that the copper tube 13 can enter the receiving portion 16 through the clamping portion 17 through the slight elastic deformation of the copper tube 13 itself and the tank body 15. After the copper tube 13 is embedded in the receiving portion 16, the clamping portion 17 can clamp the copper tube 13 to prevent it from falling out of the tank body 15. After the copper tube 13 enters the tank body 15, its part close to the clamping portion 17 will be exposed outside the tank body 15. In order to make both sides of the entire water-cooling plate 6 assembly into a flat state so as to facilitate the installation of other components on both sides, the exposed tube body is flattened.

[0073] like Figure 6 and 11As shown, the device also includes a heat dissipation component, and the heat dissipation component in this embodiment includes a heat dissipation copper plate 5 and an aluminum radiator 4. The heat dissipation copper plate 5 is fixedly mounted on the water-cooled plate 6 by fasteners, and the aluminum radiator 4 is fixedly mounted on the heat dissipation copper plate 5 by fasteners. The heat conduction efficiency of the heat dissipation copper plate 5 is 401W / mK, which can improve the temperature sensing speed of the cooling water in the water-cooled plate 6. However, due to the high density of copper, if it is used in large quantities, it will cause the equipment to be too heavy and its cost is high. Therefore, the thickness of the heat dissipation copper plate 5 in this embodiment is set to 10mm, and an aluminum radiator 4 is provided. The thermal conductivity efficiency of aluminum is 237W / mK, which is slightly inferior to that of copper, but has a smaller density and a lower cost. The shape of the aluminum radiator 4 in this embodiment is preferably a fin-type radiator, which achieves better heat dissipation effect by increasing the contact area with the air.

[0074] The adjustable speed fan 2 is fixedly arranged on the side of the aluminum radiator 4 away from the heat dissipation copper plate 5 through the fan bracket 3. In actual operation, the adjustable speed fan 2 is started to drive the air to pass through the water cooling plate 6 for cooling. After passing through the water cooling plate 6, the air passes through the heat dissipation component. Since the heat dissipation component has a high heat conduction efficiency, the temperature of the air is further reduced after heat exchange with the air.

[0075] like Figure 6 , 7 As shown in Figures 1 and 12, the exhaust hole 11 is arranged at a position opposite to the adjustable speed fan 2, so that the air blown by the adjustable speed fan can be directly discharged to the outside of the device housing 1 through the exhaust hole 11. In this embodiment, the exhaust holes 11 are oblong holes with a size of 10mm×16mm, arranged in a 32×6 array. Figure 6 As shown, the position of the air inlet 12 in this embodiment is preferably at both sides of the device housing close to the water cooling structure. In order to make the air intake and exhaust volume inside and outside the power box the same, the size and total number of the air inlet 12 and the exhaust hole 11 are the same. Fig.12 The arrows show the flow path.

[0076] like Figure 6 As shown, the water cooling plate 6 is provided with a first temperature sensor 7 for real-time monitoring of the temperature of the water cooling plate 6. A second temperature sensor (not shown in the figure) is provided between the adjustable speed fan 2 and the exhaust hole 11 for real-time monitoring of the temperature inside the device housing. A flow regulating needle valve 8 is provided on the cooling water inlet 9 or the cooling water outlet 10 for regulating the flow of cooling water.

[0077] The cooling device shown in this embodiment can adjust the cooling capacity through the adjustable speed fan 2 and / or the flow regulating needle valve 8. In this embodiment, the temperature range set by the water cooling plate 6 is preferably 20-40 degrees Celsius. When the first temperature sensor 7 detects that the temperature is higher or lower than the temperature range, the information will be transmitted to the control system. The control system controls the flow regulating needle valve 8 to increase or decrease the cooling water flow and / or controls the adjustable speed fan 2 to increase or decrease the wind speed to increase or decrease the cooling capacity of the device. In addition, the adjustable speed fan 2 and / or the flow regulating needle valve 8 can also be controlled by manual adjustment.

[0078] As a preferred implementation mode of the present application, the adjustable speed fan 2 in this embodiment is controlled by a control system, and the flow regulating needle valve is controlled by manual adjustment.

[0079] In addition, the speed-adjustable fan 2 can also preset the wind speed. At the same time, the flow regulating needle valve 8 can also stabilize the cooling water flow in the water-cooled plate 6, reducing the impact of the factory cooling water flow change on the cooling effect.

[0080] The component to be cooled 21 is arranged on the side of the water cooling plate 6 away from the adjustable speed fan 2 or in the area between the adjustable speed fan 2 and the exhaust hole 11. When the component to be cooled 21 is installed on the side of the water cooling plate 6 away from the adjustable speed fan 2, it is in direct contact with the water cooling plate 6 and performs heat exchange. When the component to be cooled 21 is installed in the area between the adjustable speed fan 2 and the exhaust hole 11, its heat dissipation is more balanced.

[0081] The water cooling plate 6 is in the shape of a long strip and can be divided into a plurality of working areas, each of which is provided with a heat dissipation component and an adjustable speed fan 2. Figure 6 In the embodiment shown, two working areas are provided. For the convenience of display, the equipment on one working area is shown in an exploded view, and the other side is a three-dimensional structure diagram after assembly. By providing multiple working areas, the disassembly, assembly and control of the equipment can be made more flexible.

[0082] As a preferred implementation of this embodiment, the diameter of the copper tube 13 is 3 / 8 inch.

[0083] By adopting the above technical solution, the present application has the following beneficial effects:

[0084] (1) A combination of water cooling and fan cooling is adopted, which significantly improves the cooling efficiency, enables the power box to operate stably, and extends the service life of the equipment.

[0085] (2) The device is designed with a heat dissipation component, including a heat dissipation copper plate and an aluminum radiator, which effectively increases the cooling water temperature transfer speed and temperature diffusion effect, further improving the cooling efficiency. At the same time, the setting of the heat dissipation component also enhances the stability and reliability of the cooling system.

[0086] (3) The water cooling plate in the device is made of stainless steel and copper tube, which has good corrosion resistance and thermal conductivity, ensuring the durability and stability of the cooling effect. In addition, the special design of the copper tube in the tank body not only facilitates the installation of other components, but also ensures the maximum cooling effect.

[0087] (4) The device is also provided with air inlet and exhaust holes, so that the gas can smoothly enter and leave the cooling device, achieving a good heat exchange effect. At the same time, the size and total number of the air inlet and exhaust holes are the same, avoiding the generation of positive or negative pressure and ensuring the normal operation of the cooling system.

[0088] (5) The device is also equipped with a temperature sensor and a flow regulating needle valve. The adjustable speed fan can also be adjusted. It can monitor the temperature of the cooling system in real time and adjust it according to needs, realizing the adjustability of cooling capacity, which not only meets the different requirements for cooling capacity in different working environments but also avoids waste and reduces operating costs.

[0089] Example 2

[0090] like Fig.13 The figure shows a schematic diagram of the top view of the single-cylinder cooling device disclosed in the second embodiment of the present application. The exhaust hole 11 and the air inlet hole 12 are respectively arranged at both ends of the cylinder, and a water cooling plate 6, an aluminum radiator 4, an adjustable speed fan 2 and a component to be cooled 21 are sequentially arranged in the cylinder along the axial direction. At the same time, the single-cylinder cooling device disclosed in the second embodiment can also include all the components included in the first embodiment, such as a fan bracket 3, a heat dissipation copper plate 5, a first temperature sensor 7, a second temperature sensor, etc., according to the usage, and adopt the same connection method and usage method as the first embodiment.

[0091] Different from the first embodiment, the air inlet 12 is arranged at an end opposite to the air outlet 11, and the device is designed to be cylindrical in shape, which can be placed in a corner of a room or erected on a beam, or can be arranged at other suitable locations.

[0092] Example 3

[0093] like Figure 14-17The multi-cylinder cooling device disclosed in the third embodiment of the present application is shown. Unlike the second embodiment, the multi-cylinder cooling device disclosed in the third embodiment connects multiple single-cylinder cooling devices at the end. Through the zigzag structure, the structure can cool multiple components 21 to be cooled at the same time. Unlike the single-cylinder cooling devices set separately, the multi-cylinder cooling device contains multiple adjustable speed fans 2, wherein the adjustable speed fan 2 closest to the air inlet 12 provides driving force for the air, and the air has an initial speed when it reaches the next adjustable speed fan 2, so that the power consumption of each subsequent adjustable speed fan 2 can be lower. If multiple single-cylinder cooling devices are set separately, each of the adjustable speed fans 2 needs to accelerate the speed of the air from the initial state, resulting in greater energy consumption. In addition, at the exhaust hole 11, if multiple single-cylinder cooling devices are set separately, multiple equipment exhaust holes 11 will exhaust together, causing large-scale air disturbances, while the exhaust volume at the exhaust hole 11 of the multi-cylinder cooling device in this embodiment is the same as the exhaust volume of a single single-cylinder cooling device. The cooling device of the present application is used to cool the light source equipment of the lithography machine, and large-scale air disturbance may affect the accuracy of the precision parts of the lithography machine.

[0094] Fig.16 and 17 The two combinations of multiple multi-cylinder cooling devices are shown, through which multiple multi-cylinder cooling devices can be tightly combined and the space occupied by them can be reduced. It should be noted that the exhaust holes 11 of multiple multi-cylinder cooling devices need to be arranged on the same side, and the air inlet holes 12 need to be arranged on the side opposite to the exhaust holes 11, so as to prevent the hot air discharged from the exhaust holes 11 from entering the device through the air inlet holes 12.

[0095] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A power box cooling device with adjustable cooling capacity, characterized in that: It includes a device housing, components to be cooled, air inlet holes, exhaust holes, adjustable speed fans and a water cooling structure; The element to be cooled is arranged in the device housing; The air inlet and the air outlet are arranged on the device housing to allow air to enter and leave the cooling device; The water cooling structure includes a cooling water inlet, a cooling water outlet, and a water cooling plate; The water cooling plate is arranged in the equipment housing; Cooling water enters the water-cooled plate through the cooling water inlet and flows in the water-cooled plate, and leaves the water-cooled plate through the cooling water outlet; The water cooling plate is directly or indirectly provided with an adjustable speed fan; The adjustable speed fan drives the air to pass through the water cooling structure and cools it, and transfers the cooled air to the component area to be cooled, thereby reducing the temperature of this area, and then discharges the gas after heat exchange through the exhaust hole on the device shell.

2. The cooling capacity adjustable power supply box cooling device according to claim 1, characterized in that: Also included is a heat dissipation assembly; The heat dissipation component is arranged on the water cooling plate to increase the cooling water temperature transfer speed and temperature diffusion effect; The speed-adjustable fan is directly or indirectly arranged on a side of the heat dissipation component away from the water cooling plate.

3. The cooling capacity adjustable power supply box cooling device according to claim 2, characterized in that: The heat dissipation assembly includes a heat dissipation copper plate and an aluminum heat sink; The heat dissipation copper plate is fixedly connected to the water cooling plate; The aluminum radiator is fixedly arranged on a side of the heat dissipation copper plate away from the water cooling plate.

4. The power box cooling device with adjustable cooling capacity according to claim 1, characterized in that: Also includes fan bracket; The fan bracket is directly or indirectly arranged on the water cooling plate; The speed-adjustable fan is arranged in the fan bracket.

5. The power box cooling device with adjustable cooling capacity according to claim 1, characterized in that: The water cooling plate comprises a water cooling base plate and a copper pipe; The water-cooling base plate is made of stainless steel and is provided with a trough for accommodating the copper tube.

6. The cooling device for a power supply box with adjustable cooling capacity according to claim 5, characterized in that: The slot body comprises a receiving portion and a locking portion; The inner diameter of the receiving portion is the same as the outer diameter of the copper tube; The height of the clamping portion is smaller than the outer diameter of the copper tube; The copper tube is arranged in the slot body, and the portion of the copper tube exposed outside the slot body is flattened to facilitate installation of other components.

7. The cooling capacity adjustable power supply box cooling device according to claim 1, characterized in that: The size and total number of the air inlet and the air outlet are the same, so that the air intake volume is the same as the air outlet volume, avoiding positive pressure or negative pressure.

8. The power box cooling device with adjustable cooling capacity according to claim 1, characterized in that: The water cooling plate is provided with a first temperature sensor for real-time monitoring of the temperature of the water cooling plate; A second temperature sensor is provided between the adjustable speed fan and the exhaust hole for real-time monitoring of the temperature inside the device housing.

9. The power box cooling device with adjustable cooling capacity according to claim 1, characterized in that: The cooling water inlet or the cooling water outlet is provided with a flow regulating needle valve for regulating the flow of cooling water.

10. The power box cooling device with adjustable cooling capacity according to claim 1, characterized in that: The element to be cooled is arranged on a side of the water cooling plate away from the speed-adjustable fan or in a region between the speed-adjustable fan and the exhaust hole.

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